UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION

                            WASHINGTON, D.C.  20549



                                    FORM 8-K

                                 CURRENT REPORT
               PURSUANT TO SECTION 12 OR 15(D) OF THE SECURITIES
                              EXCHANGE ACT OF 1934


         Date of Report (Date of earliest event reported): May 16, 2001



                      INTEGRATED MEASUREMENT SYSTEMS, INC.
             (Exact name of registrant as specified in its charter)



        OREGON                         0-26274                   93-0840631
(State or other jurisdiction    (Commission File Number)      (I.R.S. Employer
   of incorporation)                                         Identification No.)


                             9525 S.W. Gemini Drive
                            Beaverton, Oregon  97008
                                 (503) 626-7117
         (Address, including zip code, and telephone number, including
            area code, of registrant's principal executive offices)

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Item 5.  OTHER EVENTS

         On May 16, 2001, Integrated Measurement Systems, Inc., an Oregon
         corporation (the "Company"), Credence Systems Corporation, a Delaware
         corporation ("Credence") and Iguana Acquisition Corporation, an Oregon
         corporation and a wholly-owned subsidiary of Credence ("Merger Sub")
         entered into an Agreement and Plan of Merger and Reorganization (the
         "Merger Agreement"). Pursuant to the Merger Agreement and subject to
         the terms and conditions set forth therein, Merger Sub will be merged
         with and into the Company (the "Merger"), with the Company surviving
         the Merger and becoming a wholly-owned subsidiary of Credence. At the
         effective time of the Merger, each outstanding share of the Company's
         common stock will be converted into the right to receive .90 of a share
         of Credence common stock. Consummation of the Merger is subject to
         various closing conditions, including (i) approval by the Company's
         shareholders, (ii) the expiration of the waiting period under the Hart-
         Scott-Rodino Antitrust Improvement Act, and (iii) other customary
         closing conditions. In connection with the Merger Agreement, Credence
         and Merger Sub entered into a Shareholder Agreement with Cadence Design
         Systems, Inc. ("Cadence") dated as of May 16, 2001 (the "Shareholder
         Agreement") pursuant to which Cadence agrees to vote its shares of
         Company common stock in favor of the Merger.

         The foregoing description of the Merger Agreement is qualified in its
         entirety by reference to the complete text of the Merger Agreement, a
         copy of which is attached hereto as Exhibit 2.1 and is incorporated
         herein by reference. The foregoing description of the Shareholder
         Agreement is qualified in its entirety by reference to the complete
         text of the Shareholder Agreement, a copy of which is attached hereto
         as Exhibit 99.1 and is incorporated herein by reference. A copy of the
         joint press release issued by Credence and the Company on May 16, 2001
         is attached hereto as Exhibit 99.2.

Item 7.  FINANCIAL STATEMENTS AND EXHIBITS

         (c)   Exhibits

         2.1   Agreement and Plan of Merger and Reorganization dated May 16,
               2001 by and among Credence Systems Corporation, Iguana
               Acquisition Corporation and Integrated Measurement Systems, Inc.

         99.1  Shareholder Agreement dated May 16, 2001 by and among Credence
               Systems Corporation, Iguana Acquisition Corporation and Cadence
               Design Systems, Inc.

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         99.2  Press Release dated May 16, 2001 issued by Credence Systems
               Corporation and Integrated Measurement Systems, Inc.



                                   SIGNATURES

     Pursuant to the requirements of the Securities Exchange Act of 1934, the
Registrant has duly caused this report to be signed on its behalf by the
undersigned thereunto duly authorized on May 18, 2001.

                              INTEGRATED MEASUREMENT SYSTEMS, INC.
                              (Registrant)


                              /s/ Fred Hall
                              -----------------------------------
                              Fred Hall
                              Chief Financial Officer

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