Exhibit 99.1

Contact:
Tegal Corporation                         Nagle & Ferri Investor Relations
Thomas Mika (EVP and CFO)                 Frank Nagle or Bob Ferri, 415/575-1999
707/763-5600

                            TEGAL CORPORATION REPORTS
                   THIRD QUARTER FISCAL 2004 FINANCIAL RESULTS

             New $25 million structured secondary offering facility
            to fund expansion in semicap equipment and nanotechnology


Petaluma,  Calif.,  February  12,  2004 -- Tegal  Corporation  (Nasdaq:TGAL),  a
leading designer and manufacturer of plasma etch and deposition  systems used in
the  production  of  integrated  circuits  and  nanotechnology   devices,  today
announced financial results for the third quarter of its fiscal year 2004, which
ended December 31, 2003.

Tegal today also announced the signing of a new $25 million structured secondary
offering facility with Kingsbridge  Capital. The facility is designed to provide
cost-effective  growth capital for expansion in semiconductor capital equipment,
nanotechnology and related markets.

Tegal's  revenues  for the third  quarter of fiscal  2004 were $3.3  million,  a
decrease of 11% from $3.7 million for the same  quarter  last year.  The Company
reported a net loss of $6.7  million,  or ($0.29)  per share,  for the  quarter,
compared to a net loss of $3.3 million,  or ($0.20) per share in the  comparable
quarter one year ago. For the  nine-month  period ending  December 31, 2003, the
Company's  revenues  were $10.4  million,  compared to $10.1 million in the same
period one year ago. Tegal's net loss in the nine-month period decreased to $9.6
million or ($0.52) per share,  compared to a $10.9  million or ($0.73) per share
loss in the nine months ending December 31, 2002.

Tegal's  loss this  quarter  included  non-cash  charges  for:  (i)  accelerated
interest expense of $2.0 million related to the convertible debt financing; (ii)
a $2.2 million one-time expensing of in-process research and development (IPR&D)
related to its recent acquisition of the assets of Simplus Systems;  and (iii) a
$1.0 million  increase of excess  inventory  reserves.  Excluding these non-cash
charges,  Tegal's pro-forma non-GAAP loss was $1.4 million,  which was about the
same as its pro-forma earnings for the first two quarters of this fiscal year.

Gross profits for the third fiscal quarter were a negative $0.1 million compared
to a positive $0.1 million in the  comparable  quarter last year.  Excluding the
non-cash charge for additional  inventory  reserves,  the Company's gross profit
was $0.9 million,  or 27% of sales.  For the  nine-month  period,  the Company's
gross  profits were $2.0  million,  versus a negative  $1.3 million for the same
period a year ago.  Operating expenses for the third fiscal quarter increased to
$4.6 million  compared to $3.4 million in the  comparable  quarter one year ago,
including the one-time  non-cash  IPR&D  expense of $2.2  million.  Without this
expense,  operating expenses were $2.4 million,  compared to $3.4 million in the
same quarter one year ago.  Operating  expenses for the  nine-month  period were
$9.2 million compared to $9.4 million in the same period one year ago.




Cash at the end of the third fiscal quarter stood at $5.1 million, a substantial
improvement  from  $0.9  million  at  the  end  of  March,  2003,  owing  to the
convertible debt financings completed in June and September of 2003.

"Except for an unexpected  delay in revenue  recognition  for systems shipped to
one of our key European  accounts,  our quarter  went exactly as planned,"  said
Michael Parodi,  Chairman,  President and CEO of Tegal.  "The signing of our $25
million  secondary  facility  and our  recent  acquisition  of  Simplus  Systems
Corporation's  nanotechnology-related  assets, provide important building blocks
for future growth."

The new $25 million  structured  secondary  offering  facility with  Kingsbridge
Capital  will  provide the Company  with  additional  capital to support  future
growth, primarily through acquisitions. The arrangement will allow Tegal to sell
equity at its sole  discretion  over a 24-month period on a "when and if needed"
basis,  and  Kingsbridge  is  required  under  the terms of the  arrangement  to
purchase  Tegal's  stock,   subject  to  certain  conditions  contained  in  the
agreement.

