================================================================================


                                  UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549


                                ----------------
                                   FORM 10-Q/A
                                ----------------


  (Mark One)

      |X|   QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(D) OF THE SECURITIES
            EXCHANGE ACT OF 1934

                FOR THE QUARTERLY PERIOD ENDED DECEMBER 31, 2003

                                       OR

      |_|   TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(D) OF THE SECURITIES
            EXCHANGE ACT OF 1934

                         COMMISSION FILE NUMBER: 0-26824

                                TEGAL CORPORATION

             (EXACT NAME OF REGISTRANT AS SPECIFIED IN ITS CHARTER)


             DELAWARE                                    68-0370244
  (STATE OR OTHER JURISDICTION OF           (I.R.S. EMPLOYER IDENTIFICATION NO.)
    INCORPORATION OR ORGANIZATION)

                            2201 SOUTH MCDOWELL BLVD.
                           PETALUMA, CALIFORNIA 94954
                    (Address of Principal Executive Offices)


                         TELEPHONE NUMBER (707) 763-5600
              (Registrant's Telephone Number, Including Area Code)

                                ----------------


    Indicate  by check mark  whether the  registrant:  (1) has filed all reports
required to be filed by Section 13 or 15(d) of the  Securities  Exchange  Act of
1934  during  the  preceding  12 months  (or for such  shorter  period  that the
registrant was required to file reports) and (2) has been subject to such filing
requirements for the past 90 days.    Yes  |X|   No   |_|

Indicate by check mark whether the registrant is an accelerated filer (as
defined in Rule 12b-2 of the Exchange List.   Yes  |_|   No |X|

      As of June 24,  2004,  there were  44,261,309  shares of our common  stock
outstanding.

                                EXPLANATORY NOTE

This amendment is being filed to amend Part I, Items 1 and 2 of the registrant's
Quarterly  Report on Form 10-Q for the quarterly  period ended December 31, 2003
to correct interest expense, net loss, and net loss per share,  reflected on the
registrant's unaudited condensed  consolidated  statements of operations for the
three and nine-month  periods ended December 31, 2003 and other current  assets,
additional  paid-in  capital and  accumulated  deficit as of December  31, 2003.
Restated unaudited condensed consolidated financial statements for the three and
nine-month  periods ending December 31, 2003 reflecting these corrections appear
in Part I, Item 1 of this amendment.  Interest  expense,  net did not accurately
reflect the impact of the  acceleration  of the  amortization  of the beneficial
conversion  feature  and the  appropriate  accounting  for debt  issuance  costs
relating to the portion of our 2% convertible  debentures  converted into common
stock  during the quarter  ended  December  31,  2003.  The  corrections  impact
previously reported interest expense,  net loss, and net loss per share, current
assets,  additional paid-in capital and accumulated  deficit,  but do not impact
previously  reported  revenue,  operating  expenses or operating loss during the
three and  nine-month  periods ended  December 31, 2003.  This amendment is also
being  filed to amend  Exhibit  No. 31 and Exhibit No. 32 to reflect the changes
resulting from this  restatement and to file required  certifications  regarding
this amendment.

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                                       1



                       TEGAL CORPORATION AND SUBSIDIARIES

                                      INDEX



                                                                                                                              PAGE
                                                                                                                        
                                        PART I. FINANCIAL INFORMATION

ITEM 1.      CONDENSED CONSOLIDATED FINANCIAL STATEMENTS (Unaudited)
             Condensed Consolidated Balance Sheets as of December 31, 2003 (as restated) and March 31, 2003.................    4
             Condensed  Consolidated  Statements of Operations-- for the three and nine-months ended December 31, 2003 (as      5
             restated) and 2002.............................................................................................
             Condensed Consolidated  Statements of Cash Flows-- for the nine-months ended December 31, 2003 (as restated) and   6
             2002...........................................................................................................
             Notes to Condensed Consolidated Financial Statements (unaudited)...............................................    8
ITEM 2.      MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS
             OF OPERATIONS..................................................................................................   16


                                        PART II. OTHER INFORMATION

ITEM 4.      CONTROLS AND PROCEDURES........................................................................................   19
SIGNATURES.................................................................................................................    21
ITEM 6.      EXHIBITS AND REPORTS ON FORM 8-K...............................................................................   22



                                       2



                         PART I -- FINANCIAL INFORMATION

ITEM 1. CONDENSED CONSOLIDATED FINANCIAL STATEMENTS


                       TEGAL CORPORATION AND SUBSIDIARIES
                      CONDENSED CONSOLIDATED BALANCE SHEETS
                                   (UNAUDITED)
                                 (IN THOUSANDS)



                             ASSETS

                                                              DECEMBER 31,
                                                                 2003          MARCH 31,
                                                              AS RESTATED        2003
                                                             ------------    ------------
                                                                       
Current assets:

  Cash and cash equivalents ..............................   $      5,089    $        912
  Trade receivables, net .................................          2,985           2,681
  Inventories ............................................          4,914           7,032
  Prepaid expenses and other current assets ..............          1,703             465
                                                             ------------    ------------
      Total current assets ...............................         14,691          11,090
Property and equipment, net ..............................          4,093           4,916
Intangible assets, net ...................................          1,251             959
Other assets .............................................            267             244
                                                             ------------    ------------
      Total assets .......................................   $     20,302    $     17,209
                                                             ============    ============


              LIABILITIES AND STOCKHOLDERS' EQUITY
Current liabilities:

  Notes payable ..........................................   $        166    $        389
  2% convertible debentures, net .........................             66            --
  Accounts payable .......................................          1,494           1,923
  Accrued product warranty ...............................            286             734
  Customer deposits ......................................          1,142            --
  Accrued expenses and other current liabilities .........          2,997           2,679
   Deferred revenue ......................................            331             324
                                                             ------------    ------------
      Total current liabilities ..........................          6,482           6,049
Other long-term obligations ..............................            111            --
Long-term portion of capital lease obligation ............             54              37
                                                             ------------    ------------
      Total liabilities ..................................          6,647           6,086
                                                             ------------    ------------
Stockholders' equity:
  Common stock ...........................................            300             161
  Additional paid-in capital .............................         82,452          68,806
  Accumulated other comprehensive income .................            254             465
  Accumulated deficit ....................................        (69,351)        (58,309)
                                                             ------------    ------------
      Total stockholders' equity .........................         13,655          11,123
                                                             ------------    ------------
                                                             $     20,302    $     17,209
                                                             ============    ============


                             See accompanying notes.


                                       3





ITEM 2. CONDENSED CONSOLIDATED FINANCIAL STATEMENTS

                       TEGAL CORPORATION AND SUBSIDIARIES

                 CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS

                                   (UNAUDITED)

                      (IN THOUSANDS, EXCEPT PER SHARE DATA)




                                                                 THREE MONTHS ENDED            NINE MONTHS ENDED
                                                                    DECEMBER 31,                  DECEMBER 31,
                                                            ---------------------------    ---------------------------
                                                                 2003                          2003
                                                             AS RESTATED       2002        AS RESTATED         2002
                                                            -------------   -----------    ------------   ------------
                                                                                              
Revenue .................................................   $       3,276    $     3,701    $      10,371    $    10,098
Cost of revenue .........................................           3,331          3,613            8,397         11,439
                                                            -------------    -----------    -------------    -----------
   Gross profit (loss) ..................................             (55)            88            1,974         (1,341)
                                                            -------------    -----------    -------------    -----------
Operating expenses:

   Research and development .............................             951          1,102            2,490          3,397
   Sales and marketing ..................................             592            855            1,760          2,260
   General and administrative ...........................             812          1,452            2,764          3,776
  In-process research and development ...................           2,202           --              2,202           --
                                                            -------------    -----------    -------------    -----------
      Total operating expenses ..........................           4,557          3,409            9,216          9,433
                                                            -------------    -----------    -------------    -----------
      Operating loss ....................................          (4,612)        (3,321)          (7,242)       (10,774)
Other income (expense), net
  Interest expense, net .................................          (3,513)           (54)          (3,866)          (360)
  Other income , net ....................................               6             66              204            113
                                                            -------------    -----------    -------------    -----------
     Total other income (expense), net ..................          (3,507)            59           (3,800)          (156)
                                                            -------------    -----------    -------------    -----------
         Net loss .......................................   $      (8,119)   $    (3,262)   $     (11,042)   $   (10,930)
                                                            =============    ===========    =============    ===========
Net loss per share, basic and diluted ...................   $       (0.35)   $     (0.20)   $       (0.59)   $     (0.73)
                                                            =============    ===========    =============    ===========
Shares used in per share computation:
   Basic ................................................          23,234         16,002           18,588         15,048
   Diluted ..............................................          23,234         16,002           18,588         15,048



                             See accompanying notes.


