EXHIBIT 21.1 Exhibit 21.1 to Faro Technologies Inc. Form 10-K for the fiscal year ended December 31, 1999. FARO TECHNOLOGIES, INC. LIST OF SUBSIDIARIES - -------------------------------------------- Faro Worldwide Inc. 125 Technology Park Drive Lake Mary, Florida 32746 USA Faro Europe GmbH and Co. KG Ingersheimerstr. 12 D-70499 Stuttgart-Weilimdorf Germany Antares LDA Rua das Leirinhas N. 48 Aradas 3810 Aveiro Portugal