EXHIBIT 10.1

                   Certification of CEO and CFO Pursuant to
                            18 U.S.C. Section 1350,
                            as Adopted Pursuant to
                 Section 906 of the Sarbanes-Oxley Act of 2002

In connection with the Annual Report on Form 20-F of ASML Holding N.V. (the
"Company") for the fiscal year ended December 31, 2002 as filed with the
Securities and Exchange Commission on the date hereof (the "Report"), Doug
Dunn, as Chief Executive Officer of the Company, and Peter T.F.M. Wennink, as
Chief Financial Officer of the Company, each hereby certifies, pursuant to 18
U.S.C. ss. 1350, as adopted pursuant to ss. 906 of the Sarbanes-Oxley Act of
2002, that, to the best of his knowledge:

         (1) The Report fully complies with the requirements of Section 13(a)
or 15(d) of the Securities Exchange Act of 1934; and

         (2) The information contained in the Report fairly presents, in all
material respects, the financial condition and results of operations of the
Company.


/s/ Doug J. Dunn
- ----------------------------------
Name:    Doug J. Dunn
Title:   Chief Executive Officer
Date:    March 7, 2003


/s/ Peter T.F.M. Wennink
- ----------------------------------
Name: Peter T.F.M. Wennink
Title:   Chief Financial Officer
Date:   March 7, 2003

This certification accompanies the Report pursuant to ss. 906 of the
Sarbanes-Oxley Act of 2002 and shall not, except to the extent required by the
Sarbanes-Oxley Act of 2002, be deemed filed by the Company for purposes of
ss.18 of the Securities Exchange Act of 1934, as amended.