EXHIBIT 5.0

                       ATER WYNNE HEWITT DODSON & SKERRITT, LLP
                             222 SW Columbia, Suite 1800
                               Portland, Oregon  97201
                                 Phone (503) 226-1191
                                  Fax (503) 226-0079


                                  December 2, 1997


Board of Directors
Integrated Measurement Systems, Inc.
9525 SW Gemini Drive
Beaverton, Oregon  97008

Gentlemen:

    In connection with the registration of 370,000 shares of common stock,
$0.01 par value per share (the "Shares"), of Integrated Measurement Systems,
Inc., an Oregon corporation (the "Company"), under the Registration Statement on
Form S-8 to be filed with the Securities and Exchange Commission on December 2,
1997, and the proposed offer and sale of the Common Stock pursuant to the terms
of the Company's 1995 Stock Incentive Plan (the "1995 Plan"), we have examined
such corporate records, certificates of public officials and officers of the
Company and other documents as we have considered necessary or proper for the
purpose of this opinion.

    Based on the foregoing and having regard to legal issues which we deem
relevant, it is our opinion that the Shares to be offered pursuant to the 1995
Plan, when such Shares have been delivered against payment therefor as
contemplated by the 1995 Plan, will be validly issued, fully paid and
non-assessable.

    We hereby consent to the filing of this opinion as an exhibit to the
above-mentioned registration statement.

                   Very truly yours,


                   /s/ Ater Wynne Hewitt Dodson & Skerritt, LLP

                   Ater Wynne Hewitt Dodson & Skerritt, LLP