SCHEDULE 14A INFORMATION

          PROXY STATEMENT PURSUANT TO SECTION 14(a) OF THE SECURITIES
                             EXCHANGE ACT OF 1934

Filed by the Registrant /X/

Filed by a Party other than the Registrant / /

Check the appropriate box:

/X/ Preliminary Proxy Statement      / / Confidential, for Use of the Commission
/ / Definitive Proxy Statement           Only (as permitted by Rule 14a-6(e)(2))
/ / Definitive Additional Materials 
/ / Soliciting Material Pursuant to
    sec.240.14a-11(c) or sec.240.14a-12


                                 AMTECH SYSTEMS, INC.
- --------------------------------------------------------------------------------
                (Name of Registrant as Specified In Its Charter)


- --------------------------------------------------------------------------------
    (Name of Person(s) Filing Proxy Statement, if other than the Registrant)

Payment of Filing Fee (Check the appropriate box):

/X/  No fee required.

/ /  Fee computed on table below per Exchange Act Rules 14a-6(i)(4) and 0-11.

     (1)  Title of each class of securities to which transaction applies:

     (2)  Aggregate number of securities to which transaction applies:

     (3)  Per unit  price  or other  underlying  value of  transaction  computed
          pursuant to Exchange  Act Rule 0-11 (Set forth the amount on which the
          filing fee is calculated and state how it was determined):

     (4)  Proposed maximum aggregate value of transaction:

     (5)  Total fee paid:

/ /  Fee paid previously with preliminary materials.

/ /  Check box if any part of the fee is offset as provided  by  Exchange  Act
     Rule  0-11(a)(2)  and identify the filing for which the  offsetting fee was
     paid  previously.  Identify the previous filing by  registration  statement
     number, or the Form or Schedule and the date of its filing.

     (1)  Amount Previously Paid:

     (2)  Form, Schedule or Registration Statement No.:

     (3)  Filing Party:

     (4)  Date Filed:

                              AMTECH SYSTEMS, INC.
                              131 South Clark Drive
                              Tempe, Arizona 85281

- --------------------------------------------------------------------------------
                    NOTICE OF ANNUAL MEETING OF SHAREHOLDERS
                         TO BE HELD ON FEBRUARY 27, 1998
- --------------------------------------------------------------------------------


To Our Shareholders:

         The 1998 Annual Meeting of  Shareholders  of AMTECH  SYSTEMS,  INC., an
Arizona  corporation (the "Company"),  will be held at the Wyndham Garden Hotel,
427 N. 44th  Street,  Phoenix,  Arizona,  on February  27,  1998,  at 3:00 p.m.,
Mountain Standard Time, for the following purposes:

         1.       To elect five (5) directors to serve for one year terms;

         2.       To ratify  the  adoption  of the 1998  Stock  Option  Plan for
                  employees (including officers) and consultants; and

         3.       To transact  such other  business as may properly  come before
                  the  meeting  or any  adjournment(s)  thereof.  Management  is
                  presently  aware  of no  other  business  to come  before  the
                  meeting.

         The Board of  Directors  has fixed the close of business on January 22,
1998,  as  the  record  date  (the  "Record  Date")  for  the  determination  of
shareholders  entitled  to  notice  of  and  to  vote  at  the  meeting  or  any
postponement(s) or adjournment(s)  thereof.  Shares of Common Stock can be voted
at the  meeting  only if the holder is  present  at the  meeting in person or by
valid proxy. A copy of the Company's 1997 Annual Report,  which includes audited
financial  statements,  was mailed with this Notice and Proxy  Statement  to all
shareholders of record on the Record Date.

         Management  of the Company  cordially  invites you to attend the Annual
Meeting.  Your  attention  is directed to the  attached  Proxy  Statement  for a
discussion of the foregoing proposals and the reasons why the Board of Directors
encourages you to vote for approval of such proposals.

                                              By Order of the Board of Directors



                                              Robert T. Hass, Secretary
Tempe, Arizona
January 23, 1998


- --------------------------------------------------------------------------------
IMPORTANT:  IT IS  IMPORTANT  THAT YOUR  SHAREHOLDINGS  BE  REPRESENTED  AT THIS
MEETING.  PLEASE COMPLETE,  DATE, SIGN AND PROMPTLY MAIL THE ENCLOSED PROXY CARD
IN THE ACCOMPANYING ENVELOPE,  WHICH REQUIRES NO POSTAGE IF MAILED IN THE UNITED
STATES.
- --------------------------------------------------------------------------------

                              AMTECH SYSTEMS, INC.
                              131 South Clark Drive
                              Tempe, Arizona 85281


                                -----------------
                                 PROXY STATEMENT
                                -----------------


         This Proxy  Statement  is being  furnished  to  Shareholders  of AMTECH
SYSTEMS,  INC., an Arizona  corporation (the "Company"),  in connection with the
solicitation  of proxies by the Board of  Directors  for use at the 1998  Annual
Meeting of  Shareholders of the Company to be held on February 27, 1998, at 3:00
p.m.,  Mountain  Standard Time, and any adjournment or  postponement(s)  thereof
(the "Annual  Meeting").  A copy of the Notice of the Meeting  accompanies  this
Proxy Statement. It is anticipated that the mailing of this Proxy Statement will
commence on or about January 23, 1998.


                       SOLICITATION AND VOTING OF PROXIES

         Only  shareholders  of record at the close of  business  on January 22,
1998 (the  "Record  Date") are  entitled  to notice of and to vote at the Annual
Meeting  or  any  adjournment  or  postponement  thereof.  On the  Record  Date,
4,199,706  shares of Common  Stock,  $.01 par value (the "Common  Stock"),  were
issued and  outstanding.  Each  holder of Common  Stock is entitled to one vote,
exercisable in person or by proxy,  for each share of the Company's Common Stock
held of record on the Record Date.

         At the Annual  Meeting of  Shareholders,  five (5)  directors are to be
elected to serve for a term of one year or until their respective successors are
elected and qualified. Each Shareholder present at the Annual Meeting, either in
person or by proxy,  will have an  aggregate  number of votes in the election of
directors  equal to five (the  number  of  persons  nominated  for  election  as
directors)  multiplied  by the number of shares of Common  Stock of the  Company
held by each such shareholder on the Record Date. The resulting aggregate number
of votes may be cast by the  Shareholder for the election of any single nominee,
or the  Shareholder  may  distribute  such votes  among any number or all of the
nominees.  The five  nominees  receiving  the  highest  number of votes  will be
elected to the Board of Directors.

         All valid proxies  received  before the Annual  Meeting and not revoked
will be exercised.  All shares  represented by proxy will be voted,  and where a
shareholder  specifies by means of his or her proxy a choice with respect to any
matter  to be acted  upon,  the  shares  will be voted  in  accordance  with the
specifications  so made. If no choice is indicated on the proxy, the shares will
be voted in accordance with the  recommendations of the Board of Directors as to
such  matters.  Abstentions  and  broker  non-votes  will  be  included  in  the
determination of the number of shares  represented for a quorum.  Proxies may be
revoked at any time prior to the time they are voted by: (a)  delivering  to the
Secretary of the Company a written instrument of revocation bearing a date later
than  the  date of the  proxy;  or (b)  duly  executing  and  delivering  to the
Secretary a subsequent  proxy relating to the same shares;  or (c) attending the
meeting  and  voting in  person,  provided  that the  shareholder  notifies  the
Secretary  of the meeting of his or her  intention to vote in person at any time
prior to the voting
                                        2

of the  proxy.  In  order  to  vote  their  shares  in  person  at the  meeting,
shareholders  who own their shares in "street  name" must obtain a special proxy
card from their broker.

         The cost of  soliciting  proxies,  including  the cost of preparing and
mailing  the  Notice  and  Proxy  Statement,   will  be  paid  by  the  Company.
Solicitation   will  be  primarily  by  mailing  this  Proxy  Statement  to  all
shareholders  entitled  to vote at the  meeting.  Proxies  may be  solicited  by
officers and  directors of the Company  personally or by telephone or facsimile,
without additional  compensation.  The Company may reimburse brokers,  banks and
others holding shares in their names for others for the cost of forwarding proxy
materials and obtaining proxies from beneficial owners.

         The Board of  Directors  does not know of any  matters  other  than the
election of  directors  and the  proposal to approve the 1998 Stock  Option Plan
(the "1998  Plan") that are expected to be presented  for  consideration  at the
meeting. However, if other matters properly come before the meeting, the persons
named in the accompanying  proxy intend to vote thereon in accordance with their
judgment.

         All proxies received pursuant to this solicitation will be voted except
as to matters as to which  authority to vote is specifically  withheld;  where a
choice is specified as to the proposal,  they will be voted in  accordance  with
such specification.  Where authority to vote is not specifically withheld and no
voting  instructions  are given, the persons named in the proxy solicited by the
Board of Directors  intend to vote for the election of the nominees for director
listed below and for the 1998 Plan.


                              ELECTION OF DIRECTORS

General Information

         The present terms of the Company's  current  directors,  Jong S. Whang,
Robert T. Hass,  Donald F. Johnston,  Alvin Katz and Bruce R. Thaw,  expire upon
the election and  qualification of their successors at the Company's 1998 Annual
Meeting  of  Shareholders.  Messrs.  Katz and Thaw are  being  nominated  at the
request of Barber & Bronson,  Incorporated,  the  underwriter  of the  Company's
public  offering of Common Stock and Common Stock Purchase  Warrants on December
15, 1994 (the  "Underwriter").  The  Underwriter  has the right to nominate  two
directors  pursuant to the provisions of the Underwriting  Agreement between the
Company and the  Underwriter.  The Board of Directors has nominated  each of the
current  directors  as nominees  for election as directors in the election to be
held at the Annual Meeting.

         The Board of Directors  intends to vote its proxies for the election of
its nominees,  for a term to expire at the next Annual Meeting.  In that regard,
the Board of Directors solicits authority to cumulate such votes.

         If any nominee  should  become  unavailable  for any reason,  which the
Board of  Directors  does  not  anticipate,  the  proxy  will be  voted  for any
substitute  nominee or nominees  who may be  selected by the Board of  Directors
prior to or at the Annual Meeting, or, if no substitute is selected by the Board
of  Directors  prior to or at the  Annual  Meeting,  for a motion to reduce  the
present  membership  of the Board to the  number of  nominees  available  and to
create an additional vacancy to be filled by
                                        3

the Board of Directors.  The information concerning the nominees and their share
holdings in the Company has been furnished by them to the Company.

Information Concerning Directors, Nominees and Officers

         The  following  table sets forth  information  regarding  the officers,
directors and director nominees of the Company,  including biographical data for
at least the last five years.


