EXHIBIT 8 LIST OF SUBSIDIARIES Legal Entity Country of registration - ------------ ----------------------- 100% Subsidiary ASML Holding N.V.: ASML Netherlands B.V. Netherlands (Veldhoven) ASML Participations B.V. Netherlands (Veldhoven) ASML MaskTools B.V. Netherlands (Veldhoven) ASML Subholding B.V. Netherlands (Veldhoven) ASML Germany GmbH Germany (Dresden) ASML S.a.r.l. France (Montbonnot) ASML (UK) Ltd. UK (till Nov/Dec: Edinburgh; after: Paisley (Schotland)) ASML Information Systems Ltd Israel (Ramat-Gan) ASML Ireland Ltd. Ireland (Dublin) ASML Italy S.r.l. Italy (Avezzano) ASML Hong Kong Ltd. Hong Kong SAR ASML Singapore Pte. Ltd. Singapore ASML Korea Co. Ltd. Korea (Kyunggi-Do) ASML Japan Co. Ltd. Japan (Kawasaki-shi, Kanagawa-Ken) ASML Shanghai Int. Trading Co. Ltd. China/ Shanghai Free Trade Zone ASML (China) Co. Ltd. China (Tianjin) ASML Taiwan Ltd. Republic of China (Hsinchu) ASML Equipment Malaysia Sdn. Bhd. Malaysia (Penang) ASML US, Inc US (Delaware) 100% Subsidiary ASML US, Inc.: ASML Capital US, Inc. US (Delaware) SVG International Service US (Calfornia) ASML Optics LLC US (Delaware) ASML MaskTools Inc. US (Delaware) ASML Participations US, Inc. US (Delaware) 51% Subsidiary ASML US, Inc.: Axiomatic Design Software, Inc. US (Delaware) 100% Subsidiary ASML (UK) Ltd: situation per Feb 4, 2003 SVG Europe Ltd. UK (Radlett) 100% Subsidiary SVG Europe Ltd.: ASML Radlett Ltd UK (Radlett) 100% Subsidiary ASML Radlett Ltd.: SVG Thermal (UK) Ltd. UK (Radlett) 100% Subsidiary ASML Hong Kong Ltd.: ASML Macau Commercial Offshore Ltd. Macau 100% Subsidiary SVG Int. Service: SVG Systems (Far East) Ltd. Hong Kong SAR ASML (Tianjin) Semiconductor Equipment Co. Ltd. China (Tianjin) 100% Subsidiary ASML Optics LLC: Lehrer Pearson, Inc. US (Delaware) 50% Subsidiary ASML Participations US, Inc.: eLith LLC US (Delaware)