"The financing  agreement  with  Kingsbridge  represents an important  source of
financial strength for Tegal as we execute our business plan over the next 12 to
24 months,"  said Thomas Mika,  Executive  Vice  President  and Chief  Financial
Officer of Tegal.  "The facility is a  cost-effective  way to access  additional
capital  while  retaining  control over the timing and price of the common stock
issued. We will now be able to consider seriously  expansion  opportunities that
were not previously available to us."

The  24-month  agreement  enables  Tegal to obtain up to $25  million by issuing
shares of its common stock to Kingsbridge via a series of periodic  drawdowns of
funds following the  effectiveness of the registration  statement.  The price of
the common shares issued under the agreement  will be based on a discount to the
volume-weighted  average  market  price  during  a  specified  drawdown  period.
Kingsbridge  is prohibited  under the agreement from holding a short position in
Tegal's  common  stock.  The Company has no  obligation  to draw down all or any
portion of the  commitment.  In  connection  with the  agreement,  Tegal  issued
warrants to Kingsbridge to purchase 300,000 shares of the Company's common stock
at an exercise price of $4.11 per share.

Kingsbridge  Capital  specializes  in the  financing  of small to  medium  sized
technology-based  companies.  Adam  Gurney,  Managing  Director of  Kingsbridge,
stated,  "We are  excited by Tegal's  position in the  emerging  new markets for
semiconductor and nanotechnology applications. Kingsbridge is very pleased to be
helping the Company at a turning point for its future expansion plans."

"During  the past 18  months,  we have put into  place  the  cornerstones  of an
aggressive plan to move Tegal to a new level of capability, size and reach, even
while the semiconductor capital equipment industry was in stubborn decline," Mr.
Parodi said. "As a result,  we have three major  advanced  product lines serving
customers in new,  emerging  markets,  such as  nanotechnology,  radio frequency
identification devices (RFID's), non-volatile magnetic memories, thinned wafers,
photomasks and other devices based on new materials."





              Highlights of Tegal's third fiscal quarter included:

|_|      Closing of the purchase of substantially  all of the assets and certain
         liabilities of Simplus Systems Corporation,  developer of a unique Nano
         Layer  Deposition  cluster tool and processes for barrier,  copper seed
         and high-K dielectric applications;

|_|      A  multiple  980 series  etch  systems  order  from a leading  European
         semiconductor manufacturer to equip its new nanotechnology laboratory;

|_|      A repeat 980 series order from the world's  leading  microfluidic  MEMS
         device manufacturer;

|_|      An order for a 900 series  etch system  from an  Australian-based  MEMS
         manufacturer.

In January,  Tegal also  announced an order for a 6510 series  critical  silicon
etch system  from a leading  Japanese  opto device  maker.  In  addition,  Tegal
shipped,  as planned,  its newly developed system for extreme ultra violet (EUV)
photomask  production to a leading IC  manufacturer  in the United  States.  The
EndeavorEUV(TM)  is uniquely  suited for the  virtually  defect-free  and severe
stress-control  requirements of EUV photomasks and will play an integral role in
helping this customer achieve its stated goal of full production EUV lithography
for sub-70 nanometer design rules.

Tegal also  recently  entered  into a new line of credit  facility  with Silicon
Valley  Bank that will be  available  until  January 19,  2005.  The new line of
credit has a maximum borrowing capacity of $3.5 million.

Investor  Conference  Call

Tegal will host an  investor  conference  call  today,  February 12 at 5:00 p.m.
(EST), which is open to all interested investors.  The call-in numbers are (800)
901-5217  or  (617)  786-2964.  For  either  dial-in  number,  investors  should
reference Tegal or reservation  number:  68051908.  A digital  recording will be
made available one hour after the completion of the conference call, and it will
be  accessible  through  midnight on Thursday,  February  19,  2004.  To access,
investors  should dial (888)  286-8010  or (617)  801-6888  and enter  passcode:
67368442.  The  conference  call also will be available  online via the Investor
Section of the  Company's  website at:  www.tegal.com.  An online  replay of the
teleconference,  along with a copy of the Company's  earnings  release,  will be
available on the Company's website, as well.

