1 EXHIBIT 21 SUBSIDIARIES OF THE REGISTRANT Align-Rite International, Inc. is incorporated in the State of California. The following table shows the Company's subsidiaries as of March 31, 1999, and the jurisdiction under which each subsidiary is incorporated. These subsidiaries are included in the Company's consolidated financial statements. JURISDICTION OF INCORPORATION ------------------ Align-Rite International Inc. .............................. California, USA Align-Rite BV............................................... Netherlands Align-Rite GmbH........................................... Heilbronn, Germany Align-Rite International Limited............................ United Kingdom Align-Rite Limited........................................ United Kingdom Align-Rite Corporation.................................... Nevada, USA