SCHEDULE 14A
                                 (RULE 14A-101)

                     INFORMATION REQUIRED IN PROXY STATEMENT

                            SCHEDULE 14A INFORMATION
           PROXY STATEMENT PURSUANT TO SECTION 14(A) OF THE SECURITIES
                      EXCHANGE ACT OF 1934 (AMENDMENT NO. )

Filed by the Registrant  [X]
Filed by a Party other than the Registrant [ ]

Check the appropriate box:
[X] Preliminary Proxy Statement
[ ] Confidential,  for Use of the Commission Only (as permitted by Rule
    14a-6(e)(2))
[ ] Definitive Proxy Statement
[ ] Definitive  Additional Materials
[ ] Soliciting Material Pursuant to Rule 14a-11(c) or Rule 14a-12


                                TEGAL CORPORATION
- --------------------------------------------------------------------------------


                (Name of Registrant as Specified In Its Charter)
- --------------------------------------------------------------------------------


    (Name of Person(s) Filing Proxy Statement, if other than the Registrant)

Payment of Filing Fee (Check the appropriate box):
[X]  No fee required.
[ ]  Fee computed on table below per Exchange  Act Rules  14a-6(i)(1)  and
     0-11.
     (1)  Title of each class of securities to which transaction applies:
     (2)  Aggregate number of securities to which transaction applies:
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          pursuant to Exchange  Act Rule 0-11 (set forth the amount on which the
          filing fee is calculated and state how it was determined):
     (4)  Proposed maximum aggregate value of transaction: (5) Total fee paid:

[ ] Fee paid previously with preliminary materials:
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0-11(a)(2)  and  identify  the  filing  for  which the  offsetting  fee was paid
previously.  Identify the previous filing by registration  statement  number, or
the Form or Schedule and the date of its filing.
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     (3)  Filing Party:
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                                Tegal Corporation
                          2201 South McDowell Boulevard
                           Petaluma, California 94954

Dear fellow stockholders:

I am pleased to report that after many months of effort, your board of directors
and management have successfully  negotiated a proposed  $7,165,000  convertible
debt financing with a group of private  investors.  The attached proxy statement
and notice of our annual meeting of stockholders  describe in detail a number of
proposals  that  require  your  support  to enable  us to  complete  this  vital
financing.

Your board of directors  and  management  believe that receipt of these funds is
essential  if Tegal is to  continue as an  independent  company and to focus our
skills and  capabilities on exploiting our technical  leadership in the areas of
etch and  deposition of new materials.  We believe that our markets,  as well as
the semiconductor  capital equipment market overall, are beginning to show signs
of recovery.  Therefore,  we have explored many financing  alternatives over the
past  year,  including  the sale of Tegal to  strategic  investors,  the sale or
licensing  of  our  intellectual   property  and  securing   traditional  equity
investments,  and your  board of  directors  and  management  believe  that this
proposed  financing  represents the best  opportunity  available to us to enable
existing stockholders to have a continuing financial interest in our future.

We regret that this  financing  will  significantly  dilute  your  stockholding.
However,  your  board of  directors  and  management  think  that  there are few
alternatives  available to the Company and that additional financing is urgently
needed. In addition,  you should take into account the amount of stock that will
be owned by the new  investors.  We believe  that such a  substantial  ownership
position is consistent  only with a long-term  investor and that their diligence
confirms our view of the future  potential  for Tegal as we build on our current
prospects and expand into new market areas.

All of the stockholder resolutions being considered require a majority (50% plus
one vote) of all common shares to vote in favor of those  proposals.  Therefore,
it is  essential  that each and every  stockholder  take the time to review  the
attached  proxy  statement  and to complete and return the enclosed  proxy card.
YOUR VOTE IS CRITICAL, NO MATTER HOW MANY OR HOW FEW SHARES YOU OWN. Please help
us to reduce the expenses  associated  with this  solicitation  by returning the
enclosed proxy promptly.

You may also vote your shares by attending the Annual Meeting of Stockholders of
Tegal Corporation,  which will be held at our headquarters located at 2201 South
McDowell Boulevard,  Petaluma,  California 94954 on the 26th day of August 2003,
at  10:00  a.m.  local  time,  and  thereafter  as it may  from  time to time be
adjourned.

Thank you very much for your prompt attention to this important  matter.  PLEASE
VOTE TODAY.

                                            Sincerely,



                                            /s/ Michael L. Parodi
                                            -----------------------------------
                                            MICHAEL L. PARODI
                                            President and CEO





                                TEGAL CORPORATION
                          2201 South McDowell Boulevard
                           Petaluma, California 94954

                                 ---------------

                    NOTICE OF ANNUAL MEETING OF STOCKHOLDERS

                                 August 26, 2003

                                 ---------------

    The  annual  meeting  of  stockholders  of  Tegal  Corporation,  a  Delaware
corporation,  ("we," "us" and the "Company") will be held on Tuesday, August 26,
2003,  at 10:00 a.m.  local time,  at our  headquarters  at 2201 South  McDowell
Boulevard, Petaluma, California 94954 for the following purposes:

        1. To elect  four  directors  to serve  for one  year  and  until  their
    successors are duly elected and qualified.  The names of the nominees to the
    board of directors are set forth in the  accompanying  proxy statement which
    is part of this notice;


        2. To approve an  amendment  to our 1998  Equity  Participation  Plan to
    increase  the number of shares  available  for  issuance  from  2,400,000 to
    6,400,000  and to increase the Award Limit from 600,000  shares to 1,600,000
    shares;

        3. To approve a financing transaction in which we may sell and issue, to
    a group of  private  investors,  units  consisting  of (a) up to  $7,165,000
    aggregate  principal amount of our 2.0% Convertible  Secured  Debentures Due
    2011,  convertible  into our common stock at an initial  conversion price of
    $0.35 per share and (b)  eight-year  warrants to  purchase  up to  4,094,286
    shares of common stock with an exercise price of $0.50.  Under Nasdaq rules,
    this financing  transaction  requires  stockholder  approval  because it may
    result in the  issuance  of a number of shares of common  stock  equal to or
    greater  than  20% of  the  number  of  shares  of  common  stock  currently
    outstanding;


        4. To  approve an  amendment  to our  Certificate  of  Incorporation  to
    increase the number of authorized shares of common stock to 100,000,000;

        5. To approve a series of amendments to our Certificate of Incorporation
    to  effect  a  reverse  stock  split  of  our  common  stock,  whereby  each
    outstanding  2, 3, 5, 10 or 15  shares  would  be  combined,  converted  and
    changed into one share of common stock, provided that our board of directors
    will retain  discretion as to which  amendment  will be filed and as to when
    and whether any amendment is filed; and

        6. To  transact  such other  business  as may  properly  come before the
    annual meeting and any adjournments of the annual meeting.




    The board of  directors  has fixed the close of business on July 10, 2003 as
the record date for the determination of stockholders entitled to notice of, and
to vote at, the annual meeting or at any adjournments of the annual meeting.

    In order to  ensure  your  representation  at the  annual  meeting,  you are
requested to sign and date the enclosed proxy as promptly as possible and return
it in the  enclosed  envelope  (to which no postage need be affixed if mailed in
the United States). If you attend the annual meeting and file with the Secretary
of Tegal Corporation an instrument  revoking your proxy or a duly executed proxy
bearing a later date, your proxy will not be used.

    All stockholders are cordially invited to attend the annual meeting.



                                           By Order of the Board of Directors

                                           TEGAL CORPORATION

                                           /s/  Michael L. Parodi

                                           MICHAEL L. PARODI
                                           President and CEO


Petaluma, California


August ___, 2003






                                TEGAL CORPORATION

                                ----------------

                                 PROXY STATEMENT

                       FOR ANNUAL MEETING OF STOCKHOLDERS

                                 August 26, 2003

                                ----------------

                                  INTRODUCTION


    This proxy  statement is furnished in connection  with the  solicitation  of
proxies in the form enclosed for use at the annual  meeting of  stockholders  of
Tegal Corporation,  a Delaware corporation,  to be held at 10:00 a.m. local time
on Tuesday,  August 26, 2003 and at any  adjournments  of the annual meeting for
the purposes of (1) electing four  directors,  (2) approving an amendment to our
1998 Equity  Participation  Plan to  increase  the number of  authorized  shares
available  for issuance  from  2,400,000 to 6,400,000  and to increase the Award
Limit  from  600,000  shares  to  1,600,000  shares,  (3)  approve  a  financing
transaction in which we sell and issue, to a group of private  investors,  units
consisting  of (a) up to  $7,165,000  aggregate  principal  amount  of our  2.0%
Convertible Secured Debentures Due 2011, convertible into our common stock at an
initial  conversion  price of $0.35  per share and (b)  eight-year  warrants  to
purchase up to 4,094,224 shares of common stock with an exercise price of $0.50,
(4) approving an amendment to our Certificate of  Incorporation  to increase the
number of authorized shares of common stock from 35,000,000 to 100,000,000,  (5)
approving a series of amendments to our Certificate of Incorporation to effect a
reverse stock split of our common stock, whereby each outstanding 2, 3, 5, 10 or
15 shares  would be  combined,  converted  and changed  into one share of common
stock,  provided that our board of directors will retain, for one year following
approval,  discretion  as to which  amendment  will be filed  and as to when and
whether any amendment is filed and (6)  transacting  such other  business as may
properly  come  before the annual  meeting  and any  adjournments  of the annual
meeting. The approximate date when this proxy statement and accompanying form of
proxy are first being sent to stockholders is August ___, 2003.


    This solicitation is made on behalf of our board of directors.  Costs of the
solicitation will be borne by us. Our directors,  officers and employees and our
subsidiaries may also solicit proxies by telephone,  telegraph,  fax or personal
interview.  We will  reimburse  banks,  brokerage  firms and  other  custodians,
nominees and  fiduciaries  for reasonable  expenses  incurred by them in sending
proxy material to stockholders.

    Holders of record of our common stock,  par value $0.01 per share, as of the
close of  business on July 10,  2003 are  entitled to receive  notice of, and to
vote at, the annual meeting.  The





outstanding  common stock constitutes the only class of our securities  entitled
to vote at the annual  meeting,  and each  share of common  stock  entitles  the
holder to one vote.  At the  close of  business  on July 10,  2003,  there  were
16,099,949  shares  of  common  stock  issued  and  outstanding.   Two  or  more
stockholders  representing a majority of the outstanding  shares must be present
in person or by proxy to constitute a quorum for the  transaction of business at
the annual meeting.


    Unless  contrary  instructions  are  indicated  on  the  proxy,  all  shares
represented by valid proxies  received  pursuant to this  solicitation  (and not
revoked before they are voted) will be voted FOR

    o   the election of all of the directors nominated below;


    o   the approval of an amendment  to our 1998 Equity  Participation  Plan to
        increase the number of  authorized  shares  available  for issuance from
        2,400,000  to  6,400,000  and to increase  the Award Limit from  600,000
        shares to 1,600,000 shares;


    o   the approval of a financing  transaction in which we may sell and issue,
        to a  group  of  private  investors,  units  consisting  of  (a)  up  to
        $7,165,000  aggregate  principal amount of our 2.0% Convertible  Secured
        Debentures  Due 2011,  convertible  into our common  stock at an initial
        conversion  price of $0.35  per  share and (b)  eight-year  warrants  to
        purchase up to 4,094,224  shares of common stock with an exercise  price
        of $0.50;

    o   the approval of an  amendment to our  Certificate  of  Incorporation  to
        increase  the number of  authorized  shares of common stock for issuance
        from 35,000,000 to 100,000,000; and


    o   the  re-approval  of a  series  of  amendments  to  our  Certificate  of
        Incorporation  to  effect a reverse  stock  split of our  common  stock,
        whereby  each  outstanding  2, 3, 5, 10 or 15 shares  would be combined,
        converted and changed into one share of common stock,  provided that our
        board  of  directors  will  retain,  for one  year  following  approval,
        discretion  as to  which  amendment  will be  filed  and as to when  and
        whether any amendment is filed.


    With respect to any other business which may properly come before the annual
meeting and be  submitted  to a vote of  stockholders,  proxies  received by the
board of directors  will be voted in  accordance  with the best  judgment of the
designated  proxy  holders.  Any proxy may be revoked  at any time  before it is
exercised  by  filing  with  the  Secretary  an  instrument  revoking  it  or by
submitting prior to the time of the annual meeting a duly executed proxy bearing
a later date.  Stockholders  who have executed and returned a proxy and who then
attend the annual  meeting  and  desire to vote in person  are  requested  to so
notify the Secretary prior to the time of the annual meeting.

    Shares represented by proxies that reflect abstentions or "broker non-votes"
(i.e.,  shares held by a broker or nominee which are  represented  at the annual
meeting,  but with  respect to which such broker or nominee is not  empowered to
vote on a particular  proposal or proposals)  will be counted as shares that are
present and  entitled  to vote for  purposes of  determining  the  presence of a
quorum.

    In voting for the  election  of  directors  each share has one vote for each
position to be filled,  and there is no  cumulative  voting,  which means that a
simple  majority of the shares voting may





                                       2



elect all of the directors.  In voting with respect to the financing transaction
described  in Proposal No. 3, the approval of a majority of the shares of common
stock present and entitled to vote at the annual  meeting,  excluding the shares
of common  stock  currently  held by the  proposed  investors  in the  financing
transaction, is required for approval of the proposal. In voting with respect to
the amendment to our certificate of incorporation described in Proposal No. 4, a
majority of the shares of outstanding  common stock entitled to vote is required
for  approval of the  proposal.  All other  proposals  require the approval of a
majority  of the shares of common  stock  present  and  entitled  to vote at the
annual meeting.


    Our  principal   executive  offices  are  located  at  2201  South  McDowell
Boulevard, Petaluma, California 94954. Our telephone number is (707) 763-5600.

                               GENERAL INFORMATION

    We were formed in  December  1989 to acquire  the  operations  of the former
Tegal  Corporation,  a division of Motorola,  Inc. The  predecessor  company was
founded in 1972 and acquired by Motorola in 1978.

                              ELECTION OF DIRECTORS
                                (PROPOSAL NO. 1)

    Our board of directors is currently comprised of four members. Directors are
elected at each annual  meeting and hold office until their  successors are duly
elected and qualified at the next annual meeting.  Our bylaws require that there
be a minimum  of two and  maximum of eight  members  of the board of  directors.
Pursuant to our bylaws and a resolution  adopted by the board of directors,  the
authorized number of members of the board of directors has been set at six.

    In the absence of instructions  to the contrary,  the persons named as proxy
holders in the accompanying proxy intend to vote in favor of the election of the
four  nominees  designated  below to serve  until  the 2004  annual  meeting  of
stockholders and until their respective  successors shall have been duly elected
and  qualified.  Messrs.  Dohring,  Krauss,  Wadsworth  and Parodi  are  current
directors.  The board of directors  expects  that each of the  nominees  will be
available  to  serve  as a  director,  but if any  such  nominee  should  become
unavailable  or unwilling to stand for election,  it is intended that the shares
represented  by the proxy  will be voted for such  substitute  nominee as may be
designated by the board of directors.  Because the board of directors remains in
the process of seeking candidates for two vacant positions on the board, we have
fewer  nominees  named than the number  fixed by our  bylaws.  If the  financing
transaction  discussed below in Proposal No. 3 is approved by the  stockholders,
one of the investors,  Special Situations Fund, will have the right to designate
one  individual  reasonably  acceptable  to us  as a  member  of  our  board  of
directors.  Stockholders  may not vote for a greater  number of persons than the
number of nominees named.

Nominees for Election as Director

                                       Director  New Term
   Name                         Age     Since   Will Expire
   ----                        ----------------------------
   Edward A. Dohring.........   70       1996       2004
   Jeffrey M. Krauss.........   46       1992       2004
   Michael L. Parodi.........   55       1997       2004
   H. Duane Wadsworth........   66       2002       2004




                                       3


    Edward A.  Dohring has served as a director of Tegal since  September  1996.
From October 1994 through December 1998, he was the President of SVG Lithography
Systems,  Inc., a subsidiary  of Silicon  Valley  Group,  Inc. From July 1992 to
October 1994 he was  President of the Track  Division of Silicon  Valley  Group,
Inc. Prior to joining Silicon Valley Group,  Inc., Mr. Dohring was the President
of Advantage Production Technology,  Inc. from 1991 to 1992, when it was sold to
Genus.  Mr.  Dohring was a member of the  Semiconductor  Equipment and Materials
International  Board of Directors from 1977 to 1989. He currently  serves on the
Board of Directors of MTI.

    Jeffrey M. Krauss has served as a director  of Tegal since June 1992.  Since
April 2000, Mr. Krauss has been a Managing Member of Psilos Group Managers, LLC,
a New York based  venture  capital  firm,  and a Managing  Member of the general
partner of Psilos Group Partners I, LP, Psilos Group Partners II, LP, and Psilos
Group Partners II SBIC, LP, each a venture capital partnership.  From 1990 until
April 2000, Mr. Krauss was a general  partner of the general  partner of Nazem &
Company III, L.P. and Nazem & Company IV, L.P.,  both venture  capital funds. He
was also a general  partner of The  Transatlantic  Fund, a joint venture between
Nazem & Company and Banque Nationale de Paris of France.  Prior to joining Nazem
& Company,  Mr.  Krauss was a  corporate  attorney  with the law firm of Simpson
Thacher & Bartlett,  where he specialized in leveraged buyout  transactions.  He
currently  serves as Chairman of the Board of Quovadx,  Inc and as a director of
APS Healthcare,  Inc., One Shield,  Inc.,  Cohesive  Technologies,  Inc.,  Royal
Healthcare, ICS, Inc. and Miavita, Inc.

    Michael L. Parodi joined Tegal as director,  President  and Chief  Executive
Officer in December 1997. He was elected to the  additional  post of Chairman of
the Board in March  1999.  From 1991 to 1996,  Mr.  Parodi was  Chairman  of the
Board,  President and Chief Executive Officer of Semiconductor  Systems, Inc., a
manufacturer of photolithography  processing equipment sold to the semiconductor
and thin film head markets until Semiconductor Systems, Inc. was merged with FSI
International.  Mr. Parodi  remained with FSI  International  as Executive  Vice
President and General Manager of  Semiconductor  Systems,  Inc. from the time of
the merger to December 1997,  integrating  Semiconductor  Systems, Inc. into FSI
International. In 1990, Mr. Parodi led the acquisition of Semiconductor Systems,
Inc. from General  Signal  Corporation.  Prior to 1990,  Mr. Parodi held various
senior  engineering  and  operations  management  positions  with General Signal
Corporation,  Signetics Corporation,  Raytheon Company,  Fairchild Semiconductor
Corporation and National  Semiconductor  Corporation.  Mr. Parodi currently is a
member of the  Semiconductor  Equipment  and  Materials  International  Board of
Directors.

    H. Duane Wadsworth was appointed to the board of directors in November 2002.
He has served as  President of  Wadsworth-Pacific  Manufacturing  Associates,  a
supplier of  electronics  to  semiconductor  manufacturers,  since 1963. He also
serves  as  a  director  of  Eclipse  Technology,   Inc.,  Micro-Mechanics  Ltd.
(Holding),  Singapore and the Semiconductor Equipment and Material International
Board of Directors.



                                       4


    All directors hold office until our next annual meeting of the  stockholders
and until their  successors  have been duly elected or  qualified.  There are no
family relationships between any of our directors or executive officers.

Board of Directors and Committees of the Board

    In  fiscal  year  2003,  the board of  directors  held  four  meetings.  All
directors  attended  at least 75% of the  total  number  of board  meetings  and
meetings of board  committees  on which the director  served  during the time he
served on the board or committees.

    The board of directors  has  established  a standing  audit  committee and a
standing compensation  committee.  The board does not have a standing nomination
committee.  The audit  committee,  consisting  of  Messrs.  Dohring,  Krauss and
Wadsworth  for fiscal 2003,  reviews the  adequacy of internal  controls and the
results and scope of the audit and other  services  provided by our  independent
accountants.  The audit  committee  meets  periodically  with management and the
independent accountants.  The audit committee held four meetings in fiscal 2003.
In June 2000, the audit committee adopted an audit committee  charter, a copy of
which was filed with the SEC as an appendix to our proxy  statement for our 2001
annual meeting.

    For  fiscal  2003,  the  compensation  committee  was  comprised  of Messrs.
Dohring,  Krauss and Wadsworth.  The compensation committee held two meetings in
fiscal 2003. The functions of the compensation  committee  include  establishing
salaries,  incentives and other forms of compensation for our officers and other
employees and administering our incentive compensation and benefit plans.

Director Compensation

    Our outside  directors  currently  receive an annual  $12,000  retainer  for
service on the board of  directors,  meeting  fees of $1,500  per board  meeting
($750 per meeting  for  special  meetings  held  telephonically)  and $1,125 per
committee  meeting not held in  conjunction  with a full board meeting ($500 per
meeting for committee meetings held telephonically).  Furthermore, directors may
be reimbursed for certain  expenses in connection  with  attendance at board and
committee  meetings.  In addition,  we provide the Stock Option Plan for Outside
Directors,  pursuant to which  non-employee  directors receive stock options for
serving on our board of directors.

Compensation Committee Interlocks and Insider Participation

    For  fiscal  2003,  the  compensation   committee  was  comprised  of  three
directors:  Messrs. Dohring, Krauss and Wadsworth. For a detailed description of
each of these individuals' backgrounds, please see their biographies above.



                                       5


                               EXECUTIVE OFFICERS

    The following chart sets forth information  regarding our executive officers
as of March 31, 2003. For a detailed  description of each of these  individuals'
backgrounds, please consult our annual report on Form 10-K for fiscal year 2003,
filed with the SEC on June 27, 2003.



NAME                        AGE                    POSITION
- ----                        ---                    --------
                        
Michael L. Parodi...........55  Chairman of the Board of Directors, President and Chief
                                Executive Officer

Thomas R. Mika..............52  Executive Vice President and Chief Financial Officer
Stephen P. DeOrnellas.......49  Vice President and Chief Technical Officer

George B. Landreth..........48  Vice President, Product Development
James D. McKibben...........52  Vice President, Worldwide Sales and Marketing
Carole Anne Demachkie.......40  Vice President and General Manager, Sputtered Films, Inc.


                          COMPENSATION COMMITTEE REPORT

    The  information  set  forth  below  shall  not be  deemed  incorporated  by
reference  by any  general  statement  incorporating  by  reference  this  proxy
statement  into any filing  under the  Securities  Act of 1933,  as amended (the
"Securities Act"), or under the Securities Exchange Act of 1934, as amended (the
"Exchange  Act"),  except  to  the  extent  we  specifically   incorporate  this
information  by  reference,  and shall not  otherwise be deemed filed under such
Acts.

    The  compensation  committee of the board of  directors  has  furnished  the
following report on executive compensation.

Overall Policy

    In  formulating  the  executive   compensation   program,  the  compensation
committee's objectives were (1) to attract and retain competent executive talent
and  motivate  executive  officers  to  perform  to the  full  extent  of  their
abilities,  (2) to tie a significant  portion of executive  compensation  to the
achievement of specified  performance goals for Tegal, and (3) to link executive
and stockholder interests through equity based plans.

    The key  elements  of our  executive  compensation  program  consist of base
salary, cash bonuses and stock options.



                                       6


Base Salary

    Each  executive's base salary is reviewed  annually,  but as a general rule,
significant  base salary  increases  are  limited to  promotions,  while  lesser
adjustments  are made as  appropriate  after taking into account such factors as
internal  equity,  comparable  market salaries paid to individuals of comparable
responsibility and company size and increases in levels of  responsibility.  All
salaries  are based on  sustained  individual  performance  toward our goals and
objectives.

    On June 11, 1996,  the board of directors  approved a severance  arrangement
for our executive  officers in the event of a change of control of Tegal.  If an
executive  officer is  terminated  as a result of a change of control,  we shall
continue to pay such executive  officer's base salary and certain benefits for a
period of 12 months.