                                       4



                       TEGAL CORPORATION AND SUBSIDIARIES
                 CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS
                                   (UNAUDITED)
                                 (IN THOUSANDS)




                                                                                                NINE MONTHS ENDED
                                                                                                   DECEMBER 31,
                                                                                           --------------------------
                                                                                              2003
                                                                                           AS RESTATED      2002
                                                                                           -----------    -----------
                                                                                                    
 Cash flows from operating activities:
    Net loss ...........................................................................   $   (11,042)   $   (10,930)
    Adjustments to reconcile net loss to cash used in operating activities:
     Non cash in-process research & development charge .................................         2,202           --
     Depreciation and amortization .....................................................           987            743
     Non cash interest expense - accretion of debt discount and amortization of debt

          issuance costs ...............................................................         3,804           --
       Fair value of warrants and options issued for services rendered .................           159            121
       Provision for doubtful accounts and sales returns allowances ....................            90           (116)
     Excess and obsolete inventory provision ...........................................           967          1,922
     Changes in operating assets and liabilities:
          Receivables ..................................................................          (444)         1,822
          Inventories ..................................................................         1,114          2,538
          Prepaid expenses and other assets ............................................          (487)           753
          Accounts payable .............................................................          (474)           465
          Accrued expenses and other liabilities .......................................            88           (653)
       Accrued product warranty ........................................................          (540)          (166)
       Customer deposits ...............................................................         1,142            574
          Deferred revenue .............................................................             6           (864)
                                                                                           -----------    -----------
             Net cash used in operating activities .....................................        (2,428)        (3,791)
                                                                                           -----------    -----------
 Cash flows used in investing activities:

       Purchases of property and equipment .............................................           (19)          (323)
                                                                                           -----------    -----------
Cash flows from financing activities:

    Gross proceeds from the issuance of 2% convertible debentures ......................         7,165           --
    2% convertible debentures issuance costs ...........................................          (982)          --
    Net proceeds from issuance of common stock .........................................           609             27
    Borrowings under notes payable .....................................................           183          5,467
    Repayment of borrowings under notes payable ........................................          (416)        (6,209)
    Capitallease financing .............................................................            28             (5)
                                                                                           -----------    -----------
      Net cash provided by (used in) financing activities ..............................         6,587           (720)
                                                                                           -----------    -----------
 Effect of exchange rates on cash and cash equivalents .................................            37             98
                                                                                           -----------    -----------
 Net increase (decrease) in cash and cash equivalents ..................................         4,177         (4,736)
 Cash and cash equivalents at beginning of period ......................................           912          8,100
                                                                                           -----------    -----------
 Cash and cash equivalents at end of period ............................................   $     5,089    $     3,364
                                                                                           ===========    ===========


                             See accompanying notes.


                                       5



SUPPLEMENTAL SCHEDULE OF NON CASH INVESTING ACTIVITIES (IN THOUSANDS):

         On November 11, 2003, the Company  purchased certain assets and assumed
certain  liabilities  of  Simplus  Systems.  Consideration  totaled  $2,522  and
consisted of 1,499,994  shares of the  Company's  common stock valued at $2,310,
fully vested  Tegal  employee  stock  options to purchase  58,863  shares of the
Company's  common stock at an exercise  price of $3.09 per share,  valued at $32
and transaction costs of $180. The purchase price was allocated as follows:

         Assets acquired:
            Fixed assets ..........................................          48
            Identifiable intangible assets ........................         389
            In-process research and development ...................       2,202
                                                                      ---------
         Total assets .............................................       2,639
         Liabilities assumed:
            Current liabilities ...................................        (117)
                                                                      ---------
         Net assets acquired ......................................   $   2,522
                                                                      =========

                             See accompanying notes.


                                       6



                       TEGAL CORPORATION AND SUBSIDIARIES

              NOTES TO CONDENSED CONSOLIDATED FINANCIAL STATEMENTS
                                   (UNAUDITED)
                  (ALL AMOUNTS IN THOUSANDS, EXCEPT SHARE DATA)


1. BASIS OF PRESENTATION:

     In the opinion of management,  the unaudited condensed consolidated interim
financial  statements have been prepared on the same basis as the March 31, 2003
audited   consolidated   financial   statements  and  include  all  adjustments,
consisting only of normal recurring  adjustments,  necessary to fairly state the
information  set forth herein.  The statements  have been prepared in accordance
with the regulations of the Securities and Exchange  Commission (the "SEC"), but
omit  certain  information  and  footnote  disclosures  necessary to present the
statements in accordance with generally accepted  accounting  principles.  These
interim financial statements should be read in conjunction with the consolidated
financial statements and footnotes included in the Annual Report on Form 10-K of
Tegal  Corporation (the "Company") for the fiscal year ended March 31, 2003. The
results of operations  for the three and nine months ended December 31, 2003 are
not necessarily indicative of results to be expected for the entire year.

     The unaudited condensed  consolidated  financial statements contemplate the
realization of assets and the  satisfaction  of liabilities in the normal course
of business. The Company incurred net losses of $11,042 (as restated-see Note 2)
and $10,930 for the nine months ended December 31, 2003 and 2002,  respectively.
The  Company  generated  negative  cash  flows  from  operations  of $2,428  (as
restated-see  Note 2) and $3,791 for the  periods  ended  December  31, 2003 and
2002, respectively.  To finance its operations, the Company raised approximately
$6,183  in net  proceeds  from the  sale of 2%  convertible  debentures  and the
issuance of common  stock as a result of the  exercise  of  warrants  during the
nine-month  period ended  December 31, 2003 (see Note 10).  Management  believes
that these proceeds,  combined with the effects of its cost compression program,
will be adequate to fund operations through fiscal year 2005. However, projected
sales may not  materialize and unforeseen  costs may be incurred.  Additionally,
the 2%  convertible  debentures  agreement  includes a material  adverse  change
clause which allows the debenture holders to demand the immediate payment of all
outstanding balances upon the debenture holders' determination of the occurrence
of  deemed  material  adverse  changes  to the  Company's  financial  condition,
business or operations as determined by the debenture  holders based on required
financial  reporting and other criteria.  These issues raise  substantial  doubt
about the  Company's  ability to continue as a going  concern.  Our  independent
accountants have included a going concern uncertainty  explanatory  paragraph in
their latest  auditors' report dated June 10, 2003 which is included in our 10-K
for the year ended March 31, 2003.