Safe Harbor Statement

Except  for  historical  information,  matters  discussed  in this news  release
contain  forward-looking  statements  within the  meaning of Section  27A of the
Securities Act and Section 21E of the Exchange Act. Forward-looking  statements,
which are based on  assumptions  and describe our future plans,  strategies  and
expectations,  are generally  identifiable by the use of the words "anticipate,"
"believe,"  "estimate,"  "expect," "intend,"  "project" or similar  expressions.
These  forward-looking  statements  are  subject  to  risks,  uncertainties  and
assumptions about the Company including, but not limited to industry conditions,
economic conditions, acceptance of new technologies and market acceptance of the
Company's products and services. All forward-looking  statements attributable to
us or persons acting on our behalf are expressly  qualified in their entirety by
the cautionary  statements in this paragraph.  For a further discussion of these
risks and uncertainties, please refer to the Company's periodic filings with the
Securities and Exchange Commission.




About Tegal

Tegal  provides  process and  equipment  solutions to leading edge  suppliers of
advanced  semiconductor  and  nanotechnology   devices.   Incorporating  unique,
patented etch and deposition  technologies,  Tegal's system solutions are backed
by over 35 years of advanced development and over 100 patents.  Some examples of
devices  enabled by Tegal  technology  are energy  efficient  memories  found in
portable computers,  cellphones,  PDAs and RFID applications;  megapixel imaging
chips used in digital and  cellphone  cameras;  power  amplifiers  for  portable
handsets and wireless  networking gear; and MEMS devices like accelerometers for
automotive  airbags,  microfluidic  control  devices for ink jet  printers;  and
laboratory-on-a-chip  medical test kits.  More  information  is available on the
Internet at: www.tegal.com.



                           (Financial Exhibits Follow)





                       TEGAL CORPORATION AND SUBSIDIARIES
                      CONDENSED CONSOLIDATED BALANCE SHEETS
                                   (Unaudited)
                                 (In thousands)


                                     ASSETS



                                                                     December 31,   March 31,
                                                                         2003         2003
                                                                     -------------  ---------
Current assets:
                                                                              
  Cash and cash equivalents.......................................   $    5,089     $      912
  Trade receivables, net..........................................        2,985          2,681
  Inventories.....................................................        4,914          7,032
  Prepaid expenses and other current assets.......................        2,983            465
                                                                     ----------     ----------
      Total current assets........................................       15,971         11,090
Property and equipment, net.......................................        4,093          4,916
Intangible assets, net............................................        1,251            959
Other assets......................................................          267            244
                                                                     ----------     ----------
      Total assets................................................   $   21,582     $   17,209
                                                                     ==========     ==========
                      LIABILITIES AND STOCKHOLDERS' EQUITY
Current liabilities:
  Notes payable...................................................   $      166     $      389
  2% convertible debentures, net .................................           72             --
  Accounts payable................................................        1,494          1,923
  Product warranty................................................          286            734
  Customer deposits...............................................        1,142             --
  Accrued expenses and other current liabilities..................        2,997          2,679
   Deferred revenue...............................................          331            324
                                                                     ----------     ----------
      Total current liabilities...................................        6,488          6,049
Other long-term obligations.......................................          111              -
Long-term portion of capital lease obligation.....................           54             37
                                                                     ----------     ----------
      Total liabilities...........................................        6,653          6,086
                                                                     ----------     ----------
Stockholders' equity:
  Common stock....................................................          300            161
  Additional paid-in capital......................................       82,268         68,806
  Accumulated other comprehensive income..........................          254            465
  Accumulated deficit.............................................      (67,893)       (58,309)
                                                                     -----------    ----------
      Total stockholders' equity..................................       14,929         11,123
                                                                     ----------     ----------
                                                                     $   21,582     $   17,209
                                                                     ==========     ==========




                       TEGAL CORPORATION AND SUBSIDIARIES
                 CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS
                                   (Unaudited)
                      (In thousands, except per share data)




                                                                Three Months Ended         Nine Months Ended
                                                                    December 31,              December 31,
                                                                2003          2002         2003         2002
                                                             -----------     ---------    ---------    ---------
                                                                                           
