EXHIBIT 5.0 ATER WYNNE HEWITT DODSON & SKERRITT, LLP 222 SW Columbia, Suite 1800 Portland, Oregon 97201 Phone (503) 226-1191 Fax (503) 226-0079 December 2, 1997 Board of Directors Integrated Measurement Systems, Inc. 9525 SW Gemini Drive Beaverton, Oregon 97008 Gentlemen: In connection with the registration of 370,000 shares of common stock, $0.01 par value per share (the "Shares"), of Integrated Measurement Systems, Inc., an Oregon corporation (the "Company"), under the Registration Statement on Form S-8 to be filed with the Securities and Exchange Commission on December 2, 1997, and the proposed offer and sale of the Common Stock pursuant to the terms of the Company's 1995 Stock Incentive Plan (the "1995 Plan"), we have examined such corporate records, certificates of public officials and officers of the Company and other documents as we have considered necessary or proper for the purpose of this opinion. Based on the foregoing and having regard to legal issues which we deem relevant, it is our opinion that the Shares to be offered pursuant to the 1995 Plan, when such Shares have been delivered against payment therefor as contemplated by the 1995 Plan, will be validly issued, fully paid and non-assessable. We hereby consent to the filing of this opinion as an exhibit to the above-mentioned registration statement. Very truly yours, /s/ Ater Wynne Hewitt Dodson & Skerritt, LLP Ater Wynne Hewitt Dodson & Skerritt, LLP