EXHIBIT 32


                    CERTIFICATION OF CHIEF EXECUTIVE OFFICER

    Pursuant  to  18  U.S.C.  ss.  1350,  as  created  by  Section  906  of  the
Sarbanes-Oxley  Act of 2002, the undersigned  officer of Tegal  Corporation (the
"Company") hereby certifies, to such officer's knowledge, that:

      (i)   the  accompanying  Quarterly  Report on Form 10-Q of the Company for
            the  quarterly  period  ended  June 30,  2003 (the  "Report")  fully
            complies with the requirements of Section 13(a) or Section 15(d), as
            applicable, of the Securities Exchange Act of 1934, as amended; and

      (ii)the  information  contained  in the  Report  fairly  presents,  in all
            material respects, the financial condition and results of operations
            of the Company.


Date: February 12, 2004                         /s/ MICHAEL L. PARODI
                                                ------------------------------
                                                Michael L. Parodi
                                                Chief Executive  Officer



                    CERTIFICATION OF CHIEF FINANCIAL OFFICER


      Pursuant  to 18  U.S.C.  ss.  1350,  as  created  by  Section  906  of the
Sarbanes-Oxley  Act of 2002, the undersigned  officer of Tegal  Corporation (the
"Company") hereby certifies, to such officer's knowledge, that:

      (i)   the  accompanying  Quarterly  Report on Form 10-Q of the Company for
            the  quarterly  period  ended  June 30,  2003 (the  "Report")  fully
            complies with the requirements of Section 13(a) or Section 15(d), as
            applicable, of the Securities Exchange Act of 1934, as amended; and

      (ii)the  information  contained  in the  Report  fairly  presents,  in all
            material respects, the financial condition and results of operations
            of the Company.


Date: February 12, 2004                         /s/ THOMAS R. MIKA
                                                ------------------------------
                                                Thomas R. Mika
                                                Chief Financial Officer


                                       47