Name                      Age   Positions with the Company
- ----                      ---   --------------------------

Jong S. Whang             52    President, Chief Executive Officer and Director

Robert T. Hass            47    Vice President-Finance, Chief Financial Officer,
                                Treasurer, Secretary and Director

Donald F. Johnston        72    Director

Alvin Katz                68    Director

Bruce R. Thaw             45    Director


         JONG S.  WHANG  has  been  President,  Chief  Executive  Officer  and a
Director  since the  inception of the Company and was one of its  founders.  Mr.
Whang's responsibilities as President include the sales effort for the Company's
semiconductor  equipment  business and  development of new products and business
opportunities  in that industry.  He has twenty-four  years of experience in the
semiconductor industry including time spent in both processing and manufacturing
of equipment  components  and systems.  From 1973 until 1979, he was employed by
Siltronics,  Inc.,  initially  as  a  technician  working  with  chemical  vapor
deposition  (CVD) and later as  manager  of the  quartz  fabrication  plant with
responsibility of providing technical  marketing support.  From 1979 until 1981,
he was employed by U.S. Quartz,  Inc. as manufacturing  manager. In 1981 he left
U.S. Quartz to found the Company.

         ROBERT  T.  HASS  has  been  Vice  President-Finance,  Chief  Financial
Officer, Treasurer and Secretary of the Company since June 3, 1992. Mr. Hass has
been a Director of the Company  since  February 29,  1996.  From 1991 until May,
1992,  he  operated  a  financial  consulting  practice  under  the name of Hass
Financial Consulting  Services,  a sole  proprietorship.  From 1985 to 1991, Mr.
Hass  served  as  Director  of  Accounting  Services  and  then  Controller  for
Lifeshares  Group,  Inc., a holding company which owned and operated real estate
development  and  insurance  subsidiaries,  and  from  1988  to 1991  served  as
Controller and Chief Accounting Officer of some of those subsidiaries. From 1984
to 1985,  he served as Vice  President-Finance  and  Treasurer  of The  Victorio
Company, a privately owned holding company which owned and operated agriculture,
chemical, commercial real estate brokerage,  marketing research, and commodities
futures  brokerage  businesses.  From 1977 to 1984,  he was  employed in various
capacities  including Vice President,  Chief Financial  Officer and Treasurer by
Altamil Corporation,  then a public company, which manufactures truck equipment,
wirebound containers, and precision aluminum forgings. From 1972 to 1977, he was
employed as an auditor with Ernst & Ernst,  now known as Ernst & Young.  He is a
Certified Public Accountant.
                                        4

         DONALD F.  JOHNSTON has been a Director  since April 9, 1994,  and also
served as a Director  from March,  1983 to December  1992.  He is not  otherwise
employed by the Company.  He was President and Chief  Executive  Officer of JAI,
Inc., a management  consulting firm, from 1985 to March 1993. From 1985 to March
1993,  when he retired,  he acted as  marketing  and  management  consultant  to
companies in the electronics industry.  From November, 1983 until October, 1985,
he was President of Process Control,  Inc. of Tempe, Arizona. He has held senior
management positions with Montgomery Ward & Co. and the Hotpoint Division of the
General  Electric  Company.  He has also  served as the  Vice-President  of B.F.
Goodrich and the Philco Ford Division of the Ford Motor  Company.  Mr.  Johnston
also served as President of Mirco, Amstar Electronics, and Hera Investment Co.

         ALVIN  KATZ has been a Director  since May 1,  1995.  Since 1981 he has
been an  adjunct  professor  of  business  management  at the  Florida  Atlantic
University  in Boca  Raton,  Florida.  From 1991 until the  company  was sold in
September,  1992, he was Chief Executive Officer of Odessa  Engineering Corp., a
company engaged in the manufacture of pollution monitoring equipment.  From 1957
to 1976,  Mr.  Katz was  employed  by  United  Parcel  Service  holding  various
managerial  positions,  including  District  Manager  and  Corporate  Manager of
Operations, Planning, Research and Development. He is also a Director of Blimpie
International,  a fast food franchisor,  Nastech Pharmaceutical Company, Inc., a
company  engaged in research,  development  and  marketing of nasally  delivered
pharmaceuticals, BCT International, Inc., a franchisor of wholesale thermography
printing plants, OZO Diversified Technology,  Inc., a manufacturer of depaneling
equipment  for the  semiconductor  industry,  and Micron  Instruments,  Inc.,  a
manufacturer  of  infrared  temperature  measurement  devices,  all of which are
publicly held corporations.

         BRUCE R. THAW has been a Director  since May 1, 1995. Mr. Thaw has been
a practicing  attorney since 1978. Since 1995, Mr. Thaw has been a self-employed
attorney,  and from 1984 to 1995,  he was a partner  in the law firm of Abrams &
Thaw. Mr. Thaw is also a Director of Information Resource  Engineering,  Inc., a
public traded company that designs,  manufactures  and markets  computer network
security  systems and products.  Mr. Thaw does not render legal  services to the
Company.

Board and Committee Meetings

         During the 1997 fiscal year, there were three (3) meetings of the Board
of Directors.  No director  attended less than 75% of the Board  meetings  while
serving as such director or less than 75% of all committee  meetings on which he
served as a committee member.

         There  are  three  committees  of the  Board of  Directors:  the  Audit
Committee, the Compensation and Option Committee, and the Finance Committee.

         The Audit  Committee,  which  held three (3)  meetings  during the 1997
fiscal year, was comprised of Messrs. Bruce R. Thaw and Donald F. Johnston.  The
Audit Committee is responsible for maintaining  communication between the Board,
the  Company's  independent  auditors and members of financial  management  with
respect to the  Company's  financial  affairs in  general,  including  financial
statements and audits,  the adequacy and effectiveness of the Company's internal
accounting  controls and  systems,  and the  retention  and  termination  of the
independent auditors.
                                        5

         The  Compensation  and Option  Committee,  which  held one (1)  meeting
during the 1997 fiscal year,  was comprised of Messrs.  Johnston and Alvin Katz.
The Compensation and Option Committee makes  recommendations  concerning officer
compensation, employee benefit programs and retirement plans.

         The Finance  Committee,  which held no meetings  during the 1997 fiscal
year,  was  comprised  of  Messrs.  Alvin Katz and Bruce R.  Thaw.  The  Finance
Committee is  responsible  for  communication  between the Board,  the Company's
lender or  prospective  lender(s)  and other  financial  sources  and members of
financial management.

         All  current  committee  members  are  expected  to  be  nominated  for
re-election  at a Board  meeting  to be held  following  the  Annual  Meeting of
Shareholders.

Compensation of Directors

         Directors  who  are  full-time  employees  of the  Company  receive  no
additional compensation for serving as directors. Non-employee directors receive
fees of $700 per Board meeting attended and $250 per committee meeting attended.
In addition,  under the Company's Non-Employee Directors Stock Option Plan, each
outside director receives an annual grant of options to purchase 6,000 shares of
Common  Stock.  The  exercise  price of the options is the fair market  value of
Common  Stock on the date of grant and each  option  has a term of ten years and
becomes  exercisable  in  three  equal  installments  commencing  on  the  first
anniversary  of the  date  of  grant  and  continuing  for  the  two  successive
anniversaries  thereafter.  In the event of the  disability  (as  defined in the
plan) or death of an outside  director,  all options  remain  exercisable  for a
period of twelve months  following the date such person ceased to be a director,
but only to the extent  such  option was  exercisable  on the date the  director
ceased to be a director.

Compensation Committee Interlocks and Insider Participation

         The Compensation and Option Committee is composed of Messrs.  Donald F.
Johnston  and Alvin  Katz,  neither  of whom is an officer  or  employee  of the
Company.


         SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT

Security Ownership of Management

         The  following  table sets forth  certain  information  concerning  the
beneficial  ownership of the  Company's  Common Stock as of January 16, 1998, by
(i) each  director  and each  nominee  for  director of the  Company,  (ii) each
officer of the Company,  and (iii) all officers and  directors as a group.  This
information  was determined in accordance with Rule 13(d)-3 under the Securities
Exchange Act of 1934, as amended, and is based upon the information furnished by
the persons listed below. Except as otherwise indicated, each shareholder listed
possesses sole voting and investing  power with respect to the shares  indicated
as being beneficially owned.
                                        6



                                                                     Shares of Common Stock
                                                                       Beneficially Owned
                                                      --------------------------------------------------
 
                                                        Number of Shares                    Percent of
Name and Address                                      Beneficially Held(1)                 Ownership(2)
- ----------------                                      --------------------                 ------------

                                                                                          
Jong S. Whang                                             140,493(1)(3)                        3.3%
131 South Clark Drive
Tempe, AZ  85281

Bruce R. Thaw                                              53,000(1)(4)                        1.3%
45 Banfi Plaza
Farmingdale, NY  11735

Donald F. Johnston                                         13,250(1)(5)                          *
13615 N. Robertson Drive
Sun City West, AZ  85375

Robert T. Hass                                             16,500(1)(6)                          *
131 South Clark Drive
Tempe, AZ  85281

Alvin Katz                                                132,000(1)(7)                        3.1%
301 N. Birch Road
Fort Lauderdale, FL  33303-4211

Directors and Officers of the Company as a group          355,243(8)                           8.5%
(1)(2)(3)(4)(6)(7)


- ------------------------

 *       Less than 1%.

(1)      Mr. Whang is the Company's President,  CEO and a director.  Mr. Hass is
         the  Vice  President-Finance,   Chief  Financial  Officer,   Treasurer,
         Secretary and a director. Messrs. Johnston, Katz and Thaw are presently
         directors.

(2)      The shares and  percentages  shown  include the shares of Common  Stock
         actually  owned as of January 16, 1998,  and the shares of Common Stock
         with  respect to which the  person had the right to acquire  beneficial
         ownership  within 60 days of such date pursuant to options or warrants.
         All shares of Common Stock that the identified  person had the right to
         acquire within 60 days of January 16, 1998 upon the exercise of options
         or warrants, are deemed to be outstanding when computing the percentage
         of the  securities  owned  by such  person,  but are not  deemed  to be
         outstanding  when computing the  percentage of the securities  owned by
         any other person.

(3)      Includes (i) 18,976  shares held jointly  with Mr.  Whang's  spouse and
         (ii) 41,517 shares issuable upon the exercise of presently  exercisable
         options, with an exercise price of $2.50 per share.
                                        7

(4)      Includes 12,000 shares issuable upon exercise of presently  exercisable
         options  with  exercise  prices of $2.24 per share for  10,000 of these
         shares and $2.50 per share for the remaining 2,000 shares, and warrants
         to purchase  4,000 shares of Common Stock at an exercise price of $2.25
         per share.  Also  includes  9,000 shares  outstanding  and 5,000 shares
         issuable upon exercise of warrants, all of which are held by Mr. Thaw's
         spouse.

