Exhibit 21 THERMO OPTEK CORPORATION Subsidiaries of the Registrant As of February 28, 1999, Thermo Optek Corporation owned the following companies: STATE OR JURISDICTION PERCENT OF NAME OF OWNERSHIP INCORPORATION - ------------------------------------------------------------------------------------------------------------ Diametrix Detectors, Inc. Delaware 100 FI Instruments Inc. Delaware 100 Gebrueder Haake GmbH Germany 100 RHEO S.A. France 100 SWO Polymertechnik GmbH Germany 100 HB Instruments Inc. Delaware 100 Scintag, Inc. California 100 Spectronic Instruments, Inc. Delaware 100 SLM International Inc. Illinois 100 Thermo Jarrell Ash Corporation Massachusetts 100 A.R.L. Applied Research Laboratories S.A. Switzerland 100 Fisons Instruments (Proprietary) Limited South Africa 100 Thermo Optek Wissenschaftliche Gerate GesmbH Austria 100 Baird De Brazil Representacoes Ltda. Brazil 100 Beijing Baird Analytical Instrument Technology Co. China 100 Limited Cahn Instrument Corporation Wisconsin 100 Mattson Instruments Limited United Kingdom 100 Thermo Optek Limited United Kingdom 100 Norlab Instrument of Aberdeen (UK) United Kingdom 100 Thermo Elemental Limited United Kingdom 100 Unicam Limited United Kingdom 100 Unicam Export Limited United Kingdom 100 Unicam Analytical Technology Netherlands B.V. Netherlands 100 Unicam Italia SpA Italy 100 Unicam S.A. Belgium 100 Thermo Optek Nordic AB Sweden 100 Nicolet Instrument Corporation Wisconsin 100 Nicolet Japan K.K. Japan 100 Spectra-Tech, Inc. Wisconsin 100 Spectra-Tech, Europe Limited United Kingdom 100 Nicolet Instrument GmbH Germany 100 Optek Securities Corporation Massachusetts 100 Planweld Holding Limited United Kingdom 100 Nicolet Instrument Limited United Kingdom 100 Hilger Analytical Limited United Kingdom 100 Thermo Electron Limited United Kingdom 100 Thermo Instrument Systems Japan Holdings, Inc. Delaware 100 Nippon Jarrell-Ash Company, Ltd. Japan 100 Thermo Instruments (Canada) Inc. Canada 100 Fisons Instruments Inc. Canada 100 Unicam Analytical Inc. Canada 100 Thermo Optek France S.A. France 100 Thermo Optek Holding B.V. Netherlands 100 Baird Europe B.V. Netherlands 100 Baird France S.A.R.L. France 100 VG Systems Limited United Kingdom 100 VG Elemental Limited United Kingdom 100 Thermo Group B.V. Netherlands 100 Thermo Optek Materials Analysis (S.E.A.) Pte Limited Singapore 100