EXHIBIT 32.1



              Certification of Chief Executive Officer Pursuant to
                             18 U.S.C. Section 1350,
                             As Adopted Pursuant to
                  Section 906 of the Sarbanes-Oxley Act of 2002


In connection with the Quarterly Report of Mattson Technology, Inc. (the
"Company") on Form 10-Q for the quarter ended March 28, 2004 as filed with the
Securities and Exchange Commission on the date hereof (the "Report"), David
Dutton, as Chief Executive Officer of the Company, hereby certifies, pursuant to
18 U.S.C. ss. 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act
of 2002 ("Section 906"), that:

          (1) The Report fully complies with the requirements of section 13(a)
     of the Securities Exchange Act of 1934; and

          (2) The information contained in the Report fairly presents, in all
     material respects, the financial condition and result of operations of the
     Company.




May 7, 2004                                            /S/ DAVID DUTTON
                                                -------------------------------
                                                         David Dutton
                                                    Chief Executive Officer




A signed original of this written statement required by Section 906, or other
document authenticating, acknowledging, or otherwise adopting the signature that
appears in typed form within the electronic version of this written statement
required by Section 906, has been provided to Mattson Technology, Inc. and will
be retained by Mattson Technology, Inc. and furnished to the Securities and
Exchange Commission or its staff upon request.