CONCENTRATION OF CREDIT RISK

     Financial  instruments that potentially  subject the Company to significant
concentrations of credit risk consist primarily of cash and cash equivalents and
accounts  receivable.  Substantially  all of the Company's cash  equivalents are
invested  in  highly  liquid  money  market  accounts.  The  Company's  accounts
receivables are derived from sales to customers located in the U.S., Europe, and
Asia.  The Company  performs  ongoing  credit  evaluations  of its customers and
generally requires no collateral. The Company maintains allowances for potential
credit losses.  Write-offs during the periods presented have been insignificant.
As of December  31,  2003 and March 31,  2003,  three  customers  accounted  for
approximately 57% and one customer accounted for approximately 38% respectively,
of the accounts receivable balance.

    During the three months ended December 31, 2003, two customers accounted for
38% of total  revenues.  During the nine  months  ended  December  31,  2003 and
December 31, 2002,  two customers  accounted for 29% and one customer  accounted
for 14% of total revenues, respectively.

2. RESTATEMENT OF QUARTERLY FINANCIAL STATEMENTS:

     The Company's unaudited condensed consolidated financial statements for the
third quarter of fiscal 2004 have been restated to correct interest expense, net
loss, net loss per share,  other current assets,  additional paid-in capital and
accumulated  deficit as of December  31,  2003.  The  restatement  corrects  the
accounts  listed  above  by  accurately   reflecting  the  acceleration  of  the
amortization of the beneficial conversion feature and the appropriate accounting
for debt issuance costs associated with debentures  converted during the quarter
ended  December 31, 2003.  The net impact of these  corrections on the Company's


                                       7



unaudited  condensed  consolidated  balance  sheet as of  December  31, 2003 and
statements of operations  for the three and nine months ended  December 31, 2003
is presented in the following tables:



                                                        THREE MONTHS ENDED                         NINE MONTHS ENDED
                                                  DECEMBER 31, 2003 (AS RESTATED)            DECEMBER 31, 2003 (AS RESTATED)
                                            -------------------------------------------    ---------------------------------------
                                                                                               As
                                            As Originally                        As        Originally
                                              Reported       Adjustments    As Restated     Reported      Adjustments   As Restated
                                            -------------    -----------    -----------    -----------    -----------   -----------
                                                                                                      
     Operating loss: ....................   $      (4,612)          --      $    (4,612)   $    (7,242)          --     $    (7,242)
     Other income (expense), net
       Interest expense, net ............          (2,055)        (1,458)        (3,513)        (2,408)        (1,458)       (3,866)
       Other income, net ................               6           --                6             66           --              66
                                            -------------    -----------    -----------    -----------    -----------   -----------
          Total other expense, net ......          (2,049)        (1,458)        (3,507)        (2,342)        (1,458)       (3,800)
               Net loss .................   $      (6,661)   $    (1,458)   $    (8,119)   $    (9,584)   $    (1,458)  $   (11,042)
                                            =============    ===========    ===========    ===========    ===========   ===========
     Net loss per share basic and diluted   $       (0.29)   $     (0.06)   $     (0.35)   $     (0.52)   $     (0.07)  $     (0.59)
                                            =============    ===========    ===========    ===========    ===========   ===========
     Shares used in per share computation
        Basic ...........................          23,234         23,234         23,234         18,588         18,588        18,588
        Diluted .........................          23,234         23,234         23,234         18,588         18,588        18,588



                      AS OF DECEMBER 31, 2003 (AS RESTATED)



                                                                    As Originally
                                                                       Reported      Adjustments    As Restated
                                                                    -------------    -----------    -----------
                                                                                           
         Other current assets ...................................   $       2,983    $    (1,280)   $     1,703
         Additional paid-in capital .............................          82,268            184         82,452
         Accumulated deficit ....................................   $     (67,893)   $    (1,458)   $   (69,351)



3. STOCK-BASED COMPENSATION:

     The  Company  accounts  for  stock-based  employee  compensation  under the
recognition and measurement  principles of Accounting  Principles  Board Opinion
No. 25,  Accounting  for Stock  Issued to  Employees,  (APB No. 25) and  related
interpretations. Under APB No. 25, compensation cost is equal to the difference,
if any, on the date of grant between the fair value of the  Company's  stock and
the amount an employee must pay to acquire the stock.  SFAS No. 123,  Accounting
for Stock-based Compensation, established accounting and disclosure requirements
using  a  fair  value  based  method  of  accounting  for  stock-based  employee
compensation  plans.  As allowed by SFAS No.  123,  the  Company  has elected to
continue to apply the  intrinsic  value  based  method of  accounting  described
above,  and has adopted the disclosure  requirements of SFAS No. 123 and related
SFAS  No.  148,  Accounting  for  Stock-Based   Compensation  -  Transition  and
Disclosure.

     The  following  table  illustrates  the effect on net loss and net loss per
share if the Company had applied the fair value  recognition  provisions of SFAS
No. 123 to stock-based compensation (in thousands, except per share data):




                                                                                THREE MONTHS ENDED          NINE MONTHS ENDED
                                                                                   DECEMBER 31,                DECEMBER 31,
                                                                           --------------------------  --------------------------
                                                                               2003                        2003
                                                                           AS RESTATED        2002     AS RESTATED        2002
                                                                           ------------  ------------  ------------  ------------
                                                                                                         
         Net loss as restated ...........................................  $    (8,119)  $    (3,262)  $   (11,042)  $   (10,930)
         Deduct:  Total stock-based employee compensation expense
             determined under fair value method for all awards ..........          (32)          (91)  $      (121)  $      (357)
                                                                           ------------  ------------  ------------  ------------
         Proforma net loss ..............................................  $    (8,151)  $    (3,353)  $   (11,163)  $   (11,287)
                                                                           ============  ============  ============  ============
         Basic net loss per share:
         As reported ....................................................  $      (.35)  $      (.21)  $      (.59)  $      (.75)
                                                                           ============  ============  ============  ============
         Proforma .......................................................  $      (.35)  $      (.21)  $      (.60)  $      (.75)
                                                                           ============  ============  ============  ============



      The Company accounts for stock-based employee compensation arrangements in
accordance with Accounting Principles Board Opinion No. 25, Accounting for Stock
Issued to Employees, (APB No. 25) and related interpretations, and complies with
the  disclosure   provisions  of  SFAS  No.  123,   Accounting  for  Stock-based
Compensation  and  SFAS  No.  148  Accounting  for  Stock-Based  Compensation  -
Transition and  Disclosure.  The disclosure  provisions of SFAS No. 123 and SFAS
No.  148  require  judgments  by  management  as to the  estimated  lives of the
outstanding  options.  Management has based the estimated life of the options on
historical  option  exercise  patterns.  If the  estimated  life of the  options
increases, the valuation of the options will increase as well.


                                       8



     On October 28,  2003,  the Board of Directors  granted  options to purchase
3,410,000 shares of the Company's common stock at an exercise price of $1.03 per
share,  which was the closing price of the Company's common stock on October 28,
2003, to certain  employees and directors of the Company.  On December 18, 2003,
the Company granted options to purchase  500,000 shares of the Company's  common
stock at an exercise  price of $2.14 per share to certain  employees,  which was
the closing price of the Company's common stock on December 18, 2003.

4. INVENTORIES:

                                                       DECEMBER 31,   MARCH 31,
                                                           2003          2003
                                                       -----------   -----------
         Raw materials .............................   $     1,777   $     3,218
         Work in progress ..........................         1,887         1,937
         Finished goods and spares .................         1,250         1,877
                                                       -----------   -----------
                                                       $     4,914   $     7,032
                                                       ===========   ===========

   The Company  recorded a $967  provision for excess and obsolete raw materials
and spare parts inventory during the quarter ended December 31, 2003 as a result
of reduced  revenue  projections  which reflect the  continued  slow-down of the
semiconductor  sector.  Additionally,  the spares  requested by customers do not
necessarily match those parts that are in inventory, which has created an excess
of spare parts.

