Exhibit 21 THERMO OPTEK CORPORATION Subsidiaries of the Registrant At February 20, 1998, the Registrant owned the following companies: Registrant's State or Jurisdiction % of Name of Incorporation Ownership ------------------------------------------------------------------------- Spectronic Instruments, Inc. Delaware 100 SLM International Inc. Illinois 100 Thermo Jarrell Ash Corporation Massachusetts 100 ARL Applied Research Laboratories S.A. Switzerland 100 Fisons Instruments (Proprietary) Ltd. South Africa 100 Thermo Optek Wissenschaftliche Gerate GesmbH Austria 100 Baird Do Brazil Representacoes Ltda. Brazil 100 Beijing Baird Analytical Instrument Technology Co. Ltd. China 100 Cahn Instrument Corporation Wisconsin 100 Mattson Instruments Limited United Kingdom 100 Thermo Elemental Limited United Kingdom 100 Thermo Optek Limited United Kingdom 100 Unicam Limited United Kingdom 100 Unicam Export Limited United Kingdom 100 Unicam Analytical Technology Netherlands B.V. The Netherlands Unicam Italia SpA Italy 100 Unicam S.A. Belgium 100 Fisons Instruments Nordic AB Sweden 100 Nicolet Instrument Corporation Wisconsin 100 Nicolet Japan K.K. Japan 100 Spectra-Tech, Inc. Wisconsin 100 Spectra-Tech, Europe Limited United Kingdom 100 Nicolet Instrument GmbH Germany 100 Optek Securities Corporation Massachusetts 100 Planweld Holding Ltd. United Kingdom 100 Nicolet Instrument Limited United Kingdom 100 Planweld Limited United Kingdom 100 Hilger Analytical Limited United Kingdom 100 Thermo Electron Limited United Kingdom 100 Thermo Instrument Systems Japan Holdings, Inc. Delaware 100 Nippon Jarrell-Ash Company, Ltd. Japan 100 Thermo Instruments (Canada) Inc. Canada 100 Eberline Instruments (Canada) Ltd. Canada 100 Fisons Instruments Inc. Canada 100 Unicam Analytical Inc. Canada 100 Thermo Optek France S.A. France 100 Thermo Optek Holding B.V. The Netherlands 100 Baird Europe B.V. The Netherlands 100 Baird France S.A.R.L France 100 PAGE Exhibit 21 THERMO OPTEK CORPORATION Subsidiaries of the Registrant (continued) Registrant's State or Jurisdiction % of Name of Incorporation Ownership ------------------------------------------------------------------------- Thermo Group B.V. The Netherlands 100 Thermo Optek Materials Analysis (S.E.A.) pte Ltd. Singapore 100 VG Systems (Surface Science) United Kingdom 100