Bonus Programs

    In order to motivate executives and managers in the attainment of our annual
goals and to enhance our ability to attract and retain key managerial  employees
through  a  competitive   compensation   package,  we  have  adopted  an  annual
performance  bonus plan for  executives  and  managers  designated  by the Chief
Executive  Officer  and  approved  by the board of  directors.  Each  designated
position has an annual bonus incentive  target expressed as a percentage of that
executive's  or manager's  base salary.  The  attainment  of the target bonus is
determined  by the  degree  to  which an  individual  achieves  specific  annual
objectives  determined  annually  and  reviewed  and  approved  by the  board of
directors for all executives who report directly to the Chief Executive Officer,
and by the degree to which we achieve our annual  financial plan. No bonuses are
to be paid unless we realize a minimum of five percent  profit before taxes as a
percent of revenue.  Incentives  are  prorated if we exceed or fall short of our
annual  financial  plan goals,  with the  incentive  maximums  capped at 250% of
target bonus amounts.

Stock Options

    We provide  long-term  incentive  compensation  through our equity plan that
generally gives the board of directors  authority to grant stock options as well
as other types of awards.  Stock  options are designed to align the interests of
executives  and key  personnel  with  those of the  stockholders.  The  board of
directors  believes  that  significant  equity  interests  in Tegal  held by our
management serve to retain and motivate management.

    The board of directors'  decision whether to grant options and the number of
options  is  based  primarily  on  the  individual  executive's  responsibility,
performance and existing stock ownership. In fiscal 2003, the board of directors
considered awards based on the board of directors'  assessment of the individual
executive's  contribution  to our success in meeting our financial  goals.  This
assessment was based  primarily on our earnings and the level of the executive's
responsibility. The awards also were based on non-financial performance measures
such as  individual  performance,  the  recommendations  of the Chief  Executive
Officer of Tegal and the success in implementing  our long-term  strategic plan.
We expect that most  awards  under our 1998  Equity  Participation  Plan will be
stock options that will generally be granted with an exercise price equal to the
market price of the common stock on the date of grant.



                                       7


Chief Executive Officer Compensation

    The compensation  committee is charged with  establishing the objectives and
compensation of Michael L. Parodi,  the Chief Executive Officer of Tegal, who is
responsible for our strategic and financial  performance.  Mr. Parodi became the
Chief Executive  Officer of Tegal in December 1997. The  compensation  committee
determines our Chief  Executive  Officer's  compensation  package based upon the
general factors  discussed above and upon an evaluation of compensation  paid to
chief executive  officers at comparable  public companies and other companies in
our industry.

    Mr. Parodi's current annual salary is $200,000.  In addition,  Mr. Parodi is
eligible  to  receive  a  maximum  bonus  of 50% of his  base  salary  upon  the
achievement  of  certain  goals  established  by the board of  directors  at the
beginning of each fiscal year.  For fiscal  2003,  Mr.  Parodi did not receive a
bonus. The board of directors determines the actual bonus payable based upon the
recommendation  of  the  compensation  committee.  Such  recommendation  by  the
compensation  committee  is based on our overall  performance  against  specific
strategic and financial goals that are determined at the beginning of the fiscal
year.  Pursuant to his initial employment  agreement,  Mr. Parodi was granted in
1997 (1) an option to purchase  260,000  shares of common stock,  subject to our
repurchase rights expiring over a four year period and (2) an option to purchase
240,000 shares of common stock,  subject to our right of repurchase  expiring in
installments  of 60,000  when the  closing  price of our  common  stock  reaches
certain  prices for ten or more  consecutive  trading days. In fiscal 2003,  the
board granted Mr. Parodi no additional options.

    The  compensation  committee  and Mr.  Parodi  believe that  currently he is
adequately  incentivized to enhance  profitability and stockholder value through
his  compensation  package  and  his  ownership  of  options.  The  compensation
committee  continues to retain the  discretion  to change the amount and form of
compensation payable to Mr. Parodi.

Conclusion

    Through the programs  described  above,  a  significant  portion of the each
executive's  compensation is now linked  directly to our financial  performance.
The policy of these programs is to award bonuses based on our success as well as
to provide  incentives to executives  to enhance our financial  performance  and
long-term stockholder value.

                                                     Edward A. Dohring
                                                     Jeffrey M. Krauss
                                                     H. Duane Wadsworth




                                       8





                             EXECUTIVE COMPENSATION

    The following  table shows,  for the fiscal years ended March 31, 2001, 2002
and  2003,  the cash  compensation  paid by us and our  subsidiaries  as well as
certain other  compensation  paid or accrued for those years for services in all
capacities to the person serving as the Chief Executive  Officer of Tegal during
fiscal 2003 and the other three most highly compensated executive officers whose
total annual salary and bonus exceeded $100,000 in fiscal 2003.

Summary Compensation Table





                                                                                  LONG TERM
                                                                                 COMPENSATION
                                                                                  SECURITIES
                                                        ANNUAL COMPENSATION       UNDERLYING     ALL OTHER(1)
    NAME AND PRINCIPAL POSITION              YEAR       SALARY($)     BONUS($)      OPTIONS    COMPENSATION($)
    ---------------------------              ----       ---------     --------      -------    ---------------
                                                                                       
Michael L. Parodi ....................       2003       199,607             0          --          17,146
  Chairman of the Board, President and       2002       208,938          --            --          17,885
  Chief Executive Officer                    2001       249,034          --            --          17,104

James D. McKibben ....................       2003       124,465             0          --          21,093
  Vice President, Worldwide                  2002       137,601          --            --          26,968
  Marketing and Sales                        2001       159,378        41,210          --           6,806

George Landreth ......................       2003       111,019             0          --             444
  Vice President, Product Development        2002       120,108          --            --             388
                                             2001       140,625          --            --             447



- ----------

(1) Other  compensation in fiscal 2003 consists of 401(k)  contributions made by
    us,  commissions  paid to Mr.  McKibben in the amount of $14,649,  and,  for
    Messrs.  Parodi and  McKibben,  $16,800  and  $6,180,  respectively,  in car
    allowance paid by us. Other  compensation  in fiscal 2002 consists of 401(k)
    contributions made by us and, for Messrs.  Parodi and McKibben,  $16,800 and
    $6,180,  respectively,  in car allowance paid by us. Other  compensation  in
    fiscal 2001  consists of 401(k)  contributions  made by us, and, for Messrs.
    Parodi and McKibben, $16,800 and $6,180, respectively, in car allowance paid
    by us.





                                       9


             AGGREGATED OPTION EXERCISES DURING 2003 FISCAL YEAR AND
                       2003 FISCAL YEAR-END OPTION VALUES

    The  following  table sets forth  information  concerning  exercise of stock
options during fiscal 2003 by each of the individuals  identified in the Summary
Compensation Table and the value of options at the end of fiscal 2003.




                                                                     NUMBER OF SECURITIES
                                                                    UNDERLYING UNEXERCISED       VALUE OF UNEXERCISED
                                             SHARES     VALUE             OPTIONS AT             IN-THE-MONEY OPTIONS
                                           ACQUIRED ON REALIZED      2003 YEAR-END(#)(A)        AT 2003 YEAR-END($)(A)
     NAME                                  EXERCISE(#)    ($)    (EXERCISABLE/UNEXERCISABLE)  (EXERCISABLE/UNEXERCISABLE)
     ----                                  -----------    ---    ---------------------------  ---------------------------
                                                                                  
     Michael L. Parodi.....................   --          --            695,156/2,344                   --
     James D. McKibben.....................   --          --              326,100/--                    --
     George Landreth.......................   457        $117.43           290,743/--                   --


- ----------

(a) Potential  unrealized  value is (1) the fair  market  value at  fiscal  2003
    year-end  ($0.38  per  share)  less the  exercise  price  of  "in-the-money"
    unexercised  options  times (2) the  number of  shares  represented  by such
    options.


                              MANAGEMENT CONTRACTS

    Mr. Parodi serves as our Chief Executive  Officer  pursuant to an employment
agreement with us in which he is guaranteed,  in the event of his termination by
us for any reason, 12 months salary and benefits following the effective date of
the  termination.  If he remains  unemployed  after 12 months he is  entitled to
receive  benefits for up to an additional six months on a monthly basis until he
finds  employment.  If Mr. Parodi  voluntarily  leaves the company under certain
defined  "adverse"  circumstances,  Mr.  Parodi is  entitled to receive up to 24
months of salary and benefits.

    In addition,  on June 11, 1996, the board of directors  approved a severance
arrangement for executive officers in the event of a change of control of Tegal.
If an executive  officer is  terminated  as a result of a change of control,  we
shall continue to pay such executive  officer's base salary and certain benefits
for a period of 12 months.





                                       10


               APPROVAL OF THE AMENDMENT TO THE FOURTH AMENDED AND
                     RESTATED 1998 EQUITY PARTICIPATION PLAN
                                (PROPOSAL NO. 2)



The Fourth Amended and Restated 1998 Equity Participation Plan


    On June 30, 2003, our board of directors,  subject to stockholder  approval,
unanimously adopted the fifth amendment to our 1998 Equity Participation Plan of
Tegal  Corporation to increase the number of shares available for issuance under
the 1998 Equity  Participation  Plan from 2,400,000 to 6,400,000 and to increase
the Award Limit from 600,000 shares to 1,600,000 shares.


    The board of directors believes that the 1998 Equity  Participation Plan, as
amended, is desirable:

    o   to enable Tegal to retain the services of consultants  while  preserving
        Tegal's cash reserves by granting options in lieu of cash payments;

    o   to provide an incentive for key employees  and  consultants  of Tegal to
        further  the  growth,  development  and  financial  success  of Tegal by
        personally  benefiting  through the  ownership  of Tegal's  stock and/or
        rights which recognize such growth,  development and financial  success;
        and

    o   to enable  Tegal to obtain  and  retain the  services  of key  employees
        considered essential in the long-range success of Tegal by offering them
        an  opportunity  to own stock in Tegal and/or  rights which will reflect
        the growth, development and financial success of Tegal.


    Through August __, 2003,  2,400,000 shares of common stock were reserved for
issuance upon exercise of options under the 1998 Equity  Participation  Plan. As
of August 1, 2003, 925,275 shares remained available for issuance under the 1998
Equity  Participation  Plan,  and 1,474,725  shares were subject to  outstanding
options.


    The principal  features of the 1998 Equity  Participation  Plan, as amended,
are summarized  below, but the summary is qualified in its entirety by reference
to the 1998 Equity Participation Plan, as amended, which is attached as Appendix
A to this proxy statement.

    The 1998 Equity  Participation  Plan provides for the award of non-qualified
and incentive  stock options,  restricted  stock and stock  appreciation  rights
("SARs").


    The 1998 Equity  Participation  Plan  provides  that the  maximum  number of
shares  that  may  be  subject  to any  award  granted  under  the  1998  Equity
Participation  Plan to any  individual  in any  calendar  year cannot  currently
exceed 600,000.  If Proposal No. 2 is approved by




                                       11



the  stockholders,  the maximum number of shares that may be subject to any such
award would be  increased  to  1,600,000.  The shares  available  under the 1998
Equity  Participation Plan upon exercise of options and SARs and for issuance as
restricted  stock may be either  previously  authorized  but unissued  shares or
treasury shares,  and may be equity securities other than common stock. The 1998
Equity Participation Plan provides for appropriate adjustments in the number and
kind  of  shares  subject  to the  plan  and to  outstanding  grants  thereunder
(including  acceleration  of vesting in some instances) in the event of a change
in control or a recapitalization such as a stock split or stock dividend. If any
portion  of an  option,  SAR or  restricted  stock  award  terminates  or lapses
unexercised,  or is canceled upon grant of a new option, SAR or restricted stock
award (which may be at a higher or lower exercise price than the option,  SAR or
restricted  stock  award so  canceled),  the shares  which  were  subject to the
unexercised portion of such option, SAR or restricted stock award, will continue
to be available for issuance under the 1998 Equity Participation Plan.


    The  compensation  committee or another  committee or a subcommittee  of the
board assuming the functions of the compensation committee under the 1998 Equity
Participation Plan administers the 1998 Equity Participation Plan. The committee
consists of two or more independent directors appointed by and holding office at
the pleasure of the board,  each of whom is both a  "non-employee  director" for
purposes of Rule 16b-3  ("Rule  16b-3")  under the  Exchange Act and an "outside
director"  for  purposes  of  Section  162(m)  of  the  Internal  Revenue  Code.
Appointment  of  committee   members  shall  be  effective  upon  acceptance  of
appointment.  Committee  members  may resign at any time by  delivering  written
notice to the board.  Vacancies in the committee may be filled by the board. The
committee  will have the power to interpret the 1998 Equity  Participation  Plan
and to adopt such rules for the administration,  interpretation, and application
of the 1998 Equity Participation Plan as are consistent therewith, to interpret,
amend or revoke any such rules.  The board will have  discretion to exercise any
and all rights and duties of the committee  under the 1998 Equity  Participation
Plan except with respect to matters which under Rule 16b-3 or Section  162(m) of
the Internal  Revenue Code, or any regulations or rules issued  thereunder,  are
required to be determined in the sole discretion of the committee.

    Options,   restricted   stock   awards  and  SARs  under  the  1998   Equity
Participation Plan may be granted to committee-selected individuals who are then
our  employees or  consultants.  Incentive  stock options may only be granted to
employees.

    The 1998 Equity Participation Plan provides that we may grant or issue stock
options,  restricted  stock  and  SARs  or any  combination  of  stock  options,
restricted  stock and SARs.  The terms and  conditions of each award will be set
forth in a separate award agreement between the holder of the award and us.

    Nonqualified  Stock Options ("NQSOs") will provide for the right to purchase
common stock at a specified  price which,  except with respect to NQSOs intended
to  qualify  as  performance-based  compensation  under  Section  162(m)  of the
Internal  Revenue Code,  may be less than fair market value on the date of grant
(but  not  less  than  85% of  fair  market  value),  and  usually  will  become
exercisable,  in the  discretion  of the  committee in one or more  installments
after the grant  date,  subject  to the  participant's  continued  provision  of
services  to us and/or  subject to the  satisfaction  of  individual  or company
performance targets  established by the committee.  NQSOs may be granted for any
term specified by the committee.



                                       12


    Incentive  Stock  Options  ("ISOs")  will be  designed  to  comply  with the
provisions  of the  Internal  Revenue  Code  and  will  be  subject  to  certain
restrictions  contained in the Internal Revenue Code.  Among such  restrictions,
ISOs must have an exercise  price not less than the fair market value of a share
of common  stock on the date of grant,  may only be granted to  employees,  must
expire within a specified period of time following the optionee's termination of
employment,  and must be exercised within the ten years after the date of grant,
but may be  subsequently  modified to disqualify them from treatment as ISOs. In
the case of an ISO  granted to an  individual  who owns (or is deemed to own) at
least 10% of the total  combined  voting power of all classes of our stock,  the
1998 Equity Participation Plan provides that the exercise price must be at least
110% of the fair market  value of a share of common  stock on the date of grant,
and the ISO must expire upon the fifth anniversary of the date of its grant.

    Restricted  Stock may be sold to  participants  at various  prices  (but not
below par value) and made subject to such  restrictions  as may be determined by
the board or committee. Restricted stock, typically, may be repurchased by us at
the original  purchase price if the conditions or  restrictions  are not met. In
general,  restricted stock may not be sold, or otherwise transferred or pledged,
until  restrictions  are removed or expire.  Purchasers of restricted stock will
have all the rights of a  stockholder  with  respect to such  restricted  stock,
including  the right to receive all dividends  and other  distributions  paid or
made with respect to the shares prior to the time when the restrictions lapse.

    Stock  Appreciation  Rights ("SARs") may be granted in connection with stock
options,  or separately.  SARs granted by the committee in connection with stock
options  typically  will provide for payments to the holder based upon increases
in the price of our common stock over the exercise price of the related  option.
SARs  granted by the  committee  independent  of a stock option  typically  will
provide for  payments  to the holder  based upon  increases  in the price of our
common stock over the exercise price of such independent SAR. Except as required
by Section  162(m) of the  Internal  Revenue Code with respect to a SAR which is
intended to qualify as  performance-based  compensation  as described in Section
162(m) of the Internal Revenue Code, there are no restrictions  specified in the
1998  Equity  Participation  Plan on the  exercise of SARs or the amount of gain
realizable  therefrom,  although restrictions may be imposed by the committee in
the SAR  agreements.  The  committee  may elect to pay SARs in cash or in common
stock or in a combination of both.


    The  administrator  of the 1998  Equity  Participation  Plan may at any time
suspend or  terminate  the 1998  Equity  Participation  Plan.  However,  no such
amendment  or revision  may,  unless  appropriate  stockholder  approval of such
amendment  or revision is obtained,  (1)  increase the maximum  number of shares
which  may be  acquired  pursuant  to  awards  granted  under  the  1998  Equity
Participation Plan (except for adjustments  described above) or (2) increase the
maximum  number of shares of common stock for which awards may be issued  during
any  fiscal  year  to  any   participant.   No  amendment  of  the  1998  Equity
Participation  Plan may alter or impair  any  rights  or  obligations  under any
awards  already  granted  unless the holder of the award  consents  or the award
otherwise provides.


Securities Laws and Federal Income Taxes

    The following discussion is a general summary of the material federal income
tax  consequences  to participants  in the 1998 Equity  Participation  Plan. The
discussion  is based  on



                                       13


the Internal Revenue Code, regulations thereunder,  rulings and decisions now in
effect,  all of which are subject to change.  The  summary  does not discuss all
aspects  of  federal  income  taxation  that  may be  relevant  to a  particular
participant in light of such participant's  personal  investment  circumstances.
Also,  state and local income taxes are not discussed and may vary from locality
to locality.  Accordingly,  holders  should not rely thereon for  individual tax
advice,  as each  taxpayer's  situation and the  consequences  of any particular
transaction  will vary  depending  upon the  specific  facts  and  circumstances
involved.  Each  taxpayer is advised to consult  with his or her own tax advisor
for  particular  federal,  as well as state and local,  income and any other tax
advice.

    Securities Laws. The 1998 Equity  Participation  Plan is intended to conform
to the  extent  necessary  with all  provisions  of the  Securities  Act and the
Exchange Act and any and all regulations and rules promulgated by the Securities
and Exchange Commission thereunder,  including,  without limitation, Rule 16b-3.
The 1998  Equity  Participation  Plan will be  administered,  and awards will be
granted and may be exercised,  only in such a manner as to conform to such laws,
rules and  regulations.  To the extent  permitted  by  applicable  law, the 1998
Equity  Participation Plan and awards granted thereunder shall be deemed amended
to the extent necessary to conform to such laws, rules and regulations.

    Nonqualified  Stock Options.  Nonqualified stock options are not intended to
be  incentive  stock  options  under  Section  422 of the  Code.  The grant of a
nonqualified  stock  option is  generally  not a taxable  event  either  for the
optionee or for Tegal.  Upon the exercise of a  nonqualified  stock option,  the
optionee  generally  will  recognize  ordinary  income in an amount equal to the
excess of the fair market value of the shares acquired upon exercise, determined
at the date of  exercise,  over the exercise  price of such  option.  Subject to
Section  162(m)  of the Code,  Tegal  will be  entitled  to a  business  expense
deduction equal to such amount in the fiscal year of Tegal in which the optionee
exercises the nonqualified  stock option.  The ordinary income recognized by the
optionee is subject to income and employment tax withholding. The optionee's tax
basis in the shares  acquired  pursuant to the exercise of a nonqualified  stock
option will be equal to the option price paid plus the amount of ordinary income
recognized upon exercise.  Any gain or loss on a disposition of the common stock
acquired  upon the  exercise of a  nonqualified  stock option will be treated as
short-term  or  long-term  capital gain or loss,  subject to income  taxation at
short-term or long-term  capital gains rates  depending on the holding period of
the optionee  measured  from the date of the exercise of such option.  There are
generally  no  federal  income  tax  consequences  to  Tegal  by  reason  of the
disposition  by an  optionee of common  stock  acquired  upon the  exercise of a
nonqualified stock option.

    If an optionee  delivers  previously  acquired shares of the common stock of
Tegal to pay the option  price upon  exercise  of a  non-qualified  option,  the
shares of common  stock so acquired  that are equal in fair market  value to the
shares surrendered, measured at the date of exercise, generally will qualify for
nonrecognition  of  gain.  The tax  basis  of such  shares  will be equal to the
optionee's  basis in the shares  surrendered and the holding period for purposes
of  determining  capital  gain or loss  treatment  with  respect  to  subsequent
appreciation or depreciation will be measured to include the optionee's  holding
period with respect to the surrendered  shares.  Shares of common stock of Tegal
so acquired that exceed the fair market value of the shares  surrendered will be
taxable  as



                                       14


ordinary  income  to the  optionee.  Tegal  will  be  subject  to a  withholding
obligation  for  income  and  employment  taxes  with  respect  to the amount of
ordinary  income  recognized by the optionee and will be entitled to a deduction
equal to the amount of such ordinary income. The optionee's basis in such shares
is equal to the amount of ordinary  income so recognized  and the holding period
for subsequent capital gain (or loss) will be measured from the exercise date.

    Incentive Stock Options. Generally, an optionee recognizes no taxable income
upon  the  grant or  exercise  of an  incentive  stock  option  that  meets  the
requirements of Code Section 422.  However,  the amount by which the fair market
value of the common  stock  acquired at the time of exercise  exceeds the option
exercise  price (the  "spread")  is taken into the  account in  determining  the
amount, if any, of the alternative minimum tax due from the optionee in the year
in which the option is  exercised.  In addition,  if the optionee  exercises the
option by paying the option price with shares of common  stock,  the transfer of
such common stock may result in taxable  income to the optionee  even though the
transfer  itself will not affect the favorable tax treatment of the common stock
received as a result of exercising the option.

    If an optionee  holds the common stock  acquired  through the exercise of an
incentive stock option for more than two years from the date on which the option
was  granted  and more  than one year  from  the date on which  the  option  was
exercised,  and if the  optionee  is an  employee of Tegal at all times from the
date of the grant of the incentive  stock option  through the date that is three
months  before  the  date of  exercise,  any  gain  or  loss  on the  subsequent
disposition  of such common  stock will be taxed to such  optionee as  long-term
capital gain or loss equal to the difference between consideration received upon
such disposition and the option exercise price.

    Generally,  if an optionee disposes of the common stock received on exercise
of an  incentive  stock option less than two years after the date the option was
granted or less than one year after the date the  option  was  exercised,  it is
considered  to  be  a   "disqualifying   disposition."   At  the  time  of  such
disqualifying  disposition,  the optionee will recognize  ordinary income in the
amount  equal to the lesser of (i) the fair market  value of the common stock on
the date of exercise over the option exercise price; or (ii) the amount received
for the common stock over the option exercise price.  Any gain in excess of this
amount will be taxed as capital gain.

    To the extent that an  optionee  recognizes  ordinary  income by reason of a
disqualifying  disposition  of common  stock  acquired  upon the exercise of any
incentive  stock option,  Tegal  generally  will be entitled to a  corresponding
business   expense   deduction  in  the  fiscal  year  of  Tegal  in  which  the
disqualifying disposition occurs, subject to Section 162(m) of the Code.

    Restricted  Stock.  A holder of restricted  stock  generally  will recognize
ordinary  income an amount  equal to the excess of the fair market  value of the
common stock  (determined  without regard to any  restrictions  other than those
that by their terms never  lapse) over the amount,  if any,  paid for the common
stock on the  earlier of the date on which:  (i) the  common  stock is no longer
subject to a substantial risk of forfeiture or (ii) is transferable (without the
transferee  being subject to a substantial  risk of forfeiture).  If, as of such
date, the holder cannot sell the common stock without incurring  liability under
Section  16(b) of the Exchange  Act,  the holder  generally  will not  recognize
ordinary  income with respect to the receipt of the common stock until such time
as the  holder can sell the  common  stock  without  incurring  liability  under
Section  16(b) of the Exchange  Act. For  purposes of  determining  the holder's
income  resulting  from the receipt of the common  stock,  the fair market value
will be determined as of that date.