5. PRODUCT WARRANTY:

    The Company  provides for  estimated  product  warranty  costs on all system
sales based on the estimated  cost of product  warranties at the time revenue is
recognized.  The  warranty  obligation  is  affected by product  failure  rates,
material  usage  rates,  and the  efficiency  by which the  product  failure  is
corrected.  Should actual product failure rates,  material usage rates and labor
efficiencies  differ  from  estimates,   revisions  to  the  estimated  warranty
liability may be required.

    Warranty activity for the three-month and nine-month  periods ended December
31, 2003 and 2002 was:



                                                                    WARRANTY ACTIVITY FOR THE        WARRANTY ACTIVITY FOR THE
                                                                        THREE MONTHS ENDED               NINE MONTHS ENDED
                                                                             DECEMBER 31,                   DECEMBER 31,
                                                                   -----------------------------    ----------------------------
                                                                       2003             2002            2003             2002
                                                                   ------------     ------------    ------------    ------------
                                                                                                        
         Balance at the beginning of the period.................   $        386     $      1,064    $        734    $      1,205
         Additional warranty accruals for warranties issued
         during the period......................................             43               92             188             303
         Accruals related to pre-existing warranties...........               -                -            (227)              -
         Less settlements made during the period...............            (143)            (117)           (409)           (469)
                                                                   ------------     ------------    ------------    ------------
         Balance at the end of the period......................    $        286     $      1,039    $        286    $      1,039
                                                                   ============     ============    ============    ============



    Certain  sales  contracts  of the  Company  include  provisions  under which
customers  would be  indemnified  by the  Company in the event of,  among  other
things,  a  third-party  claim  against the customer for  intellectual  property
rights infringement related to the Company's products.  There are no limitations
on the maximum potential future payments under these guarantees. The Company has
accrued no amounts in relation to these  provisions  as no such claims have been
made  and  the  Company  believes  it  has  valid,  enforceable  rights  to  the
intellectual property embedded in its products.


                                        9



6. NET LOSS PER COMMON SHARE:

    Basic Net Loss Per Share  ("EPS") is calculated by dividing net loss for the
period by the  weighted  average  common  shares  outstanding  for that  period.
Diluted EPS takes into account the number of additional common shares that would
have been  outstanding if the dilutive  potential  common shares  ("common stock
equivalents") had been issued.

    Common stock  equivalents  for the three months ended  December 31, 2003 and
December 31, 2002,  and the nine months ended December 31, 2003 and December 31,
2002 were 19,477,218 and 220,513, and 18,766,218 and 408,873,  respectively, and
have been  excluded  from  shares  used in  calculating  diluted  loss per share
because their effect would be antidilutive. The antidilutive securities excluded
from  shares  used in  calculating  diluted  loss per share are as  follows  (in
thousands):



                                                                                THREE MONTHS ENDED          NINE MONTHS ENDED
                                                                                    DECEMBER 31,               DECEMBER 31,
                                                                            -------------------------   -------------------------
                                                                                2003         2002           2003          2002
                                                                            -----------   -----------   -----------   -----------
                                                                                                          
         Antidilutive common equivalent shares:
         Options and warrants ...........................................         9,917           220         9,206           409
         Shares issuable upon conversion of convertible debentures ......         9,560            --         9,560            --
                                                                            -----------   -----------   -----------   -----------
         Total antidilutive shares ......................................        19,477           220        18,766           409
                                                                            ===========   ===========   ===========   ===========



                                       10



7. NOTES PAYABLE AND BANK LINES OF CREDIT:

     On June 30, 2003, the Company entered into an Amended Letter  Agreement and
Subordination  Agreement with Silicon Valley Bank, which subordinated the bank's
interest in Tegal's  intellectual  property to the investors in the  Convertible
Debt Financing (See Note 10). The Company agreed not to request, until such time
as the investors' security interest in the intellectual property was terminated,
any loan, letter of credit,  foreign exchange forward contract,  cash management
service or credit  accommodation under the Company's current line of credit with
Silicon  Valley  Bank.  As of  December  31,  2003,  the  Company had no amounts
outstanding under this domestic line of credit, which had been collateralized by
substantially all of the Company's domestic assets and which was further limited
by the amounts of accounts  receivable and inventories on the Company's  balance
sheet. The facility had a maximum borrowing capacity of $10.0 million,  and bore
interest at prime plus 1.0 %, or 5.25 % as of December 31, 2003.  On January 19,
2004,  the Company  entered into a new line of credit with  Silicon  Valley Bank
that will be  available  until  January 19,  2005.  The new line of credit has a
maximum  borrowing  capacity of $3.5 million,  bears interest of prime plus 1.0%
and  is  collateralized  by  substantially  all of the  Company's  domestic  and
Japanese assets.

     As  of  December  31,  2003,  the  Company's  Japanese  subsidiary  had  $6
outstanding  under its bank line of credit which is  collateralized  by Japanese
customer  promissory  notes  held by such  subsidiary  in  advance of payment on
customers'  accounts  receivable.  The  Japanese  bank line  bears  interest  at
Japanese  prime  (1.375 % as of December  31,  2003) plus 1.0%,  and has a total
capacity of 150 million yen  (approximately  $1,401 at exchange rates prevailing
on December 31, 2003). As of March 31, 2003, the Company's  Japanese  subsidiary
had  approximately  $70  outstanding  under its bank  line of  credit  which was
collateralized by Japanese customer  promissory notes held by such subsidiary in
advance of payment on customers' accounts receivable.

     Notes  payable  as  of  December  31,  2003  consisted   primarily  of  one
outstanding  note, to the  California  Trade and Commerce  Agency for $139.  The
unsecured note from the California  Trade and Commerce  Agency carries an annual
interest rate of 5.75% with monthly interest only payments of approximately $4.2
per month.  Although the payment  deadlines are being met, the note is currently
in technical default due to the merger of Sputtered Films and Tegal Corporation.

     The  default  could  result in the  California  Trade and  Commerce  Agency
calling  the  note,  therefore  the notes  payable  is  classified  as a current
liability.

8. COMPREHENSIVE LOSS:

    The components of  comprehensive  loss for the three and nine-month  periods
ended December 31, 2003 (as restated) and 2002 are as follows:



                                                                    THREE MONTHS                  NINE MONTHS
                                                                       ENDED                         ENDED
                                                                    DECEMBER 31,                  DECEMBER 31,
                                                            --------------------------    --------------------------
                                                               2003                          2003
                                                            AS RESTATED        2002       AS RESTATED       2002
                                                            -----------    -----------    -----------    -----------
                                                                                             
         Net loss .......................................        (8,119)   $    (3,262)   $   (11,042)   $   (10,930)
         Foreign currency translation adjustment ........           111            (33)           211            (27)
                                                            -----------    -----------    -----------    -----------
                                                            $    (8,008)   $    (3,295)   $   (10,831)   $   (10,957)
                                                            ===========    ===========    ===========    ===========



9. ACQUISITIONS:

     Simplus Systems Corporation:

     On November 11, 2003, the Company acquired  substantially all of the assets
and  certain  liabilities  of  Simplus  Systems  Corporation,   ("Simplus"),   a
development stage company, pursuant to an asset purchase agreement.  Simplus had
developed a deposition  cluster tool and certain  processes for barrier,  copper
seed and high-K dielectric  applications.  The purchase  consideration of $2,522
includes 1,499,994 shares of the Company's common stock valued at $2,310; 58,863
fully  vested  employee  stock  options to  purchase  Tegal  common  stock at an
exercise price of $3.09 per share valued at $32, and acquisition  costs of $180.
This  transaction  was accounted for as a purchase of assets in accordance  with
EITF Issue No. 98-3,  "Determining  Whether a Nonmonetary  Transaction  Involves
Receipt of Productive Assets or of a Business".

