REGISTRATION RIGHTS AGREEMENT


         THIS  REGISTRATION  RIGHTS  AGREEMENT  (this  "Agreement")  is made and
entered  into as of July 1,  1997,  between  AMTECH  SYSTEMS,  INC.,  an Arizona
corporation  (the "Buyer"),  and P.R. HOFFMAN MACHINE  PRODUCTS  CORPORATION,  a
Delaware  corporation  (the  "Seller").  All  capitalized  terms  used  in  this
Agreement and not defined herein shall have the respective  meanings ascribed to
them in the Asset Purchase  Agreement of even date herewith  between the Seller,
John R. Krieger, and the Buyer (the "Asset Purchase Agreement").

         WHEREAS,  pursuant  to the Asset  Purchase  Agreement,  the  Seller has
agreed to sell, transfer,  convey, assign and deliver to the Buyer substantially
all of the assets and business of the Seller;

         WHEREAS,  in  partial  consideration   therefor,   the  Asset  Purchase
Agreement  requires  the  Buyer to grant to the  Seller  piggyback  registration
rights with respect to certain of the shares of Common Stock to be issued to the
Seller pursuant to Sections 1.3(b) and (c) of the Asset Purchase Agreement.

         1. Defined Terms.  As used herein,  the following  capitalized  defined
terms shall have the following meanings:

         "Commission" shall mean the Securities and Exchange Commission,  or any
other federal agency at the time administering the Securities Act.

         "Common  Stock"  shall mean the Common  Stock,  $.01 par value,  of the
Buyer, as constituted as of the date of this Agreement.

         "Exchange  Act"  shall mean the  Securities  Exchange  Act of 1934,  as
amended from time to time, and the rules and  regulations of the SEC promulgated
thereunder.

         "Person" shall mean in individual,  partnership,  corporation, trust or
unincorporated organization,  or a government or agency or political subdivision
thereof.

         "Piggyback Registration" shall mean a registration under the Securities
Act effected pursuant to Section 2 hereof.

         "Prospectus"  shall  mean the  prospectus  included  in a  Registration
Statement,  including any  preliminary  prospectus,  and any such  prospectus as
amended  or  supplemented  by  any  prospectus  supplement,  and  by  all  other
amendments and supplements to a prospectus, including post-effective amendments,
and in each case including all material incorporated by reference therein.

         "Register,"  "Registered"  and  "Registration"  refer to a registration
effected by preparing and filing a Registration Statement in compliance with the
Securities Act and the  declaration or ordering by the SEC of the  effectiveness
of such Registration Statement.

         "Registrable  Securities"  shall mean the shares of Common Stock issued
to  Seller  pursuant  to  Sections  1.3(b)  and  1.3(c)  of the  Asset  Purchase
Agreement,  excluding  the  Registered  Shares,  and any shares of Common  Stock
received  by the Seller by way of  sub-division  of the  outstanding  shares (by
reclassification,  stock split or otherwise);  provided,  however, that any such
securities  shall  cease  to be  Registrable  Securities  when  they  have  been
Registered under a Piggyback Registration.

         "Registration  Expenses"  shall mean any and all  expenses  incident to
performance of or compliance by the Buyer with this Agreement, including but not
limited to (i) all SEC,  stock  exchange or National  Association  of Securities
Dealers,  Inc. registration and filing fees, (ii) all fees and expenses incurred
in connection with compliance with state  securities or blue sky laws, (iii) all
expenses  and  disbursements  of  any  Persons  in  preparing  or  assisting  in
preparing, word processing,  duplicating,  printing, distribution,  messengering
and delivering any  Registration  Statement,  any Prospectus,  any amendments or
supplements  thereto, any underwriting  agreements,  securities sales agreements
and other  documents  relating to the  performance of and  compliance  with this
Agreement,  (iv) the reasonable fees and disbursements of counsel for the Buyer,
and (v) the fees and disbursements of the independent  public accountants of the
Buyer,  including the expenses of any special audits or "cold  comfort"  letters
required by or incident to such performance and compliance,  and transfer taxes,
but excluding  underwriting  discounts and commissions,  if any, relating to the
sale or disposition of Registrable Securities by the Seller.

         "Registration  Rights  Expiration  Date"  shall mean the earlier of (i)
such time as the Seller may sell,  without  violation  of any  provision  of the
Securities  Act,  the  Exchange  Act or any SEC rule or  regulation,  under Rule
144(k)  within a  three-month  period  all  Registrable  Securities  held by the
Seller,  or (ii) such time as all such Registrable  Securities  issued have been
eligible for a Piggyback  Registration  and the Seller  either has included said
shares or declined to include them in a Piggyback Registration.