                                       15


    In the  alternative,  if the  holder  files an  election  with the  Internal
Revenue  Service  pursuant  to Section  83(b) of the Code  within 30 days of the
receipt of the common stock pursuant to an award of restricted stock, the holder
will be taxed in the year the common stock is received on the difference between
the fair market  value of the common stock at the time of receipt and the amount
paid for the common stock, if any. This amount will be taxed as ordinary income.
If shares with respect to which a Section 83(b) election has been made are later
forfeited,  the holder  generally  will be entitled to a capital loss only in an
amount equal to the amount,  if any,  that the holder had paid for the forfeited
shares,  not the amount that the holder had  recognized as income as a result of
the Section  83(b)  election.  Subject to Section  162(m) of the Code,  Tegal is
entitled  to a business  expense  deduction  that  corresponds  to the amount of
ordinary  income  recognized  by the holder in the fiscal year of Tegal in which
such ordinary income is recognized by the holder.

    Stock  Appreciation  Rights.  Generally,  the holder of a stock appreciation
right recognizes no income upon the grant of a stock  appreciation  right.  Upon
exercise,  the holder will recognize as ordinary  income the excess of the value
of the stock appreciation right on the date of exercise over the value as of the
date of grant. If the stock appreciation right is paid in cash, the appreciation
is taxable under Section 61 of the Code. If the committee determines to transfer
shares  of  common  stock  to the  holder  in full  or  partial  payment  of the
appreciation,  the fair market  value of the common  stock so received  over the
amount paid therefor by the holder,  if any, is taxable as ordinary income under
Section 83 of the Code as of the date the stock appreciation right is exercised.
Subject to Section 162(m) of the Code,  Tegal is entitled to a business  expense
deduction that  corresponds to the amount of ordinary  income  recognized by the
holder in the  fiscal  year of Tegal in which the  stock  appreciation  right is
exercised.

    Section 162(m) Limitation.  In general, under Section 162(m) of the Internal
Revenue Code, income tax deductions of publicly-held corporations may be limited
to the extent total  compensation  (including base salary,  annual bonus,  stock
option  exercises,  transfers of property and benefits paid under  non-qualified
plans) for certain executive officers exceeds $1 million (less the amount of any
"excess  parachute  payments" as defined in Section 280G of the Internal Revenue
Code) in any one year.  However,  under Section 162(m), the deduction limit does
not apply to certain "performance-based compensation."

    Under   Section   162(m),   stock   options   and  SARs  will   satisfy  the
"performance-based  compensation"  exception if the award of the options or SARs
are made by a board of  directors  committee  consisting  solely  of two or more
"outside  directors,"  the plan sets the  maximum  number of shares  that can be
granted to any person within a specified  period and the  compensation  is based
solely on an increase  in the stock price after the grant date (i.e.  the option
or SAR  exercise  price is equal to or greater than the fair market value of the
stock  subject to the award on the grant  date).  Other  types of awards such as
restricted  stock may only qualify as  "performance-based  compensation" if such
awards are only granted or payable to the  recipients  based upon the attainment
of objectively  determinable  and  pre-established  performance  goals which are
established by a qualifying  committee and which relate to  performance  targets
which are approved by the corporation's stockholders.

    The 1998 Equity  Participation  Plan has been designed to permit a committee
of outside  directors,  within the  meaning of Section  162(m),  to grant  stock
options,  restricted  stock  and SARs that will  qualify  as  "performance-based
compensation."  In addition,  in order to permit



                                       16


awards  other than  stock  options  and SARs to  qualify  as  "performance-based
compensation",  the 1998 Equity  Participation  Plan provides that the committee
may  designate  as  "Section  162(m)   Participants"   certain  employees  whose
compensation  for a given fiscal year may be subject to the limit on  deductible
compensation  imposed  by  Section  162(m) of the  Internal  Revenue  Code.  The
committee may grant awards to Section  162(m)  Participants  that vest or become
exercisable  upon the  attainment  of  performance  targets  established  by the
committee.

THE BOARD UNANIMOUSLY RECOMMENDS THAT THE STOCKHOLDERS VOTE FOR THE AMENDMENT TO
THE 1998 EQUITY PARTICIPATION PLAN.



                       SECURITIES AUTHORIZED FOR ISSUANCE
                         UNDER EQUITY COMPENSATION PLANS

    The following  table sets forth  information as of March 31, 2003 for all of
our equity  compensation  plans,  including our 1998 Equity  Participation Plan,
Employee  Stock  Purchase  Plan,  1990 Stock Option  Plan,  Amended and Restated
Equity  Incentive  Plan and Third  Amended and  Restated  Stock  Option Plan for
Outside Directors.




                                                                                                       NUMBER OF SECURITIES
                                                                                                      REMAINING AVAILABLE FOR
                                                   NUMBER OF SECURITIES TO BE   WEIGHTED-AVERAGE       FUTURE ISSUANCE UNDER
                                                     ISSUED UPON EXERCISE OF    EXERCISE PRICE OF    EQUITY COMPENSATION PLANS
                                                      OUTSTANDING OPTIONS,    OUTSTANDING OPTIONS,     (EXCLUDING SECURITIES
     PLAN CATEGORY                                     WARRANTS AND RIGHTS     WARRANTS AND RIGHTS    REFLECTED IN COLUMN(A))
     -------------                                 -------------------------  -----------------------------------------------
                                                               (A)                     (B)                      (C)
                                                                                                 
     Equity compensation plans approved by
       security holders.........................           4,952,008                $  3.17                  1,132,475(1)
     Equity compensation plans not approved by
       security holders.........................                   --                    --                         --
       Total....................................           4,952,008                $  3.17                  1,132,475(1)


- ----------


(1)  Includes  91,260 shares  remaining  available for future issuance under our
     Employee  Stock  Purchase  Plan and 90,000 shares  remaining  available for
     future  issuance  under our  Directors  Stock  Option Plan and excludes the
     proposed increase of 4,000,000 shares to the 1998 Equity Participation Plan
     described above.




                        APPROVAL OF FINANCING TRANSACTION
                                (PROPOSAL NO. 3)


        On June 30,  2003,  we entered into a financing  transaction  subject to
stockholder approval in which the agreement provided that we may sell and issue,
to a group  of  private  investors,  units  consisting  of up to (a)  $7,165,000
aggregate  principal amount of our 2.0% Convertible Secured Debentures Due 2011,
convertible  into our common stock at an initial  conversion  price of $0.35




                                       17



per share and (b)  eight-year  warrants to purchase  4,094,286  shares of common
stock  with an  exercise  price of $0.50.  As part of the first  closing of this
financing  transaction,  on June 30, 2003, we sold $929,444  principal amount of
our  2.0%  Convertible  Secured  Debentures  Due  2011  and  warrants  initially
exercisable for 531,111 shares of common stock to a group of private  investors.
The  closing  sales  price of our  common  stock on June 30,  2003 was $0.55 per
share.  Under  Nasdaq  rules,  the sale of  additional  units  to these  private
investors requires stockholder approval because it may result in the issuance of
a number of shares of common stock equal to or greater than 20% of the number of
shares of common  stock  currently  outstanding.  If  stockholders  approve this
financing  transaction,  we  intend  to sell  additional  units to the  group of
private  investors up to the total amount  authorized  by the board of directors
(the "Second Closing").


     Details of the Transaction

     We have sold  $929,444  principal  amount of our 2.0%  Convertible  Secured
Debentures Due 2011, and upon stockholder  approval will sell additional  units,
to a group of private  investors for total  consideration  of up to  $7,165,000.
These investors are "accredited  investors"  under the federal  securities laws,
and therefore the sale constitutes a private  placement exempt from registration
under the federal  securities  laws.  Each unit  consists of our 2%  Convertible
Secured Debentures plus common stock warrants.

     Interest on our 2% Convertible  Secured Debentures of 2% per annum is to be
paid by us on each debenture on a quarterly  basis.  Each  debenture  matures on
June 30, 2011, at which time the principal on each  debenture must be paid by us
to each holder. If we default on payment of any Debentures, the interest on such
Debentures  automatically  increases  to 12% per annum.  Debentures  and accrued
interest  thereon are convertible  into shares of our common stock at a price of
$0.35 per share.  This conversion price is subject to adjustment in the event of
a stock split or stock  dividends or the issuance of common stock or  securities
convertible  into  common  stock  by  us,  excluding   issuances  to  employees,
consultants,  strategic  partners  or major  lenders  or in  connection  with an
acquisition.  Our  obligations  under  the  Debentures  are  secured  by all our
intellectual property, subject to release upon conversion of all the Debentures.
The Debentures provide for standard events of default and payment of expenses of
collection by us and are not permitted to be subordinated to any other creditors
of us. We are  required  to deliver to each  investor  our annual and  quarterly
financial  statements  filed  with  the SEC.  If the  financing  transaction  is
approved by the  stockholders,  one of the investors,  Special  Situations Fund,
will have the right to designate one individual reasonably acceptable to us as a
member of our board of directors.


     The common stock warrants sold with the Debentures as part of each unit are
exercisable  to purchase a number of shares of our common  stock equal to 20% of
the shares  issuable upon  conversion of each  Debenture.  The exercise price is
$0.50  per  share of  common  stock  purchased,  subject  to  adjustment  in the
following instances:

o    if  holders  of common  stock  receive,  without  payment  therefor,  cash,
     additional  stock,  securities or property by way of dividend,  spin-off or
     other corporate  arrangement,  then warrantholders,  upon exercise of their
     warrants,  are  entitled  to  receive  the  amount  of cash,  stock,  other
     securities  or property  which such holders  would hold on the date of such
     exercise  if such  holders  had been the  holder of record of the number of
     shares of common stock  issuable  pursuant to the warrants from the time of
     the issuance of the warrants to and including the date of exercise;




                                       18



o   if the number of shares of common  stock  outstanding  at any time after the
    issuance of the  warrants is  decreased by a  combination  or reverse  stock
    split,  the  exercise  price per share of common  stock  purchased  shall be
    increased,  and the number of shares of common stock  purchasable  under the
    warrants  shall be decreased in proportion  to such decrease in  outstanding
    shares of common stock;

o   if we  effect a  reorganization,  consolidate  with or merge  into any other
    person or transfer all or  substantially  all of our properties or assets to
    any  other  person  under  any  plan  or   arrangement   contemplating   our
    dissolution,  then  warrantholders,  upon exercise of their  warrants at any
    time after the consummation of such reorganization,  consolidation or merger
    or the effective date of such dissolution,  shall be entitled to receive, in
    lieu of the underlying  common stock issuable upon such exercise,  the stock
    and other  securities  and property,  including  cash, to which such holders
    would have been entitled upon such  consummation  or in connection with such
    dissolution,  if such holder had so  exercised  their  warrants  immediately
    prior thereto;

o   if we issue any common stock,  excluding common stock issued or reserved for
    employees, consultants, leasing companies, strategic partners, major lenders
    or upon  conversion  or exercise  of the  Debentures  or the  warrants or in
    connection with  acquisitions  ("excluded  stock"),  for a consideration per
    share less than the purchase price per share in effect  immediately prior to
    the  issuance  of such common  stock,  the  exercise  price shall be reduced
    accordingly  and the number of shares of common stock for which the warrants
    are exercisable shall be increased accordingly;

o    if we issue or sell any securities convertible into our common stock, there
     shall be  determined  the price per  share  for which the  common  stock is
     issuable  upon the  conversion  or exchange  thereof,  and if the price per
     share so determined shall be less than the exercise price,  then such issue
     shall be deemed to be an issue or sale for cash of such  maximum  number of
     shares of  common  stock at the  price  per  share so  determined,  and the
     exercise price shall be adjusted accordingly;

o    if we grant any rights or options to subscribe  for,  purchase or otherwise
     acquire common stock,  other than the "excluded stock" described above, for
     a price that is  determined  to be less than the exercise  price,  then the
     exercise price shall be readjusted accordingly; and

o    if any other event occurs and the foregoing provisions would not adequately
     protect the rights of  warrantholders,  then we shall make such adjustments
     as necessary to protect such rights.

Each warrant is  exerciseable in whole or in part any time for eight years after
its date of  issuance,  at which time it expires.  The warrants can be exercised
via a "cashless"  exercise,  which means that holders of the warrants shall have
the right to exercise the warrants in full or in part by surrendering  shares of
common stock or warrants as payment of the  aggregate  purchase  price per share
for the  warrants  to be  exercised.  For  example,  if the  exercise  price for
exercising  a warrant  to  purchase  100 shares of common  stock is $50.00,  the
holder may pay the exercise price by surrendering 70 shares of common stock or a
warrant  representing  that number of shares of common stock,  assuming a market
price of $0.72 per share.




                                       19



     In connection  with the sale of units on June 30, 2003, we are obligated to
file by July 30, 2003 a registration  statement relating to the resale of common
stock  issuable upon  conversion  of the  Debentures or exercise of the warrants
which we must keep  effective for up to two years.  On July 29, 2003, we filed a
registration  statement  on Form S-3 to register for resale the shares of common
stock  issuable upon  conversion of the  Debentures and exercise of the warrants
issued on June 30, 2003. If we had failed, or in the future fail, to comply with
our registration  obligations,  we would be subject to liquidated  damages in an
amount equal to 1.5% of the aggregate  amount invested by the Debenture  holders
for each 30-day period or pro rata for any portion thereof following the date by
which a registration  statement should have been filed. If stockholders  approve
this proposal and we  subsequently  sell  additional  units,  we will file a new
registration  statement  relating to the resale of common  stock  issuable  upon
conversion  of the  Debentures  or  exercise  of the  warrants  issued  in  that
transaction.

     Under  the  terms of the  financing  transaction,  (i)  Bentley  Securities
Corporation,  one of our financial advisors,  is entitled to a cash fee of up to
5% of the gross  proceeds  of the  financing  (approximately  $358,250  assuming
stockholder approval of the transaction),  and (ii) TSD Trading, LLC, one of our
financial advisors,  shall be entitled to a cash fee of up to 1.65% of the gross
proceeds of the financing  (approximately $118,223 assuming stockholder approval
of the  transaction),  plus cash or  warrants  with an  exercise  price of $0.35
representing  up to 3.75% of the gross  proceeds  of the  financing  and  actual
expenses plus $75,000 (not to exceed $100,000 in the  aggregate);  provided that
we shall not be  obliged  to make any  payment  of any fees or  expenses  to any
investment banker,  broker or finder in connection with the financing (including
the fees  mentioned  above)  unless  and  until  the  stockholders  approve  the
financing and the Second Closing has been  consummated.  In connection  with the
financing  transaction,  on June 30, 2003, we entered into a financial  advisory
agreement with Orin Hirschman.  Mr.  Hirschman  manages  investments for private
investment  firms  and  has  no  prior   affiliation  with  Bentley   Securities
Corporation,  TSD  Trading,  LLC or  any  affiliates  of  Tegal.  The  agreement
specifies  compensation to Mr. Hirschman for services to be performed by him for
us in the future in connection with the introduction of potential  acquisitions,
strategic partners, merger partners or investors. Such compensation,  consisting
of cash  equal to 4% of the  value of the  transaction,  is to be paid only upon
completion  of a  transaction  involving an entity or person  introduced  by Mr.
Hirschman  to  us.  The  agreement  does  not  include  the  proposed  financing
transaction and expires, unless extended by us, on June 30, 2006.

     In the first stage of the financing,  the $929,444  principal amount of our
2.0% Convertible  Secured Debentures Due 2011 and warrants sold on June 30, 2003
to a group of private  investors  consisted of Debentures  which are convertible
into  2,655,554  shares of common stock and warrants which are  exercisable  for
531,111  shares  of  common  stock.  Upon  such  conversion  and  exercise,  the
percentage  of our  common  stock that will be held by those  investors  will be
16.6%. Upon stockholder approval, we will complete the Second Closing by selling
an additional  $6,235,500 principal amount of our Debentures and warrants to the
same investors.  These additional  Debentures will be initially convertible into
17,815,714  shares  of  common  stock,  and  the  additional  warrants  will  be
exercisable  for  3,563,143  shares of our common  stock.  Assuming that all the
Debentures  are converted  and  exercised  and no  additional  shares are issued
following the Second Closing, the private investors will own approximately 60.4%
of our outstanding shares. Except for Neil I. Goldman, A. Alexander Arnold, III,
Karl Niehoff and Trainer  Wortham,  each of whom is an existing  stockholder  of
Tegal, Tegal has no prior affiliation with any of the proposed investors.




                                       20


Proposed Investors

         The following table sets forth the names of the proposed investors, the
number of shares of our common stock  issuable upon  conversion  and exercise of
the Debentures and warrants purchased by such investors in June 30, 2003 and the
aggregate  number of shares to be held by such  investors  following  the Second
Closing.  Beneficial ownership is determined in accordance with Rule 13d-3 under
the Securities Exchange Act of 1934. Percentage ownership is based on 16,099,949
shares of common stock outstanding as of July 10, 2003.





                                                   Shares Beneficially Owned          Shares Beneficially Owned
              Name of Investors                   Prior to the Second Closing    Subsequent to the Second Closing (1)
              -----------------                   ---------------------------    ------------------------------------
                                                    Shares          Percent             Shares            Percent
                                                    ------          -------             ------            -------
                                                                                                
Hershel Berkowitz                                   48,923           0.3%              377,142              1.0%
Orin Hirshman                                      217,929           1.1%             1,679,996             4.1%
Steven Spira                                        66,713           0.4%              514,284              1.3%
CAM Co.(2)                                         177,901           0.9%             1,371,425             3.4%
Ganot Corporation(3)                               177,901           0.9%             1,371,425             3.4%
Anfel Trading Limited(4)                            88,951           0.5%              685,713              1.7%
Dr. Jack Dodick                                    177,901           0.9%             1,371,425             3.4%
Globis Capital Partners, L.P.(5)                   155,664           0.8%             1,199,997             3.0%
Paul Packer                                         22,237           0.1%              171,428              0.4%
Richard Grossman                                    44,475           0.2%              342,856              0.8%
Mazel D&K, Inc.(6)                                  44,475           0.2%              342,856              0.8%
James Kardon                                        6,671            0.0%               51,428              0.1%
Neal I. Goldman                                    155,644           0.8%             1,199,997             3.0%
A. Alexander Arnold, III                            22,237           0.1%              171,428              0.4%
Trust U/W Kenneth R. Berol                          44,475           0.2%              342,856              0.8%




                                       21





                                                                                                
  FBO John A. Berol(7)
Trust U/W Kenneth R. Berol                          44,475           0.2%              342,856              0.8%

  FBNO David A. Berol(7)
Berol Family Trust                                  44,475           0.2%              342,856              0.8%

  FBO Margaret Beattie(7)
Laddcap Value Partners, LP                          88,951           0.5%              685,713              1.7%
Schottenfeld Qualified Associates, LP              222,376           1.2%             1,714,281             4.2%
CSL Associates LP                                   44,475           0.2%              342,856              0.8%
Performance Capital Group, LLC                      44,475           0.2%              342,856              0.8%
Hilary Shane                                        88,951           0.5%              688,713              1.7%
Kinderhook Capital Partners, LLC                    22,237           0.1%              171,428              0.4%
Karl Niehoff                                        22,237           0.1%              171,428              0.4%
Special Situations Private Equity Fund, L.P.(8)    667,130           3.5%             5,142,844            12.6%
Special Situations Technology Fund, L.P.(8)        371,968           1.9%             2,867,470             7.1%
Special Situations Technology Fund II, L.P.(8)      72,785           0.4%              561,091              1.4%

TOTAL                                             3,186,632          16.4%            24,568,648           60.3%



- --------------------------------


(1) Assumes the  conversion  and exercise of all  Debentures  and warrants to be
    held by such investors.

(2) Charles Alpert is the beneficial owner or control person for CAM Co.

(3) Sisel  Klurman  is  the  beneficial   owner  or  control  person  for  Ganot
    Corporation.

(4) Andre  Zolty is the  beneficial  owner or control  person for Anfel  Trading
    Limited.

(5) Paul Packer is the  beneficial  owner or control  person for Globis  Capital
    Partners, L.P.

(6) Reuven Dessler is the control person for Mazel D&K, Inc.

(7) Voting  rests with the  trustees  of the three  trusts,  all of whom are the
    same. A. Alexander Arnold, III is a trustee.

(8) MG Advisers,  L.L.C. ("MG") is the general partner of and investment adviser
    to the Special  Situations  Private Equity Fund,  L.P. SST Advisers,  L.L.C.
    ("SSTA") is the  general  partner of and  investment  adviser to the Special
    Situations  Technology Fund, L.P. and Special Situations Technology Fund II,
    L.P. Austin W. Marxe and David M. Greenhouse are the principal  owners of MG
    and SSTA and are principally responsible for the selection,  acquisition and
    disposition of the portfolio securities by each investment advisor on behalf
    of its funds.



                                       22


     Use of Proceeds

     We  intend  to use the  proceeds  from the sale of units in this  financing
transaction for general corporate purposes and working capital.

     The Board of Directors Recommends Approval of this Financing Transaction

     Few companies in our industry,  if any, predicted that the current downturn
would  last as long and be as severe as we have  experienced.  Between  2000 and
2002,  overall  capital  spending  in  semiconductors  declined  by more than 60
percent.  At best,  spending stabilized between 2002 and 2003, as we entered the
third full year of an historic  downturn.  In the past two years,  we have taken
decisive actions to ensure that we would survive this unprecedented downturn.

     The  first  step  that we took  was to  implement  a major  cost  reduction
program,  which has resulted in a savings going forward of more than $20 million
annually,  compared  to our  expense  levels  only two years ago. We closed some
operations,  reduced the number of staff worldwide,  lowered overhead costs, and
implemented across-the-board pay cuts among out staff and management.

     Next, we moved to strengthen  our  leadership in our target  markets and to
expand our market and  technology  leadership  into a band of  adjacent  markets
central to certain etch and deposition processes related to new materials.  This
strategy  was  behind  our  acquisition  of  Sputtered  Films,  Inc.,  which was
completed in August 2002 and which has been  successful in providing new sources
of revenue for us.

     As a result of our operating losses,  however,  our cash balance at the end
of the fiscal year has  declined.  Beginning  last year, in addition to pursuing
cost reductions,  we began to explore options for strategic  relationships  with
larger  companies  in our  industry,  along  with  efforts  to raise  additional
capital. We found both efforts challenging.

     At a time when many companies in our industry are contracting,  we found it
difficult to engage the imagination of managements of those  companies,  despite
the potential value of the  intellectual  property and know-how  inherent in our
company. Furthermore,  following the demise of many venture-backed companies and
the lack of liquidity for small companies in the stock market,  we found capital
to be extremely scarce.

     However,  we are pleased to have found a group of private investors willing
to look at our future  potential.  We believe that the proposed  financing is in
our  best  interests  and may be the only  option  available  to allow  Tegal to
continue as a going concern.


     This financing will significantly  dilute your stockholding.  However,  our
history of net losses and  negative  cash  flows  from  operations  have  raised
substantial  doubt as to our  ability to continue  as a going  concern,  and our
auditors  have  included a going concern  uncertainty  explanatory  paragraph in
their latest  auditors' report dated June 10, 2003 which is included in our 10-K
for the fiscal year ended March 31, 2003. Therefore,  if our stockholders do not
approve the proposals necessary to secure the proposed investment,  Tegal may be
compelled to cease  operations and we could be forced to liquidate with most, if
not all, of the proceeds going to the current holder of the Debentures.




                                       23


     The Company's  directors,  executive officers and certain stockholders (who
currently hold common stock  representing  approximately  24% of our outstanding
common stock) have indicated that they intend to vote all shares of common stock
over which they exercise  voting power as of the close of business on the record
date in favor of approval of Proposal 3.

THE BOARD UNANIMOUSLY  RECOMMENDS THAT THE STOCKHOLDERS VOTE FOR THE APPROVAL OF
THIS FINANCING TRANSACTION.



