POWER OF ATTORNEY

      Know  all  by  these  presents, that the undersigned hereby authorizes (i)
each of Gregory E. Lichtwardt, Kevin Waters, Kristen Howells and Alaleh Nouri of
Accuray  Incorporated (the "Company") and (ii) any attorney employed in the Palo
Alto, CA office of Wilson Sonsini Goodrich & Rosati, to individually execute for
and  on  behalf  of the undersigned, in the undersigned's capacity as an officer
and/or  director  of  the Company, Forms 3, 4 and 5, and any amendments thereto,
and  cause  such  form(s)  to  be  filed  with  the U.S. Securities and Exchange
Commission (the "SEC") pursuant to Section 16(a) of the Securities Exchange Act
of  1934,  as  amended,  relating  to  the undersigned's beneficial ownership of
securities   in  the  Company.  The  undersigned  hereby  grants  to  each  such
attorney-in-fact  full  power  and authority to do and perform any and every act
and  thing whatsoever requisite, necessary, or proper to be done in the exercise
of  any  of  the  rights  and powers herein granted, as fully to all intents and
purposes  as  the undersigned might or could do if personally present, with full
power  of  substitution  or revocation, hereby ratifying and confirming all that
such  attorney-in-fact,  or  such  attorney-in-fact's substitute or substitutes,
shall  lawfully  do  or cause to be done by virtue of this power of attorney and
the  rights  and  powers  herein  granted. The undersigned acknowledges that the
foregoing  attorneys-in-fact,  in serving in such capacity at the request of the
undersigned,  are  not  assuming,  nor  is  the  Company  assuming,  any  of the
undersigned's  responsibilities  to  comply  with  Section  16 of the Securities
Exchange Act of 1934, as amended.

      This  Power  of  Attorney  shall remain in full force and effect until the
undersigned  is  no longer required to file Forms 3, 4 and 5 with respect to the
undersigned's  holdings  of,  and  transactions  in,  securities  issued  by the
Company, unless earlier revoked by the undersigned in a signed writing delivered
to the foregoing attorneys-in-fact.

      IN  WITNESS  WHEREOF, the undersigned has caused this Power of Attorney to
be executed as of this 19th day of March, 2015.

                                                /s/ Gregory E. Lichtwardt
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                                                Signature

                                                Gregory E. Lichtwardt
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