1
                                                                    Exhibit 23.1


                         Consent of Independent Auditors



The Board of Directors
Tegal Corporation:

We consent to incorporation by reference in the registration statement (No.
333-462) on Form S-8 of Tegal Corporation of our reports dated April 23,
1996, relating to the consolidated financial statements of Tegal Corporation as
of March 31, 1996 and 1995, and the related consolidated statements of
operations, stockholders' equity (deficit), and cash flows for each of the years
in the three-year period ended March 31, 1996, and the related schedule, which
reports appear in the March 31, 1996 annual report on Form 10-K of Tegal
Corporation.



                                            /s/ KPMG Peat Marwick LLP
                                            KPMG PEAT MARWICK LLP
 

Palo Alto, California
June 28, 1996