         "Registration  Statements"  shall mean a registration  statement of the
Buyer  pursuant to the  provisions of Section 2 hereof,  and all  amendments and
supplements  to  such  registration   statement,  in  each  case  including  the
Prospectus contained therein, all exhibits thereto and all material incorporated
by reference therein.

         "SEC" shall mean the Securities and Exchange Commission.

         "Securities Act" shall mean the Securities Act of 1933, as amended from
time to time, and the rules and regulations of the SEC promulgated thereunder.

         "Seller" shall mean P.R. Hoffman Machine  Products  Corporation or John
R.  Krieger,  as the case may be,  including  any  transfer  of the  Registrable
Securities  by P.R.  Hoffman  Machine  Products  Corporation  to John R. Krieger
following the date of this Agreement.
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         2. Piggyback Registration.

                  (a)  Notice  of  Piggyback   Registration   and  Inclusion  of
Registrable  Securities.  If the  Buyer  at any  time  after  the  date  of this
Agreement proposes to register any of its Common Stock (other than pursuant to a
registration  statement on Form S-4 or Form S-8, or any successor form), whether
or not for sale for its own account, and the registration form to be used may be
used for the  registration  of the  Registrable  Securities,  the Buyer will (i)
promptly  give the  Holder  written  notice  thereof,  and (ii)  include in such
registration  (and in any  related  qualification  under blue sky or other state
securities laws), and in any underwriting  involved therein, all the Registrable
Securities  specified in a written request  delivered to the Buyer by the Seller
within 20 calendar  days after  delivery of such written  notice from the Buyer,
provided that the Seller has requested such Piggyback  Registration with respect
to any of the Registrable  Securities held by the Seller at such time; provided,
however,  that if Seller declines to include any of the  Registrable  Securities
held by it at that time,  such shares shall no longer be eligible for  inclusion
in any  future  Piggyback  Registration.  If the  Piggyback  Registration  is an
underwritten  offering,  and the underwriter or the Buyer, based upon the advice
of its  underwriter(s),  in  good  faith  requests  in  writing,  due to  market
conditions,  that the  number  of  securities  covered  by the  Registration  be
reduced,  the Buyer  may  reduce  the  number of  Registrable  Securities  to be
included in the Piggyback  Registration pro rata with the reduction of shares of
Common Stock  included with respect to other  participants  in the  Registration
other than the Buyer.  Seller may not, by virtue solely of the rights granted to
it  in  this  Agreement,  participate  in a  Piggyback  Registration  after  the
Registration Rights Expiration Date.

                  (b) Expenses. The Buyer shall pay all Registration Expenses in
connection with each Piggyback Registration pursuant to this Section 2.

                  (c)  Exercise  of  Registration  Rights.  The  Seller  may not
exercise the rights  granted  hereunder  with respect to any of the  Registrable
Securities  for a  period  of two  years  from  the  date  of  issuance  of such
Registrable Securities.

         3. Registration Procedures.

                  In  connection  with  the   registration  of  any  Registrable
Securities  under this  Agreement,  the Buyer shall  effect  such  Registrations
pursuant  to the sale of such  Registrable  Securities  in  accordance  with the
intended method of disposition thereof, and pursuant thereto shall:

                  (a)  prepare  and file with the SEC a  Registration  Statement
which shall comply as to form in all material  respects with the requirements of
the  applicable  form  under  the  Securities  Act  and  include  all  financial
statements required by the SEC to be filed therewith,and use its best efforts to
cause such  Registration  Statement to become effective and remain effective for
six months, provided,  however, that such six-month period shall be extended for
a period of time equal to the longest  period  during which the Seller  refrains
from selling any securities  included in such Registration at the request of the
underwriter, if any, of such Registration;
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                  (b)  during  such  period  prepare  and file with the SEC such
amendments and supplements to such Registration Statement as may be necessary to
comply with the provisions of the Securities Act with respect to the disposition
of all securities covered by such Registration Statement;

                  (c) make every  reasonable  effort to obtain the withdrawal of
any order  suspending  the  effectiveness  of a  Registration  Statement  at the
earliest  practicable  time and  provide  immediate  notice to the Seller of the
withdrawal of any such order;