                                       11



     During the three months ended December 31, 2003, the Company  completed the
preliminary  allocation of the purchase  price of Simplus.  The following  table
represents  the  preliminary  allocation of the purchase  price for Simplus.  In
estimating  the fair  value of the  assets  acquired  and  liabilities  assumed,
management considered various factors, including an independent appraisal.

         Fair value fixed assets acquired..................   $      48
         Work Force........................................          50
         Patents...........................................         339
         In-process research and development...............       2,202
         Assumed liabilities...............................        (117)
                                                              ---------
                                                              $   2,522
                                                              =========

The  assets  will be  amortized  over a period of years  shown on the  following
table:

          Fixed assets acquired.............................  1 year
          Work Force........................................  2 years
          Patents...........................................  5 years


     The fair value underlying the $2.2 million assigned to acquired  in-process
research and development ("IPR&D") in the Simplus acquisition was charged to the
Company's  results of operations  during the quarter ended December 31, 2003 and
was determined by identifying research projects in areas for which technological
feasibility  had not been  established  and for which  there was no  alternative
future  use.   Projects  in  the  IPR&D   category  are  certain  design  change
improvements  on the existing 150 mm and 200 mm systems and the development of a
300 mm  system.  The  design  change  improvements  on the  existing  systems is
estimated to cost  approximately  $500,000 to $1 million,  is approximately  90%
complete and will be completed by December 31, 2004. The development of a 300 mm
system is estimated to be approximately 10% complete, and to cost between $2 and
$4 million over the next two to four years, as market demand materializes.

     The IPR&D value of $2.2 million was determined by an income  approach where
fair  value is the  present  value of  projected  free cash  flows  that will be
generated  by  the  products   incorporating  the  acquired  technologies  under
development,  assuming they are successfully  completed.  The estimated net free
cash flows generated by the products over a seven-year period were discounted at
a rate of 32% in relation to the stage of  completion  and the  technical  risks
associated with achieving technological feasibility. The net cash flows for such
projects  were based on  management's  estimates of revenue,  expenses and asset
requirements.  Any delays or failures in the  completion of these projects could
impact  expected  return on  investment  and future  results of  operations.  In
addition,  the Company's  financial condition would be adversely affected if the
value of other intangible assets acquired became impaired.

     All of these  projects  have  completion  risks  related to  functionality,
architecture   performance,    process   technology   availability,    continued
availability of key technical personnel, product reliability and availability of
software support. To the extent that estimated completion dates are not met, the
risk of competitors'  product  introductions is greater and revenue  opportunity
may be permanently lost.

     Sputtered Films, Inc:

     On  August  30,  2002,  the  Company  acquired  Sputtered  Films,  Inc.,  a
California corporation  ("Sputtered Films") pursuant to an Agreement and Plan of
Merger  Agreement  dated  August 13,  2002.  The  following  unaudited  proforma
financial  results of Tegal  Corporation  and Sputtered  Films for the three and
nine months ended December 31, 2002 give effect to the  acquisition of Sputtered
Films  as if the  acquisition  had  occurred  on  April  1,  2002  and  includes
adjustments such as amortization of intangible  assets directly  attributable to
the  acquisition,  and  expected  to have a  continuing  impact on the  combined
Company.

     These  unaudited  proforma  financial  results are provided for comparative
purposes only and are not  necessarily  indicative of what the Company's  actual
results would have been had the forgoing  transaction  been consummated on April
1,  2002,  nor does it give  effect to the  synergies,  cost  savings  and other
charges  expected  to result from the  acquisition.  Accordingly,  the  proforma
financial  results do not purport to be indicative  of the Company's  results of
operations  as of the date hereof or for any period  ended on the date hereof or
for any other future date or period.


                                       12



Unaudited actual and proforma financial Information (in thousands,  except share
and per share amounts):



                                                                    THREE MONTHS ENDED     NINE MONTHS ENDED
                                                                        DECEMBER 31,          DECEMBER 31,
                                                                  ---------------------  -----------------------
                                                                      2003       2002        2003       2002
                                                                  ----------  ---------  ----------  -----------
                                                                                         
         Revenue                                                  $    3,276  $  3,701   $   10,371  $   11,763
         Net loss                                                 $   (8,119) $ (3,262)  $  (11,042) $  (11,473)
         Net loss per share, basic and diluted................    $    (0.35) $  (0.20)  $    (0.59) $    (0.72)
         Shares used in per share computations:
           Basic..............................................        23,233    16,002       18,588      15,881
           Diluted............................................        23,233    16,002       18,588      15,881


10. 2% CONVERTIBLE DEBENTURES: (AS RESTATED)

     On June 30, 2003, the Company signed  definitive  agreements with investors
to raise up to $7,165 in a private placement of convertible debt financing to be
completed in two  tranches.  The first  tranche,  which closed on June 30, 2003,
involved the sale of  debentures in the  principal  amount of $929.  The Company
received $424 in cash on June 30, 2003 and the remaining balance of $505 on July
1, 2003,  which was recorded as an other  receivable  as of June 30,  2003.  The
closing of the second  tranche,  which  occurred on September 9, 2003  following
shareholder   approval  on  September  8,  2003,  resulted  in  the  receipt  of
approximately $6,236 in cash on September 10, 2003.

     The debentures  agreement includes a Material Adverse Change ("MAC") clause
which  allows  the  debenture  holders to demand  the  immediate  payment of all
outstanding balances upon the debenture holders' determination of the occurrence
of  deemed  material  adverse  changes  to the  Company's  financial  condition,
business  or  operations  as  determined  by the  debenture  holders.  Potential
material adverse changes that may cause the Company to default on the debentures
include any  significant  adverse  effect on the Company's  financial  condition
arising from an event not previously disclosed in the Company's filings with the
Securities and Exchange  Commission  ("SEC"),  such as a significant  litigation
judgment against the Company,  bankruptcy, or termination of the majority of the
Company's  customer  relationships.  The  MAC  clause  is  effective  until  the
conversion of all  outstanding  debentures.  As a result of the MAC clause,  the
debentures are classified as current liabilities.

     The  Company  was  required  to pay a cash fee of up to 6.65% of the  gross
proceeds of the debentures to certain financial advisors upon the closing of the
second tranche.  A fee of $448 has been recorded as a debt issuance cost and was
paid in September  2003.  The financial  advisors also were granted  warrants to
purchase  1,756,127 shares of the Company's common stock at an exercise price of
$0.35 per share.  These  warrants were valued at $1,387 using the  Black-Scholes
option  pricing model with the following  variables:  stock fair value of $0.93,
term of five  years,  volatility  of 95% and  risk-free  interest  rate of 2.5%.
During the  three-month  period ended December 31, 2003, the financial  advisors
exercised  warrants for 763,870  shares,  leaving  advisor  warrants for 992,257
shares unexercised at the end of the quarter.

     The  debentures  accrue  interest  at the  rate of 2% per  annum.  Both the
principal of, and the accrued interest on, the debentures are convertible at the
rate of $0.35 per share.  The principal of the  debentures is  convertible  into
20,471,428  shares of the  Company's  common  stock.  The closing  prices of the
Company's common stock on June 30, 2003 and September 9, 2003, the closing dates
for  the  first  and  second  tranches,  respectively,  were  $0.55  and  $1.49.
Therefore,  a beneficial  conversion  feature exists which needs to be accounted
for under the  provisions  of EITF 00-27,  Application  of Issue 98-5 to Certain
Convertible Instruments. A beneficial feature also exists in connection with the
conversion of the interest on the debentures into shares of common stock.