          APPROVAL OF THE AMENDMENT TO THE CERTIFICATE OF INCORPORATION
                                (PROPOSAL NO. 4)

     On June 3,  2003,  the board of  directors  approved  an  amendment  to the
Company's  Certificate  of  Incorporation  to increase the number of  authorized
shares of common stock for issuance from 35,000,000 to 100,000,000. The board of
directors recommends that the Company's stockholders approve this amendment.


     As of July 29, 2003, the number of  outstanding  shares of common stock was
16,099,949,  and the number of  authorized  shares of common stock  reserved for
issuance  pursuant  to  options,  warrants,  contractual  commitments  (assuming
approval of Proposal No. 3) or other  arrangements was 9,771,216.  The number of
authorized  shares of common stock  reserved  for issuance  pursuant to options,
warrants, contractual commitments or other arrangements after the second tranche
will be 40,406,109.

     The Company  anticipates  that  approximately  27,000,000 of the additional
authorized  shares of common stock will be used for the issuance of common stock
upon conversion of Debentures and warrants to the group of private  investors as
discussed  above in  Proposal  No. 3. If the  amendment  to our  certificate  of
incorporation  is not  approved,  we will be unable to  complete  the  financing
transaction  described  in Proposal  No. 3 and we may be unable to continue as a
going concern.  The additional  authorized shares for which stockholder approval
is sought may be used by the  Company  for other  purposes,  including,  without
limitation,  the issuance of stock to obtain additional  capital or the issuance
of stock in  connection  with  stock  dividends,  stock  splits or other  equity
compensation and employee benefit plans that may be adopted in the future.

     The added flexibility of having additional  authorized shares available for
the purposes described in the preceding paragraphs without the expense and delay
of  obtaining  stockholder  approval at the time of the  issuance of  additional
shares is now  considered by the board of directors to far outweigh the dilution
to our  outstanding  common  stock  noted in  Proposal  No. 5 below and the cost
savings of maintaining fewer authorized  shares. As of July 29, 2003,  6,328,733
authorized  and  unissued  shares are not  reserved for any specific use and are
available for future  issuances.  Assuming this Proposal No. 4 is approved,  the
number of authorized  and unissued  shares not reserved for any specific use and
available  for  future  issuances  would be  43,493,942.  Note that there may be
additional  potential dilution to you if the reverse stock split in Proposal No.
5 is approved by the stockholders and if Tegal's board of directors effects such



                                       24



a reverse  stock split,  as Tegal would then have far fewer shares  outstanding.
For example,  if Proposal No. 3,  Proposal No. 4 and Proposal No. 5 are approved
and consummated  and the board of directors  effects a 1:10 reverse stock split,
we would have available for issuance  approximately  95,959,389 shares, which if
issued,  would result in substantial dilution to you. Assuming that the proposed
amendment  is approved at the annual  meeting,  the board of  directors  will be
entitled to  authorize  the  issuance of the  additional  shares of common stock
without  further  approval  of  the  Company's  stockholders,   subject  to  any
applicable laws or Nasdaq rules which require  stockholder  approval for certain
stock  issuances  such as the issuance of shares equal to or greater than 20% of
the number of shares of common stock  currently  outstanding or shares issued in
connection with the sale or other change of control of Tegal.  Currently,  we do
not  anticipate  that the  additional  shares  will be used for any  significant
transactions.

Possible Existing Anti-Takeover Effect of Our Articles, By-laws and Agreements


     Under certain circumstances, an increase in the authorized number of shares
of common stock could have an  anti-takeover  effect by making it more difficult
for a person or group to obtain  control  of the  Company  (and  thereby  remove
incumbent  management) by means of a tender offer,  merger or other transaction.
For example,  the Company's issuance of additional shares in a public or private
sale, merger or other transaction or pursuant to the exercise of rights pursuant
to our stockholder  rights plan would increase the number of outstanding  shares
and  thereby  dilute the  equity  interest  and voting  power of a person who is
attempting  to  obtain  control  of the  Company.  By  potentially  discouraging
initiation  of an attempt by a third party to gain control of the  Company,  the
proposed  increase  in the  authorized  number of shares  could,  under  certain
circumstances,  limit the ability of  stockholders to dispose of their shares at
the higher prices that are sometimes  available in takeover  attempts or similar
transactions.


     Each  holder of our common  stock is entitled to one vote per share held of
record on all  matters  submitted  to a vote of the  stockholders.  There are no
cumulative voting or preemptive rights applicable to any shares of common stock.
All shares of common stock are entitled to participate pro rata in distributions
and in such  dividends as may be declared by the Board of Directors out of funds
legally  available  therefor,  subject to any  preferential  dividend  rights of
outstanding shares of preferred stock. Subject to the prior rights of creditors,
all shares of common stock are entitled in the event of liquidation, dissolution
or winding up of Tegal to  participate  ratably in the  distribution  of all the
remaining assets of Tegal after distribution in full of preferential amounts, if
any, to be  distributed  to holders of  preferred  stock.  However,  the rights,
preferences and privileges of holders of common stock are subject to, and may be
adversely  affected by, the rights of any series of preferred stock which we may
designate  and issue in the  future.  Our  common  stock is also  subject to the
Rights Agreement dated June 11, 1996, as amended, between us and Mellon Investor
Services LLC, as rights agent,  in which each share of our common stock includes
one common share purchase right.  Additional  details  regarding our rights plan
can be found on our most recent Form 10-K,  which has been previously filed with
the SEC.

     The Board of Directors has the  authority,  without  further  action by the
stockholders,  to issue up to 5,000,000 shares of preferred stock in one or more
series and to fix the  rights,  terms of  redemption,  liquidation  preferences,
sinking  fund  terms and the  number of shares  constituting




                                       25



any series or the designation of such series, without any further vote or action
by  stockholders.  We  believe  that the Board of  Directors'  ability  to issue
preferred  stock on such a wide variety of terms will enable the preferred stock
to be used for important corporate purposes,  such as financing  acquisitions or
raising  additional  capital.  However,  were it inclined to do so, the Board of
Directors  could  issue all or part of the  preferred  stock with  (among  other
things)  substantial voting power or advantageous  conversion rights. Such stock
could be issued to persons  deemed by the Board of  Directors  likely to support
current management in a contest for control of Tegal,  either as a precautionary
measure or in response to a specific  takeover threat.  We have no current plans
to issue preferred stock.

     The  voting  provisions  of the  common  stock  and  the  broad  discretion
conferred  upon the Board of Directors with respect to the issuance of preferred
stock  (including  the  power  to  confer   preferential  voting  rights)  could
substantially impede the ability of one or more stockholders (acting in concert)
to acquire sufficient influence over the election of directors and other matters
to  effect  a change  in  control  or  management  of  Tegal,  and the  Board of
Directors' ability to issue preferred stock could also be utilized to change the
economic and control structure of Tegal. As a result, such provisions,  together
with  certain  other  provisions  of the  By-laws,  may be  deemed  to  have  an
anti-takeover  effect and may delay, defer or prevent a tender offer or takeover
attempt that a particular  stockholder might consider in such stockholders' best
interest,  including  attempts  that might  result in a premium  over the market
price for the shares of common stock held by such stockholder.


     Notwithstanding  the  foregoing,  the proposal by the board of directors to
increase the number of authorized  shares of stock is not being made in response
to any effort known by the board of directors to acquire  control of the Company
by means of a merger,  accumulation  of stock,  tender  offer,  solicitation  in
opposition  to  management  or  otherwise,  and the board of directors  does not
presently  intend  to  adopt  or  propose  other  anti-takeover  provisions  not
described in this Proxy Statement.

     The text of the form of amendment to our Certificate of Incorporation  that
would be filed with the  Secretary  of State of the State of  Delaware to effect
the  increase  in  authorized  shares is set forth in  Appendix  B to this proxy
statement;  provided, however, that such text is subject to amendment to include
such  changes as may be required by the office of the  Secretary of State of the
State of Delaware and as the board of directors deems necessary and advisable to
effect the increase in authorized  shares.  If the increase in authorized shares
is approved by the  stockholders,  our  Certificate  of  Incorporation  would be
amended accordingly.


     The Company's  directors,  executive officers and certain stockholders (who
currently hold common stock  representing  approximately  24% of our outstanding
common stock) have indicated that they intend to vote all shares of common stock
over which they exercise  voting power as of the close of business on the record
date in favor of approval of Proposal No. 4.


THE BOARD UNANIMOUSLY RECOMMENDS THAT THE STOCKHOLDERS VOTE FOR THE AMENDMENT TO
THE ARTICLES OF INCORPORATION.





                                       26


           RE-APPROVAL OF THE AUTHORIZATION OF THE REVERSE STOCK SPLIT
                                (PROPOSAL NO. 5)

     The board of directors  recommends  that the  stockholders  re-approve  the
authorization  of a reverse  stock split that was  approved by the  stockholders
(the "Prior Approval") in a Special Meeting of Stockholders on Monday, April 28,
2003 (the "Special  Meeting").  We are asking  stockholders  to  re-approve  the
reverse  stock  split in light of the  developments  that have  occurred  to the
Company since the Special Meeting.

General

     The  board  of  directors  has  considered,  deemed  advisable,  adopted  a
resolution  approving and  recommends to the  stockholders  for their approval a
series of proposed  amendments to our Certificate of  Incorporation to authorize
the board to effect a reverse  stock  split for the  purpose of  increasing  the
per-share  market  price of our common stock in order to maintain its listing on
The Nasdaq Stock Market's SmallCap Market (the "SmallCap  Market") and for other
purposes  as  described  below in this proxy  statement.  Under  these  proposed
amendments,  each  outstanding 2, 3, 5, 10 or 15 shares of common stock would be
combined,  converted  and changed into one share of common  stock (the  "Reverse
Stock  Splits"),  with the  effectiveness  of one such amendment (the "Effective
Reverse  Stock  Split")  and the  abandonment  of the other  amendments,  or the
abandonment  of all such  amendments,  to be determined at the discretion of the
board  pursuant  to  Section  242(c) of the  Delaware  General  Corporation  Law
following the special meeting.


     If  approved  by the  stockholders,  the  Prior  Approval  would be  deemed
superseded and withdrawn by the stockholders and the board would have discretion
to implement the  Effective  Reverse Stock Split for one time only in any of the
following  ratios:  1:2,  1:3,  1:5,  1:10 or  1:15.  The  board  believes  that
stockholder  approval of selected exchange ratios within an exchange ratio range
(as opposed to approval of a specified  exchange  ratio) would provide the board
with maximum  flexibility to achieve the purposes of the Effective Reverse Stock
Split and,  therefore,  is in the best interests of Tegal and its  stockholders.
The actual timing for  implementation of the Effective Reverse Stock Split would
be  determined  by the board  based upon its  evaluation  as to when such action
would  be  most  advantageous  to  Tegal  and  its  stockholders.   Furthermore,
notwithstanding  stockholder approval,  the board also would have the discretion
not to implement an Effective Reverse Stock Split. If the board were to elect to
implement an  Effective  Reverse  Stock  Split,  the board will set the exchange
ratio using one of the ratios approved by the stockholders. The board would base
such a determination upon the then current trading price of our common stock and
the advice of our financial  advisers,  among other things. If Proposal No. 4 is
not  approved  by the  stockholders,  Tegal may face  delisting  from the Nasdaq
SmallCap  Market,  as more  fully  described  below  under the  heading  "Nasdaq
Listing."


     The text of the form of amendment to our Certificate of Incorporation  that
would be filed with the  Secretary  of State of the State of  Delaware to effect
the  Effective  Reverse  Stock  Split is set forth in  Appendix  C to this proxy
statement;  provided, however, that such text is subject to amendment to include
such  changes as may be required by the office of the  Secretary of State of the
State of Delaware and as the board deems  necessary  and advisable to effect the
Effective  Reverse Stock Split.  If the Reverse Stock Splits are approved by the
stockholders  and following such approval the board determines that an Effective
Reverse Stock Split is in the best interest of Tegal and its  stockholders,  our
Certificate of Incorporation would be amended accordingly.



                                       27


     Purpose of the Effective Reverse Stock Split

     The board  recommends  the Effective  Reverse Stock Split for the following
reasons:


     |X|  The board believes that the Effective  Reverse Stock Split is the most
          effective means of increasing the per-share market price of our common
          stock in order to maintain our listing on the SmallCap Market; and


     |X|  The board believes that a higher  per-share market price of our common
          stock could encourage  investor  interest in Tegal and promote greater
          liquidity for our stockholders.


     Nasdaq Listing. Our stock is currently listed on The Nasdaq SmallCap Market
under the symbol  "TGAL." The Nasdaq  Stock  Market's  Marketplace  Rules impose
certain minimum  financial  requirements on us for the continued  listing of our
stock.  One such  requirement is the minimum bid price on our stock of $1.00 per
share.  Beginning in 2002,  there have been periods of time during which we have
been out of  compliance  with the $1.00 minimum bid  requirements  of the Nasdaq
SmallCap Market.


    On September 6, 2002, we received  notification  from Nasdaq that for the 30
days prior to the  notice,  the price of our common  stock had closed  below the
minimum  $1.00 per share bid price  requirement  for continued  inclusion  under
Marketplace Rule 4450(a)(5) (the "Rule"), and were provided 90 calendar days, or
until December 5, 2002, to regain compliance.  Our bid price did not close above
the minimum  during that period.  On December 6, 2002, we received  notification
from  Nasdaq that our  securities  would be  delisted  from The Nasdaq  National
Market,  the  exchange  on which our stock was listed  prior to May 6, 2003,  on
December 16, 2002 unless we either (i) applied to transfer our securities to The
Nasdaq SmallCap  Market,  in which case we would be afforded  additional time to
come into  compliance  with the  minimum  $1.00 bid price  requirement;  or (ii)
appealed the Nasdaq staff's determination to the Nasdaq's Listing Qualifications
Panel (the  "Panel").  On December 12, 2002 we requested an oral hearing  before
the Panel and such  hearing took place on January 16, 2003 in  Washington,  D.C.
Our appeal was based,  among other things,  on our intention to seek stockholder
approval for a reverse split of our outstanding common stock. On May 6, 2003, we
transferred  the listing of our common stock to the Nasdaq SmallCap  Market.  In
connection with this transfer, Nasdaq granted us an extension until September 2,
2003,  to regain  compliance  with the Rule's  minimum $1.00 per share bid price
requirement for continued  inclusion on the Nasdaq SmallCap Market (which may be
further  extended to December 1, 2003 so long as Tegal  continues  to meet other
continued listing requirements).


    Alternatives  to trading on the  SmallCap  Market  include  being listed for
trading  the OTC  Bulletin  board  or in the  "pink  sheets"  maintained  by the
National  Quotation Bureau,  Inc. However,  the alternatives of the OTC Bulletin
board and the "pink  sheets" are generally  considered to be less  efficient and
less broad-based than the SmallCap Market, and therefore less desirable.



                                       28


     We believe that delisting from the SmallCap Market could  adversely  affect
(i) the liquidity  and  marketability  of shares of our common  stock;  (ii) the
trading price of our common stock; and (iii) our relationships  with vendors and
customers.  We also believe that the SmallCap  Market  provides a broader market
for our common stock than would the OTC Bulletin  board or the "pink sheets" and
is, therefore, preferable to those alternatives. We believe that a reverse stock
split may have the effect of increasing the trading price of our common stock to
a level high enough to satisfy  the Nasdaq  minimum  bid price  requirement  for
continued listing of our common stock on the SmallCap Market, and that a reverse
stock split would be the most effective  means available to avoid a delisting of
our common  stock.  During the period from January 1, 2002 to July 1, 2003,  the
closing sales price per share of our common stock ranged from a high of $2.00 to
a low of $0.13. The closing sales price on July 2, 2003 was $0.57.

     Increased  Investor  Interest.  We also  believe  that an  increase  in the
per-share price of our common stock could encourage  increased investor interest
in our common stock and possibly promote greater liquidity for our stockholders.
We believe that the current low per-share  price of our common  stock,  which we
believe is due in part to the overall weakness in the market for stocks, has had
a negative effect on the marketability of our common stock. We believe there are
several reasons for this effect. First, many institutional investors view stocks
trading at low prices as unduly  speculative  in nature and, as a result,  avoid
investing  in  such  stocks.   Second,   because  the  brokers'  commissions  on
lower-priced  stocks generally  represent a higher percentage of the stock price
than  commissions on higher priced stocks,  the current  per-share  price of our
common stock can result in  individual  stockholders  paying  transaction  costs
(commissions, markups or markdowns) that constitute a higher percentage of their
total share value than would be the case if the share price of our common  stock
were  substantially  higher.  This  factor  may also  limit the  willingness  of
institutional  investors  to  purchase  our common  stock.  Third,  a variety of
policies and practices of brokerage firms discourage  individual  brokers within
those firms from dealing in  low-priced  stocks.  These  policies and  practices
pertain to the payment of brokers' commissions and to time-consuming  procedures
that make the  handling of  low-priced  stocks  unattractive  to brokers from an
economic  standpoint.  Fourth,  many brokerage  firms are reluctant to recommend
low-priced  stocks to their customers.  Finally,  the analysts at many brokerage
firms do not monitor  the trading  activity  or  otherwise  provide  coverage of
low-priced stocks.

     Although any  increase in the market  price of our common  stock  resulting
from the  Effective  Reverse  Stock Split may be  proportionately  less than the
decrease in the number of outstanding  shares,  we anticipate that the Effective
Reverse  Stock  Split will result in an increase in the bid price for our common
stock that will be large enough to avoid  delisting from the SmallCap Market and
possibly  to  reduce  the  effect  of  some  of  the  policies,   practices  and
circumstances referred to above.

     Possibility that the Effective Reverse Stock Split Will Fail to Achieve the
Desired Effects; Other Possible Consequences

     Stockholders  should note that the effect of the  Effective  Reverse  Stock
Split upon the market price for our common stock cannot be accurately predicted.
In  particular,  we cannot assure you that prices for shares of our common stock
after the Effective Reverse Stock Split will be two, three, five, ten or fifteen
times,  as  applicable,  the prices for shares of our common  stock  immediately
prior to the Effective  Reverse Stock Split.  Furthermore,  we cannot assure you



                                       29


that the  market  price of our  common  stock  immediately  after  the  proposed
Effective Reverse Stock Split will be maintained for any period of time. Even if
an increased  per-share  price can be  maintained,  the Effective  Reverse Stock
Split may not  achieve  the  desired  results  that have  been  outlined  above.
Moreover,  because some  investors  may view the  Effective  Reverse Stock Split
negatively, we cannot assure you that the Effective Reverse Stock Split will not
adversely  impact the market price of our common stock or,  alternatively,  that
the market price following the Effective  Reverse Stock Split will either exceed
or remain in excess of the current market price.

     While we expect the  Effective  Reverse  Stock  Split to be  sufficient  to
prevent Nasdaq from delisting our common stock, it is possible that, even if the
Effective  Reverse  Stock Split results in a bid price for our common stock that
exceeds  $1.00  per  share,  we may not be  able  to  continue  to  satisfy  the
additional  criteria for  continued  listing of our common stock on the National
Market.  We would also need to satisfy  additional  criteria to continue to have
our common stock eligible for continued  listing on the SmallCap  Market.  These
criteria require that:

     |X|  we have stockholders' equity of at least $2.5 million;

     |X|  the market  value of the public  float of our common stock be at least
          $1.0 million  (public float defined under Nasdaq's rules as the shares
          held by persons other than officers,  directors and beneficial  owners
          of greater than 10% of our total outstanding shares);

     |X|  there be at least 300 round lot holders (defined as persons who own at
          least 100 shares of our common stock);

     |X|  there be at least two market makers for our common stock; and

     |X|  we comply with certain corporate governance requirements.


     We believe  that we satisfy all of these other  maintenance  criteria as of
the mailing date of these proxy materials. However, we cannot assure you that we
will be successful in continuing to meet all requisite maintenance criteria.

     If the Effective Reverse Stock Split is implemented,  some stockholders may
consequently  own less than 100 shares of common  stock.  A purchase  or sale of
less than 100 shares  (an "odd lot"  transaction)  may  result in  incrementally
higher  trading costs  through  certain  brokers,  particularly  "full  service"
brokers.  Therefore,  those  stockholders who own less than 100 shares following
the  Effective  Reverse  Stock Split may be  required to pay higher  transaction
costs if they sell their shares in us.

     We believe  that the  Effective  Reverse  Stock Split may result in greater
liquidity for our stockholders. However, it is also possible that such liquidity
could be adversely  affected by the reduced number of shares  outstanding  after
the Effective Reverse Stock Split.

     Board Discretion to Implement Effective Reverse Stock Split



                                       30



     If the Reverse Stock Splits are approved by our stockholders at the special
meeting,  the Effective  Reverse  Stock Split will be effected,  if at all, only
upon a determination  by the board that one of the Reverse Stock Splits (with an
exchange  ratio  determined  by the  board as  described  above)  is in the best
interests of Tegal and its stockholders. Such determination shall be made within
one year of  stockholder  approval and be based upon the advice of our financial
advisors and certain other factors,  including meeting and responding to changes
in  Nasdaq's  listing  requirements  for the  SmallCap  Market such as the $1.00
trading price requirement,  Tegal's growth,  existing and expected marketability
and  liquidity  of our  common  stock,  prevailing  market  conditions,  analyst
coverage of our common  stock and the likely  effect on the market  price of our
common  stock.  Notwithstanding  approval  of the  Reverse  Stock  Splits by the
stockholders, the board may, in its sole discretion, abandon all of the proposed
amendments  and  determine  prior to the  effectiveness  of any filing  with the
Delaware  Secretary of State not to effect any of the Reverse Stock  Splits,  as
permitted under Section 242(c) of the Delaware General Corporation Law.


     Effect of the  Effective  Reverse  Stock Split on  Registration  and Voting
Rights

     Our  common  stock  is  currently  registered  under  Section  12(g) of the
Securities  Exchange Act of 1934, as amended (the  "Exchange  Act"),  and we are
subject to the periodic  reporting and other  requirements  of the Exchange Act.
The  Effective  Reverse  Stock  Split would not affect the  registration  of our
common stock or our  reporting  obligations  under the Exchange  Act.  After the
Effective Reverse Stock Split, our common stock would continue to be reported on
the SmallCap  Market under the symbol "TGAL"  (although  Nasdaq would likely add
the letter "D" to the end of the trading  symbol for a period of 20 trading days
to indicate that the Effective Reverse Stock Split has occurred).

     Proportionate voting rights and other rights of the holders of common stock
would not be  affected by the  Effective  Reverse  Stock Split  (other than as a
result of the payment of cash in lieu of fractional  shares as described below).
For  example,  a holder of 2% of the voting power of the  outstanding  shares of
common stock  immediately  prior to the effective time of the Effective  Reverse
Stock Split would  continue  to hold 2% of the voting  power of the  outstanding
shares of common stock after the  Effective  Reverse  Stock Split.  Although the
Effective Reverse Stock Split would not affect the rights of stockholders or any
stockholder's  proportionate  equity interest in Tegal (subject to the treatment
of fractional shares), the number of authorized shares of common stock would not
be reduced and would  increase  significantly  the ability of the board to issue
such  authorized and unissued  shares without further  stockholder  action.  The
number of stockholders of record would not be affected by the Effective  Reverse
Stock Split (except to the extent that any  stockholder  holds only a fractional
share interest and receives cash for such interest  after the Effective  Reverse
Stock Split).