                  (d)  use  its  best   efforts  to  register  and  qualify  the
securities covered by such Registration  Statement under such securities or blue
sky  laws  and  regulations  of such  jurisdiction  as  shall  be  necessary  or
appropriate for the  distribution of the securities  covered by the Registration
Statement, provided that the Buyer shall not be required in connection therewith
or as a condition thereto to qualify to do business or to file a general consent
to service of process in any such states or jurisdictions;

                  (e)  furnish to the Seller  such  number of  prospectuses  and
other  documents  incident  thereto the Seller from time to time may  reasonable
request;

                  (f) notify the Seller at any time when a  Prospectus  relating
to a Registration Statement is required to be delivered under the Securities Act
of the  happening of any event as a result of which the  Prospectus  included in
such Registration  Statement, as then in effect, includes an untrue statement of
a material fact or omits to state a material fact required to be stated  therein
or necessary to make the  statements  therein not  misleading  or  incomplete in
light of the circumstances then existing, and at the request of any such seller,
prepare and furnish to such seller a reasonable number of copies of a supplement
to or an amendment of such Prospectus as may be necessary so that, as thereafter
delivered to the purchasers of such shares, such Prospectus shall not include an
untrue  statement of material  fact or omit to state a material fact required to
be stated therein or necessary to make the statements  therein not misleading or
incomplete in the light of the circumstances then existing; and

                  (g) cause all such Registrable  Securities registered pursuant
to this  Agreement  to be listed on each  securities  exchange on which the same
class of securities issued by the Buyer are then listed.

         4. Indemnification; Contribution.

                  (a) The  Buyer  agrees  to  indemnify  and hold  harmless  the
Seller, the directors, officers, employees, subsidiaries and agents of each such
Holder  and each  Person who  controls  the  Seller  within  the  meaning of the
Securities Act or the Exchange Act (a  "Controlling  Person"),  from and against
any and all  losses,  claims,  damages,  liabilities  and  expenses  (including,
without limiting the foregoing but subject to Section 4(c) hereof, the legal and
other expenses incurred in connection with any action, suit or proceeding or any
claim  asserted)  arising out of or based upon any untrue  statement  or alleged
untrue statement of a material fact contained in any  Registration  Statement or
Prospectus  (as amended or  supplemented  if the Buyer shall have  furnished any
amendments or supplements thereto), or arising out of or based upon
                                        4

any omission or alleged omission to state therein a material fact required to be
stated  therein or  necessary  to make the  statements  therein not  misleading,
provided  that the Buyer  shall not be liable in any such case to the  Seller to
the extent that such losses, claims, damages,  liabilities or expenses arise out
of or are based upon any such untrue  statement  or  omission or alleged  untrue
statement or omission  made in reliance  upon and  conformity  with  information
specifically  relating to the Seller,  furnished  in writing to the Buyer by the
Seller expressly for use in such Registration Statement or Prospectus.

                  (b) The  Seller  agrees to  indemnify  and hold  harmless  the
Buyer, the directors, officers, employees,  subsidiaries and agents of the Buyer
and each  Controlling  Person,  from and  against  any and all  losses,  claims,
damages, liabilities and expenses (including, without limiting the foregoing but
subject  to  Section  4(c)  hereof,  the legal and other  expenses  incurred  in
connection with any action,  suit or proceeding or any claim  asserted)  arising
out of or based upon any untrue statement made in such Registration Statement or
Prospectus  in  reliance  upon  or  in  conformity  with  information   relating
specifically  to such Holder which was furnished in writing to the Buyer by such
Holder expressly for use in such Registration Statement or Prospectus,  provided
that such  Holder  shall not be liable in any such case to the extent  that such
losses, claims, damages,  liabilities or expenses arise out of or are based upon
any such untrue  statement or omission or alleged  untrue  statement or omission
for which such Holder is entitled to indemnification under Section 4(a) hereof.