     As of December 31, 2003, several debenture holders converted  debentures in
the principal  amount of $3,759 into 10,740,534  shares of the Company's  common
stock. In addition, 46,197 shares were issued which represented interest payable
to the  debenture  holders at the time of the  conversions.  As of December  31,
2003,  there remained  convertible  debentures in the principal amount of $3,406
convertible into 9,730,894 shares of the Company's common stock.

     In  addition,  the  debenture  holders  were  granted  warrants to purchase
4,094,209  shares of the Company's  common stock at an exercise  price of $0.50.
The  warrants  expire  after eight  years.  The  warrants  were valued using the
Black-Scholes model with the following variables:  fair value of common stock of
$0.35  for the  first  tranche  debentures  and  $0.93  for the  second  tranche
debentures,  volatility  of 37%  and  risk-free  interest  rate of  2.5%.  As of
December 31, 2003,  the  debenture  holders had  exercised  warrants to purchase
437,133 (1,770 of these shares were remitted as payment) shares of the Company's
common stock. As of December 31, 2003, there remained  unexercised warrants held
by the debenture holders for 3,657,076 of the Company's common stock.


                                       13



     The relative fair value of the warrants has been  classified as equity with
the beneficial conversion feature because it meets all the equity classification
criteria of EITF 00-19,  Accounting for Derivative Financial Instruments Indexed
to, and Potentially Settled in, a Company's Own Stock.

     The  following  table  presents  the amounts  originally  allocated  to the
beneficial  conversion feature and warrants and the outstanding  balance of debt
at  December  31,  2003 (as  restated)  after  accounting  for these two  equity
instruments and conversions (in thousands):



                                                                               FIRST         SECOND
                                                                              TRANCHE        TRANCHE         TOTAL
                                                                            -----------    -----------    -----------
                                                                                                 
         2% convertible debentures - principal amount ...................   $       929    $     6,236    $     7,165
         Beneficial conversion feature (included in equity) .............          (605)        (4,585)        (5,190)
         Warrants (included in equity) ..................................           (73)        (1,651)        (1,724)
         Conversions to common stock ....................................          (627)        (1,890)        (2,517)

         Accretion of debt discount .....................................           425          1,907          2,332
                                                                            -----------    -----------    -----------
         Net amount of 2% convertible debentures ........................   $        49    $        17    $        66
                                                                            ===========    ===========    ===========


     The value of the beneficial conversion feature,  warrants and debt issuance
costs are being  amortized  as interest  expense over the life of the debt using
the  effective  interest  method.  Related  interest  expense for the nine month
period ended  December 31, 2003 amounted to $3,804.  This amount is comprised of
nominal interest, amortization of beneficial conversion feature and amortization
of debt issuance costs.

     The debt issuance costs  associated with the debentures  amounted to $2,369
and are  comprised of $982 in cash  issuance  costs and $1,387  associated  with
warrants issued to financial  advisors.  Approximately  $603 of these costs were
allocable to the warrants and were therefore  offset into equity.  The remaining
balance of $1,766 has been recorded as an asset to be amortized over the life of
the debt. As of December 31, 2003, $697 is remaining in current assets.

     Amortization  accelerates  if the  Company  repays  the  debt  early,  upon
conversion, if the material adverse change clause is invoked, or if it is deemed
that such  invocation is probable  given the presence of negative  factors or if
the debt is converted into common stock. The Company will assess the probability
of the occurrence of the material adverse change clause on a quarterly basis.

11. SUBSEQUENT EVENT:

     Convertible Debenture Financing

     As of June 15, 2004, all of the outstanding  debentures associated with the
Convertible  Debenture Financing as described in Note 7 above had been converted
into the  Company's  common  stock.  The  principal  and interest  amount of the
debentures  converted between April 1, 2004 and June 15, 2004 was $1,688,  which
was converted into 4,825,118 shares of the Company's common stock.

     Acquisition of First Derivative Systems, Inc.

     On May 28, 2004, Tegal purchased  substantially  all of the assets of First
Derivative  Systems,  Inc.  ("FDSI")  for  1,410,622  shares of common stock and
approximately $200,000 in assumed liabilities,  pursuant to a purchase agreement
dated  April  29,  2004.  All of the  shares of common  stock are  subject  to a
registration  rights  agreement  in which the Company has agreed to register the
shares with the Securities and Exchange Commission for resale. In addition,  the
Company  entered into employment  agreements  with key FDSI  personnel.  FDSI, a
privately  held  development  stage company based in Goleta,  CA, was founded in
1999 as a spin-off of Sputtered Films,  Inc., which itself was acquired by Tegal
in August 2002.  FDSI had  developed a  high-throughput,  low  cost-of-ownership
physical vapor deposition ("PVD") system with highly  differentiated  technology
for leading edge memory and logic device production on 300 millimeter wafers.

ITEM 2. MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS
OF OPERATIONS

     Information herein contains "forward-looking statements" within the meaning
of the Private Securities Litigation Reform Act of 1995, which can be identified
by the use of  forward-looking  terminology  such as  "may,"  "will,"  "expect,"
"anticipate,"  "estimate,"  or  "continue"  or the  negative  thereof  or  other


                                       14



variations  thereon or  comparable  terminology  or which  constitute  projected
financial  information.  The forward-looking  statements relate to the near-term
semiconductor capital equipment industry outlook,  demand for our products,  our
quarterly  revenue and earnings  prospects  for the  near-term  future and other
matters contained herein. Such statements are based on current  expectations and
beliefs  and  involve a number of  uncertainties  and risks that could cause the
actual results to differ materially from those projected. Such uncertainties and
risks  include,  but are not limited to, the  cyclicality  of the  semiconductor
industry,   impediments  to  customer  acceptance,   fluctuations  in  quarterly
operating results, competitive pricing pressures, the introduction of competitor
products having technological and/or pricing advantages,  product volume and mix
and other  risks  detailed  from time to time in our SEC  reports.  For  further
information,  refer  to the  business  description  and  risk  factors  sections
included in our Form 10-K for the year ended March 31, 2003 and the risk factors
section included in this Form 10-Q (Part II, Item 5) as filed with the SEC.

RESULTS OF OPERATIONS

     Tegal designs, manufactures,  markets and services plasma etch systems used
in the fabrication of integrated circuits, memory devices,  read-write heads for
the disk drive industry, printer heads, telecommunications equipment, small flat
panel displays,  device-level  packaging,  mask/reticle formation and MEMS. With
the  acquisition of Sputtered  Films on August 30, 2002, and the  acquisition of
Simplus  on  November  11,  2003,  the  Company  now  also  provides  deposition
capabilities.  The  acquisition of Sputtered  Films and Simplus secured a source
for a complementary  deposition  technology for our new materials strategy.  The
continuation  of Moore's Law is  dependent  on the  adoption of a variety of new
materials that, because of their composition, are extremely difficult to deposit
an etch  uniformly.  Since the  mid-1990's  Tegal has focused on developing  and
implementing process solutions for the new materials being adopted by the makers
of advanced semiconductor and nanotechnology devices.

