Subsidiaries of the Registrant - ------------------------------ Exhibit 21.1 ------------ Novalog, Inc. 3001 Redhill Ave., Building 4 Costa Mesa, California 92626 MicroSensors, Inc. 3001 Redhill Ave., Building 4 Costa Mesa, California 92626 Silicon Film Technologies, Inc. 16265 Laguna Canyon Road Irvine, California 92618 3D-Microelectronics, Inc. 3001 Redhill Ave., Building 3 Costa Mesa, California 92626 3D-Microsystems, Inc. 3001 Redhill Ave., Building 3 Costa Mesa, California 92626