(5)      Includes   12,000  shares  issuable  upon  the  exercise  of  presently
         exercisable options, with exercise prices of $1.75 per share for 10,000
         of these shares and $2.50 per share for the remaining 2,000 shares.

(6)      Includes   10,000  shares  issuable  upon  the  exercise  of  presently
         exercisable options, with an exercise price of $.63 per share. Excludes
         stock bonus  grants for 4,000 shares that do not vest within 60 days of
         January 16, 1998.

(7)      Includes   12,000  shares  issuable  upon  the  exercise  of  presently
         exercisable options, with exercise prices of $2.24 per share for 10,000
         of these shares and $2.50 per share for the remaining 2,000 shares.

(8)      Includes 91,517 shares issuable upon exercise of presently  exercisable
         options  and  4,000  shares   issuable  upon  exercise  of  outstanding
         warrants.

Security Ownership of Certain Beneficial Owners

         There are no persons  known to the  Company who  beneficially  own more
than 5% of the outstanding Common Stock of the Company.

Compliance with Section 16(a) of the Securities Exchange Act of 1934

         Section  16(a) of the  Securities  Exchange  Act of 1934  requires  the
Company's  directors  and  executive  officers  as well as persons  beneficially
owning more than 10% of the Company's  Common Stock,  to file certain reports of
ownership  with the  Securities  and  Exchange  Commission  (the  "SEC")  within
specified  time periods.  Such  officers,  directors and  shareholders  are also
required by SEC rules to furnish the  Company  with copies of all Section  16(a)
forms they file.

         Based  solely on its  review of such forms  received  by it, or written
representations  from  certain  reporting  persons,  the Company  believes  that
between  October  1,  1996 and  September  30,  1997 all  Section  16(a)  filing
requirements  applicable to its officers,  directors and 10%  shareholders  were
complied with.
                                        8

                             EXECUTIVE COMPENSATION

         The following  table sets forth annual and long-term  compensation  for
services in all  capacities to the Company for the fiscal years ended  September
30, 1997, 1996 and 1995, of the Company's Chief Executive Officer, and the other
most highly  compensated  executive  officers of the company who received annual
compensation  exceeding  $100,000  during such  periods  (the  "Named  Executive
Officers").

                           SUMMARY COMPENSATION TABLE


                                                       Annual Compensation
                                          -------------------------------------------
         Name and              Fiscal                                 Other Annual          All Other
    Principal Position          Year      Salary        Bonus       Compensation (2)    Compensation (3)
    ------------------          ----      ------        -----       ----------------    ----------------

                                                                            
Jong S. Whang                   1997     $139,615      $33,994(1)       -                $3,693(3)
President and Chief             1996      100,000       59,870          -                 3,106
Executive Officer               1995       95,000       48,657          -                 2,815

Robert T. Hass                  1997       89,838       10,771          -                 1,935(4)
Vice President - Finance



- ---------------------

(1)      On February  24,  1989,  the Board of  Directors  approved an incentive
         compensation  plan for Mr.  Whang,  which  provides  for an annual cash
         bonus equal to 2% of the annual profits of the Company before taxes and
         extraordinary items; plus 2% of the amount by which the revenues of the
         Company' s  semiconductor  equipment  business in each year exceed such
         revenues for the previous year. It is a condition to the payment of any
         bonus that Mr. Whang have been continually  employed by the Company and
         that the Company have realized a profit after the payment of the bonus.
         On February 28, 1997,  Mr. Whang  entered into an  employment  contract
         with the Company,  which contract  incorporated  Mr. Whang's  incentive
         compensation plan and added additional bonus eligibility criteria.  See
         "Employment Contracts with Executive Officers," below.

(2)      Other compensation to Messrs. Whang and Hass,  consisting of the use of
         a Company  car,  vacation  pay and other  perquisites,  did not  exceed
         $50,000 or 10% of base  compensation  during any fiscal year covered by
         this table.

(3)      Amount  includes annual  insurance  premiums of $255 paid on whole-life
         insurance  for the  benefit  of Mr. Whang's spouse and Company matching
         contribution  in the Amtech  Systems,  Inc.  401(k) Plan for Mr.  Whang
         of $3,438 respectively.

(4)      Amount represents Company matching  contribution in the Amtech Systems,
         Inc. 401(k) Plan for Mr. Hass.
                                        9

Option Grants

         The table shown below  contains  information on grants of stock options
during the 1997 fiscal year to the Named Executive Officers.

                        OPTION GRANTS IN LAST FISCAL YEAR


                                                Individual Grants                            
                   ----------------------------------------------------------------------    Potential Realizable Value at
                      Securities                                     Stock                       Assumed Annual Rates of   
                      Underlying       % of Total                   Price on                  Stock Price Appreciation for
                       Options      Options Granted    Exercise     Date of                         Option Term(3)        
                       Granted       to Employees        Price       Grant     Expiration    ------------------------------
       Name              (#)            in 1997         ($/sh)      ($/sh)        Date          0%        5%         10% 
- ------------------ --------------  -----------------  ----------  ----------- -----------    -------- ----------- --------- 
                                                                                                
Jong S. Whang         207,584(1)          77%          $2.50(2)      $2.50      2/28/07         -      $326,371    $827,089
Robert T. Hass          2,500(4)            1           2.50(2)       2.50      2/28/07         -         3,931       9,961


(1)      All options  were  granted to Mr.  Whang on February 28, 1997 under the
         applicable Stock Option Plan. The options granted become exercisable as
         follows:  20% on February 28, 1998,  and an additional  20% on each one
         year anniversary thereafter. To the extent not already exercisable, the
         options become  immediately  exercisable  upon: (i) the  dissolution or
         liquidation of the Company or a reorganization, merger or consolidation
         in which all or substantially all prior shareholders do not continue to
         own more than 60% of the outstanding  shares of common stock and voting
         securities;  (ii) the sale of all or substantially all of the assets of
         the  Company;  or (iii) the  occurrence  of a change in  control of the
         Company. In addition, Mr. Whang's options accelerate upon the Company's
         termination of Mr. Whang without cause. See "Employment  Contracts with
         Executive Officers."

(2)      The  exercise  price was set at 100% of  closing  price  ($2.50) of the
         Company's Common Stock on grant day (February 28, 1997), as reported on
         the Nasdaq SmallCap Market.

(3)      Reflects  the value of the stock  option on the date of grant  assuming
         (i) for the 0% column,  no  appreciation  in the Company's  stock price
         from  the date of grant  over the term of the  option,  (ii) for the 5%
         column,  a five percent  annual rate of  appreciation  in the Company's
         stock price over the term of the option,  and (iii) for the 10% column,
         a ten percent annual rate of  appreciation in the Company's stock price
         over the term of the option,  in each case without any  discounting  to
         present value.  The actual gains, if any, on stock option exercises are
         dependent upon the future  performance  of the Company's  Common Stock.
         Accordingly, the amounts reflected in this table may not necessarily be
         indicative of the actual results obtained.

(4)      All options  were  granted to Mr.  Hass on February  28, 1997 under the
         applicable Stock Option Plan. The options granted become exercisable as
         follows:  20% on the date of grant  and an  additional  20% on each one
         year anniversary thereafter.
                                       10

Option Exercises

         The  following  table shows the stock  options  exercised  by the Named
Executive  Officers  during fiscal year 1997 and the value of stock options held
by him, as of the end of fiscal year 1997.


                   AGGREGATED OPTION EXERCISES IN FISCAL 1997
                    AND OPTION VALUE AS OF SEPTEMBER 30, 1997


                                                   Number of Unexercised           Value of Unexercised
                                                       Options                      In-the-Money
                                                 at September 30, 1997       Options at September 30, 1997
                                              ----------------------------   -----------------------------
                      Shares
                    Acquired on     Value
Name               Exercise (#)    Realized   Exercisable  Unexerciseable   Exercisable    Unexerciseable
- ---------------  ---------------   --------   -----------  --------------   -----------    --------------
                                                                                
Jong S. Whang         10,000        $13,550        -          207,584           $0            $38,922


Amendment or Repricing of Options

         During  fiscal  year 1997,  the Company did not amend or reprice any of
its stock options held by executive officers of the Company.

Employment Contracts with Executive Officers

         On  February  28,  1997,  the  Company  entered  into a five  (5)  year
employment  agreement with its President,  Jong S. Whang. Under the terms of the
agreement,  Mr.  Whang  receives  an annual  salary  of  $155,000,  with  annual
increases of at least 5% to be  determined  by the Board of Directors at the end
of  each  year  of the  agreement.  He is  entitled  to  receive  the  following
additional  annual  incentive cash  compensation of up to fifty percent (50%) of
his base salary,  to be  calculated  as follows:  (i) a bonus equal to 2% of the
annual earnings of the Company before taxes and extraordinary  items, and (ii) a
bonus  equal  to 2% of the  amount  by  which  the  revenues  of  the  Company's
semiconductor  equipment  business in each year  exceeds  such  revenues for the
previous year. During fiscal year 1997, Mr. Whang earned a cash bonus of $33,994
pursuant to the foregoing formula.  It is a condition to the payment of any cash
bonus that Mr.  Whang shall have been  continuously  employed by the Company and
that the total of all cash and stock  bonuses is limited to 10% of the Company's
pre-tax earnings for that year.  Profits shall also be determined without taking
into  account  the first  $3,200,000  expended or invested by the Company in the
development of the proposed  photo-assisted CVD product. In addition,  Mr. Whang
was granted 207,584 stock options pursuant to the agreement.  These options were
granted on  February  28, 1997 and they are vested at twenty  percent  (20%) per
full  year of  service  over a five  year  period.  To the  extent  not  already
exercisable,  the options  will become  immediately  exercisable  upon:  (i) the
dissolution  or  liquidation  of the  Company  or a  reorganization,  merger  or
consolidation  in which  all or  substantially  all  prior  shareholders  do not
continue  to own more than 60% of then  outstanding  shares of common  stock and
voting  securities,  (ii) the sale of all or substantially  all of the assets of
the Company,  or (iii) the  occurrence  of a change in control of the Company as
discussed in the  agreement.  The agreement  also contains  confidentiality  and
non-compete provisions. If Mr. Whang
                                       11

is terminated other than for "cause", he is entitled to receive as severance pay
salary,  incentive  compensation  and  vacation  accrued  through  the  date  of
termination  plus the greater of $155,000 or the balance of his  compensation to
the end of the  term of the  employment  agreement  computed  using  the  latest
applicable salary rate without consideration of any reductions in base pay below
$155,000.  Mr.  Whang is also  entitled  to  participate  in any  benefit  plans
generally available to employees of the Company.