    The following  table sets forth certain  financial  items as a percentage of
revenue  for the  three and  nine-month  periods  ended  December  31,  2003 (as
restated) and 2002:



                                                                             THREE MONTHS                 NINE MONTHS
                                                                                ENDED                        ENDED
                                                                             DECEMBER 31,                 DECEMBER 31,
                                                                   ------------------------------   ----------------------------
                                                                          2003                             2003
                                                                      AS RESTATED         2002       AS RESTATED          2002
                                                                    ---------------   -----------    --------------    ----------
                                                                                                                
           Revenue ...............................................            100.0%        100.0%            100.0%        100.0%
           Cost of sales .........................................            101.7          97.6              81.0         113.4
                                                                    ---------------   -----------    --------------    ----------
              Gross profit (loss).................................             (1.7)          2.4              19.0         (13.4)
           Operating expenses:
              Research and development............................             29.0          29.8              24.0          33.6
              Sales and marketing.................................             18.1          23.1              17.0          22.4
              General and administrative..........................             24.8          39.2              26.6          37.4
              In-process research and development.................             67.2            --              21.2            --
                                                                    ---------------   -----------    --------------    ----------
                 Total operating expenses.........................            139.1          92.1              88.9          93.4
                                                                    ---------------   -----------    --------------    ----------
                    Operating loss................................           (140.8)        (89.7)            (69.8)       (106.8)
           Other income, net
              Interest expense, net...............................           (107.2)         (1.5)            (37.3)         (3.6)
              Other income (expense), net.........................              0.2           3.1               0.6           2.1
                                                                    ---------------   -----------    --------------    ----------
           Other income (expense), net............................           (107.0)          1.6             (36.7)         (1.5)
                                                                    ---------------   -----------    --------------    ----------
              Net loss............................................           (247.8%)       (88.1%)          (106.5%)      (108.3%)
                                                                    ===============   ===========    ==============    ==========


     Revenue.  System revenue for the three and  nine-months  ended December 31,
2003 was $3,276 and $10,371 respectively, a decrease for the three-months and an
increase for the nine-months of $425 and $273, respectively, over the comparable
periods in 2002.  The decrease for the three months ended  December 31, 2003 was
principally  due to the sale of a 6500 series system  upgrade as compared to the
sale of one full 6500 series  systems for the same period in the prior year. The
increase for the nine months ended December 31, 2003 was  principally due to the
systems  sales  product mix as compared to the same period in the prior year. As
of December 31, 2003 and 2002, our backlog was $5,189 and $2,774, respectively.

     Revenue  from spare  parts and  service  sales for the three  months  ended
December 31, 2003 and  December  31, 2002 were $1,930 and $1,860,  respectively.
The  increase of spare parts and service  revenue  during the three months ended
December  31,  2003 was  primarily  due to  increased  sales  of spare  parts as
compared  to the same  period  in the  prior  year.  For the nine  months  ended
December 31, 2003, service and spare parts revenue was $5,701,  down from $5,809


                                       15



for the  nine-month  period ended December 31, 2002. The decrease of spare parts
and service  revenue in the nine months ended  December 31, 2003 was as a result
of slow  service and spare parts sales at the  beginning  of the current  fiscal
year, that is partially offset by an increase in the three months ended December
31, 2003, which the Company believes is due to increased usage of systems in the
customers' facilities during the last three-month period.

    International  sales as a percentage of the Company's  revenue for the three
and nine months  ended  December  31, 2003 were  approximately  79.1% and 81.0%,
respectively,  and for the three and nine months  ended  December  31, 2002 were
83.2% and 77.2%, respectively. We believe that international sales will continue
to represent a significant portion of our revenue.

     Gross profit (loss).  Gross profit (loss) as a percentage of revenue (gross
margin) was (1.7)% and 2.4% for the  three-months  ended  December  31, 2003 and
2002, respectively, and 19.0% and (13.4)% for the nine-months ended December 31,
2003 and 2002,  respectively.  The decrease in gross margin for the three-months
ended  December  31,  2003  compared  to the same  period in the prior  year was
principally attributable to a $967 excess and obsolete inventory provision based
on reduced revenue  projections and recent changes in product mix of spare parts
creating an excess of the spare parts  currently in  inventory.  The increase in
gross  margin for the nine months ended  December 31, 2003  compared to the same
period in the prior year was  principally  attributable  to a $1,922  excess and
obsolete  inventory  provision based on reduced revenue  projections  during the
prior year, which reflected the slow-down of the semiconductor sector.

     Research  and  development.   Research  and  development  expenses  consist
primarily of salaries,  prototype  material and other costs  associated with our
ongoing  systems  and process  technology  development,  applications  and field
process support efforts.  Research and development expenses were $951 and $1,102
for the three  months and $2,490 and $3,397 for the nine months  ended  December
31, 2003 and 2002, respectively, representing 29.0% and 29.8% of revenue for the
three-months  and 24.0% and 33.6% of revenue for the nine months ended  December
31,  2003 and 2002,  respectively.  The  decrease in  research  and  development
spending is  primarily  due to the  completion  and  implementation  of specific
projects and the Company's continued cost reduction efforts.

     Sales and  marketing.  Sales and marketing  expenses  consist  primarily of
salaries,  commissions,  trade show  promotion  and  travel and living  expenses
associated with those functions. Sales and marketing expenses were $592 and $855
for the three  months and $1,760 and $2,260 for the nine months  ended  December
31, 2003 and 2002, respectively, representing 18.1% and 23.1% of revenue for the
three months and 17.0% and 22.4% of revenue for the nine months  ended  December
31, 2003 and 2002, respectively. The decrease in sales and marketing spending is
due to the Company's continued cost reduction efforts.

     General and  administrative.  General and  administrative  expenses consist
primarily of compensation for general management,  accounting and finance, human
resources,  information  systems and investor relations functions and for legal,
consulting  and  accounting  fees of the  Company.  General  and  administrative
expenses were $812 and $1,452 for the three months and $2,764 and $3,776 for the
nine months ended December 31, 2003 and 2002,  respectively,  representing 24.8%
and 39.2% of revenue for the three months and 26.7% and 37.4% of revenue for the
nine months  ended  December  31, 2003 and 2002,  respectively.  The decrease in
general and  administrative  spending for the three-month  period ended December
31,  2003,  compared  to the same  periods  in the  prior  year,  was  primarily
attributable  to the operating  expenses that are incurred by Sputtered Films in
the prior year. The decrease in general and administrative spending for the nine
month period ended December 31, 2003,  compared to the same periods in the prior
year, was primarily attributable to Company's continued cost reduction efforts.

     In-process  research  &  development.  In-process  research  &  development
("IPR&D")  consists of those products obtained through  acquisition that are not
yet proven to be  technologically  feasible  but have been  developed to a point
where  there is value  associated  with them in  relation  to  potential  future
revenue. Because technological feasibility was not yet proven and no alternative
future uses are believed to exist for the in-process technologies,  the assigned
value of $2,202 was expensed immediately upon the date of the acquisition.

     The fair value underlying the $2.2 million assigned to IPR&D in the Simplus
acquisition was determined by identifying  research  projects in areas for which
technological  feasibility  had not been  established and for which there was no
alternative future use. Projects in the IPR&D category are certain design change
improvements  on the existing 150 mm and 200 mm systems and the development of a
300 mm  system.  The  design  change  improvements  on the  existing  systems is
estimated to cost  approximately  $500,000 to $1 million,  is approximately  90%
complete and will be completed by December 31, 2004. The development of a 300 mm
system is estimated to be approximately 10% complete, and to cost between $2 and
$4 million over the next two to four years, as market demand materializes.


                                       16



     The IPR&D value of $2.2 million was determined by an income  approach where
fair  value is the  present  value of  projected  free cash  flows  that will be
generated  by  the  products   incorporating  the  acquired  technologies  under
development,  assuming they are successfully  completed.  The estimated net free
cash flows generated by the products over a seven-year period were discounted at
a rate of 32% percent in relation to the stage of  completion  and the technical
risks associated with achieving  technological  feasibility.  The net cash flows
for such projects were based on management's estimates of revenue,  expenses and
asset  requirements.  Any delays or failures in the completion of these projects
could impact expected return on investment and future results of operations.  In
addition,  the Company's  financial condition would be adversely affected if the
value of other intangible assets acquired became impaired.

     All of these  projects  have  completion  risks  related to  functionality,
architecture   performance,    process   technology   availability,    continued
availability of key technical personnel, product reliability and availability of
software support. To the extent that estimated completion dates are not met, the
risk of competitors'  product  introductions is greater and revenue  opportunity
may be permanently lost.