     Effect of the Effective  Reverse Stock Split on the Authorized but Unissued
Shares of Common Stock


     The number of authorized  but unissued  shares of common stock  effectively
will be increased  significantly  by the  Effective  Reverse  Stock  Split.  The
following  table  illustrates  the  effect  as of July  10,  2003 of each of the
proposed ratios on our (i) 16,099,949 shares of common stock  outstanding,  (ii)
authorized but unissued common stock, (iii) authorized but unissued common stock
assuming  stockholder  approval  of the  increase  to our  authorized  shares in
Proposal No. 4 and (iv) authorized  common stock reserved for issuance  pursuant
to options,  warrants,  contractual  commitments  (including  the  assumption of
stockholder approval of Proposal No. 3) or other arrangements:



                                       31





- ------------ ------------------- ------------------- --------------------------- ---------------------------

   Ratio      (i) Outstanding     (ii) Authorized         (iii) Authorized            (iv) Authorized
              Shares of Common      but Unissued        but Unissued Shares      Common Stock Reserved for
                   Stock               Shares           Assuming Approval of         Issuance Assuming
                                                           Proposal No. 4        Approval of Proposal No. 3
- ------------ ------------------- ------------------- --------------------------- ---------------------------
                                                                             
    1:1          16,099,949          18,900,051              83,900,051                 40,406,109
- ------------ ------------------- ------------------- --------------------------- ---------------------------
    1:2           8,049,975          26,950,025              91,950,025                 20,203,054
- ------------ ------------------- ------------------- --------------------------- ---------------------------
    1:3           5,366,650          29,633,350              94,633,350                 13,468,703
- ------------ ------------------- ------------------- --------------------------- ---------------------------
    1:5           3,219,990          31,780,010              96,780,010                  8,081,227
- ------------ ------------------- ------------------- --------------------------- ---------------------------
   1:10           1,609,995          33,390,005              98,390,005                  4,040,610
- ------------ ------------------- ------------------- --------------------------- ---------------------------
   1:15           1,073,330          33,926,670              98,926,670                  2,693,740
- ------------ ------------------- ------------------- --------------------------- ---------------------------



The  issuance in the future of such  additional  authorized  shares may have the
effect of diluting the  earnings per share and book value per share,  as well as
the stock ownership and voting rights,  of the currently  outstanding  shares of
common stock.  In addition,  the effective  increase in the number of authorized
but unissued shares of common stock may be construed as having an  anti-takeover
effect. Although we are not proposing the Reverse Stock Splits for this purpose,
we could, subject to the board's fiduciary duties and applicable law, issue such
additional  authorized  shares to purchasers who might oppose a hostile takeover
bid or any efforts to amend or repeal certain  provisions of our  Certificate of
Incorporation or bylaws. Such a use of these additional  authorized shares could
render  more  difficult,  or  discourage,  an attempt  to acquire  control of us
through a transaction opposed by the board.

     Effect of the Effective Reverse Stock Split on Stock Options,  Warrants and
Par Value

     The  Effective  Reverse  Stock Split  would  reduce the number of shares of
common stock  available for issuance under our 1998 Equity  Participation  Plan,
Employee  Stock  Purchase  Plan,  1990 Stock Option  Plan,  Amended and Restated
Equity  Incentive  Plan and Third  Amended and  Restated  Stock  Option Plan for
Outside  Directors in proportion to the exchange ratio of the Effective  Reverse
Stock Split. The total number of shares of common stock currently authorized for
issuance but  unissued at June 30, 2003 under these plans is 2,400,00  (prior to
giving effect to the Effective Reverse Stock Split).



                                       32


     We also have  outstanding  certain  stock  options and warrants to purchase
shares of common  stock.  Under the terms of the  outstanding  stock options and
warrants,  the  Effective  Reverse  Stock Split will  effect a reduction  in the
number of shares of common stock  issuable  upon  exercise of such stock options
and warrants in proportion to the exchange ratio of the Effective  Reverse Stock
Split and will effect a  proportionate  increase in the  exercise  price of such
outstanding stock options and warrants. In connection with the Effective Reverse
Stock Split,  the number of shares of common  stock  issuable  upon  exercise or
conversion  of  outstanding  stock  options and warrants  will be rounded to the
nearest  whole  share  and no cash  payment  will be  made  in  respect  of such
rounding. No fractional shares of common stock will be issued in connection with
the proposed  Effective  Reverse Stock Split.  Holders of common stock who would
otherwise  receive a fractional  share of common stock pursuant to the Effective
Reverse  Stock  Split  will  receive  cash in lieu of the  fractional  share  as
explained more fully below.

     The par value of our common stock and preferred stock would remain at $0.01
per share following the effective time of the Effective Reverse Stock Split.

     Effective Date

     If the proposed  Reverse  Stock Splits are approved at the special  meeting
and the board elects to proceed with the Effective Reserve Stock Split in one of
the approved ratios, the Effective Reverse Stock Split would become effective as
of 5:00 p.m.  Eastern time on the date of filing (the  "Effective  Date") of the
applicable certificate of amendment to the Certificate of Incorporation with the
office of the  Secretary of State of the State of Delaware.  Except as explained
below with respect to fractional shares, on the Effective Date, shares of common
stock issued and outstanding  immediately  prior thereto will be,  automatically
and without any action on the part of the stockholders,  combined, converted and
changed into new shares of common stock in accordance with the Effective Reverse
Stock Split ratio  determined  by the board  within the limits set forth in this
proposal.

     Exchange of Stock Certificates

     Shortly after the Effective Date, each holder of an outstanding certificate
theretofore  representing  shares of  common  stock  will  receive  from  Mellon
Investor  Services,  as our  exchange  agent  (the  "Exchange  Agent")  for  the
Effective   Reverse  Stock  Split,   instructions  for  the  surrender  of  such
certificate  to the Exchange  Agent.  Such  instructions  will include a form of
transmittal  letter to be completed and returned to the Exchange  Agent. As soon
as practicable after the surrender to the Exchange Agent of any certificate that
prior to the Effective Reverse Stock Split  represented  shares of common stock,
together with a duly  executed  transmittal  letter and any other  documents the
Exchange  Agent may specify,  the Exchange  Agent shall deliver to the person in
whose name such certificate had been issued certificates  registered in the name
of such person representing the number of full shares of common stock into which
the shares of common stock previously represented by the surrendered certificate
shall have been  reclassified  and a check for any amounts to be paid in cash in
lieu of any fractional  share.  Until surrendered as contemplated  herein,  each
certificate  that  immediately  prior  to  the  Effective  Reverse


                                       33


Stock Split  represented any shares of common stock shall be deemed at and after
the  Effective  Reverse  Stock Split to  represent  the number of full shares of
common  stock   contemplated  by  the  preceding   sentence.   Each  certificate
representing  shares of common stock  issued in  connection  with the  Effective
Reverse Stock Split will continue to bear any legends  restricting  the transfer
of such shares that were borne by the surrendered certificates  representing the
shares of common stock.

     No service  charges,  brokerage  commissions  or  transfer  taxes  shall be
payable by any holder of any certificate that prior to approval of the Effective
Reverse Stock Split  represented any shares of common stock,  except that if any
certificates of common stock are to be issued in a name other than that in which
the certificates for shares of common stock surrendered are registered, it shall
be a condition of such issuance that:

     |X|  The person  requesting  such  issuance  pay to us any  transfer  taxes
          payable  by reason of such  issuance  or any  prior  transfer  of such
          certificate,  or  establish to our  satisfaction  that such taxes have
          been paid or are not payable;

     |X|  Such transfer comply with all applicable  federal and state securities
          laws; and

     |X|  Such surrendered  certificate be properly endorsed and otherwise be in
          proper form for transfer.


     No Appraisal Rights

     Under Delaware law, our  stockholders  would not be entitled to dissenter's
or appraisal rights with respect to the Effective Reverse Stock Split.

     Cash Payment in Lieu of Fractional Shares

     In lieu of any  fractional  shares to which a holder of common  stock would
otherwise be entitled as a result of the Effective Reverse Stock Split, we shall
pay cash equal to such  fraction  multiplied  by the average of the high and low
trading prices of our common stock on the National Market during regular trading
hours  for  the  five  trading  day  period  ending  on the  last  business  day
immediately preceding the Effective Date.

     Federal Income Tax Consequences

     The following  description of the material  federal income tax consequences
of the Effective  Reverse  Stock Split is based on the Internal  Revenue Code of
1986,  as amended (the  "Code"),  applicable  Treasury  regulations  promulgated
thereunder,  judicial authority and current administrative rulings and practices
as in effect on the date of this  proxy  statement.  Changes  to the laws  could
alter the tax consequences described below, possibly with retroactive effect. We
have not sought  and will not seek an  opinion  of counsel or a ruling  from the
Internal  Revenue Service  regarding the federal income tax  consequences of the
Effective Reverse Stock Split.  This discussion is for general  information only
and does not discuss the tax  consequences  that may apply to special classes of
taxpayers (e.g.,  non-resident aliens,  broker/dealers or insurance  companies).
The state and local tax  consequences  of the Effective  Reverse Stock Split may
vary



                                       34


significantly as to each  stockholder,  depending upon the jurisdiction in which
such  stockholder  resides.  Stockholders  are  urged to  consult  their own tax
advisors to determine the particular consequences to them.

     In general,  the federal income tax  consequences of the Effective  Reverse
Stock Split will vary among  stockholders  depending  upon  whether they receive
cash for fractional  shares or solely a reduced number of shares of common stock
in exchange  for their old shares of common  stock.  We believe that because the
Effective  Reverse Stock Split is not part of a plan to increase  periodically a
stockholder's  proportionate interest in our assets or earnings and profits, the
Effective  Reverse Stock Split will likely have the following federal income tax
effects:  A stockholder who receives solely a reduced number of shares of common
stock will not recognize  gain or loss. In the aggregate,  such a  stockholder's
basis  in  the  reduced  number  of  shares  of  common  stock  will  equal  the
stockholder's  basis in its old  shares  of  common  stock.  A  stockholder  who
receives cash in lieu of a fractional share as a result of the Effective Reverse
Stock  Split  will  generally  be treated as having  received  the  payment as a
distribution  in  redemption  of the  fractional  share,  as provided in Section
302(a) of the Code,  which  distribution  will be taxed as either a distribution
under Section 301 of the Code or an exchange to such  stockholder,  depending on
that stockholder's particular facts and circumstances.  Generally, a stockholder
receiving such a payment should  recognize gain or loss equal to the difference,
if any, between the amount of cash received and the  stockholder's  basis in the
fractional  share. In the aggregate,  such a stockholder's  basis in the reduced
number of shares of common stock will equal the  stockholder's  basis in its old
shares of common stock decreased by the basis allocated to the fractional  share
for which such  stockholder  is entitled to receive cash, and the holding period
of the  post-Effective  Reverse  Stock Split  shares  received  will include the
holding period of the pre-Effective Reverse Stock Split shares exchanged.

     We will not recognize any gain or loss as a result of the Effective Reverse
Stock Split.


     The Company's  directors,  executive officers and certain stockholders (who
currently hold common stock  representing  approximately  24% of our outstanding
common stock) have indicated that they intend to vote all shares of common stock
over which they exercise  voting power as of the close of business on the record
date in favor of approval of Proposal No. 5.


THE BOARD UNANIMOUSLY  RECOMMENDS THAT THE STOCKHOLDERS VOTE FOR THE APPROVAL OF
THE REAUTHORIZATION OF THE REVERSE STOCK SPLIT.



                             PRINCIPAL STOCKHOLDERS

    The following table sets forth  information as of July 10, 2003 with respect
to shares  of our  common  stock  which  are held by  persons  known by us to be
beneficial owners of more than 5% of such stock based upon information  received
from such  persons or  contained  in filings  made with the SEC. For purposes of
this schedule,  beneficial ownership of securities is defined in accordance with
the  rules  of the SEC and  means  generally  the  power to vote or  dispose  of
securities, regardless of any economic interest therein.

                                       35





                                                        COMMON STOCK BENEFICIALLY OWNED
                                                       ----------------------------------
                                                        AMOUNT AND NATURE OF     PERCENT OF
     NAME AND ADDRESS OF BENEFICIAL OWNER               BENEFICIAL OWNERSHIP        CLASS
     ------------------------------------              ----------------------------------
                                                                              
     Carole L. Clarke                                        1,454,885              9.04%
          320 Nopals Street

          Santa Barbara, CA 93103
     Polar Global Technology Fund                            1,075,000              6.68%


                        OWNERSHIP OF STOCK BY MANAGEMENT

    The following  table sets forth  information  with respect to the beneficial
ownership of shares of our common stock by our directors,  the individuals named
in the Summary Compensation Table, and all directors and executive officers as a
group as of July 10, 2003. An asterisk denotes beneficial ownership of less than
1%.



                                                                                               SHARES
                                                                                            BENEFICIALLY    PERCENT
           NAME OF BENEFICIAL OWNER                   POSITION                                OWNED(1)    OF CLASS(1)
           ------------------------                   --------                              -----------   -----------
                                                                                                      
           Michael L. Parodi(2).....................  Chairman of the Board, President        705,500       4.38%
                                                      and Chief Executive Officer
           James D. McKibben(3).....................  Vice President, Worldwide               331,720       2.06%
                                                      Marketing and Sales
           George Landreth(4).......................  Vice President, Product                 295,560       1.84%
                                                      Development
           Jeffrey M. Krauss(5).....................  Director                                171,500       1.07%
           Edward A. Dohring(6).....................  Director                                170,000       1.06%
           H. Duane Wadsworth(7)....................  Director                                 30,000       0.19%
           Directors and Executive Officers as a
             group (9 persons)(8)...................                                         2,031,380      12.62%




                                       36


- ----------
(1)  Applicable  percentage of ownership is based on 16,099,949 shares of common
     stock outstanding as of July 10, 2003. The number of shares of common stock
     beneficially  owned and calculation of percent  ownership of each person or
     group of persons named above, in each case, takes into account those shares
     underlying stock options that are currently  exercisable,  but which may or
     may not be subject to our repurchase  rights held by such person or persons
     but not for any other person.

(2)  Includes  options to  purchase  697,500  shares of common  stock  which are
     exercisable  within 60 days and  excludes  options to  purchase  938 shares
     which are not so exercisable.

(3)  Includes  options to  purchase  326,100  shares of common  stock  which are
     exercisable within 60 days.

(4)  Includes  options to  purchase  290,743  shares of common  stock  which are
     exercisable within 60 days.

(5)  Includes  options to  purchase  150,000  shares of common  stock  which are
     exercisable  within 60 days and excludes  options to purchase 20,000 shares
     which are not so exercisable.

(6)  Includes  options to  purchase  150,000  shares of common  stock  which are
     exercisable  within 60 days and excludes  options to purchase 20,000 shares
     which are not so exercisable.

(7)  Includes  options to purchase  20,000  shares of common stock which are not
     exercisable within 60 days.

(8)  Includes  options to purchase  2,225,838  shares of common  stock which are
     exercisable  within 60 days and excludes options to purchase 163,438 shares
     which are not so exercisable.




                                       37





                                PERFORMANCE GRAPH

                                  [LINE GRAPH]




                                                  3/98       3/99       3/00      3/01       3/02         3/03
                                                 -------   -------    -------   -------    -------       ------
                                                                                        
 Tegal Corporation.............................  100.00      42.48      93.81     42.48      16.99        5.38
 NASDAQ Stock Market (U.S.)....................  100.00     135.08     250.99    100.60     101.32       74.37
 Peer Group....................................  100.00     158.16     504.64    242.94     319.16      152.06




*    $100  Invested  on  3/31/98  in stock or  index,  including  investment  of
     dividends. Fiscal year ending March 31.

+    Peer group  consists of the following  companies:  Applied  Material  Inc.,
     Genus Inc., KLA-Tencor Corp., Lam Research Corp., Mattson Technology, Inc.,
     Novellus Systems, Inc. and Trikon Technologies, Inc.




                                       38


                             AUDIT COMMITTEE REPORT

    Notwithstanding  anything to the contrary set forth in any of the  Company's
filings under the Securities Act of 1933 or the Securities Exchange Act of 1934,
the following Audit Committee Report shall not be incorporated by reference into
any such filings and shall not otherwise be deemed to be filed under such Acts.

    The Audit  Committee of our board of  directors is comprised of  independent
directors as required by the listing  standards of the Nasdaq  National  Market.
The Audit Committee  operates pursuant to a written charter adopted by our board
of directors, a copy of which has been filed with the SEC.

    The role of the  Audit  Committee  is to  oversee  our  financial  reporting
process on behalf of the board of  directors.  Our  management  has the  primary
responsibility for our financial  statements as well as our financial  reporting
process,  principles and internal  controls.  The  independent  accountants  are
responsible  for performing an audit of our financial  statements and expressing
an opinion as to the  conformity of such  financial  statements  with  generally
accepted accounting principles.

    In this context,  the Audit Committee has reviewed and discussed our audited
financial statements as of and for the year ended March 31, 2003 with management
and the  independent  accountants.  The Audit  Committee has discussed  with the
independent  accountants  the matters  required to be  discussed by Statement on
Auditing Standards No. 61 (Communication with Audit Committees), as currently in
effect.  In addition,  the Audit Committee has received the written  disclosures
and the  letter  from  the  independent  accountants  required  by  Independence
Standards Board Standard No. 1 (Independence Discussions with Audit Committees),
as  currently  in  effect,  and it has  discussed  with  the  accountants  their
independence  from us.  The Audit  Committee  has also  considered  whether  the
independent  accountant's provision of information technology services and other
non-audit  services  to us  is  compatible  with  maintaining  the  accountant's
independence.

    Based on the reports and discussions  described  above,  the Audit Committee
recommended to the board of directors that the audited  financial  statements be
included in our Annual  Report on Form 10-K for the year ended  March 31,  2003,
for filing with the Securities and Exchange Commission.

    Submitted  on June 26,  2003 by the  members of the Audit  Committee  of the
board of directors.



                                                          Edward A. Dohring
                                                          Jeffrey M. Krauss
                                                          H. Duane Wadsworth



                                       39



                         INDEPENDENT PUBLIC ACCOUNTANTS

Presence at Annual Meeting

    Our board of directors  appointed  the firm of  PricewaterhouseCoopers  LLP,
independent  accountants,  to audit our financial statements for the fiscal year
ending March 31, 2003. We expect representatives of  PricewaterhouseCoopers  LLP
to be present at the annual meeting and will have the  opportunity to respond to
appropriate questions and to make a statement if they desire.

Audit Fees

    The   aggregate   fees  billed  for   professional   services   rendered  by
PricewaterhouseCoopers  LLP for the audit of our annual financial statements for
the fiscal year ended March 31, 2002,  the reviews of the  financial  statements
included in our quarterly  reports on Form 10-Q for the fiscal year ending March
31, 2002, and services that are normally provided by PricewaterhouseCoopers  LLP
in connection  with statutory and regulatory  filings and  engagements  for that
fiscal year were $125,000.  The aggregate fees for the services listed above for
the fiscal year ending March 31, 2003 were $145,000.

Financial Information Systems Design and Implementation Fees

    PricewaterhouseCoopers LLP did not render any professional services to us of
the type  described in Rule  2-01(c)(4)(ii)  of Regulation S-X during the fiscal
years ended March 31, 2002 and March 31, 2003.

Audit-Related Fees

     The aggregate fees billed by  PricewaterhouseCoopers  LLP for assurance and
related services that were reasonably related to the performance of the audit or
review of Tegal's  financial  statements and are not reported above under "Audit
Fees" were  $28,000  during the fiscal year ending March 31, 2002 and there were
no fees for such  services  during the fiscal year ending  March 31,  2003.  The
services for the fees  disclosed  under this category were work done in relation
to the Company's acquisition of Sputtered Films, Inc.

Tax Fees

     The aggregate fees billed by  PricewaterhouseCoopers  LLP for  professional
services rendered for tax compliance,  tax advice, and tax planning were $90,000
during the fiscal year ending March 31, 2002 and $75,000  during the fiscal year
ending March 31, 2003. The services for the fees  disclosed  under this category
were for tax compliance and the preparation of tax returns.

All Other Fees

     There were no fees billed for services  rendered by  PricewaterhouseCoopers
LLP, other than fees for the services referenced under the captions "Audit Fees"
and "Financial  Information Systems Design and Implementation  Fees", during the
fiscal years ending March 31, 2002 and March 31, 2003.




                                       40



             SECTION 16(a) BENEFICIAL OWNERSHIP REPORTING COMPLIANCE

    Section 16(a) of the Exchange Act, requires our officers and directors,  and
persons  who own more  than ten  percent  of a  registered  class of our  equity
securities,  to file reports of ownership  and changes in ownership  (Forms 3, 4
and 5) with the SEC. Officers,  directors and  greater-than-ten-percent  holders
are required to furnish us with copies of all such forms which they file.

    To our  knowledge,  based  solely on our  review of such  reports or written
representations  from  certain  reporting  persons,  we believe  that all of the
filing   requirements   applicable   to  our   officers,   directors,   greater-
than-ten-percent  beneficial  owners and other persons  subject to Section 16 of
the Exchange Act during fiscal 2003 were complied with.

                DEADLINE FOR SUBMISSION OF STOCKHOLDER PROPOSALS
                           FOR THE 2004 ANNUAL MEETING

    Stockholder  proposals to be  presented  at the 2004 annual  meeting must be
received  at our  principal  executive  offices no later than March __,  2004 in
order to be considered for inclusion in the proxy  materials to be  disseminated
by the board of directors for such annual meeting.  To be eligible for inclusion
in such proxy  materials,  such proposals must conform to the  requirements  set
forth in Regulation 14A under the Exchange Act as well as in our bylaws.

    Stockholder  proposals to be  presented  at the 2004 annual  meeting must be
received at our principal executive offices no later than June __, 2004 in order
to be considered for inclusion on the 2004 annual meeting agenda. To be eligible
for inclusion on the agenda, such proposals must conform to the requirements set
forth in Regulation 14A under the Exchange Act as well as in our bylaws.

                           INCORPORATION BY REFERENCE

     The following  information has been incorporated by reference in this Proxy
Statement:  the  biographies  of  the  Directors  and  the  Company's  financial
information  requested in Item 13(a) of Schedule 14A, both of which can be found
in our 2003 Annual Report.

                                  OTHER MATTERS

    We are not aware of any matters that may come before the meeting  other than
those referred to in the notice of annual meeting of stockholders.  If any other
matter shall properly come before the annual meeting, however, the persons named
in the  accompanying  proxy intend to vote all proxies in accordance  with their
best judgment.

    Our 2003  Annual  Report for the fiscal  year ended  March 31, 2003 has been
mailed with this proxy statement.

                                          By Order of the Board of Directors

                                          TEGAL CORPORATION

                                          /s/  Michael L. Parodi
                                          ----------------------------
                                          MICHAEL L. PARODI
                                          President and CEO


Petaluma, California


August ___, 2003




STOCKHOLDERS  OF RECORD ON JULY 10,  2003 MAY OBTAIN  COPIES OF  TEGAL'S  ANNUAL
REPORT ON FORM 10-K  (EXCLUDING  EXHIBITS)  AND ALL  AMENDMENTS  FILED  WITH THE
SECURITIES  AND  EXCHANGE  COMMISSION  BY WRITING TO INVESTOR  RELATIONS,  TEGAL
CORPORATION, 2201 SOUTH MCDOWELL BOULEVARD, PETALUMA, CALIFORNIA 94954.






                                       41






                                                                      APPENDIX A



          THE FIFTH AMENDED AND RESTATED 1998 EQUITY PARTICIPATION PLAN

                                       OF

                                TEGAL CORPORATION



    Tegal Corporation, a Delaware corporation (the "Company"), hereby amends and
restates the Fourth Amended and Restated 1998 Equity Participation Plan of Tegal
Corporation  (as so  amended,  the  "Plan"),  incorporating  certain  amendments
adopted by the Board of Directors on June 30, 2003 (the "Effective  Date").  The
Plan was  initially  adopted by the Board of  Directors on July 16, 1998 and the
stockholders  of the Company on September  15, 1998,  with an initial  effective
date of July 16,  1998.  The Plan  was  amended  and  restated  by the  Board of
Directors on July 21, 1999 and such  amendment was approved by the  stockholders
on September  21, 1999.  The Plan was again amended and restated on July 8, 2000
by the Board of Directors and such amendment was approved by the stockholders on
September 19, 2000.  The Plan was amended and restated a third time on September
25,  2001  by the  Board  of  Directors  and  such  amendment  did  not  require
stockholder  approval.  The plan  was  amended  and  restated  a fourth  time on
September 9, 2002 and was approved by our  stockholders on October 22, 2002. The
purposes of the Plan are as follows:

        (1) To provide an additional incentive for key Employees and Consultants
    (as such terms are defined  below) to further the  growth,  development  and
    financial  success  of the  Company by  personally  benefiting  through  the
    ownership  of Company  stock  and/or  rights  which  recognize  such growth,
    development and financial success.