Compensation and Option Committee Report on Executive Compensation

         The  Compensation  and  Option  Committee  of the  Company's  Board  of
Directors (the "Committee),  which is composed entirely of independent,  outside
directors,  establishes  the  general  compensation  policies of the Company and
specific compensation for each executive officer of the Company, and administers
the  Company's  stock  option  program.  The  Committee's  intent is to make the
compensation  packages of the  executive  officers of the Company  sufficient to
attract and retain  persons of  exceptional  quality,  and to provide  effective
incentives to motivate and reward Company executives for achieving the financial
and strategic goals of the Company essential to the Company's  long-term success
and to growth in shareholder value. The Company's executive compensation package
consists of three main components:  (1) base salary; (2) incentive cash bonuses;
and (3) stock options.

Base Compensation

         The Committee's  approach is to offer executives  salaries  competitive
with those of other executives in the industry in which the Company operates. To
that end, the Committee  evaluates the  competitiveness of its base salary based
on  information  drawn  from a  variety  of  sources,  including  published  and
proprietary  survey  data  and  the  Company's  own  experience  recruiting  and
retaining  executives,  although complete  information is not easily obtainable.
The Company's base salary levels are intended to be consistent with  competitive
practice  and  level  of  responsibility,   with  salary  increases   reflecting
competitive  trends,  the overall  financial  performance of the Company and the
performance of the individual executive.

Bonuses

         In  addition  to base  salary,  executives  are  eligible  to receive a
discretionary  annual bonus. At the beginning of each year, the Compensation and
Option   Committee  and  the  CEO  review  each   individual   executive's   job
responsibilities  and goals for the upcoming  year.  The amount of the bonus and
any performance criteria vary with the position and role of the executive within
the Company.  In  addition,  for all  executives,  the  Compensation  and Option
Committee  reviews  the  Company's  actual  financial  performance  against  its
internally  budgeted  performance  in  determining  year-end  bonuses,  if  any.
However,   the   Compensation  and  Option  Committee  does  not  set  objective
performance  targets for  executives  other than the CEO and sales and marketing
personnel.

Stock Option and Restricted Stock Grants

         The  Company,  from time to time,  grants  stock  options and shares of
restricted stock in order to provide certain executives with a competitive total
compensation  package and to reward them for their contribution to the long-term
price  performance  of the Company's  Common Stock.  Grants of stock options and
restricted stock are designed to align the executive's interest with that of the
                                       12

shareholders of the Company.  In awarding option grants,  the  Compensation  and
Option  Committee  will  consider,  among other things,  the amount of stock and
options  presently held by the executive,  the executive's  past performance and
contributions,   and  the  executive's   anticipated  future  contributions  and
responsibilities.

1997 CEO Compensation

         The base salary for the Chief Executive  Officer ("CEO") for the fiscal
year 1997 was increased  from $100,000 in 1996 to $155,000 in 1997,  pursuant to
the February 28, 1997 employment  agreement  entered into by the Company and the
CEO.  The  CEO's  increased  base  salary  is  based  upon the  compensation  of
executives in comparable positions in the semiconductor  industry,  adjusted for
the size of the Company (total assets and revenues).

         On February  24,  1989,  the Board of  Directors  approved an incentive
compensation  plan for the CEO, which provides for an annual cash bonus equal to
2% of the annual  profits of the Company before taxes and  extraordinary  items;
plus 2% of the  amount  by which the  revenues  of the  Company's  semiconductor
equipment  business in each year exceed such revenues for the previous  year. It
is a condition  to the  payment of any bonus that the CEO have been  continually
employed by the  Company  and that the total of such cash  bonuses is limited to
10% of the Company's  pre-tax  earnings for that year. The CEO earned $33,994 in
1997  pursuant  to  such  incentive  compensation  plan.  The  CEO's  employment
agreement  with  the  Company  incorporates  the  incentive   compensation  plan
described above. See "Employment Contracts With Executive Officers," above.

                                               COMPENSATION AND OPTION COMMITTEE


                                               Donald F. Johnston
                                               Alvin Katz
                                       13

                       ADOPTION OF 1998 STOCK OPTION PLAN

         At the Annual Meeting,  the Company will seek  shareholder  approval of
the 1998 Plan.  The 1998 Plan was adopted by the Board of  Directors  on January
__, 1998, subject to shareholder  approval. In adopting the 1998 Plan, the Board
recognized that there were no additional shares available for issuance under the
Company's  Amended  and  Restated  1995  Stock  Option  Plan and that,  with the
Company's continued growth, the Company required the ability to grant additional
options  to new and  existing  employees.  The 1998 Plan is  designed  to induce
persons  of  outstanding  ability  and  potential  to join and  remain  with the
Company,  by  encouraging,  motivating  and enabling  employees to acquire stock
ownership in the Company,  and by providing the participating  employees with an
additional  incentive to promote the success of the Company through the grant of
options to purchase shares of the Company's Common Stock. The maximum  aggregate
number of shares which may be optioned and sold under the Plan is 320,000 shares
of Common Stock.  As of the date of this Proxy  Statement,  no options have been
granted under the 1998 Plan.  THE BOARD OF DIRECTORS  RECOMMENDS  AND ENCOURAGES
YOU TO VOTE "FOR" THE APPROVAL OF THE 1998 Plan.

Reasons for Approval

         The grant of stock  options  pursuant to a plan which has been approved
by shareholders  and meets certain  conditions are exempt from the  "short-swing
profits" liability provisions of Section 16(b) of the Securities Exchange Act of
1934, as amended (the "1934 Act"). Section 16(b) provides that upon the purchase
and sale (or sale and  purchase)  of the  Company's  Common Stock within any six
month period by a principal  officer,  director or beneficial owner of more than
10% of the  Company's  Common  Stock,  any  "profit"  realized by such person is
recoverable  by the  Company.  As a result  of the  complexities  of this  rule,
optionees may unwittingly  fall within its scope and be forced to disgorge gains
to the Company, thereby frustrating the Company's intent to provide incentive to
officers and employees under the 1998 Plan.  Thus,  shareholder  approval of the
1998 Plan is sought in order to exempt from the liability  provisions of Section
16(b) the grant of  options  to  officers  and  directors  who are  eligible  to
participate in the 1998 Plan. In addition, shareholder approval of the 1998 Plan
is necessary in order that incentive  stock options  granted under the 1998 Plan
will qualify for  treatment as such under the Internal  Revenue Code of 1986, as
amended (the  "Code").  Unless  shareholder  approval is  obtained,  any options
granted  under the 1998 Plan will have less  value and,  consequently,  will not
provide the incentive to the recipient intended by the Board.

Summary of the 1998 Plan

         The following summary of the 1998 Plan does not purport to be complete,
and is subject to and  qualified in its entirety by reference to the text of the
1998 Plan, which is attached hereto as Exhibit "A."

         Administration.  The 1998  Plan  will be  administered  by the Board of
Directors  of the Company or a  Committee  appointed  by the Board of  Directors
(hereinafter referred to as the "Board"). The Board has full authority,  subject
to the  provisions  of the 1998  Plan,  to award  incentive  stock  options  and
nonstatutory stock options ("Options").
                                       14

         Subject to the provisions of the 1998 Plan, the Board determines in its
sole  discretion,  among  other  things,  the  persons to whom from time to time
Options may be granted  ("Participants"),  the number of shares  subject to each
Option,  exercise prices under the Options,  any  restrictions or limitations on
such Option including  vesting,  exchange,  deferral,  surrender,  cancellation,
acceleration, termination, or forfeiture provisions related to such Options. The
interpretation  and  construction  by the  Board of any  provisions  of,  or the
determination  of any  questions  arising  under,  the 1998  Plan or any rule or
regulation  established by the Board pursuant to the 1998 Plan,  shall be final,
conclusive and binding on all persons interested in the 1998 Plan.

         Shares Subject to the 1998 Plan. The 1998 Plan  authorizes the granting
of Options the  exercise of which would allow up to a maximum of 320,000  shares
of the Common Stock to be acquired by the Participants of said Options. In order
to prevent the dilution or enlargement of the rights of the  Participants  under
the 1998 Plan, the number of shares of Common Stock  authorized by the 1998 Plan
and the  number  of  shares  subject  to  outstanding  options  are  subject  to
adjustment  in the event of any  increase or decrease in the number of shares of
outstanding  Common  Stock  resulting  from  a  stock  dividend,   stock  split,
combination of shares, merger, reorganization,  consolidation,  recapitalization
or other change in the  corporate  structure  affecting  the  Company's  capital
stock. If any Option granted under the 1998 Plan is forfeited or terminated, the
shares of Common Stock that were underlying such Option shall again be available
for distribution in connection with Options  subsequently granted under the 1998
Plan.

         Eligibility. Subject to the provisions of the 1998 Plan, Options may be
granted to full-time employees of the Company or its subsidiaries.

         Effective  Date and Term of 1998 Plan.  If  approved  by the  Company's
shareholders,  the 1998 Plan will be deemed  effective on January ___, 1998, the
date on which it was adopted by the Board of Directors. No option may be granted
after  January __, 2008.  The 1998 Plan will  terminate ten (10) years after the
effective date of the 1998 Plan, subject to earlier termination by the Board. No
Option  may be  granted  under the 1998 Plan  after the  termination  date,  but
Options previously granted may extend beyond such date.

         Nature of  Options.  The 1998 Plan  provides  for the grant of options,
which may be non-qualified options,  incentive stock options, or any combination
of the  foregoing.  In  general,  options  granted  under  the 1998 Plan are not
transferable  and expire eleven (11) years after the date of grant (ten years in
the  case of  incentive  stock  options).  The per  share  exercise  price of an
incentive  stock  option  granted  the 1998  Plan may not be less  than the fair
market value of the Common Stock on the date of grant.  Incentive  stock options
granted to persons  who have  voting  control  over 10% or more of the  Companys
capital  stock are  granted at 110% of the fair market  value of the  underlying
shares on the date of grant and expire fie years after the date of grant.

         Exercise  of  Options.  The  1998  Plan  provides  the  Board  with the
discretion to determine when options granted thereunder will become exercisable.
Generally, such options may be exercised after a period of time specified by the
Board at any time prior to expiration,  so long as the optionee remains employed
by the Company. No option granted under the 1998 Plan is transferable by the
                                       15

optionee  other than by will or the laws of descent and  distribution,  and each
option is exercisable during the lifetime of the optionee only by the optionee.

         Agreements.  Options  granted  under the 1998 Plan will be evidenced by
agreements  consistent  with  the  1998  Plan in  such  form  as the  Board  may
prescribe.  Neither the 1998 Plan nor agreements thereunder confer any right top
continued employment upon any Participant.

         Amendments to the 1998 Plan.  The Board may at any time,  and from time
to time, amend,  modify or terminate any of the provisions of the 1998 Plan, but
no amendment,  modification or termination  shall be made which would impair the
rights of a Participant under any agreement theretofore entered into pursuant to
an Option grant, without the Participant's consent.