                  (c)  In  case  any  action  or   proceeding   (including   any
governmental or regulatory investigation or proceeding) shall be brought against
any  party  indemnified  under  either  of  paragraphs  (a)  or  (b)  above  (an
"Indemnified Party"),  based upon the Registration  Statement or any Prospectus,
or any amendment or supplement thereto,  and with respect to which indemnity may
be sought against the party to provide such  indemnification  (the "Indemnifying
Party"),  the Indemnified Party shall promptly notify the Indemnifying  Party in
writing and the Indemnifying  Party shall assume the defense thereof,  including
the employment of counsel  reasonably  satisfactory to the Indemnified Party and
payment of all reasonable fees and expenses  relating  thereto.  The Indemnified
Party  shall have the right to employ  separate  counsel  in any such  action or
proceeding and participate in the defense thereof,  but the fees and expenses of
such  counsel  shall  be at the  Indemnified  Party's  expense  unless  (i)  the
employment  of such counsel has been  specifically  authorized in writing by the
Indemnifying  Party, (ii) the Indemnifying Party has not assumed the defense and
employed counsel  reasonably  satisfactory to such  Indemnified  Party within 15
days after notice of any such action or  proceeding,  or (iii) the named parties
to any such action or proceeding  (including any impleaded parties) include both
the Indemnified  Party and the  Indemnifying  Party and such  Indemnified  Party
shall  have been  advised  by such  counsel  that there may be one or more legal
defenses  available  to the  Indemnifying  Party  that  are  different  from  or
additional  to those  available  to the  Indemnifying  Party (in which  case the
Indemnifying Party shall not have the right to assume the defense of such action
or proceeding on behalf of such Indemnified Party, it being understood, however,
that the Indemnifying Party shall not, in connection with any one such action or
separate but  substantially  similar or related  actions arising out of the same
general  allegations or  circumstances,  be liable for the  reasonable  fees and
expenses of more than one separate  firm of attorneys  (in addition to all local
counsel  which is  necessary,  in the good  faith  opinion  of  counsel  for the
Indemnified  Party in order to adequately  represent the Indemnified  Party) for
the Indemnified Party, which firm shall be
                                        5

designated  in  writing  by the  Indemnified  Party  and that all such  fees and
expenses  shall be  reimbursed  as they are incurred  upon  written  request and
presentation of invoices).  The  Indemnifying  Party shall not be liable for any
settlement  of any such  action  effected  without  the  written  consent of the
Indemnifying Party, which cannot be unreasonably  withheld,  but if settled with
the written  consent of the  Indemnifying  Party or if there is a final judgment
for the plaintiff,  the Indemnifying Party agrees to indemnify and hold harmless
such Indemnified  Party from and against any loss or liability by reason of such
settlement  or judgment.  The  Indemnifying  Party shall not,  without the prior
written consent of the Indemnified  Party,  effect any settlement of any pending
or threatened  proceeding in respect of which such Indemnified  Party is a party
and indemnity has been sought  hereunder by such  Indemnified  Party unless such
settlement includes an unconditional  release of such Indemnified Party from all
liability on claims that are the subject  matter of such  proceeding to which it
is  entitled  to be  indemnified,  and may not  settle  matters  as to which the
Indemnified Party is not entitled to indemnification.

                  (d) If the  indemnification  provided for in this Section 4 is
unavailable  to an  Indemnified  Party under  paragraph (a) or (b) hereof (other
than by reason of the  exceptions  provided  therein)  in respect of any losses,
claims,  damages,  liabilities  or  expenses  referred  to  therein,  then  each
Indemnifying  Party,  in lieu of  indemnifying  such  Indemnified  Party,  shall
contribute to the amount paid or payable to such  Indemnified  Party as a result
of such losses, claims, damages,  liabilities and expenses in such proportion as
is appropriate to reflect the relative  fault of the  Indemnifying  Party on the
one hand and the  Indemnified  Party on the other  hand in  connection  with the
statements  or  omissions  which  resulted  in  such  losses,  claims,  damages,
liabilities or expenses, as well as any other relevant equitable considerations.
The relative fault of the Indemnifying Party on the one hand and the Indemnified
Party on the other hand shall be determined by reference to, among other things,
whether  the  untrue or  alleged  untrue  statement  of a  material  fact or the
omission  to state a  material  fact  related  to  information  supplied  by the
Indemnifying Party on the one hand or by the Indemnified Party on the other hand
and  the  parties'  relative  intent,  knowledge,   access  to  information  and
opportunity to correct or prevent such statement or omission.

                  (e) The Buyer and the  Seller  agree that it would not be just
and equitable if  contribution  pursuant to this Section 4 were  determined by a
pro rata allocation or by any other method of allocation that does not take into
account the  equitable  considerations  referred to in paragraph (d) above which
shall be deemed to include,  subject to the  limitations  set forth  above,  any
legal  or  other  expenses  reasonably  incurred  by such  Indemnified  Party in
connection with investigating any claim or defendant in any such action, suit or
proceeding. No person guilty of fraudulent misrepresentation (within the meaning
of Section 11(f) of the Securities Act) shall be entitled to  contribution  from
any person who was not guilty of such fraudulent misrepresentation.

