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                                                                    EXHIBIT 23.1

                       CONSENT OF INDEPENDENT ACCOUNTANTS

     We hereby consent to the incorporation by reference in the Registration
Statements on Forms S-8 (Nos. 333-66781, 333-12473 and 333-462) of our report
dated April 28, 1999 appearing on page 38 of Tegal Corporation's Annual Report
on Form 10-K for the year ended March 31, 1999.

PricewaterhouseCoopers LLP
San Jose, California
June 24, 1999