         Federal  Income  Tax  Considerations.  The  discuss  that  follows is a
summary,  based upon current law, of some of the significant  federal income tax
considerations  relating to awards under the 1998 Plan. The following discussion
does not address state, local or foreign tax consequences.

         If the Plan is approved by the shareholders,  a Participant in the 1998
Plan  will not  recognize  taxable  income  upon the  grant  or  exercise  of an
incentive  stock option  except under  certain  circumstances  when the exercise
price is paid  with  already-owned  shares of Common  Stock  that were  acquired
through the previous  exercise of an incentive stock option.  However,  upon the
exercise of an incentive  stock  option,  the excess of the fair market value of
the shares  received  on the date of  exercise  over the  exercise  price of the
shares will be treated as a tax preference  item for purposes of the alternative
minimum tax. In order for the  exercise of an incentive  stock option to qualify
for the foregoing tax treatment,  the Participant  generally must be an employee
of the Company from the date the incentive  stock option is granted  through the
date three months  before the date of  exercise,  except in the case of death or
disability,  where special rules apply.  The Company will not be entitled to any
deduction with respect to the grant or exercise of an incentive stock option.

         If shares  acquired upon exercise of an incentive  stock option are not
disposed of by the Participant within two years from the date of grant or within
one year after the transfer of such shares to the Participant  (the "ISO Holding
Period"),  then (i) no amount will be reportable as ordinary income with respect
to such shares by the  Participant or recipient and (ii) the Company will not be
allowed a deduction in connection with such incentive stock option or the Common
Stock acquired pursuant to the exercise of the incentive stock option. If a sale
of such Common Stock occurs after the ISO Holding  Period has expired,  then any
amount  recognized  in excess of the  exercise  price  will be  reportable  as a
long-term  capital gain, and any amount recognized below the exercise price will
be reportable as a long-term  capital loss. The exact amount of tax payable on a
long-term  capital  gain will depend upon the tax rates in effect at the time of
the sale. The ability of a Participant to utilize a long-term  capital loss will
depend upon the Participant's other tax attributes and the statutory limitations
on capital loss deductions not discussed  herein. To the extent that alternative
minimum taxable income was recognized on exercise of the incentive stock option,
the basis in the Common Stock acquired may be higher for determining a long-term
capital gain or loss for alternative minimum tax purposes.

         A "disqualifying disposition" will result if Common Stock acquired upon
the exercise of an  incentive  stock option  (except in the  circumstances  of a
decedent's  incentive  stock option as  described  below) is sold before the ISO
Holding  Period  has  expired.  In such  case,  at the  time of a  disqualifying
disposition  (except  in  the  case  of a  Participant  subject  to  Section  16
restrictions of the
                                       16

1934 Act, as noted below), the Participant will recognize ordinary income in the
amount of the  difference  between the exercise  price and the lesser of (i) the
fair  market  value  on the date of  exercise  or (ii) the  amount  realized  on
disposition. If the amount realized on the sale is less than the exercise price,
then the Participant will recognize no ordinary income,  and the recognized loss
will be reportable as a short-term  capital loss. The Participant will report as
a short-term capital gain, as applicable, any amount recognized in excess of the
fair market  value on the date of  exercise,  and the Company  will be allowed a
deduction  on its  federal  income tax  return in the year of the  disqualifying
disposition equal to the ordinary income  recognized by the Participant.  To the
extent that alternative minimum taxable income was recognized on exercise of the
incentive stock option, the basis in the Common Stock acquired may be higher for
determining  a  short-term  capital  gain or loss for  alternative  minimum  tax
purposes.

         The general  rules  discussed  above are  different if the  Participant
disposes of the shares of Common Stock in a disqualifying disposition in which a
loss,  if  actually  sustained,  would  not be  recognized  by the  Participant.
Examples of these dispositions include gifts or sales to related parties such as
members of the  Participant's  family and  corporations or entities in which the
Participant  owns  a  majority  equity  interest.  In  such  circumstances,  the
Participant would recognize  ordinary income equal to the difference between the
exercise price of the Common Stock and the fair market value of the Common Stock
on the date of exercise.  The amount of ordinary  income would not be limited by
the price at which the Common Stock was actually sold by the Participant.

         If the Participant retires or otherwise terminates  employment with the
Company,  other than by reason of death or permanent  and total  disability,  an
incentive stock option must be exercised within three months of such termination
in order to be eligible for the tax  treatment of the  incentive  stock  options
described  above,  provided the ISO Holding  Period  requirements  are met. If a
Participant  terminates  employment because of a permanent and total disability,
the  incentive  stock  option  will be  eligible  for  such  treatment  if it is
exercised within one year of the date of termination of employment, provided the
ISO Holding Period requirements are met. In the event of a Participant's  death,
the incentive  stock option will be eligible for such  treatment if exercised by
the Participant's legatees,  personal representatives or distributees within one
year  from  the date of  death,  provided  that the  death  occurred  while  the
Participant  was  employed,  within three months of the date of  termination  of
employment or within one year  following the date of  termination  of employment
because of permanent and total disability.

         In general, a Participant to whom a nonqualified option is granted will
recognize  no  taxable  income  at the time of the  grant.  Upon  exercise  of a
nonqualified option, the Participant will recognize ordinary income in an amount
equal to the amount by which the fair  market  value of the Common  Stock on the
date of exercise exceeds the exercise price of the nonqualified  option, and the
Company will generally be entitled to a deduction  equal to the ordinary  income
recognized by the  Participant in the year the participant  recognizes  ordinary
income, subject to the limitations of Section 162(m) of the Code.

         For  purposes  of  the   "alternative   minimum  tax"   applicable   to
individuals,  the exercise of an  incentive  stock option is treated in the same
manner as the exercise of a nonqualified  option.  Thus, a Participant  must, in
the year of option exercise,  include the difference  between the exercise price
and the fair market  value of the stock on the date of  exercise in  alternative
minimum  taxable  income.  The  alternative  minimum  tax  is  imposed  upon  an
individual's alternative minimum taxable income
                                       17

currently,  but only to the extent that such tax exceeds the taxpayer's  regular
income tax liability for the taxable year.

         The  Company  is  required  to  withhold   certain  income  taxes  from
Participants  upon  exercises  of  nonqualified  options.  The  Company  will be
entitled  to a business  expense  deduction  for both  financial  statement  and
federal  income tax purposes  equal to the  ordinary  income  recognized  by the
Participant  in the year the  Participant  recognizes  ordinary  income from the
exercise of nonqualified options.

         In addition to the foregoing  federal tax  consequences,  the exercise,
ultimate sale or other disposition of options by Participants will in most cases
be subject to state income taxation.

Vote Required

         Assuming a quorum  consisting  of a majority of all of the  outstanding
shares of Common Stock is present, in person or by proxy, at the Annual Meeting,
the  affirmative  vote of the  holders of a majority of the shares  present,  in
person or by proxy, at the Annual Meeting, is required to approve the 1998 Plan.
If you  abstain or if you hold your  shares in  "street  name" and fail to sign,
date and return the enclosed  proxy card, it will have the same effect as a vote
against this proposal.

         THE BOARD OF DIRECTORS  RECOMMENDS AND ENCOURAGES YOU TO VOTE "FOR" THE
APPROVAL OF THE 1998 STOCK OPTION PLAN.


                 CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS

         The Company did not have any  transactions  during fiscal 1997 with any
director,  director  nominee,  executive  officer,  security holder known to the
Company  to own of record or  beneficially  more  than five (5)  percent  of the
Company's  Common  Stock,  or any member of the  immediate  family of any of the
foregoing persons, in which the amount involved exceeded $60,000.

Comparison of Stock Performance

         The  following  graph assumes that $100 was invested on October 1, 1992
in each of the following: the Company's Common Stock, the Nasdaq Composite Index
and the Nasdaq Industrial Index.

                            [Stock Performance Graph]

                                       18

                                  OTHER MATTERS

Independent Auditors

         Arthur  Andersen LLP, has been  selected as the  Company's  independent
auditors for the current fiscal year,  which ends September 30, 1998.  That firm
has served as the Company's  independent  auditors since 1983. During the fiscal
year ended  September 30, 1997,  Arthur  Andersen LLP provided audit services to
the  Company.  Representatives  of that firm are  expected  to be present at the
Annual Meeting with the  opportunity to make a statement if they desire to do so
and to be available to respond to appropriate questions.

Annual Report

         The Annual  Report of the Company  for the fiscal year ended  September
30, 1997, is enclosed herewith.

Voting By Proxy

         In order to ensure that your shares will be  represented  at the Annual
Meeting,  please sign and return the enclosed Proxy in the envelope provided for
that purpose,  whether or not you expect to attend. Any Shareholder may, without
affecting any vote previously taken,  revoke a written proxy by giving notice of
revocation  to the  Company in writing or by  executing  and  delivering  to the
Company a later dated proxy.


Shareholder Proposals for Action At the Company's Next Annual Meeting

         Any  Shareholder  who wishes to present any  proposal  for  shareholder
action at the  Company's  next Annual  Meeting,  expected to be held on or about
February 26, 1999, must be received by the Company's Secretary, at the Company's
offices,  not later than  November  13,  1998,  in order to be  included  in the
Company's proxy statement and form of proxy for that meeting.


                                              BY ORDER OF THE BOARD OF DIRECTORS


                                              Robert T. Hass, Secretary

Tempe, Arizona
January 23, 1998
                                       19


                              AMTECH SYSTEMS, INC.

                             1998 STOCK OPTION PLAN


         1.       Purpose of the Plan.  The  purposes of this 1998 Stock  Option
Plan are to advance the interests of Amtech  Systems,  Inc.  (the  "Company") by
inducing  persons of  outstanding  ability and potential to join and remain with
the Company, by encouraging,  motivating and enabling employees to acquire stock
ownership in the Company,  and by providing the participating  employees with an
additional  incentive to promote the success of the Company through the grant of
options to  purchase  shares of the  Company's  Common  Stock.  Options  granted
hereunder may be either  "Incentive Stock Options," as defined in Section 422 of
the Internal Revenue Code of 1986, as amended,  or "Nonstatutory Stock Options,"
at the  discretion  of the Board or a  Committee  appointed  by the Board and as
reflected in the terms of the written option agreement ("Option Agreement").

         2.       Definitions.  As used herein, the following  definitions shall
apply:

                  (a) "Board"  shall mean the Board of  Directors of the Company
or the Committee, if one has been appointed.

                  (b) "Code"  shall mean the Internal  Revenue Code of 1986,  as
amended, and the rules and regulations promulgated thereunder.

                  (c) "Common  Stock" shall mean the common stock of the Company
described in the Company's Certificate of Incorporation, as amended.

