EXHIBIT 23.1




                            INDEPENDENT AUDITORS CONSENT
                                          

     We consent to the incorporation by reference in this Registration 
Statement of Silicon Valley Group, Inc. on Form S-8 of our reports dated 
October 27, 1997, appearing in and incorporated by reference in the Annual 
Report on Form 10-K of Silicon Valley Group, Inc. for the year ended 
September 30, 1997.

                                   

DELOITTE & TOUCHE LLP



San Jose, California
January 6, 1998