        (2) To enable the  Company to obtain  and  retain  the  services  of key
    Employees and Consultants  considered essential to the long range success of
    the  Company by  offering  them an  opportunity  to own stock in the Company
    and/or  rights  which will  reflect the growth,  development  and  financial
    success of the Company.

                                   ARTICLE I.

                                   DEFINITIONS

    1.1 General.  Wherever the following  terms are used in the Plan, they shall
have  the  meanings  specified  below,  unless  the  context  clearly  indicates
otherwise.

    1.2 Administrator.  "Administrator"  shall mean the entity that conducts the
general  administration  of the Plan as provided  herein.  With reference to the
administration of the Plan with respect to any Award granted under the Plan, the
term  "Administrator"  shall refer to the Committee unless the Board has assumed
the authority for  administration  of the Plan  generally as provided in Section
9.1.



                                      A-1


    1.3 Award. "Award" shall mean an Option, a Restricted Stock award or a Stock
Appreciation Right which may be awarded or granted under the Plan (collectively,
"Awards").

    1.4 Award  Agreement.  "Award  Agreement"  shall  mean a  written  agreement
executed by an  authorized  officer of the  Company  and the Holder  which shall
contain such terms and conditions with respect to an Award as the  Administrator
shall determine, consistent with the Plan.


    1.5 Award Limit.  "Award Limit" shall mean 1,600,000 shares of Common Stock,
as adjusted pursuant to Section 10.3 of the Plan.


    1.6  Board.  "Board" shall mean the Board of Directors of the Company.

    1.7 Change in Control.  "Change in Control" shall mean a change in ownership
or control of the Company effected through any of the following transactions:

        (i) any person or related group of persons  (other than the Company or a
    person that, prior to such transaction,  directly or indirectly controls, is
    controlled  by, or is under common  control with,  the Company)  directly or
    indirectly acquires  beneficial  ownership (within the meaning of Rule 13d-3
    under the Exchange  Act) of securities of the Company (or a successor of the
    Company)  possessing  more  than  twenty-five  percent  (25%)  of the  total
    combined voting power of the then  outstanding  securities of the Company or
    such successor; or

        (ii) at any time  that the  Company  has  registered  shares  under  the
    Exchange  Act,  at least  40% of the  directors  of the  Company  constitute
    persons  who  were not at the time of their  first  election  to the  Board,
    candidates  proposed by a majority of the Board in office  prior to the time
    of such first election; or

        (iii) the  dissolution of the Company or liquidation of more than 75% in
    value of the Company or a sale of assets  involving  75% or more in value of
    the assets of the Company,  (x) any merger or  reorganization of the Company
    whether or not another entity is the survivor, (y) a transaction pursuant to
    which  the  holders,  as a  group,  of  all  of the  shares  of the  Company
    outstanding  prior to the transaction hold, as a group, less than 50% of the
    combined  voting power of the Company or any successor  company  outstanding
    after the transaction, or (z) any other event which the Board determines, in
    its discretion,  would  materially alter the structure of the Company or its
    ownership.

    1.8  Code.  "Code" shall mean the Internal Revenue Code of 1986, as amended.

    1.9  Committee.  "Committee"  shall mean the  Compensation  Committee of the
Board, or another committee or subcommittee of the Board,  appointed as provided
in Section 9.1.

    1.10  Common  Stock.  "Common  Stock"  shall  mean the  common  stock of the
Company, par value $.01 per share, and any equity security of the Company issued
or authorized to be issued in the future,  but excluding any preferred stock and
any warrants, options or other rights to purchase Common Stock.

    1.11  Company.   "Company"   shall  mean  Tegal   Corporation,   a  Delaware
corporation.

    1.12  Consultant.  "Consultant" shall mean any consultant or adviser if:



                                      A-2


        (a) the consultant or adviser renders bona fide services to the Company;

        (b) the  services  rendered  by the  consultant  or  adviser  are not in
    connection  with  the  offer  or sale  of  securities  in a  capital-raising
    transaction  and do not directly or indirectly  promote or maintain a market
    for the Company's securities; and

        (c) the  consultant  or adviser is a natural  person who has  contracted
    directly with the Company to render such services.

    1.13  Director.  "Director" shall mean a member of the Board.

    1.14 DRO. "DRO" shall mean a domestic relations order as defined by the Code
or Title I of the Employee  Retirement  Income Security Act of 1974, as amended,
or the rules thereunder.

    1.15  Employee.  "Employee"  shall mean any  officer or other  employee  (as
defined in accordance  with Section  3401(c) of the Code) of the Company,  or of
any corporation which is a Subsidiary.

    1.16 Exchange Act. "Exchange Act" shall mean the Securities  Exchange Act of
1934, as amended.

    1.17 Fair Market Value. "Fair Market Value" of a share of Common Stock as of
a given date shall be (a) the  closing  price of a share of Common  Stock on the
principal exchange on which shares of Common Stock are then trading,  if any (or
as reported on any composite index which includes such principal  exchange),  on
the  trading  day  previous  to such date,  or if shares  were not traded on the
trading day previous to such date,  then on the next  preceding  date on which a
trade  occurred,  or (b) if Common  Stock is not  traded on an  exchange  but is
quoted on NASDAQ or a successor  quotation system,  the mean between the closing
representative  bid and asked  prices for the Common  Stock on the  trading  day
previous to such date as reported by NASDAQ or such successor  quotation system;
or (c) if Common Stock is not  publicly  traded on an exchange and not quoted on
NASDAQ or a successor  quotation  system,  the Fair  Market  Value of a share of
Common Stock as established by the Administrator acting in good faith.

    1.18 Holder. "Holder" shall mean a person who has been granted or awarded an
Award.

    1.19 Incentive Stock Option.  "Incentive  Stock Option" shall mean an option
which conforms to the applicable provisions of Section 422 of the Code and which
is designated as an Incentive Stock Option by the Administrator.

    1.20 Independent Director. "Independent Director" shall mean a member of the
Board who is not an Employee of the Company.

    1.21 Non-Qualified Stock Option.  "Non-Qualified Stock Option" shall mean an
Option  which  is  not   designated   as  an  Incentive   Stock  Option  by  the
Administrator.

    1.22 Option.  "Option" shall mean a stock option granted under Article IV of
the  Plan.  An  Option  granted  under  the Plan  shall,  as  determined  by the
Administrator,  be either a  Non-Qualified  Stock Option or an  Incentive  Stock
Option;  provided,  however,  that  Options  granted  to  Consultants  shall  be
Non-Qualified Stock Options.



                                      A-3


    1.23 Performance Criteria.  "Performance  Criteria" shall mean the following
business criteria with respect to the Company, any Subsidiary or any division or
operating unit: (a) net income,  (b) pre-tax income,  (c) operating income,  (d)
cash flow, (e) earnings per share, (f) return on equity,  (g) return on invested
capital or assets,  (h) cost reductions or savings,  (i) funds from  operations,
(j)  appreciation  in the fair  market  value of Common  Stock and (k)  earnings
before any one or more of the following items: interest,  taxes, depreciation or
amortization.

    1.24 Plan.  "Plan" shall mean The Fourth  Amended and  Restated  1998 Equity
Participation Plan of Tegal Corporation.

    1.25 Restricted  Stock.  "Restricted  Stock" shall mean Common Stock awarded
under Article VII of the Plan.

    1.26 Rule 16b-3.  "Rule  16b-3" shall mean that certain Rule 16b-3 under the
Exchange Act, as such Rule may be amended from time to time.

    1.27 Section 162(m) Participant. "Section 162(m) Participant" shall mean any
key  Employee   designated  by  the   Administrator  as  a  key  Employee  whose
compensation for the fiscal year in which the key Employee is so designated or a
future  fiscal  year may be  subject  to the  limit on  deductible  compensation
imposed by Section 162(m) of the Code.

    1.28 Securities Act. "Securities Act" shall mean the Securities Act of 1933,
as amended.

    1.29 Stock Appreciation Right. "Stock Appreciation Right" shall mean a stock
appreciation right granted under Article VIII of the Plan.

    1.30  Subsidiary.  "Subsidiary"  shall mean any  corporation  in an unbroken
chain of  corporations  beginning  with the Company if each of the  corporations
other than the last corporation in the unbroken chain then owns stock possessing
fifty percent (50%) or more of the total combined voting power of all classes of
stock in one of the other corporations in such chain.

    1.31 Substitute Award. "Substitute Award" shall mean an Option granted under
this Plan upon the assumption of, or in  substitution  for,  outstanding  equity
awards  previously  granted by a company or other  entity in  connection  with a
corporate  transaction,   such  as  a  merger,  combination,   consolidation  or
acquisition of property or stock.

    1.32 Termination of Consultancy. "Termination of Consultancy" shall mean the
time  when the  engagement  of a Holder  as a  Consultant  to the  Company  or a
Subsidiary is terminated for any reason, with or without cause,  including,  but
not by way of  limitation,  by  resignation,  discharge,  death,  disability  or
retirement;   but  excluding   terminations   where  there  is  a   simultaneous
commencement   of   employment   with  the  Company  or  any   Subsidiary.   The
Administrator,  in its absolute  discretion,  shall  determine the effect of all
matters and questions relating to Termination of Consultancy, including, but not
by way of  limitation,  the  question of whether a  Termination  of  Consultancy
resulted  from a  discharge  for good  cause,  and all  questions  of  whether a
particular   leave  of  absence   constitutes  a  Termination  of   Consultancy.
Notwithstanding  any other  provision of the Plan, the Company or any Subsidiary
has an absolute and  unrestricted  right to terminate a Consultant's  service at
any time for any reason whatsoever,  with or without cause, except to the extent
expressly provided otherwise in writing.



                                      A-4


    1.33 Termination of Employment.  "Termination of Employment"  shall mean the
time when the employee-employer relationship between a Holder and the Company or
any Subsidiary is terminated for any reason,  with or without cause,  including,
but not by way of limitation,  a termination by resignation,  discharge,  death,
disability  or  retirement;  but  excluding  (a)  terminations  where there is a
simultaneous reemployment or continuing employment of a Holder by the Company or
any Subsidiary,  (b) at the discretion of the Administrator,  terminations which
result in a temporary severance of the employee-employer  relationship,  and (c)
at the discretion of the  Administrator,  terminations which are followed by the
simultaneous  establishment  of a  consulting  relationship  by the Company or a
Subsidiary  with  the  former  employee.  The  Administrator,  in  its  absolute
discretion,  shall determine the effect of all matters and questions relating to
Termination of Employment, including, but not by way of limitation, the question
of whether a Termination of Employment resulted from a discharge for good cause,
and all  questions  of  whether a  particular  leave of  absence  constitutes  a
Termination of Employment;  provided,  however,  that, with respect to Incentive
Stock  Options,   unless  otherwise  determined  by  the  Administrator  in  its
discretion,  a leave  of  absence,  change  in  status  from an  employee  to an
independent  contractor  or other change in the  employee-employer  relationship
shall  constitute a Termination of Employment  if, and to the extent that,  such
leave of absence, change in status or other change interrupts employment for the
purposes of Section  422(a)(2) of the Code and the then  applicable  regulations
and revenue rulings under said Section.  Notwithstanding  any other provision of
the Plan, the Company or any Subsidiary has an absolute and  unrestricted  right
to terminate an Employee's service at any time for any reason  whatsoever,  with
or without cause, except to the extent expressly provided otherwise in writing.

                                   ARTICLE II.

                             SHARES SUBJECT TO PLAN

    2.1  Shares Subject to Plan.

    (a) The shares of stock subject to Awards shall be Common  Stock,  initially
shares of the Company's  Common Stock,  par value $.01 per share.  The aggregate
number of such  shares  which may be issued  upon  exercise  of such  Options or
rights or upon any such awards  under the Plan shall not exceed  6,400,000.  The
shares of Common Stock  issuable upon exercise of such Options or rights or upon
any such  awards may be either  previously  authorized  but  unissued  shares or
treasury shares.

    (b) The  maximum  number of shares  which may be subject to Awards,  granted
under the Plan to any  individual  in any fiscal year shall not exceed the Award
Limit. To the extent  required by Section 162(m) of the Code,  shares subject to
Options which are canceled continue to be counted against the Award Limit.

    2.2 Add-back of Options and Other Rights.  If any Option,  or other right to
acquire shares of Common Stock under any other Award under the Plan,  expires or
is canceled without having been fully exercised,  or is exercised in whole or in
part for cash as  permitted  by the Plan,  the number of shares  subject to such
Option  or other  right  but as to which  such  Option  or other  right  was not
exercised  prior  to its  expiration,  cancellation  or  exercise  may  again be
optioned,  granted or awarded  hereunder,  subject to the limitations of Section
2.1.  Furthermore,  any shares subject to Awards which are adjusted  pursuant to
Section 10.3 and become  exercisable  with respect to



                                      A-5


shares of stock of another  corporation  shall be  considered  cancelled and may
again be optioned,  granted or awarded hereunder,  subject to the limitations of
Section  2.1.  Shares  of Common  Stock  which are  delivered  by the  Holder or
withheld  by the  Company  upon the  exercise  of any Award  under the Plan,  in
payment of the exercise price thereof or tax withholding  thereon,  may again be
optioned,  granted or awarded  hereunder,  subject to the limitations of Section
2.1.  If any  shares  of  Restricted  Stock  are  surrendered  by the  Holder or
repurchased  by the Company  pursuant to Section 7.4 or 7.5 hereof,  such shares
may again be optioned, granted or awarded hereunder,  subject to the limitations
of Section 2.1. Notwithstanding the provisions of this Section 2.2, no shares of
Common  Stock may again be  optioned,  granted or awarded if such  action  would
cause an Incentive  Stock Option to fail to qualify as an incentive stock option
under Section 422 of the Code.

                                  ARTICLE III.

                               GRANTING OF AWARDS

    3.1 Award  Agreement.  Each Award shall be evidenced by an Award  Agreement.
Award  Agreements  evidencing  Awards  intended to qualify as  performance-based
compensation as described in Section 162(m)(4)(C) of the Code shall contain such
terms and  conditions as may be necessary to meet the  applicable  provisions of
Section 162(m) of the Code. Award Agreements  evidencing Incentive Stock Options
shall  contain  such  terms  and  conditions  as may be  necessary  to meet  the
applicable provisions of Section 422 of the Code.

    3.2  Provisions Applicable to Section 162(m) Participants.

    (a) The Committee,  in its discretion,  may determine whether an Award is to
qualify as  performance-based  compensation as described in Section 162(m)(4)(C)
of the Code.

    (b) Notwithstanding  anything in the Plan to the contrary, the Committee may
grant any Award to a Section 162(m) Participant,  including Restricted Stock the
restrictions  with  respect to which lapse upon the  attainment  of  performance
goals which are related to one or more of the Performance Criteria.

    (c)  To  the  extent   necessary   to  comply  with  the   performance-based
compensation  requirements of Section  162(m)(4)(C) of the Code, with respect to
any Award  granted under Article VII which may be granted to one or more Section
162(m)  Participants,  no later than ninety (90) days following the commencement
of any fiscal year in question or any other  designated  fiscal period or period
of service (or such other time as may be required or permitted by Section 162(m)
of the Code), the Committee shall, in writing, (i) designate one or more Section
162(m)  Participants,  (ii) select the  Performance  Criteria  applicable to the
fiscal  year or other  designated  fiscal  period or period  of  service,  (iii)
establish the various  performance  targets, in terms of an objective formula or
standard,  and amounts of such Awards,  as  applicable,  which may be earned for
such fiscal year or other designated



                                      A-6


fiscal  period or period of service and (iv)  specify the  relationship  between
Performance Criteria and the performance targets and the amounts of such Awards,
as applicable,  to be earned by each Section 162(m)  Participant for such fiscal
year or other  designated  fiscal  period or period of  service.  Following  the
completion  of each fiscal year or other  designated  fiscal period or period of
service,   the  Committee  shall  certify  in  writing  whether  the  applicable
performance  targets have been achieved for such fiscal year or other designated
fiscal  period or period of  service.  In  determining  the  amount  earned by a
Section 162(m)  Participant,  the Committee  shall have the right to reduce (but
not to increase) the amount payable at a given level of performance to take into
account  additional  factors  that  the  Committee  may  deem  relevant  to  the
assessment of individual or corporate  performance  for the fiscal year or other
designated fiscal period or period of service.

    (d) Furthermore,  notwithstanding any other provision of the Plan, any Award
which is granted to a Section 162(m)  Participant  and is intended to qualify as
performance-based  compensation as described in Section 162(m)(4)(C) of the Code
shall be subject to any  additional  limitations  set forth in Section 162(m) of
the  Code  (including  any  amendment  to  Section  162(m)  of the  Code) or any
regulations or rulings issued thereunder that are requirements for qualification
as  performance-based  compensation as described in Section  162(m)(4)(C) of the
Code, and the Plan shall be deemed amended to the extent necessary to conform to
such requirements.

    3.3 Limitations Applicable to Section 16 Persons.  Notwithstanding any other
provision  of the  Plan,  the Plan,  and any Award  granted  or  awarded  to any
individual  who is then  subject  to Section 16 of the  Exchange  Act,  shall be
subject to any additional limitations set forth in any applicable exemptive rule
under Section 16 of the Exchange Act  (including  any amendment to Rule 16b-3 of
the Exchange Act) that are  requirements  for the  application of such exemptive
rule. To the extent  permitted by applicable law, the Plan and Awards granted or
awarded  hereunder shall be deemed amended to the extent necessary to conform to
such applicable exemptive rule.

    3.4  At-Will  Employment.  Nothing  in the  Plan or in any  Award  Agreement
hereunder  shall  confer upon any Holder any right to continue in the employ of,
or as a Consultant for, the Company or any  Subsidiary,  or shall interfere with
or restrict in any way the rights of the Company and any  Subsidiary,  which are
hereby  expressly  reserved,  to discharge any Holder at any time for any reason
whatsoever,  with or  without  cause,  except to the extent  expressly  provided
otherwise in a written  employment  agreement between the Holder and the Company
and any Subsidiary.

                                   ARTICLE IV.

                GRANTING OF OPTIONS TO EMPLOYEES AND CONSULTANTS

    4.1  Eligibility.  Any  Employee or  Consultant  selected  by the  Committee
pursuant to Section 4.4(a)(i) shall be eligible to be granted an Option.

    4.2  Disqualification  for Stock  Ownership.  No person  may be  granted  an
Incentive Stock Option under the Plan if such person,  at the time the Incentive
Stock Option is granted,  owns stock  possessing  more than ten percent (10%) of
the total  combined  voting  power of all classes of stock of the Company or any
then existing  Subsidiary or parent  corporation  (within the meaning of Section
422 of the Code) unless such Incentive  Stock Option  conforms to the applicable
provisions of Section 422 of the Code.

    4.3  Qualification  of Incentive  Stock Options.  No Incentive  Stock Option
shall be granted to any person who is not an Employee.



                                      A-7


    4.4  Granting of Options to Employees and Consultants.

    (a) The Committee shall from time to time, in its absolute  discretion,  and
subject to applicable limitations of the Plan:

        (i)  Determine  which  Employees are key Employees and select from among
    the key Employees or Consultants  (including  Employees or  Consultants  who
    have  previously  received  Awards  under the  Plan)  such of them as in its
    opinion should be granted Options;

        (ii)  Subject to the Award Limit,  determine  the number of shares to be
    subject  to  such  Options   granted  to  the  selected  key   Employees  or
    Consultants;

        (iii) Subject to Section 4.3,  determine  whether such Options are to be
    Incentive  Stock  Options or  Non-Qualified  Stock  Options and whether such
    Options are to qualify as  performance-based  compensation  as  described in
    Section 162(m)(4)(C) of the Code; and

        (iv) Determine the terms and conditions of such Options, consistent with
    the  Plan;  provided,  however,  that the terms and  conditions  of  Options
    intended  to qualify  as  performance-based  compensation  as  described  in
    Section  162(m)(4)(C) of the Code shall include, but not be limited to, such
    terms and conditions as may be necessary to meet the  applicable  provisions
    of Section 162(m) of the Code.

    (b) Upon the  selection  of a key  Employee or  Consultant  to be granted an
Option,  the Committee  shall instruct the Secretary of the Company to issue the
Option and may  impose  such  conditions  on the grant of the Option as it deems
appropriate.

    (c) Any Incentive Stock Option granted under the Plan may be modified by the
Committee,  with the  consent of the  Holder,  to  disqualify  such  Option from
treatment as an "incentive stock option" under Section 422 of the Code.

                                   ARTICLE V.

                                TERMS OF OPTIONS

    5.1 Option Price.  The price per share of the shares  subject to each Option
granted to Employees and  Consultants  shall be set by the Committee;  provided,
however, that such price shall be no less than 85% of the Fair Market Value of a
share of Common Stock on the date the Option is granted and:

        (a) in the case of Options  intended  to  qualify  as  performance-based
    compensation  as described in Section  162(m)(4)(C)  of the Code, such price
    shall not be less than  100% of the Fair  Market  Value of a share of Common
    Stock on the date the Option is granted;

        (b) in the case of Incentive  Stock Options such price shall not be less
    than 100% of the Fair  Market  Value of a share of Common  Stock on the date
    the  Option is  granted  (or the date the Option is  modified,  extended  or
    renewed for purposes of Section 424(h) of the Code); and

        (c) in the case of Incentive Stock Options granted to an individual then
    owning  (within the meaning of Section  424(d) of the Code) more than 10% of
    the total  combined  voting  power of



                                      A-8


    all classes of stock of the Company or any Subsidiary or parent  corporation
    thereof  (within the  meaning of Section 422 of the Code),  such price shall
    not be less than 110% of the Fair Market Value of a share of Common Stock on
    the date the Option is granted (or the date the Option is modified, extended
    or renewed for purposes of Section 424(h) of the Code).

    5.2 Option Term.  The term of an Option granted to an Employee or consultant
shall be set by the Committee in its discretion; provided, however, that, in the
case of Incentive Stock Options,  the term shall not be more than ten (10) years
from the date the Incentive Stock Option is granted,  or five (5) years from the
date the  Incentive  Stock  Option is granted if the  Incentive  Stock Option is
granted to an individual  then owning  (within the meaning of Section  424(d) of
the Code) more than 10% of the total  combined  voting  power of all  classes of
stock of the Company or any Subsidiary or parent corporation thereof (within the
meaning of  Section  422 of the Code).  Except as  limited  by  requirements  of
Section 422 of the Code and  regulations  and rulings  thereunder  applicable to
Incentive  Stock Options,  the Committee may extend the term of any  outstanding
Option in  connection  with any  Termination  of Employment  or  Termination  of
Consultancy  of the Holder,  or amend any other term or condition of such Option
relating to such a termination.

    5.3  Option Vesting

    (a) The period  during which the right to exercise,  in whole or in part, an
Option  granted to an Employee or a Consultant  vests in the Holder shall be set
by the  Committee  and the  Committee  may  determine  that an Option may not be
exercised  in whole  or in part  for a  specified  period  after it is  granted;
provided, however, that, unless the Committee otherwise provides in the terms of
the Award  Agreement or otherwise,  no Option shall be exercisable by any Holder
who is then subject to Section 16 of the  Exchange Act within the period  ending
six months and one day after the date the Option is  granted.  At any time after
grant of an Option,  the Committee may, in its sole and absolute  discretion and
subject to  whatever  terms and  conditions  it selects,  accelerate  the period
during which an Option granted to an Employee or Consultant vests.