                  (d)  "Company"  shall mean Amtech  Systems,  Inc.,  an Arizona
corporation,  and shall  include  any parent or  subsidiary  corporation  of the
Company as defined in Sections 424(e) and (f), respectively, of the Code.

                  (e)  "Committee"  shall mean the  Committee  appointed  by the
Board in  accordance  with  paragraph  (a) of  Section 4 of the Plan,  if one is
appointed.

                  (f)  "Employee"  shall mean any  person,  including  officers,
employed by the Company.

                  (g) "Exchange  Act" shall mean the Securities and Exchange Act
of 1934, as amended.

                  (h) "Fair Market Value" shall mean, with respect to the date a
given Option is granted or exercised,  the value of the Common Stock  determined
by the Board or the  Committee in such manner as it may deem  equitable for Plan
purposes but, in the case of an Incentive Stock Option, no less than is required
by applicable  laws or  regulations;  provided,  however,  that where there is a
public market for the Common Stock, the Fair Market Value per Share shall be the
average of the bid and asked prices of the Common Stock on the date of grant

if the Common Stock is then included for quotation on the NASDAQ SmallCap Market
or, the Fair Market  Value per Share  shall be the  closing  price of the Common
Stock if the Common  Stock is then  included  on the NASDAQ  National  Market or
listed on the New York,  American  or  Pacific  Stock  Exchange.  The Board or a
Committee appointed by the Board may rely upon published  quotations in The Wall
Street Journal or a comparable  publication  for purposes of the  calculation of
the Fair Market Value per Share as set forth above.

                  (i)  "Incentive  Stock  Option"  shall mean an Option which is
intended to qualify as an incentive  stock option  within the meaning of Section
422 of the Code.

                  (j) "Option" shall mean a stock option granted under the Plan.

                  (k) "Optioned Stock" shall mean the Common Stock subject to an
Option.

                  (l)  "Optionee"  shall mean an Employee of the Company who has
been granted one or more Options.

                  (m) "Parent" shall mean a "parent corporation," whether now or
hereafter existing, as defined in Section 424(e) of the Code.

                  (n) "Plan" shall mean this Stock Option Plan.

                  (o)  "Share"  shall  mean a  share  of the  Common  Stock,  as
adjusted in accordance with Section 11 of the Plan.

                  (p)  "Subsidiary"  shall  mean  a  "subsidiary   corporation,"
whether now or hereafter existing, as defined in Section 424(f) of the Code.

                  (q) "Tax Date"  shall mean the date an Optionee is required to
pay the  Company  an amount  with  respect  to tax  withholding  obligations  in
connection with the exercise of an option.

         3.       Common Stock Subject to the Plan. Subject to the provisions of
Section 11 of the Plan,  the  maximum  aggregate  number of shares  which may be
optioned and sold under the Plan is 320,000 Shares  of Common  Stock. The Shares
may be authorized,  but unissued, or previously issued Shares acquired or  to be
acquired by the Company and held in treasury.

                  If an Option  should  expire or become  unexercisable  for any
reason without having been exercised in full, the unpurchased  Shares covered by
such Option shall, unless the Plan shall have been terminated,  be available for
future grants of Options.

         4.       Administration of the Plan.

                  (a) Procedure.

                           (1) The Plan  shall be  administered  by the Board in
accordance  with  Securities and Exchange  Commission Rule 16b-3 ("Rule 16b-3");
provided, however, that the
                                        2

Board may appoint a Committee to administer the Plan at any time or from time to
time and, provided further, that if members of the Board are not "disinterested"
within the meaning of Securities and Exchange  Commission  Rule 16b-3,  then any
participation  by  directors  in the Plan must be  administered  by a  Committee
appointed by the Board.

                           (2) The  Committee  shall consist of at least two (2)
members  of the Board,  each of whom is  "disinterested"  within the  meaning of
Securities and Exchange  Commission  Rule 16b-3 to administer the Plan on behalf
of the Board,  subject to such terms and  conditions as the Board may prescribe.
Once appointed,  the Committee shall continue to serve until otherwise  directed
by the Board. From time to time the Board may increase the size of the Committee
and appoint additional members thereof,  remove members (with or without cause),
and appoint new members in substitution therefor, fill vacancies however caused,
or remove all members of the Committee and  thereafter  directly  administer the
Plan;  provided,  however,  that  at  no  time  may  any  director  who  is  not
"disinterested"  within the meaning of Securities and Exchange  Commission  Rule
16b-3 serve on the  Committee nor shall a Committee of less than two (2) members
administer the Plan.

                  (b) Powers of the  Board.  Subject  to the  provisions  of the
Plan, the Board or a Committee  appointed by the Board shall have the authority,
in its  discretion:  (i) to grant  Incentive  Stock Options,  in accordance with
Section 422 of the Code,  and to grant  "nonstatutory  stock  options;"  (ii) to
determine,  upon review of relevant information and in accordance with Section 2
of the Plan,  the Fair Market Value of the Common Stock;  (iii) to determine the
exercise price per Share of Options to be granted, which exercise price shall be
determined  in accordance  with Section 8(a) of the Plan;  (iv) to determine the
Employees to whom,  and the time or times at which  Options shall be granted and
the number of shares to be  represented  by each Option;  (v) to  interpret  the
Plan; (vi) to prescribe, amend and rescind rules and regulations relating to the
Plan;  (vii) to determine the terms and provisions of each Option granted (which
need not be identical) and, with the consent of the Optionee thereof,  modify or
amend  each  Option;  (viii) to  accelerate  or defer  (with the  consent of the
Optionee)  the  exercise  date of any Option;  (ix) to  authorize  any person to
execute on behalf of the Company any instrument required to effectuate the grant
of an Option  previously  granted by the Board or a Committee  appointed  by the
Board;  (x) to accept or reject the  election  made by an  Optionee  pursuant to
Section  18 of the  Plan;  and  (xi) to make  all  other  determinations  deemed
necessary or advisable for the administration of the Plan.

                  (c) Effect of Board's Decision. All decisions,  determinations
and interpretations of the Board or a Committee appointed by the Board, shall be
final and binding on all Optionees and any other holders of any Options  granted
under the Plan.

         5.       Eligibility.

                  (a)  Consistent  with  the  Plan's  purposes,  Options  may be
granted  only to  Employees  of the  Company  as  determined  by the  Board or a
Committee  appointed  by the Board.  An Employee  who has been granted an Option
may, if he is otherwise  eligible,  be granted an additional  Option or Options.
Incentive  Stock  Options may be granted  only to those  Employees  who meet the
requirements applicable under Section 422 of the Code.
                                        3

                  (b) With respect to Incentive  Stock Options granted under the
Plan,  the  aggregate  fair market value  (determined  at the time the Incentive
Stock  Option is granted) of the Common  Stock with  respect to which  Incentive
Stock  Options are  exercisable  for the first time by the  employee  during any
calendar  year  (under all plans of the  Company  and its parent and  subsidiary
corporations) shall not exceed One Hundred Thousand Dollars ($100,000).

                  The Plan shall not  confer  upon any  Optionee  any right with
respect to continuation  of employment with the Company,  nor shall it interfere
in any way with his right or the Company's  right to terminate his employment at
any time.

         6.       Effective  Date.  The Plan  shall take  effect on January  31,
1998,  the date on which the Board  approved the Plan.  No Option may be granted
after  January  30,  2008  (ten  years  from the  effective  date of the  Plan);
provided,  however,  that the Plan and all  outstanding  Options shall remain in
effect until such Options have expired or until such Options are  canceled.  The
Plan  shall  be  submitted  for  shareholder  approval  at the next  meeting  of
shareholders  of the  Company;  provided,  however,  that failure to obtain such
approval shall not affect the effectiveness of the Plan.

         7.       Term  of  Option.  Unless  otherwise  provided  in the  Option
Agreement,  the term of each Incentive Stock Option shall be ten (10) years from
the date of grant thereof.  Unless otherwise  provided in the Option  Agreement,
the term of each Option which is not an  Incentive  Stock Option shall be eleven
(11) years from the date of grant.  Notwithstanding the above, in the case of an
Incentive  Stock Option  granted to an Employee  who, at the time the  Incentive
Stock Option is granted,  owns ten percent  (10%) or more of the Common Stock as
such amount is  calculated  under  Section  422(b)(6) of the Code ("Ten  Percent
Shareholder"),  the term of the  Incentive  Stock Option shall be five (5) years
from the date of grant  thereof or such  shorter  time as may be provided in the
Option Agreement.

         8.       Exercise Price and Payment.

                  (a)  Exercise  Price.  The per  Share  exercise  price for the
Shares to be issued pursuant to exercise of an Option shall be determined by the
Board or a Committee  appointed  by the Board,  but in the case of an  Incentive
Stock Option shall be no less than one hundred percent (100%) of the Fair Market
Value per Share on the date of grant; provided,  further, that in the case of an
Incentive  Stock Option  granted to an Employee who, at the time of the grant of
such  Incentive  Stock  Option,  is a Ten  Percent  Shareholder,  the per  Share
exercise  price shall be no less than one hundred ten percent (110%) of the Fair
Market Value per Share on the date of grant.  In no event may the exercise price
in the case of a nonstatutory stock option be less than eighty-five (85%) of the
Fair Market Value per share on the date of grant.

                           The Company  will pay any  documentary  stamp  taxes,
handling or certificate  issuance fees  attributable to the initial  issuance of
shares of Common Stock upon the exercise of any Option under the Plan; provided,
however,  that the Company  shall not be required to pay any fees or taxes which
may be payable with respect to any transfer involved in the issuance or delivery
of any  certificates  for  shares in a name  other than that of the holder of an
Option.
                                        4

                  (b) Payment.  The price of an  exercised  Option and any taxes
attributable to the delivery of Common Stock under the Plan, or portion thereof,
shall be paid:

                           (1) In  United  States  dollars  in cash or by check,
bank draft or money order payable to the order of the Company; or

                           (2) At the  discretion  of the  Board or a  Committee
appointed by the Board,  through the delivery of shares of Common Stock, with an
aggregate Fair Market Value, equal to the option price; or

                           (3) By a combination of (1) and (2) above.

                  The  Board  or  a  Committee  appointed  by  the  Board  shall
determine acceptable methods for tendering Common Stock as payment upon exercise
of an Option and may impose  such  limitations  and  prohibitions  on the use of
Common  Stock to exercise  an Option as it deems  appropriate,  with  respect to
nonstatutory  options,  at the election of the Optionee  pursuant to Section 18,
the Company may satisfy its withholding  obligations by retaining such number of
shares of Common Stock subject to the  exercised  Option which have an aggregate
Fair Market value on the exercise date equal to the Company's aggregate federal,
state,  local and foreign tax  withholding  and FICA and FUTA  obligations  with
respect to income generated by the exercise of the Option by Optionee.

