UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549
                              --------------------

                                    FORM 8-K

                                 CURRENT REPORT
                       Pursuant to Section 13 or 15(d) of
                       the Securities Exchange Act of 1934


       Date of Report (Date of earliest event reported): February 12, 2004

                                TEGAL CORPORATION

               (Exact Name of Registrant as Specified in Charter)

         Delaware                      0-26824               68-0370244
(State or Other Jurisdiction of      (Commission          (I.R.S. Employer
          Incorporation)             File Number)         Identification No.)

                          2201 South McDowell Boulevard
                           Petaluma, California 94955
                    (Address of Principal Executive Offices)


                                 (707) 763-5600
              (Registrant's telephone number, including area code)




ITEM 5.  Other Events.

         On February 11, 2004, we entered into a structured  secondary  offering
facility  (the  "Structured   Secondary")   with  Kingsbridge   Capital  Limited
("Kingsbridge").  Under  the terms of a Common  Stock  Purchase  Agreement  (the
"Purchase  Agreement")  entered into by the Company and Kingsbridge on such date
with respect to the Structured Secondary,  we may, at our sole discretion,  sell
to  Kingsbridge,  and  Kingsbridge  would be obligated  to  purchase,  up to $25
million of shares of our Common  Stock,  par value $0.01 per share (the  "Common
Stock").  The  price at which we may sell  shares  of  Common  Stock  under  the
Purchase  Agreement is based on a discount to the volume weighted average market
price of the Common Stock for a specified  number of trading days following each
of our  respective  elections  to sell  shares  thereunder.  We may  utilize the
Structured  Secondary  over the  next 24  months  from  time to time in our sole
discretion,  subject to various  conditions and terms  contained in the Purchase
Agreement.

         In  connection  with our entering  into the  Structured  Secondary,  we
issued to  Kingsbridge a warrant (the  "Warrant") to purchase  300,000 shares of
Common  Stock at an exercise  price of $4.11 per share.  The Warrant will not be
exercisable until August 11, 2004, and will expire on August 11, 2009.

         The Company and  Kingsbridge  also entered into a  Registration  Rights
Agreement  (the   "Registration   Rights  Agreement")  in  connection  with  the
Structured Secondary. As contemplated by the Registration Rights Agreement,  the
Company will file a  registration  statement  with the  Securities  and Exchange
Commission  relating to the resale by  Kingsbridge of any shares of Common Stock
purchased by Kingsbridge  under the Purchase  Agreement or issued to Kingsbridge
as a  result  of  the  exercise  of  the  Warrant.  The  effectiveness  of  such
registration  statement  is a condition  precedent to our ability to sell Common
Stock to Kingsbridge under the Purchase Agreement.

         A copy of the Purchase Agreement,  the Warrant, the Registration Rights
Agreement and related press release are filed herewith as Exhibit 10.1,  Exhibit
10.2, Exhibit 10.3 and Exhibit 99.1,  respectively,  and incorporated  herein by
reference. The foregoing descriptions of the Purchase Agreement, the Warrant and
the  Registration  Rights Agreement are qualified in their entirety by reference
to such Exhibits.


ITEM 7.  Financial Statements, Pro Forma Financial Information and Exhibits

 (c)     Exhibits

         10.1     Common Stock  Purchase  Agreement  by and between  Kingsbridge
                  Capital  Limited and Tegal  Corporation,  dated as of February
                  11, 2004.

         10.2     Warrant,  dated  February  11,  2004,  issued  to  Kingsbridge
                  Capital Limited.

         10.3     Registration Rights Agreement,  dated as of February 11, 2004,
                  by and  between  Tegal  Corporation  and  Kingsbridge  Capital
                  Limited.

         99.1     Press Release, dated February 12, 2004.


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                                   SIGNATURES

         Pursuant to the  requirements  of the Securities  Exchange Act of 1934,
the  registrant  has duly  caused  this report to be signed on its behalf by the
undersigned hereunto duly authorized.



Date:  February 12, 2004                TEGAL CORPORATION
                                        (registrant)


                                        By: /s/ Thomas R. Mika
                                            ---------------------------------
                                        Name: Thomas R. Mika
                                        Its: Chief Financial Officer


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                                  EXHIBIT INDEX

10.1     Common  Stock  Purchase  Agreement by and between  Kingsbridge  Capital
         Limited and Tegal Corporation, dated as of February 11, 2004.

10.2     Warrant,  dated  February  11,  2004,  issued  to  Kingsbridge  Capital
         Limited.

10.3     Registration  Rights  Agreement,  dated as of February 11, 2004, by and
         between Tegal Corporation and Kingsbridge Capital Limited.

99.1     Press Release, dated February 12, 2004.