    (b) No portion of an Option  granted to an Employee or  Consultant  which is
unexercisable  at Termination of Employment or  Termination of  Consultancy,  as
applicable,  shall  thereafter  become  exercisable,  except as may be otherwise
provided  by the  Committee  either in the Award  Agreement  or by action of the
Committee following the grant of the Option.

    (c) To the extent that the aggregate Fair Market Value of stock with respect
to which  "incentive  stock  options"  (within the meaning of Section 422 of the
Code, but without regard to Section 422(d) of the Code) are  exercisable for the
first time by a Holder  during any  calendar  year (under the Plan and all other
incentive  stock  option  plans of the  Company  and any  parent  or  subsidiary
corporation,  within the  meaning of  Section  422 of the Code) of the  Company,
exceeds $100,000,  such Options shall be treated as Non-Qualified Options to the
extent  required by Section 422 of the Code. The rule set forth in the preceding
sentence  shall be applied by taking  Options into account in the order in which
they were granted. For purposes of this Section 5.3(c), the Fair Market Value of
stock shall be  determined  as of the time the Option with respect to such stock
is granted.

    5.4  Substitute  Awards.  Notwithstanding  the foregoing  provisions of this
Article V to the contrary,  in the case of an Option that is a Substitute Award,
the price per share of the shares



                                      A-9


    subject to such Option may be less than the Fair  Market  Value per share on
    the date of grant, provided, that the excess of:

        (a) the  aggregate  Fair  Market  Value (as of the date such  Substitute
    Award is granted) of the shares subject to the Substitute Award; over

        (b) the aggregate exercise price thereof; does not exceed the excess of;

        (c)  the  aggregate  fair  market  value  (as  of the  time  immediately
    preceding the  transaction  giving rise to the Substitute  Award,  such fair
    market  value  to be  determined  by the  Committee)  of the  shares  of the
    predecessor entity that were subject to the grant assumed or substituted for
    by the Company; over

    (d) the aggregate exercise price of such shares.

    5.5  Termination.  In the event of a Holder's  Termination  of Employment or
Termination  of  Consultancy,  such Holder may exercise his or her Option within
such period of time as is specified  in the Option  Agreement to the extent that
the Option is vested on the date of termination. If, on the date of termination,
the Holder is not vested as to his or her entire  Option,  the shares covered by
the unvested portion of the Option shall  immediately cease to be issuable under
the Option and shall again become  available  for issuance  under the Plan.  If,
after  termination,  the Holder does not exercise  his or her Option  within the
time period specified herein, the Option shall terminate, and the shares covered
by such Option shall again become available for issuance under the Plan.



                                   ARTICLE VI.

                               EXERCISE OF OPTIONS

    6.1 Partial Exercise.  An exercisable Option may be exercised in whole or in
part.  However,  an Option shall not be  exercisable  with respect to fractional
shares and the  Administrator  may require that,  by the terms of the Option,  a
partial exercise be with respect to a minimum number of shares.

    6.2 Manner of Exercise.  All or a portion of an exercisable  Option shall be
deemed  exercised  upon delivery of all of the following to the Secretary of the
Company or his office:

        (a) A written notice complying with the applicable rules  established by
    the  Administrator  stating  that  the  Option,  or a  portion  thereof,  is
    exercised.  The notice  shall be signed by the Holder or other  person  then
    entitled to exercise the Option or such portion of the Option;

        (b) Such  representations  and  documents as the  Administrator,  in its
    absolute discretion,  deems necessary or advisable to effect compliance with
    all  applicable  provisions of the  Securities  Act and any other federal or
    state securities laws or regulations. The Administrator may, in its absolute
    discretion,  also take whatever  additional  actions it deems appropriate to
    effect such compliance  including,  without  limitation,  placing legends on
    share  certificates  and  issuing   stop-transfer   notices  to  agents  and
    registrars;



                                      A-10


        (c) In the event that the Option shall be exercised  pursuant to Section
    10.1 by any person or persons  other than the Holder,  appropriate  proof of
    the right of such person or persons to exercise the Option; and

        (d) Full cash  payment to the  Secretary  of the  Company for the shares
    with respect to which the Option, or portion thereof, is exercised. However,
    the Administrator,  may in its discretion (i) allow a delay in payment up to
    thirty (30) days from the date the Option, or portion thereof, is exercised;
    (ii) allow payment,  in whole or in part,  through the delivery of shares of
    Common  Stock  which have been owned by the Holder for at least six  months,
    duly  endorsed  for  transfer to the Company with a Fair Market Value on the
    date of  delivery  equal to the  aggregate  exercise  price of the Option or
    exercised portion thereof; (iii) allow payment, in whole or in part, through
    the  surrender of shares of Common Stock then  issuable upon exercise of the
    Option  having a Fair Market Value on the date of Option  exercise  equal to
    the aggregate  exercise  price of the Option or exercised  portion  thereof;
    (iv) allow payment, in whole or in part, through the delivery of property of
    any kind  which  constitutes  good and  valuable  consideration;  (v)  allow
    payment,  in whole or in  part,  through  the  delivery  of a full  recourse
    promissory  note  bearing  interest (at no less than such rate as shall then
    preclude the  imputation  of interest  under the Code) and payable upon such
    terms as may be  prescribed by the  Administrator;  (vi) allow  payment,  in
    whole or in part,  through  the  delivery  of a notice  that the  Holder has
    placed a market  sell order with a broker  with  respect to shares of Common
    Stock then  issuable  upon  exercise of the Option,  and that the broker has
    been directed to pay a sufficient portion of the net proceeds of the sale to
    the Company in  satisfaction  of the Option  exercise  price,  provided that
    payment of such proceeds is then made to the Company upon settlement of such
    sale; or (vii) allow payment  through any  combination of the  consideration
    provided in the foregoing  subparagraphs (ii), (iii), (iv), (v) and (vi). In
    the case of a promissory note, the Administrator may also prescribe the form
    of such note and the security to be given for such note.  The Option may not
    be exercised,  however,  by delivery of a promissory  note or by a loan from
    the  Company  when or  where  such  loan or other  extension  of  credit  is
    prohibited by law.

    6.3 Conditions to Issuance of Stock  Certificates.  The Company shall not be
required to issue or deliver any certificate or certificates for shares of stock
purchased  upon  the  exercise  of  any  Option  or  portion  thereof  prior  to
fulfillment of all of the following conditions:

        (a) The  admission  of such shares to listing on all stock  exchanges on
    which such class of stock is then listed;

        (b) The completion of any  registration or other  qualification  of such
    shares under any state or federal  law, or under the rulings or  regulations
    of  the  Securities  and  Exchange  Commission  or  any  other  governmental
    regulatory body which the Administrator  shall, in its absolute  discretion,
    deem necessary or advisable;

        (c) The obtaining of any approval or other  clearance  from any state or
    federal  governmental agency which the Administrator  shall, in its absolute
    discretion, determine to be necessary or advisable;

        (d) The lapse of such  reasonable  period of time following the exercise
    of the  Option  as the  Administrator  may  establish  from time to time for
    reasons of administrative convenience; and



                                      A-11


        (e)  The  receipt  by the  Company  of full  payment  for  such  shares,
    including payment of any applicable withholding tax, which in the discretion
    of the Administrator may be in the form of consideration  used by the Holder
    to pay for such shares under Section 6.2(d).

    6.4 Rights as Stockholders. Holders shall not be, nor have any of the rights
or  privileges  of,  stockholders  of the  Company  in  respect  of  any  shares
purchasable  upon  the  exercise  of any  part of an  Option  unless  and  until
certificates  representing  such  shares have been issued by the Company to such
Holders.

    6.5 Ownership and Transfer Restrictions. The Administrator,  in its absolute
discretion, may impose such restrictions on the ownership and transferability of
the shares  purchasable upon the exercise of an Option as it deems  appropriate.
Any such  restriction  shall be set forth in the respective  Award Agreement and
may be referred to on the certificates  evidencing such shares. The Holder shall
give the Company  prompt  notice of any  disposition  of shares of Common  Stock
acquired by exercise of an Incentive  Stock Option within (a) two years from the
date of granting (including the date the Option is modified, extended or renewed
for  purposes  of Section  424(h) of the Code) such Option to such Holder or (b)
one year after the transfer of such shares to such Holder.

    6.6 Additional  Limitations on Exercise of Options.  Holders may be required
to comply with any timing or other  restrictions  with respect to the settlement
or  exercise  of an Option,  including  a  window-period  limitation,  as may be
imposed in the discretion of the Administrator.

                                  ARTICLE VII.

                            AWARD OF RESTRICTED STOCK

    7.1 Eligibility. Subject to the Award Limit, Restricted Stock may be awarded
to any Employee who the Committee determines is a key Employee or any Consultant
who the Committee determines should receive such an Award.

    7.2  Award of Restricted Stock.

    (a) The Committee may from time to time, in its absolute discretion:

        (i)  Determine  which  Employees are key Employees and select from among
    the key Employees or Consultants  (including  Employees or  Consultants  who
    have previously received other awards under the Plan) such of them as in its
    opinion should be awarded Restricted Stock; and

        (ii)  Determine  the  purchase  price,  if  any,  and  other  terms  and
    conditions applicable to such Restricted Stock, consistent with the Plan.

    (b) The Committee  shall  establish the purchase  price, if any, and form of
payment for Restricted Stock; provided,  however, that such purchase price shall
be no less  than the par  value of the  Common  Stock  to be  purchased,  unless
otherwise  permitted by applicable state law. In all cases, legal  consideration
shall be required for each issuance of Restricted Stock.



                                      A-12


    (c) Upon  the  selection  of a key  Employee  or  Consultant  to be  awarded
Restricted  Stock,  the Committee shall instruct the Secretary of the Company to
issue such  Restricted  Stock and may impose such  conditions on the issuance of
such Restricted Stock as it deems appropriate.

    7.3 Rights as  Stockholders.  Subject to Section 7.4,  upon  delivery of the
shares of  Restricted  Stock to the escrow  holder  pursuant to Section 7.6, the
Holder shall have, unless otherwise provided by the Committee, all the rights of
a stockholder  with respect to said shares,  subject to the  restrictions in his
Award  Agreement,  including  the  right to  receive  all  dividends  and  other
distributions paid or made with respect to the shares;  provided,  however, that
in the discretion of the Committee, any extraordinary distributions with respect
to the Common  Stock shall be subject to the  restrictions  set forth in Section
7.4.

    7.4  Restriction.  All  shares of  Restricted  Stock  issued  under the Plan
(including  any shares  received by holders  thereof  with  respect to shares of
Restricted Stock as a result of stock dividends,  stock splits or any other form
of recapitalization)  shall, in the terms of each individual Award Agreement, be
subject to such restrictions as the Committee shall provide,  which restrictions
may include,  without  limitation,  restrictions  concerning  voting  rights and
transferability  and  restrictions  based on  duration  of  employment  with the
Company,  Company  performance and individual  performance;  provided,  however,
that,  unless  the  Committee  otherwise  provides  in the  terms  of the  Award
Agreement or otherwise, no share of Restricted Stock granted to a person subject
to  Section  16 of the  Exchange  Act  shall  be  sold,  assigned  or  otherwise
transferred  until at least six months and one day have elapsed from the date on
which the Restricted Stock was issued, and provided,  further, that, except with
respect to shares of Restricted Stock granted to Section 162(m) Participants, by
action taken after the  Restricted  Stock is issued,  the Committee may, on such
terms and conditions as it may determine to be appropriate, remove any or all of
the restrictions  imposed by the terms of the Award Agreement.  Restricted Stock
may not be sold or encumbered  until all  restrictions are terminated or expire.
If no consideration  was paid by the Holder upon issuance,  a Holder's rights in
unvested  Restricted  Stock  shall  lapse,  and such  Restricted  Stock shall be
surrendered to the Company without consideration, upon Termination of Employment
or, if applicable,  upon Termination of Consultancy with the Company;  provided,
however, that the Committee in its sole and absolute discretion may provide that
such  rights  shall  not  lapse in the  event  of a  Termination  of  Employment
following a "change of  ownership  or  control"  (within the meaning of Treasury
Regulation Section 1.162-27(e)(2)(v) or any successor regulation thereto) of the
Company or because  of the  Holder's  death or  disability;  provided,  further,
except with  respect to shares of  Restricted  Stock  granted to Section  162(m)
Participants, the Committee in its sole and absolute discretion may provide that
no such  lapse or  surrender  shall  occur  in the  event  of a  Termination  of
Employment,  or a  Termination  of  Consultancy,  without cause or following any
Change in Control of the  Company or  because  of the  Holder's  retirement,  or
otherwise.

    7.5 Repurchase of Restricted Stock. The Committee shall provide in the terms
of each  individual  Award  Agreement  that the Company  shall have the right to
repurchase  from the Holder the  Restricted  Stock then subject to  restrictions
under the Award  Agreement  immediately  upon a Termination of Employment or, if
applicable,  upon a  Termination  of  Consultancy  between  the  Holder  and the
Company,  at a cash  price per share  equal to the price  paid by the Holder for
such Restricted  Stock;  provided,  however,  that the Committee in its sole and
absolute  discretion may provide that no such right of repurchase shall exist in
the event of a  Termination  of  Employment  following a "change of ownership or
control" (within the meaning of Treasury



                                      A-13


Regulation Section 1.162-27(e)(2)(v) or any successor regulation thereto) of the
Company or because of the Holder's death or disability; provided, further, that,
except with  respect to shares of  Restricted  Stock  granted to Section  162(m)
Participants, the Committee in its sole and absolute discretion may provide that
no such  right of  repurchase  shall  exist in the  event  of a  Termination  of
Employment or a Termination of Consultancy without cause or following any Change
in Control of the Company or because of the Holder's retirement, or otherwise.

    7.6 Escrow.  The Secretary of the Company or such other escrow holder as the
Committee  may  appoint  shall  retain  physical  custody  of  each  certificate
representing  Restricted Stock until all of the  restrictions  imposed under the
Award Agreement with respect to the shares evidenced by such certificate  expire
or shall have been removed.

    7.7 Legend.  In order to enforce  the  restrictions  imposed  upon shares of
Restricted Stock hereunder,  the Committee shall cause a legend or legends to be
placed on  certificates  representing  all shares of  Restricted  Stock that are
still subject to restrictions  under Award  Agreements,  which legend or legends
shall make appropriate reference to the conditions imposed thereby.

    7.8 Section  83(b)  Election.  If a Holder makes an election  under  Section
83(b) of the Code, or any successor section thereto, to be taxed with respect to
the Restricted  Stock as of the date of transfer of the Restricted  Stock rather
than as of the date or dates upon which the Holder  would  otherwise  be taxable
under  Section  83(a) of the  Code,  the  Holder  shall  deliver  a copy of such
election to the Company immediately after filing such election with the Internal
Revenue Service.

                                  ARTICLE VIII.

                            STOCK APPRECIATION RIGHTS

    8.1 Grant of Stock  Appreciation  Rights. A Stock  Appreciation Right may be
granted to any key Employee or  Consultant  selected by the  Committee.  A Stock
Appreciation Right may be granted (a) in connection and simultaneously  with the
grant of an Option,  (b) with respect to a  previously  granted  Option,  or (c)
independent of an Option.  A Stock  Appreciation  Right shall be subject to such
terms and  conditions  not  inconsistent  with the Plan as the  Committee  shall
impose and shall be evidenced by an Award Agreement.

    8.2  Coupled Stock Appreciation Rights.

    (a) A Coupled  Stock  Appreciation  Right  ("CSAR")  shall be  related  to a
particular  Option  and shall be  exercisable  only when and to the  extent  the
related Option is exercisable.

    (b) A CSAR may be  granted  to the  Holder  for no more  than the  number of
shares subject to the simultaneously or previously granted Option to which it is
coupled.

    (c) A CSAR shall  entitle the Holder (or other  person  entitled to exercise
the Option  pursuant  to the Plan) to  surrender  to the Company  unexercised  a
portion of the Option to which the CSAR relates (to the extent then  exercisable
pursuant to its terms) and to receive from the Company in exchange  ~herefore an
amount  determined by  multiplying  the difference  obtained by subtracting  the
Option  exercise  price from the Fair Market Value of a share of Common Stock on
the date of  exercise  of the CSAR by the number of shares of Common  Stock with
respect to which the CSAR shall have been exercised,  subject to any limitations
the Committee may impose.



                                      A-14


    8.3  Independent Stock Appreciation Rights.

    (a) An Independent Stock  Appreciation  Right ("ISAR") shall be unrelated to
any  Option  and  shall  have a term  set by the  Committee.  An ISAR  shall  be
exercisable in such  installments as the Committee may determine.  An ISAR shall
cover such  number of shares of Common  Stock as the  Committee  may  determine;
provided,  however, that unless the Committee otherwise provides in the terms of
the ISAR or otherwise,  no ISAR granted to a person subject to Section 16 of the
Exchange  Act shall be  exercisable  until at least six months have elapsed from
(but excluding) the date on which the Option was granted. The exercise price per
share of Common  Stock  subject to each ISAR shall be set by the  Committee.  An
ISAR is exercisable only while the Holder is an Employee or Consultant; provided
that the Committee may  determine  that the ISAR may be exercised  subsequent to
Termination  of Employment or  Termination  of  Consultancy  without  cause,  or
following a Change in Control, or because of the Holder's  retirement,  death or
disability, or otherwise.

    (b) An ISAR shall  entitle the Holder (or other person  entitled to exercise
the ISAR  pursuant  to the Plan) to exercise  all or a specified  portion of the
ISAR (to the extent then exercisable  pursuant to its terms) and to receive from
the Company an amount  determined  by  multiplying  the  difference  obtained by
subtracting  the exercise price per share of the ISAR from the Fair Market Value
of a share of Common  Stock on the date of exercise of the ISAR by the number of
shares of Common Stock with respect to which the ISAR shall have been exercised,
subject to any limitations the Committee may impose.

    8.4  Payment and Limitations on Exercise.

    (a) Payment of the amounts  determined under Section 8.2(c) and 8.3(b) above
shall be in cash, in Common Stock (based on its Fair Market Value as of the date
the  Stock  Appreciation  Right is  exercised)  or a  combination  of  both,  as
determined  by the  Committee.  To the extent such payment is effected in Common
Stock, it shall be made subject to satisfaction of all provisions of Section 6.3
above pertaining to Options.

    (b) Holders of Stock Appreciation  Rights may be required to comply with any
timing or other  restrictions  with respect to the  settlement  or exercise of a
Stock  Appreciation  Right,  including  a  window-period  limitation,  as may be
imposed in the discretion of the Committee.

                                   ARTICLE IX.

                                 ADMINISTRATION

    9.1 Compensation Committee. The Compensation Committee (or another committee
or a subcommittee of the Board assuming the functions of the Committee under the
Plan) shall consist solely of two or more Independent Directors appointed by and
holding  office  at  the  pleasure  of  the  Board,  each  of  whom  is  both  a
"non-employee  director" as defined by Rule 16b-3 and an "outside  director" for
purposes of Section 162(m) of the Code.  Appointment of Committee  members shall
be effective upon acceptance of appointment. Committee members may resign at any
time by delivering  written notice to the Board.  Vacancies in the Committee may
be filled by the Board.



                                      A-15


    9.2 Duties and Powers of Committee. It shall be the duty of the Committee to
conduct  the  general   administration  of  the  Plan  in  accordance  with  its
provisions.  The  Committee  shall have the power to interpret  the Plan and the
Award   Agreements,   and  to  adopt   such   rules   for  the   administration,
interpretation,  and  application  of the Plan as are consistent  therewith,  to
interpret,  amend or revoke  any such  rules  and to amend  any Award  Agreement
provided that the rights or  obligations  of the Holder of the Award that is the
subject of any such Award Agreement are not affected  adversely.  Any such grant
or award under the Plan need not be the same with  respect to each  Holder.  Any
such  interpretations and rules with respect to Incentive Stock Options shall be
consistent  with the  provisions  of Section  422 of the Code.  In its  absolute
discretion, the Board may at any time and from time to time exercise any and all
rights and duties of the Committee under the Plan except with respect to matters
which  under Rule 16b-3 or Section  162(m) of the Code,  or any  regulations  or
rules issued thereunder, are required to be determined in the sole discretion of
the Committee.

    9.3 Majority Rule;  Unanimous Written Consent.  The Committee shall act by a
majority of its members in  attendance at a meeting at which a quorum is present
or by a  memorandum  or other  written  instrument  signed by all members of the
Committee.

    9.4 Compensation;  Professional  Assistance;  Good Faith Actions. Members of
the Committee  shall receive such  compensation,  if any, for their  services as
members as may be determined by the Board.  All expenses and  liabilities  which
members of the Committee incur in connection with the administration of the Plan
shall be borne by the  Company.  The  Committee  may,  with the  approval of the
Board, employ attorneys, consultants, accountants, appraisers, brokers, or other
persons.  The  Committee,  the Company and the Company's  officers and Directors
shall be entitled to rely upon the advice,  opinions or  valuations  of any such
persons.  All actions taken and all  interpretations  and determinations made by
the  Committee  or the Board in good faith shall be final and  binding  upon all
Holders,  the  Company  and all other  interested  persons.  No  members  of the
Committee or Board shall be personally  liable for any action,  determination or
interpretation  made in good faith with  respect to the Plan or Awards,  and all
members of the Committee  and the Board shall be fully  protected by the Company
with respect to any such action, determination or interpretation.

    9.5  Delegation  of Authority to Grant Awards.  The Committee  may, but need
not,  delegate  from time to time some or all of its  authority  to grant Awards
under the Plan to a committee consisting of one or more members of the Committee
or of one or more officers of the Company; provided, however, that the Committee
may not  delegate  its  authority  to grant  Awards to  individuals  (i) who are
subject on the date of the grant to the  reporting  rules under Section 16(a) of
the Exchange  Act,  (ii) who are Section  162(m)  Participants  or (iii) who are
officers of the Company who are delegated authority by the Committee  hereunder.
Any delegation  hereunder shall be subject to the  restrictions  and limits that
the Committee  specifies at the time of such  delegation of authority and may be
rescinded at any time by the Committee.  At all times,  any committee  appointed
under this  Section  9.5 shall  serve in such  capacity  at the  pleasure of the
Committee.


                                      A-16


                                   ARTICLE X.

                            MISCELLANEOUS PROVISIONS

    10.1 Not  Transferable.  No  Award  under  the  Plan  may be sold,  pledged,
assigned or  transferred in any manner other than by will or the laws of descent
and distribution or, subject to the consent of the Administrator,  pursuant to a
DRO,  unless and until such Award has been exercised,  or the shares  underlying
such Award have been issued, and all restrictions applicable to such shares have
lapsed;  provided,  however,  that the  restrictions  set forth in the foregoing
clause shall not apply to transfers of Non-Qualified  Stock Options,  Restricted
Stock or Stock Appreciation Rights, subject to the consent of the Administrator,
by gift of an Option by an Employee to a Permitted Transferee (as defined below)
subject to the following  terms and conditions:  (i) an Option  transferred to a
Permitted  Transferee  shall not be assignable or  transferable by the Permitted
Transferee other than by DRO or by will or the laws of descent and distribution;
(ii) any Option which is transferred to a Permitted Transferee shall continue to
be subject to all the terms and  considerations  of the Option as  applicable to
the  original  holder  (other than the ability to further  transfer the Option);
(iii) the  Employee  and the  Permitted  Transferee  shall  execute  any and all
documents  reasonably  requested  by  the  Administrator,   including,   without
limitation, documents to (a) confirm the status of the transferee as a Permitted
Transferee, (b) satisfy any requirements for an exemption for the transfer under
applicable  federal and state  securities  laws and (c) provide  evidence of the
transfer;  (iv) the shares of Common  Stock  acquired by a Permitted  Transferee
through exercise of an Option have not been registered under the Securities Act,
or any state securities act and may not be transferred, nor will any assignee or
transferee  thereof be recognized as an owner of such shares of Common Stock for
any purpose,  unless a registration  statement  under the Securities Act and any
applicable  state  securities  act with  respect to such shares shall then be in
effect or unless the availability of an exemption from registration with respect
to any proposed  transfer or  disposition of such shares shall be established to
the  satisfaction  of counsel for the  Company.  As used in this  Section  10.1,
"Permitted  Transferee"  shall  mean  (i) one or more  of the  following  family
members  of an  Employee:  spouse,  former  spouse,  child  (whether  natural or
adopted),  stepchild, any other lineal descendant of the Employee, (ii) a trust,
partnership or other entity established and existing for the sole benefit of, or
under the sole  control  of,  one or more of the  above  family  members  of the
Employee,   or  (iii)  any  other  transferee   specifically   approved  by  the
Administrator  after taking into account any state or federal tax or  securities
laws applicable to transferable Options.