         9.       Exercise of Option.

                  (a)  Procedure  for  Exercise;  Rights as a  Shareholder.  Any
Option  granted  hereunder  shall be  exercisable  at such  times and under such
conditions  as  determined  by the Board or a Committee  appointed by the Board,
including  performance criteria with respect to the Company and/or the Optionee,
and as shall be  permissible  under  the  terms of the  Plan.  Unless  otherwise
determined  by the Board or a  Committee  appointed  by the Board at the time of
grant,  an Option may be exercised  in whole or in part,  but in no case may any
option be exercised as to less than One Hundred (100) shares at any one time (or
the  remaining  shares  covered  by the  option if less than One  Hundred  (100)
shares)). An Option may not be exercised for a fraction of a Share.

                           An  Option  shall  be  deemed  to be  exercised  when
written  notice of such  exercise has been given to the Company at its principal
office to the attention of the  Secretary of the Company in accordance  with the
terms of the  Option by the  person  entitled  to  exercise  the Option and full
payment for the Shares with  respect to which the Option is  exercised  has been
received by the  Company.  Full  payment  may, as  authorized  by the Board or a
Committee  appointed by the Board,  consist of any  consideration  and method of
payment  allowable  under  Section  8(b) of the  Plan.  Until the  issuance  (as
evidenced  by the  appropriate  entry on the books of the  Company  or of a duly
authorized  transfer agent of the Company) of the stock  certificate  evidencing
such  Shares,  no right to vote or receive  dividends  or any other  rights as a
shareholder shall exist with respect to the Optioned Stock,  notwithstanding the
exercise of the Option. No adjustment will be made for a dividend or other right
for which the record date is prior to the date the stock  certificate is issued,
except as provided in Section 11 of the Plan.
                                        5

                           Exercise of an Option in any manner shall result in a
decrease in the number of Shares which  thereafter  may be  available,  both for
purposes of the Plan and for sale under the Option by the number of Shares as to
which the Option is exercised.

                           Notwithstanding  anything  contained  in this Plan to
the  contrary,  the Board or a Committee  appointed  by the Board may  establish
certain  restrictions  on the times at which an Option may be exercised  after a
number of elapsed years together with cumulative  exercise rights and may retain
certain rights with respect to a fixed  repurchase price for the Option Stock if
the Employee  voluntarily  terminates his  employment  with the Company within a
certain  period of time  after  exercising  the  Option or whose  employment  is
involuntarily  terminated  for gross  misconduct,  fraud,  embezzlement,  theft,
breach  of any  fiduciary  duty owed to the  Company  or for  nonperformance  of
duties.

                  (b) Termination of Status as an Employee.

                           (1)  Termination  of  Employment.   Unless  otherwise
provided in an Option  Agreement  relating to an Option that is not an Incentive
Stock Option, if an Employee's employment by the Company is terminated,  whether
voluntary or for cause,  except if such  termination  occurs due to  retirement,
death or disability, the Option, to the extent not exercised, shall cease on the
date on which Employee's  employment by the Company is terminated.  For purposes
of this Section 9, an employee who leaves the employ of the Company to become an
employee of a subsidiary or parent  corporation  of the Company or a corporation
which  has  assumed  the  option  of the  Company  as a  result  of a  corporate
reorganization, etc., shall not be considered to have terminated his employment.
For purposes of this Section 9, the  employment  relationship  of an employee of
the Company or of a  subsidiary  corporation  of the Company  will be treated as
continuing intact while he is on military or sick leave or other bona fide leave
of absence (such as temporary  employment by the  government) if such leave does
not exceed ninety (90) days, or, if longer, so long as his right to reemployment
is guaranteed either by statute or by contract.

                           (2)  Retirement.   For  purposes  of  the  Plan,  the
retirement of an  individual  either  pursuant to a pension or  retirement  plan
adopted by the Company or at the normal  retirement date prescribed from time to
time by the Company,  shall be deemed to be a termination  of such  individual's
employment  other than voluntary or for cause.  If an Employee's  termination is
due to retirement, then the Employee may, but only within ninety (90) days after
the date he ceases to be an Employee of the Company,  exercise his Option to the
extent that he was entitled to exercise it at the date of such  termination.  To
the extent that he was not  entitled to exercise  the Option at the date of such
termination,  or if he does not exercise  such Option  (which he was entitled to
exercise) within the time specified herein, the Option shall terminate.

                           (3)  Disability.  Unless  otherwise  provided  in  an
Option  Agreement  relating to an Option that is not an Incentive  Stock Option,
notwithstanding  the provisions of Section 9(b) above,  in the event an Employee
is  unable  to  continue  his  employment  with the  Company  as a result of his
permanent and total  disability (as defined in Section 22(e)(3) of the Code), he
may,  but only within one (1) year from the date of  termination,  exercise  his
Option  to the  extent  he was  entitled  to  exercise  it at the  date  of such
termination. To the extent that he
                                        6

was not  entitled to exercise  the Option at the date of  termination,  or if he
does not exercise  such Option  (which he was  entitled to exercise)  within the
time specified herein, the Option shall terminate.

                           (4) Death of Optionee.  Unless otherwise  provided in
an Option Agreement relating to an Option that is not an Incentive Stock Option,
if  Optionee  dies during the term of the Option and is at the time of his death
an  Employee  of the  Company  who shall  have been in  continuous  status as an
Employee  since the date of grant of the Option,  the Option may be exercised at
any time within one (1) year  following  the date of death (or such other period
of time as is determined by the Board or a Committee appointed by the Board), by
the  Optionee's  estate or by a person who  acquired  the right to exercise  the
Option by  bequest or  inheritance,  but only to the extent  that  Optionee  was
entitled  to  exercise  the  Option on the date of  death.  To the  extent  that
decedent was not entitled to exercise the Option on the date of death, or if the
Optionee's  estate,  or person who  acquired the right to exercise the Option by
bequest or inheritance,  does not exercise such Option (which he was entitled to
exercise) within the time specified herein, the Option shall terminate.

         10.      Non-Transferability  of  Option.  An  Option  may not be sold,
pledged, assigned, hypothecated, transferred, or disposed of in any manner other
than by will or by the laws of descent  or  distribution  and may be  exercised,
during the lifetime of the Optionee, only by the Optionee.

         11.      Adjustments Upon Changes in Capitalization or Merger.  Subject
to any required action by the shareholders of the Company,  the number of shares
of Common Stock covered by each outstanding  Option, and the number of shares of
Common Stock which have been  authorized  for issuance  under the Plan but as to
which no Options have yet been  granted or which have been  returned to the Plan
upon cancellations or expiration of an Option, as well as the price per share of
Common Stock covered by each such outstanding  Option,  shall be proportionately
adjusted for any  increase or decrease in the number of issued  shares of Common
Stock  resulting  from a stock  split,  reverse  stock  split,  stock  dividend,
combination or  reclassification  of the common stock,  or any other increase or
decrease in the number of issued shares of Common Stock effected without receipt
of  consideration  by the Company;  provided,  however,  that  conversion of any
convertible securities of the Company shall not be deemed to have been "effected
without receipt of consideration." Such adjustment shall be made by the Board or
a Committee appointed by the Board, whose determination in that respect shall be
final, binding and conclusive.  Except as expressly provided herein, no issuance
by the Company of shares of stock of any class, or securities  convertible  into
shares of stock of any class shall affect,  and no adjustment by reason thereof,
shall be made with  respect  to the  number  or price of shares of Common  Stock
subject to an Option.

                  In the event of the proposed dissolution or liquidation of the
Company, the Option will terminate immediately prior to the consummation of such
proposed action, unless otherwise provided by the Board or a Committee appointed
by the  Board.  The Board or a  Committee  appointed  by the Board  may,  in the
exercise of its sole discretion in such instances, declare that any Option shall
terminate as of a date fixed by the Board or a Committee  appointed by the Board
and give each Optionee the right to exercise his Option as to all or any part of
the Optioned Stock,  including Shares as to which the Option would not otherwise
be exercisable.
                                        7

In the event of a proposed sale of all or substantially all of the assets of the
Company,  or the merger of the Company  with or into  another  corporation,  the
Option shall be assumed or an  equivalent  option shall be  substituted  by such
successor  corporation or a parent or subsidiary of such successor  corporation,
unless  the  Board or a  Committee  appointed  by the Board  determines,  in the
exercise of its sole discretion and in lieu of such assumption or  substitution,
that the  Optionee  shall have the right to exercise the Option as to all of the
Optioned Stock,  including  Shares as to which the Option would not otherwise be
exercisable.  If the Board or a Committee appointed by the Board makes an Option
fully exercisable in lieu of assumption or substitution in the event of a merger
or sale of assets, the Board or a Committee  appointed by the Board shall notify
the Optionee that the Option shall be fully  exercisable  for a period of thirty
(30) days from the date of such notice (but not later than the expiration of the
term of the Option under the Option  Agreement),  and the Option will  terminate
upon the expiration of such period.

         12.      Time of  Granting  Options.  The date of  grant  of an  Option
shall, for all purposes, be the date on which the Board or a Committee appointed
by the  Board  makes  the  determination  granting  such  Option.  Notice of the
determination  shall be given to each  Employee  to whom an Option is so granted
within a reasonable time after the date of such grant.

         13.      Amendment and Termination of the Plan.

                  (a)  Amendment  and  Termination.   The  Board  may  amend  or
terminate  the Plan  from  time to time in such  respect  as the  Board may deem
advisable;  provided,  however, that the following revisions or amendments shall
require  approval of the holders of a majority of the outstanding  Shares of the
Company entitled to vote:

                           (1) Any  increase in the number of Shares  subject to
the Plan,  other than in connection  with an adjustment  under Section 11 of the
Plan;

                           (2) Any  change  in the  designation  of the class of
employees eligible to be granted Options; or

                           (3) If the  Company  has a class of  equity  security
registered  under Section 12 of the Exchange Act at the time of such revision or
amendment,  any material increase in the benefits accruing to participants under
the Plan.

                  (b) Effect of Amendment or Termination.  Any such amendment or
termination  of the Plan  shall not  affect  Options  already  granted  and such
Options  shall  remain  in full  force  and  effect as if this Plan had not been
amended or terminated, unless mutually agreed otherwise between the Optionee and
the Board, which agreement must be in writing and signed by the Optionee and the
Company.

         14.      Conditions Upon Issuance of Shares. Shares shall not be issued
pursuant to the  exercise of an Optionee  unless the exercise of such Option and
the issuance and delivery of such Shares pursuant  thereto shall comply with all
relevant provisions of law, including, without limitation, the Securities Act of
1933,  as amended,  the  Exchange  Act,  the rules and  regulations  promulgated
thereunder, and the requirements of any stock exchange upon which the Shares may
                                        8

then be listed,  and shall be further subject to the approval of counsel for the
Company with respect to such compliance.

