EXHIBIT 23.1 ------------ CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM We hereby consent to the incorporation by reference in the Registration Statement on Form S-8 (No. 333-143517) of Spire Corporation of our report dated June 27, 2008 relating to the financial statements of the Spire Corporation 401(k) Profit Sharing Plan, which appears in this Form 11-K. /s/ Carlin, Charron & Rosen, LLP CARLIN, CHARRON & ROSEN, LLP Westborough, Massachusetts June 27, 2008