    No Award or  interest  or right  therein  shall  be  liable  for the  debts,
contracts or engagements of the Holder or his successors in interest or shall be
subject  to  disposition   by  transfer,   alienation,   anticipation,   pledge,
encumbrance, assignment or any other means whether such disposition be voluntary
or  involuntary  or  by  operation  of  law,  by  judgment,   levy,  attachment,
garnishment or any other legal or equitable proceedings (including  bankruptcy),
and any attempted  disposition  thereof shall be null and void and of no effect,
except to the  extent  that  such  disposition  is  permitted  by the  preceding
sentence.

    Unless an Option has been  transferred in accordance with this Section 10.1,
(i) during the  lifetime of the Holder,  only he may exercise an Option or other
Award (or any portion  thereof) granted to him under the Plan unless it has been
disposed  of  pursuant  to a DRO,  and (ii) after the death of the  Holder,  any
exercisable portion of an Option or other Award may, prior to the time when such
portion becomes  unexercisable under the Plan or the applicable Award Agreement,
be exercised by his personal  representative or by any person empowered to do so
under the deceased  Holder's will or under the then  applicable  laws of descent
and distribution.



                                      A-17


    10.2 Amendment,  Suspension or Termination of the Plan.  Except as otherwise
provided in this Section  10.2,  the Plan may be wholly or partially  amended or
otherwise modified,  suspended or terminated at any time or from time to time by
the Administrator. However, without approval of the Company's stockholders given
within twelve months before or after the action by the Administrator,  no action
of the  Administrator  may,  except as provided in Section  10.3,  increase  the
limits  imposed  in Section  2.1 on the  maximum  number of shares  which may be
issued under the Plan.  No  amendment,  suspension  or  termination  of the Plan
shall,  without  the  consent  of the  Holder,  alter or  impair  any  rights or
obligations  under any Award  theretofore  granted or awarded,  unless the Award
itself  otherwise  expressly  so  provides.  No Awards may be granted or awarded
during any period of  suspension  or after  termination  of the Plan,  and in no
event may any  Incentive  Stock Option be granted under the Plan after the first
to occur of the following events:

        (a) The expiration of ten years from the date the Plan is adopted by the
    Board; or

        (b) The  expiration  of ten years from the date the Plan is  approved by
    the Company's stockholders under Section 10.4.

    10.3  Changes  in  Common  Stock or Assets of the  Company,  Acquisition  or
Liquidation of the Company and Other Corporate Events.

    (a)  Subject  to  Section  10.3  (d),  in the event  that the  Administrator
determines that any dividend or other distribution (whether in the form of cash,
Common  Stock,   other   securities,   or  other  property),   recapitalization,
reclassification,  stock split,  reverse  stock split,  reorganization,  merger,
consolidation,   split-up,  spin-off,  combination,   repurchase,   liquidation,
dissolution,  or  sale,  transfer,  exchange  or  other  disposition  of  all or
substantially  all of the assets of the Company,  or exchange of Common Stock or
other  securities  of the  Company,  issuance  of  warrants  or other  rights to
purchase  Common  Stock or other  securities  of the Company,  or other  similar
corporate transaction or event, in the Administrator's sole discretion,  affects
the Common Stock such that an adjustment is determined by the  Administrator  to
be  appropriate  in order to prevent  dilution or enlargement of the benefits or
potential  benefits intended to be made available under the Plan or with respect
to an  Award,  then  the  Administrator  shall,  in such  manner  as it may deem
equitable, adjust any or all of

        (i) the number and kind of shares of Common  Stock (or other  securities
    or  property)  with  respect  to which  Awards  may be  granted  or  awarded
    (including,  but not limited to,  adjustments of the  limitations in Section
    2.1 on the  maximum  number  and kind of  shares  which  may be  issued  and
    adjustments of the Award Limit),

        (ii) the number and kind of shares of Common Stock (or other  securities
    or property) subject to outstanding Awards, and

        (iii) the grant or exercise price with respect to any Award.



                                      A-18


    (b)  Subject  to  Sections  10.3(b)(vii)  and  10.3(d),  in the event of any
transaction  or event  described in Section  10.3(a) or of changes in applicable
laws, regulations, or accounting principles, the Administrator,  in its sole and
absolute  discretion,  and on such terms and conditions as it deems appropriate,
either by the terms of the Award or by action taken prior to the  occurrence  of
such transaction or event and either automatically or upon the Holder's request,
is hereby  authorized to take any one or more of the following  actions whenever
the Administrator determines that such action is appropriate in order to prevent
dilution or  enlargement  of the benefits or potential  benefits  intended to be
made  available  under the Plan or with respect to any Award under the Plan,  to
facilitate  such  transactions  or events or to give  effect to such  changes in
laws, regulations or principles:

        (i) To provide  for either the  purchase of any such Award for an amount
    of cash equal to the amount that could have been  attained upon the exercise
    of such  Award or  realization  of the  Holder's  rights had such Award been
    currently  exercisable or payable or fully vested or the replacement of such
    Award with other  rights or property  selected by the  Administrator  in its
    sole discretion;

        (ii) To provide  that the Award  cannot  vest,  be  exercised  or become
    payable after such event;

        (iii) To provide that such Award shall be  exercisable  as to all shares
    covered thereby,  notwithstanding anything to the contrary in Section 5.3 or
    the provisions of such Award;

        (iv) To provide that such Award be assumed by the  successor or survivor
    corporation,  or a parent or subsidiary thereof, or shall be substituted for
    by similar options,  rights or awards covering the stock of the successor or
    survivor  corporation,  or a parent or subsidiary thereof,  with appropriate
    adjustments as to the number and kind of shares and prices; and

        (v) To make adjustments in the number and type of shares of Common Stock
    (or other securities or property) subject to outstanding  Awards, and in the
    number  and kind of  outstanding  Restricted  Stock  and/or in the terms and
    conditions of, and the criteria included in, outstanding options, rights and
    awards and options, rights and awards which may be granted in the future;

        (vi) To  provide  that,  for a  specified  period of time  prior to such
    event,  the  restrictions  imposed under an Award Agreement upon some or all
    shares of Restricted Stock may be terminated, and some or all shares of such
    Restricted  Stock may cease to be subject to repurchase under Section 7.5 or
    forfeiture under Section 7.4 after such event;

        (vii) Notwithstanding any other provision of the Plan, in the event of a
    Change in Control,  each outstanding  Award shall,  immediately prior to the
    effective  date  of  the  Change  in  Control,  automatically  become  fully
    exercisable  for all of the  shares of Common  Stock at the time  subject to
    such  rights  and  may be  exercised  for  any or all  of  those  shares  as
    fully-vested shares of Common Stock.

    (c) Subject to Sections 10.3(d),  3.2 and 3.3, the Administrator may, in its
discretion,  include  such  further  provisions  and  limitations  in any Award,
agreement or certificate,  as it may deem equitable and in the best interests of
the Company.



                                      A-19


    (d) With respect to Awards which are granted to Section 162(m)  Participants
and are  intended to qualify as  performance-based  compensation  under  Section
162(m)(4)(C),  no adjustment or action  described in this Section 10.3 or in any
other  provision  of the Plan  shall  be  authorized  to the  extent  that  such
adjustment  or action would cause such Award to fail to so qualify under Section
162(m)(4)(C),  or any  successor  provisions  thereto.  No  adjustment or action
described in this  Section  10.3 or in any other  provision of the Plan shall be
authorized to the extent that such  adjustment or action would cause the Plan to
violate Section 422(b)(1) of the Code. Furthermore, no such adjustment or action
shall be  authorized  to the extent such  adjustment  or action  would result in
short-swing  profits  liability  under  Section  16  or  violate  the  exemptive
conditions of Rule 16b-3 unless the  Administrator  determines that the Award is
not to comply  with such  exemptive  conditions.  The number of shares of Common
Stock subject to any Award shall always be rounded to the next whole number.

    (e) Notwithstanding  the foregoing,  in the event that the Company becomes a
party to a  transaction  that is intended to qualify for "pooling of  interests"
accounting  treatment and, but for one or more of the provisions of this Plan or
any Award  Agreement  would so qualify,  then this Plan and any Award  Agreement
shall be interpreted  so as to preserve such  accounting  treatment,  and to the
extent that any provision of the Plan or any Award  Agreement  would  disqualify
the transaction from pooling of interests  accounting treatment  (including,  if
applicable,  an entire Award  Agreement),  then such provision shall be null and
void. All  determinations  to be made in connection with the preceding  sentence
shall be made by the  independent  accounting firm whose opinion with respect to
"pooling of  interests"  treatment is required as a condition  to the  Company's
consummation of such transaction.

    (f) The existence of the Plan,  the Award  Agreement and the Awards  granted
hereunder  shall  not  affect or  restrict  in any way the right or power of the
Company or the  stockholders of the Company to make or authorize any adjustment,
recapitalization,  reorganization  or  other  change  in the  Company's  capital
structure or its business, any merger or consolidation of the Company, any issue
of stock or of  options,  warrants  or  rights  to  purchase  stock or of bonds,
debentures, preferred or prior preference stocks whose rights are superior to or
affect the Common Stock or the rights thereof or which are  convertible  into or
exchangeable for Common Stock, or the dissolution or liquidation of the Company,
or any sale or  transfer  of all or any part of its assets or  business,  or any
other corporate act or proceeding, whether of a similar character or otherwise.

    10.4  Approval of Plan by  Stockholders.  The Plan will be submitted for the
approval of the  Company's  stockholders  within twelve months after the date of
the Board's initial adoption of the Plan. Awards may be granted or awarded prior
to such stockholder approval, provided that such Awards shall not be exercisable
nor shall such  Awards  vest prior to the time when the Plan is  approved by the
stockholders,  and provided  further that if such approval has not been obtained
at the end of said twelve-month period, all Awards previously granted or awarded
under the Plan  shall  thereupon  be  canceled  and  become  null and  void.  In
addition,  if the Board  determines  that  Awards  other  than  Options or Stock
Appreciation  Rights which may be granted to Section 162(m)  Participants should
continue  to be  eligible  to qualify as  performance-based  compensation  under
Section  162(m)(4)(C) of the Code, the Performance Criteria must be disclosed to
and approved by the Company's  stockholders no later than the first  stockholder
meeting that occurs in the fifth year  following the year in which the Company's
stockholders previously approved the Performance Criteria.



                                      A-20


    10.5 Tax  Withholding.  The Company shall be entitled to require  payment in
cash or  deduction  from other  compensation  payable to each Holder of any sums
required by federal,  state or local tax law to be withheld  with respect to the
issuance,  vesting,  exercise or payment of any Award. The  Administrator may in
its  discretion  and in  satisfaction  of the foregoing  requirement  allow such
Holder to elect to have the Company  withhold  shares of Common Stock  otherwise
issuable under such Award (or allow the return of shares of Common Stock) having
a Fair Market Value equal to the sums required to be withheld.

    10.6 Loans.  The Committee may, in its discretion,  extend one or more loans
to key Employees in connection  with the exercise or receipt of an Award granted
or awarded under the Plan, or the issuance of Restricted Stock awarded under the
Plan. The terms and conditions of any such loan shall be set by the Committee.

    10.7 Forfeiture  Provisions.  Pursuant to its general authority to determine
the terms and conditions  applicable to Awards under the Plan, the Administrator
shall have the right to provide,  in the terms of Awards made under the Plan, or
to require a Holder to agree by  separate  written  instrument,  that (a)(i) any
proceeds, gains or other economic benefit actually or constructively received by
the Holder upon any  receipt or  exercise  of the Award,  or upon the receipt or
resale of any Common Stock  underlying  the Award,  must be paid to the Company,
and (ii) the Award  shall  terminate  and any  unexercised  portion of the Award
(whether  or not  vested)  shall  be  forfeited,  if  (b)(i)  a  Termination  of
Employment or Termination of  Consultancy  occurs prior to a specified  date, or
within a specified time period  following  receipt or exercise of the Award,  or
(ii) the Holder at any time, or during a specified  time period,  engages in any
activity in  competition  with the Company,  or which is  inimical,  contrary or
harmful to the interests of the Company, as further defined by the Administrator
or (iii) the  Holder  incurs a  Termination  of  Employment  or  Termination  of
Consultancy for cause.

    10.8 Effect of Plan Upon Options and Compensation Plans. The adoption of the
Plan shall not affect any other  compensation  or incentive  plans in effect for
the Company or any  Subsidiary.  Nothing in the Plan shall be construed to limit
the right of the  Company (a) to  establish  any other  forms of  incentives  or
compensation  for Employees or  Consultants  of the Company or any Subsidiary or
(b) to grant or assume  options or other rights or awards  otherwise  than under
the Plan in connection with any proper  corporate  purpose  including but not by
way of  limitation,  the grant or assumption  of options in connection  with the
acquisition  by purchase,  lease,  merger,  consolidation  or otherwise,  of the
business,  stock or assets of any corporation,  partnership,  limited  liability
company, firm or association.

    10.9  Compliance  with Laws.  The Plan,  the  granting and vesting of Awards
under the Plan and the  issuance  and delivery of shares of Common Stock and the
payment of money under the Plan or under Awards granted or awarded hereunder are
subject to  compliance  with all  applicable  federal and state laws,  rules and
regulations  (including but not limited to state and federal  securities law and
federal margin requirements) and to such approvals by any listing, regulatory or
governmental  authority  as may, in the opinion of counsel for the  Company,  be
necessary or advisable in connection  therewith.  Any securities delivered under
the Plan shall be subject to such  restrictions,  and the person  acquiring such
securities  shall,  if  requested by the Company,  provide such  assurances  and
representations to the Company as the Company may deem necessary or desirable to
assure  compliance  with  all  applicable  legal  requirements.  To  the  extent
permitted by applicable  law, the Plan and Awards  granted or awarded  hereunder
shall be deemed amended to the extent  necessary to conform to such laws,  rules
and regulations.



                                      A-21


    10.10 Titles. Titles are provided herein for convenience only and are not to
serve as a basis for interpretation or construction of the Plan.

    10.11  Governing  Law.  The  Plan  and any  agreements  hereunder  shall  be
administered,  interpreted  and enforced under the internal laws of the State of
Delaware without regard to conflicts of laws thereof.



                                      A-22




                               * * * * * * * * * *



    I hereby  certify that the  foregoing  plan was duly adopted by the Board of
Directors of Tegal Corporation as of June 30, 2003.



                                                     /s/ THOMAS R. MIKA
                                                     --------------------------
                                                     Thomas R. Mika
                                                     Secretary



                                      A-23




                                                                      APPENDIX B



                       FORM OF CERTIFICATE OF AMENDMENT TO

                CERTIFICATE OF INCORPORATION OF TEGAL CORPORATION


It is hereby certified that:

1.  The name of the Corporation  (hereinafter called the "Corporation") is Tegal
    Corporation.

2.  The Certificate of Incorporation is hereby amended by striking out the first
    sentence  of Article  FOURTH  thereof  and by  substituting  in lieu of said
    sentence the following new sentence:

    "FOURTH:  The total  number of shares of all classes of capital  stock which
    the  Corporation  shall have  authority to issue is One Hundred Five Million
    shares,  comprised  of One Hundred  Million  (100,000,000)  shares of Common
    Stock, with a par value of One Cent (U.S. $0.01) per share, and Five Million
    (5,000,000)  shares of Preferred  Stock,  with a par value of One Cent (U.S.
    $0.01) per share.

3.  The  amendment of the  Certificate  of  Incorporation  herein  certified was
    submitted to the  stockholders  of the  Corporation and was duly approved by
    the required vote of  stockholders of the Corporation in accordance with the
    provisions  of Sections  222 and 242 of the General  Corporation  Law of the
    State of Delaware.  The total number of outstanding  shares entitled to vote
    or  consent to this  Amendment  was  16,099,949  shares of Common  Stock.  A
    majority of the  outstanding  shares of Common Stock,  voting  together as a
    single class,  voted in favor of this  Certificate  of  Amendment.  The vote
    required was a majority of the  outstanding  shares of Common Stock,  voting
    together as a single class.

     IN WITNESS  WHEREOF,  Tegal  Corporation  has caused  this  Certificate  of
Amendment to be signed by its Chief Executive Officer as of [ ], 2003.



                                                -------------------------
                                                Michael L. Parodi
                                                Chief Executive Officer

                                      B-1




                                                                      APPENDIX C



                       FORM OF CERTIFICATE OF AMENDMENT TO

                CERTIFICATE OF INCORPORATION OF TEGAL CORPORATION


It is hereby certified that:

1. The name of the Corporation  (hereinafter  called the "Corporation") is Tegal
Corporation.

2. The  Certificate of  Incorporation  is hereby amended by striking out Article
FOURTH  thereof and by  substituting  in lieu of said Article the  following new
Article:

    "FOURTH:  The total  number of shares of all classes of capital  stock which
    the  Corporation  shall have authority to issue is [One Hundred Five Million
    shares,  comprised  of One Hundred  Million  (100,000,000)  shares of Common
    Stock],  with a par  value of One Cent  (U.S.  $0.01)  per  share,  and Five
    Million  (5,000,000) shares of Preferred Stock, with a par value of One Cent
    (U.S. $0.01) per share. Effective as of 5:00 p.m., Eastern time, on the date
    this  Certificate  of Amendment is filed with the  Secretary of State of the
    State of Delaware,  each [ Insert either two,  three,  five, ten or fifteen]
    shares of the Corporation's  Common Stock, par value $0.01 per share, issued
    and outstanding  shall,  automatically and without any action on the part of
    the respective holders thereof, be combined,  converted and changed into one
    (1) share of Common stock,  par value $0.01 per share,  of the  Corporation;
    provided  however,  that the Corporation shall issue no fractional shares of
    Common Stock, but shall instead pay to any stockholder who would be entitled
    to receive a fractional  share as a result of the actions set forth herein a
    sum in cash equal to such fraction multiplied by the average of the high and
    low  prices of the  Corporation's  Common  Stock as  reported  on the Nasdaq
    National Market for the five trading-day  period ending on the last business
    day  before  the date  this  Certificate  of  Amendment  is  filed  with the
    Secretary  of  State of the  State of  Delaware.  The  designation,  powers,
    preferences and relative,  participating,  optional or other special rights,
    including voting rights, qualifications,  limitations or restrictions of the
    Preferred Stock shall be established by resolution of the Board of Directors
    pursuant  to  Section  151 of the  General  Corporation  Law of the State of
    Delaware."

3. The  amendment of the  Certificate  of  Incorporation  herein  certified  was
submitted to the  stockholders  of the  Corporation and was duly approved by the
required  vote  of  stockholders  of the  Corporation  in  accordance  with  the
provisions of Sections 222 and 242 of the General  Corporation  Law of the State
of Delaware.  The total number of outstanding shares entitled to vote or consent
to this  Amendment was l shares of Common Stock.  A majority of the  outstanding
shares of Common Stock,  voting  together as a single  class,  voted in favor of
this  Certificate  of  Amendment.  The  vote  required  was a  majority  of  the
outstanding shares of Common Stock, voting together as a single class.

                                      C-1





     IN WITNESS  WHEREOF,  Tegal  Corporation  has caused  this  Certificate  of
Amendment to be signed by its Chief Executive Officer as of [ ], 2003.


                                                        -----------------------
                                                        Michael L. Parodi
                                                        Chief Executive Officer


                                      C-2



PROXY



                                TEGAL CORPORATION



            THIS PROXY IS SOLICITED BY AND ON BEHALF OF THE BOARD OF

      DIRECTORS FOR THE ANNUAL MEETING OF STOCKHOLDERS ON AUGUST 26, 2003.



The  undersigned   hereby  appoints   Michael  L.  Parodi  with  full  power  of
substitution,  as proxy, and hereby  authorizes him to represent and to vote, as
designated  below,  all shares of common  stock of Tegal  Corporation  which the
undersigned  may be entitled to vote at the annual meeting of stockholders to be
held on August 26, 2003, and any and all adjournments of the annual meeting.


                (CONTINUED AND TO BE SIGNED ON THE REVERSE SIDE)

- --------------------------------------------------------------------------------


                             -FOLD AND DETACH HERE -





                                                        Please mark
                                                        your votes as
                                                        indicated in [X]
                                                        this example



       THIS PROXY WILL BE VOTED AS DIRECTED. IF NO CONTRARY INSTRUCTION IS

        INDICATED, THIS PROXY WILL BE VOTED FOR THE ELECTION OF THE THREE

                             NOMINEES LISTED BELOW.



               The board of directors recommends that you vote FOR

         the nominees in Proposal No. 1, FOR adoption of Proposal No. 2,

       FOR adoption of Proposal No. 3, FOR adoption of Proposal No. 4,

                      and FOR adoption of Proposal No. 5.


1. Election of Directors:
                                                                                     FOR                WITHHOLD
     01 Edward A. Dohring, 02 Jeffrey M. Krauss 03 Michael L. Parodi and         all nominees           AUTHORITY
     04 H. Duane Wadsworth.                                                     listed (except         to vote for
                                                                                 as marked to         all nominees
                                                                                the contrary)            listed
                                                                                                 
                                                                                    [   ]                 [   ]
     INSTRUCTIONS: To withhold authority to vote for any individual
     nominee, strike a line through the nominee's name in the list above.


2.   Proposal to amend the 1998 Equity Participation Plan to increase the number     FOR       AGAINST           ABSTAIN
     of shares  available  for  issuance  from  2,400,000 to  6,4000.000  and to    [   ]       [   ]             [   ]
     increase the Award Limit from 600,000 shares to 1,600,000 shares.







                                                                                                       
3.   Proposal to approve the sale of 2% Convertible  Secured  Debentures and            FOR         AGAINST     ABSTAIN
     warrants to purchase  common  stock to a group of private investors in a
     private placement.                                                                 [ ]           [ ]          [ ]

4.   Proposal to amend the Articles of  Incorporation to increase the number            FOR         AGAINST     ABSTAIN
     of  authorized  shared for  issuance  from  35,000,000  to 100,000,000.            [ ]           [ ]          [ ]

5.   Proposal to approve the reverse stock split.                                       FOR         AGAINST     ABSTAIN
                                                                                        [ ]           [ ]          [ ]

6.   In their  discretion,  the proxies are  authorized  to vote upon such other
     business as may properly come before the annual meeting and adjournments of
     the annual meeting.



                ANY  PREVIOUS  PROXY  EXECUTED  BY  THE  UNDERSIGNED  IS  HEREBY
                REVOKED.



                Receipt  of the  notice  of the  annual  meeting  and the  proxy
                statement is hereby acknowledged.



                PLEASE MARK, SIGN, DATE AND RETURN THE PROXY CARD PROMPTLY USING
                THE ENCLOSED ENVELOPE



Signature of Stockholder  ________________________________________________
Dated  _____________________ , 2003



Note:  Please sign exactly as addressed  hereon.  Joint owners should each sign.
Executors, administrators,  trustees, guardians and attorneys should so indicate
when  signing.  Attorneys  should submit  powers of attorney.  Corporations  and
partnerships  should sign in full corporate or partnership name by an authorized
officer.



- --------------------------------------------------------------------------------

                             -FOLD AND DETACH HERE-