Exhibit 21 MICROSEMI CORPORATION SUBSIDIARIES AS OF 9/30/01 NAME OF MICROSEMI CORPORATION ENTITIES JURISDICTION - -------------------------------------- ------------ Microsemi Corp. - Santa Ana Delaware Microsemi Corp. - Scottsdale Arizona Microsemi Corp. - Colorado Colorado Microsemi Watertown, Inc. Delaware Microsemi RF Products, Inc. Delaware Linfinity Microelectronics, Inc. Delaware Microsemi Microwave Products, Inc. Massachusetts Micro WaveSys, Inc. California Microsemi NES, Inc. Delaware Microsemi CDI, Inc. Delaware Microsemi Real Estate, Inc. California Semcon Electronics Pvt. Ltd. India Micro (Bermuda), Ltd. Bermuda