                  As a condition to the  exercise of an Option,  the Company may
require the person  exercising  such Option to represent and warrant at the time
of any such exercise that the Shares are being purchased only for investment and
without  any  present  intention  to sell or  distribute  such Shares if, in the
opinion of counsel for the Company,  such a representation is required by any of
the aforementioned relevant provisions of law.

                  In the case of an  Incentive  Stock  Option,  any Optionee who
disposes of Shares of Common Stock acquired on the exercise of an Option by sale
or exchange  (a) either  within two (2) years after the date of the grant of the
Option  under  which the Common  Stock was  acquired  or (b) within one (1) year
after the acquisition of such Shares of Common Stock shall notify the Company of
such disposition and of the amount realized upon such disposition.

                  Stock  certificates  evidencing  unregistered  shares acquired
upon  the  exercise  of  Options  shall  bear a  restrictive  securities  legend
substantially as follows:
                                                                        
                  "THE SHARES  REPRESENTED BY THIS CERTIFICATE HAVE NOT
                  BEEN REGISTERED  UNDER THE SECURITIES ACT OF 1933, AS
                  AMENDED, OR UNDER THE SECURITIES LAWS OF ANY STATE OR
                  OTHER JURISDICTION. THE SECURITIES MAY NOT BE SOLD OR
                  OFFERED  FOR  SALE  IN THE  ABSENCE  OF AN  EFFECTIVE
                  REGISTRATION  STATEMENT FOR THE SECURITIES  UNDER THE
                  SECURITIES  ACT OF 1933, AS AMENDED,  AND  APPLICABLE
                  SECURITIES  LAWS OF ANY STATE OR OTHER  JURISDICTION,
                  OR AN OPINION OF COUNSEL  SATISFACTORY TO THE COMPANY
                  THAT SUCH REGISTRATION IS NOT REQUIRED."

         15.      Change  in  Control.  Each  Option  that is  outstanding  on a
Control Change Date, as hereinafter defined, shall be exercisable in whole or in
part on that date and  thereafter  during the  remainder  of the  Option  period
stated in the Option Agreement.  A "Change in Control" occurs if, after the date
of the  initial  Agreement,  (1) any  person,  including a "group" as defined in
Section  13(d)(3) of the Exchange Act,  becomes the owner or beneficial owner of
the Company's  securities having 20% or more of the combined voting power of the
then outstanding  Company's  securities that may be cast for the election of the
Company's  directors  (other  than as a  result  of an  issuance  of  securities
initiated  by the  Company,  or open market  purchases  approved by the Board of
Directors  as long  as a  majority  of the  Board  of  Directors  approving  the
purchases is in the majority at the time the purchases are made);  or (2) as the
direct or indirect  result of, or in connection  with, a cash tender or exchange
offer, a merger or other  business  combination,  a sale of assets,  a contested
election,  or any  combination  of  these  transactions,  the  persons  who were
directors  of the  Company  before  such  transactions  ceased to  constitute  a
majority of the Company's  Board of Directors or any successor's  board,  within
two years of the last of such  transactions.  For purposes of this Section,  the
"Control  Change  Date" is the date on  which an event  described  in (1) or (2)
occurs. If a Change of Control
                                        9

occurs on account of a series of  transactions,  the Control  Change Date is the
date of the last of such transactions.

         16.      Reservation  of  Shares;  Issuance  and  Sale of  Shares.  The
Company,  during  the term of this  Plan,  will at all  times  reserve  and keep
available  such  number  of  Shares  as  shall  be  sufficient  to  satisfy  the
requirements of the Plan.  Inability of the Company to obtain authority from any
regulatory body having jurisdiction,  which authority is deemed by the Company's
counsel to be necessary to the lawful issuance and sale of any Shares hereunder,
shall relieve the Company of any liability in respect of the failure to issue or
sell  such  Shares  as to which  such  requisite  authority  shall not have been
obtained.

         17.      Option Agreement. Options shall be evidenced by written option
agreements in such form as the Board shall approve.

         18.      Withholding Taxes.  Subject to Section 4(b)(x) of the Plan and
prior to the Tax Date, the Optionee may make an irrevocable election to have the
Company  withhold  from those Shares that would  otherwise be received  upon the
exercise of any  nonstatutory  stock  option,  a number of Shares  having a Fair
Market  Value equal to the minimum  amount  necessary  to satisfy the  Company's
federal,  state, local and foreign tax withholding obligations and FICA and FUTA
obligations with respect to the exercise of such Option by the Optionee.

                  An Optionee  who is also an officer of the  Company  must make
the above-described election:

                  (a) at least six months  after the date of grant of the Option
(except in the event of death or disability); and

                  (b) either:

                           (1) six months prior to the Tax Date, or

                           (2)  prior  to the Tax  Date and  during  the  period
beginning on the third  business day following the date of the Company  releases
its  quarterly  or annual  statement  of sales and  earnings  and  ending on the
twelfth business day following such date.

         19.      Miscellaneous Provisions.

                  (a) Not a Contract of  Employment.  Nothing  contained  in the
Plan or in any Option Agreement executed pursuant to the Plan shall be deemed to
confer upon any individual to whom an Option may be granted  hereunder any right
to remain in the  employ or service  of the  Company  or a parent or  subsidiary
corporation of the Company.

                  (b) Plan  Expenses.  Any expenses of  administering  this Plan
shall be borne by the Company.

                  (c)  Use of  Exercise  Proceeds.  The  payment  received  from
Optionees  from the exercise of Options shall be used for the general  corporate
purposes of the Company.
                                       10

                  (d) Construction of Plan. The place of  administration  of the
Plan  shall  be in  the  State  of  Arizona,  and  the  validity,  construction,
interpretation,  administration  and  effect  of the Plan and of its  rules  and
regulations,  and rights relating to the Plan, shall be determined in accordance
with the laws of the State of Arizona and where  applicable,  in accordance with
the Code.

                  (e) Taxes.  The  Company  shall be entitled  if  necessary  or
desirable to pay or withhold the amount of any tax  attributable to the delivery
of Common Stock under the Plan from other amounts  payable to the Employee after
giving the person entitled to receive such Common Stock notice as far in advance
as practical,  and the Company may defer making delivery of such Common Stock if
any such tax may be pending unless and until indemnified to its satisfaction.

                  (f)  Indemnification.  In  addition  to such  other  rights of
indemnification  as they  may  have  as  members  of the  Board  or a  Committee
appointed  by the  Board,  the  members  of the  Board or a  Committee  shall be
indemnified by the Company against all costs and expenses reasonably incurred by
them in connection  with any action,  suit or proceeding to which they or any of
them may be a party by reason of any action  taken or failure to act under or in
connection with the Plan or any Option,  and against all amounts paid by them in
settlement  thereof  (provided such settlement is approved by independent  legal
counsel  selected by the Company) or paid by them in  satisfaction of a judgment
in any such action,  suit or proceeding,  except a judgment based upon a finding
of bad faith;  provided that upon the  institution  of any such action,  suit or
proceeding a Board or Committee member shall, in writing give the Company notice
thereof and an  opportunity,  at its own expense,  to handle and defend the same
before such Board or Committee member  undertakes to handle and defend it on her
or his own behalf.

                  (g)  Gender.  For  purposes  of this  Plan,  words used in the
masculine  gender shall include the feminine and neuter,  and the singular shall
include the plural and vice versa, as appropriate.
                                       11

                              AMTECH SYSTEMS, INC.

           THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS
         OF AMTECH SYSTEMS, INC. FOR THE ANNUAL MEETING OF SHAREHOLDERS

     The   undersigned   shareholder  of  Amtech   Systems,   Inc.,  an  Arizona
corporation,  hereby  acknowledges  receipt of the  Notice of Annual  Meeting of
Shareholders  dated January 23, 1998 and hereby appoints Jong S. Whang or Robert
T. Hass and each of them,  proxies  and  attorneys-in-fact,  with full  power of
substitution,  on behalf and in the name of the  undersigned,  to represent  the
undersigned at the Annual Meeting of Shareholders of AMTECH SYSTEMS,  INC. to be
held at the  Wyndham  Garden  Hotel,  427 N. 44th  Street,  Phoenix,  Arizona on
February  27,  1998  at  3:00  p.m.,   Mountain   Standard   time,  and  at  any
adjournment(s)  or  postponement(s)  thereof,  and to vote all  shares of Common
Stock  that  the  undersigned  would  be  entitled  to vote if  then  and  there
personally present, on the matters set forth below.

1.   ELECTION OF DIRECTORS    [ ]  FOR all  nominees  listed  below  (except  as
                                   marked to the contrary below):

Jong S. Whang   Robert T. Hass   Donald F. Johnston   Alvin Katz   Bruce R. Thaw

         [ ]  WITHHOLD AUTHORITY to vote for all nominees listed above

INSTRUCTIONS:  To withhold authority to vote for any individual  nominee,  write
that nominee's name in the space provided below:

     -------------------------------------------------------

     The  undersigned  agrees that the proxy  holder is  authorized  to cumulate
votes  in the  election  of  directors  and to vote  for  less  than  all of the
nominees.

2.   PROPOSAL NO. 1 - ADOPTING THE AMTECH SYSTEMS, INC. 1998 STOCK OPTION PLAN

         [ ]  FOR          [ ]  AGAINST              [ ]  ABSTAIN

     THIS  PROXY WHEN  PROPERLY  EXECUTED  WILL BE VOTED IN THE MANNER  DIRECTED
HEREIN BY THE UNDERSIGNED SHAREHOLDER.  IF NO DIRECTION IS MADE, THIS PROXY WILL
BE VOTED FOR THE ELECTION OF THE NOMINEES NAMED ABOVE, FOR PROPOSAL NO. 1 AND AS
SAID PROXIES DEEM ADVISABLE ON SUCH MATTERS AS MAY COME BEFORE THE MEETING.

     Dated:   ________________, 1998         Please  sign  exactly  as your name
                                             appears above. When shares are held
                                             in common or in joint tenancy, both
                                             should   sign.   When   signing  as
                                             attorney,        as       executor,
                                             administrator, trustee or guardian,
                                             please give full title as such,  If
                                             a   corporation,   sign   in   full
                                             corporate   name  by  President  or
                                             other  authorized   officer.  If  a
                                             partnership,    please    sign   in
                                             partnership  name by an  authorized
                                             person.

                                             SIGNATURES:

                                             -----------------------------------
                                             -----------------------------------
                                             -----------------------------------

             Please return in the enclosed, postage-paid envelope.
                 I Will _____ Will not _____ attend the Meeting.