1 CERPROBE CORPORATION LIST OF SUBSIDIARIES EXHIBIT 21 SUBSIDIARIES OF CERPROBE CORPORATION: Cerprobe Interconnect Solutions, Inc. SVTR, Inc. Cerprobe Europe Limited Cerprobe Asia Holdings Pte Ltd Cerprobe Europe S.A.S. OZ Technologies, Inc. SUBSIDIARIES OF OZ Technologies, Inc. Triple S Engineering, Inc. SUBSIDIARIES OF CERPROBE ASIA HOLDINGS PTE LTD: Cerprobe Asia Pte Ltd. * SUBSIDIARIES OF CERPROBE ASIA PTE LTD.: Cerprobe Singapore Pte Ltd Cerprobe Taiwan Company Ltd * 70% owned by Cerprobe Corporation until August 18, 1997, at which time Cerprobe's ownership was reduced to 60%.