 Revenue..................................................   $     3,276     $   3,701    $  10,371    $  10,098
 Cost of revenue..........................................         3,331         3,613        8,397       11,439
                                                             -----------     ---------    ---------    ---------
    Gross profit (loss) ..................................           (55)           88        1,974       (1,341)
                                                             ------------    ---------  -----------    ----------
 Operating expenses:
    Research and development..............................           951         1,102        2,490        3,397
    Sales and marketing...................................           592           855        1,760        2,260
    General and administrative............................           812         1,452        2,764        3,776
     In-process research and development..................         2,202             -        2,202            -
                                                             -----------   -----------  -----------  -----------
       Total operating expenses...........................         4,557         3,409        9,216        9,433
                                                             -----------     ---------  -----------    ---------
       Operating loss.....................................        (4,612)       (3,321)      (7,242)     (10,774)
 Other income (expense), net
   Interest expense, net..................................        (2,055)          (54)      (2,408)        (360)
   Other income (expense) ................................             6           113           66          204
                                                             -----------   -----------  -----------  -----------
      Total other income (expense), net...................        (2,049)           59       (2,342)        (156)
                                                             ------------    ---------  ------------   ----------
          Net loss .......................................   $    (6,661)    $  (3,262)   $  (9,584)   $ (10,930)
                                                             ============    ========== ============   ==========
 Net  loss per share, basic and diluted...................   $     (0.29)    $   (0.20)   $   (0.52)   $   (0.73)
                                                             ============    ========== ============   ==========
 Shares used in per share computation:
    Basic.................................................        23,234        16,002       18,588       15,048
    Diluted...............................................        23,234        16,002       18,588       15,048


          Reconciliation from GAAP to non-GAAP Measures of Performance




                                                                Three Months Ended         Nine Months Ended
                                                                    December 31,              December 31,
                                                             -------------------------  -------------------------
                                                                 2003          2002         2003         2002
                                                             ------------  -----------  ------------ ------------
                                                                                           
 Revenue..................................................   $     3,276     $   3,701    $  10,371    $  10,098
 GAAP Cost of revenue.....................................         3,331         3,613        8,397       11,439
 Non-cash increase in inventory reserve...................          (967)            -         (967)      (1,922)
                                                             ------------  -----------  ------------ ------------
 Non GAAP Cost of revenue.................................         2,364            88        7,430        9,517
                                                             -----------   -----------  -----------  -----------
    Non GAAP Gross profit (loss) .........................           912            88        2,941          581
                                                             -----------     ---------  -----------    ---------
 GAAP Total operating expenses............................         4,557         3,409        9,216        9,433
  Non-cash IPR&D expense..................................        (2,202)            -       (2,202)           -
                                                             ------------  -----------  ------------ -----------
       Non GAAP total operating expenses..................         2,355         3,409        7,014        9,433
                                                             -----------     ---------  -----------    ---------
       Non GAAP Operating loss............................        (1,443)       (3,321)      (4,073)      (8,852)

 GAAP Total other income (expense), net...................        (2,049)           59       (2,342)        (156)
   Non-cash interest expense associated with Debentures...         2,044             -        2,347            -
                                                             -----------   -----------  -----------  -----------
   Non GAAP total other income (expense), net.............            (5)           59            5         (156)
                                                             ------------  -----------  -----------  ------------
          Non GAAP Net loss ..............................   $    (1,448)    $  (3,262)   $  (4,068)   $  (9,008)
                                                             ============    ========== ============   ==========
 Non GAAP Net  loss per share, basic and diluted..........   $     (0.06)    $   (0.20)   $   (0.22)   $   (0.60)
                                                             ============    ========== ============   ==========
 Shares used in per share computation:
    Basic.................................................        23,234        16,002       18,588       15,048
    Diluted...............................................        23,234        16,002       18,588       15,048






The  above  pro-forma  financial  information  is  presented  for  informational
purposes  only.  Our  presentation  excludes a non-cash  increase  in  inventory
reserves, a non-cash, non-recurring IPR&D charge, and non-cash interest expenses
resulting  from our  debentures  financing.  Because  of these  exclusions,  our
presentation is not in accordance with Generally Accepted Accounting  Principles
(GAAP).  Additionally,  our presentation of pro-forma financial  information may
not be consistent with that of other companies.

We believe that the  exclusion of these  non-cash  charges may help the investor
better  understand our liquidity  position and the use of tangible  resources in
our  operations  and the  exclusion of unusual or infrequent  items  provides an
alternative  measure  which  may  help  the  investor  evaluate  our  underlying
operating  performance.   Pro-forma  information  is  not,  and  should  not  be
considered,  a substitute for financial  information prepared in accordance with
GAAP.