                  (f) The provisions of this Section 4 will remain in full force
and  effect,  regardless  of  any  investigation  made  by or on  behalf  of any
Indemnified  Party  or any of the  officers,  directors,  employees,  agents  or
Controlling  Persons of such Indemnified Party, and will survive the sale by the
Seller of Registrable Securities.
                                        6

         5. Miscellaneous.

                  (a)  Amendment;  Waivers.  This  Agreement  may not be changed
orally,  but  (subject  to the  provisions  of  this  Section  5(a))  only by an
agreement in writing signed by the party against whom enforcement of any waiver,
change,  modification or discharge is sought. Any term,  covenant,  agreement or
condition of this Agreement may be amended or compliance therewith may be waived
(either  generally  or in a  particular  instance  and either  retroactively  or
prospectively),  if the Buyer shall have  obtained the consent in writing of the
Seller.  The Buyer  shall  promptly  send  copies of any  request  for  consent,
amendment or waiver (and any request for any such amendment,  consent or waiver)
relating to this Agreement to the Seller.

                  (b) Notices.  All communications  provided for hereunder shall
be in writing and sent by telecopy,  certified or registered first class mail or
nationwide  overnight delivery service (with charges prepaid),  addressed to the
Seller at the registered address of the Seller as set forth in the register kept
by the Buyer at its  principal  office,  and if to the Buyer,  at its  principal
executive  offices  specified  in its  most  recent  report  filed  with the SEC
pursuant to the Exchange Act or to such other address for purposes hereof as the
Buyer may have  designated in writing to the Seller (such notice being effective
on receipt).

                  (c) Rules 144 and 144A. The Buyer  covenants that it will file
the reports required to be filed by it under the Securities Act and the Exchange
Act and the rules and  regulations  adopted by the SEC  thereunder  (or,  if the
Buyer is not required to file such reports, the Buyer shall (i) upon the request
of the Seller of Registrable Securities make publicly available such information
as is necessary to enable the Seller to sell Registrable  Securities pursuant to
Rule 144 or (ii)  deliver  such  information  to a  prospective  purchaser as is
necessary to enable the Seller to sell Registrable  Securities  pursuant to Rule
144A).

                  (d)  Successors  and Assigns.  All covenants and agreements in
this Agreement shall bind and inure to the benefit of the respective successors,
heirs,  personal  representatives  and assigns of the parties hereto (including,
without limitation, any transferee of the Seller) whether so expressed or not.

                  (e) Counterparts.  This Agreement and any amendments, waivers,
consents,  or  supplements  hereto or hereunder may be executed in any number of
counterparts,   and  by  different   parties   hereto  or  thereto  in  separate
counterparts,  each of which when so executed and  delivered  shall be deemed an
original,  but all such  counterparts  together shall constitute but one and the
same  instrument.  This Agreement shall become  effective upon the execution and
delivery of a counterpart hereof by each of the parties hereto.

                  (f) Descriptive Headings.  Descriptive headings of sections of
this  Agreement are for  convenience  of reference  only and do not constitute a
part of this Agreement.

                  (g)  Governing  Law.  This  Agreement  shall be construed  and
enforced in accordance with, and the rights of the parties shall be governed by,
the  internal  laws of the State of Arizona,  without  regard to  principles  of
conflicts of law.
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                  (h) Independence of Covenants.  All covenants  hereunder shall
be given independent effect.

                  (i) Severability. In case any provision in or obligation under
this Agreement shall be invalid,  illegal or unenforceable in any  jurisdiction,
the  validity,  legality  and  enforceability  of the  remaining  provisions  or
obligations, or of such provision or obligation in any other jurisdiction, shall
not in any way be affected or impaired thereby.

                  (j) Satisfaction Requirement. If any agreement, certificate or
other  writing,  or any  action  taken or to be  taken,  is by the terms of this
Agreement  required to be satisfactory to any party,  the  determination by such
party of such  satisfaction  shall be made by such party in its own  independent
judgment exercised in good faith.

         IN WITNESS  WHEREOF,  the parties have caused this Agreement to be duly
executed and delivered by their  respective duly  authorized  officers as of the
date first written above.

                                        AMTECH SYSTEMS, INC.



                                        By:
                                           -------------------------------------
                                             Name:
                                                  ------------------------------
                                             Title:
                                                   -----------------------------

                                        P.R. HOFFMAN MACHINE PRODUCTS
                                        CORPORATION



                                        By:
                                           -------------------------------------
                                             Name:
                                                  ------------------------------
                                             Title:
                                                   -----------------------------
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