     Interest  expense,  net.  Interest expense  consists  primarily of interest
expense on the  debenture  financing  and the domestic  line of credit offset in
part by interest income on outstanding cash balances.

     Other income (expense), net. Other income (expense), net consists primarily
of gains and losses on foreign exchange.

LIQUIDITY AND CAPITAL RESOURCES

    For  the  nine-month  period  ended  December  31,  2003,  we  financed  our
operations through the use of outstanding cash balances, the sale of convertible
debentures,  and borrowings against our promissory note borrowing  facilities in
Japan, as well as our domestic line of credit.

    Net cash used in operations was $2,428 during the nine months ended December
31, 2003, due  principally to a net loss of $11,042 (as restated)  offset by non
cash expense from  depreciation and  amortization,  warrants issued for services
rendered,  and non cash amortization of debt discount, and a non cash charge for
acquired IPR&D related to the Simplus acquisition. Additionally, the net loss is
offset by a net  decrease in  inventory  and an increase in accounts  receivable
offset by a net decrease in accounts payable and accrued liabilities,  offset by
an increase in prepaid expenses and other assets.  We expect to incur additional
costs in connection  with the completion of certain  projects as a result of the
acquisition  of Simplus.  Net cash used in operations was $3,791 during the nine
months ended December 31, 2002, due  principally to a net loss of $10,930 offset
by non cash  expense  for  depreciation  and  amortization,  a non cash  related
provision for inventory and warrants issued for services rendered. Additionally,
the net loss was offset by a  decrease  in  accounts  receivable  and  inventory
offset,  in part,  by a decrease  in deferred  revenue  and  increase in prepaid
expenses and other assets,  and a decrease in accounts payable and other accrued
liabilities.

    There were minimal capital  expenditures  for the nine months ended December
31, 2003. Capital expenditures  totaled  approximately $19 and $323 for the nine
months ended  December 31, 2003 and  December  31, 2002,  respectively.  Capital
expenditures in 2002 were incurred principally for leasehold improvements and to
acquire design tools, analytical equipment and computers.

    Cash proceeds from financing  activities  totaled $6,587 for the nine months
ended  December  31,  2003 and were  primarily  from the sale of 2%  convertible
debentures  and the  subsequent  exercise  of common  stock  warrants by service
providers  and  debenture  holders,  partially  offset by the  repayment  of the
Japanese line of credit. Net cash used in financing  activities totaled $720 for
the nine months ended  December 31, 2002  primarily  related to the repayment of
the domestic and Japanese lines of credit.

     On June 30, 2003, the Company entered into an Amended Letter  Agreement and
Subordination  Agreement with Silicon Valley Bank, which subordinated the bank's
interest in Tegal's  intellectual  property to the investors in the  Convertible
Debt Financing (See Note 10). The Company agreed not to request, until such time
as the investors' security interest in the intellectual property was terminated,
any loan, letter of credit,  foreign exchange forward contract,  cash management
service or credit  accommodation under the Company's current line of credit with
Silicon  Valley  Bank.  As of  December  31,  2003,  the  Company had no amounts
outstanding under this domestic line of credit, which had been collateralized by
substantially all of the Company's domestic assets and which was further limited
by the amounts of accounts  receivable and inventories on the Company's  balance
sheet. The facility had a maximum borrowing capacity of $10.0 million,  and bore
interest at prime plus 1.0 %, or 5.25 % as of December 31, 2003.  On January 19,
2004,  the Company  entered into a new line of credit with  Silicon  Valley Bank
that will be  available  until  January 19,  2005.  The new line of credit has a


                                       18



maximum  borrowing  capacity of $3.5 million,  bears interest of prime plus 1.0%
and  is  collateralized  by  substantially  all of the  Company's  domestic  and
Japanese assets.

     As  of  December  31,  2003,  the  Company's  Japanese  subsidiary  had  $6
outstanding  under its bank line of credit which is  collateralized  by Japanese
customer  promissory  notes  held by such  subsidiary  in  advance of payment on
customers'  accounts  receivable.  The  Japanese  bank line  bears  interest  at
Japanese  prime  (1.375% as of  December  31,  2003) plus 1.0%,  and has a total
capacity of 150 million yen  (approximately  $1,401 at exchange rates prevailing
on December 31, 2003).

     Notes  payable  as  of  December  31,  2003  consisted   primarily  of  one
outstanding  note to the  California  Trade and  Commerce  Agency for $139.  The
unsecured note from the California  Trade and Commerce  Agency carries an annual
interest rate of 5.75% with monthly interest only payments of approximately $4.2
per month.  Although the payment  deadlines are being met, the note is currently
in technical default due to the merger of Sputtered Films and Tegal Corporation.

     The Company also entered into a convertible  debenture financing,  which is
described in Note 10 to the financial statements.

     The unaudited condensed  consolidated  financial statements contemplate the
realization of assets and the  satisfaction  of liabilities in the normal course
of  business.  The  Company  incurred  net losses of $11,042 (as  restated)  and
$10,930 for the nine months ended December 31, 2003 and 2002, respectively.  The
Company  generated  negative cash flows from operations of $2,428 and $3,791 for
the  periods  ended  December  31, 2003 and 2002,  respectively.  To finance its
operations,  the Company  raised  approximately  $6,183 in net proceeds from the
sale of 2% convertible debentures and exercise of warrants during the nine-month
period ended  December 31, 2003 (see Note 10).  Management  believes  that these
proceeds,  combined with the effects of its cost  compression  program,  will be
adequate to fund operations through fiscal year 2005.  However,  projected sales
may not  materialize  and unforeseen  costs may be incurred.  Additionally,  the
convertible debentures agreement includes a material adverse change clause which
allows the debenture  holders to demand the immediate payment of all outstanding
balances upon the debenture  holders'  determination of the occurrence of deemed
material  adverse  changes to the  Company's  financial  condition,  business or
operations as determined  by the debenture  holders based on required  financial
reporting and other  criteria.  These issues raise  substantial  doubt about the
Company's ability to continue as a going concern.

ITEM 4. CONTROLS AND PROCEDURES

     We maintain  disclosure controls and procedures that are designed to ensure
that  information  required  to be  disclosed  in our  Exchange  Act  reports is
recorded,  processed,  summarized and reported within the time periods specified
in the SEC's  rules and forms,  and that such  information  is  accumulated  and
communicated to our management,  including our Chief Executive Officer and Chief
Financial Officer, as appropriate,  to allow timely decisions regarding required
disclosure.  In designing and evaluating the disclosure controls and procedures,
management  recognized  that any  controls  and  procedures,  no matter how well
designed and operated,  can provide only  reasonable  assurance of achieving the
desired  control  objectives,  and, in reaching  reasonable  level of  assurance
management  necessarily  was  required to apply its judgment in  evaluating  the
cost-benefit relationship of possible controls and procedures.

As required by SEC Rule 13a-15(b), the Company carried out an evaluation,  under
the  supervision  and  with  the  participation  of  the  Company's  management,
including  the  Company's  Chief  Executive  Officer  and  the  Company's  Chief
Financial  Officer,  of the  effectiveness  of the design and  operation  of the
Company's  disclosure  controls  and  procedures  as of the  end of the  quarter
covered  by this  report.  The  evaluation  also  took  into  account  a written
confirmation  of a reportable  condition  recently  provided by our  independent
accountants  stating that they noted certain matters involving the accounting of
our  convertible  debentures  and related debt issuance  costs.  The  reportable
condition arose from the accounting for our convertible debentures with warrants
and related  measurement  and  recognition of beneficial  conversion and warrant
discounts and issuance costs. As a result of the above, the Company restated its
unaudited  condensed   consolidated  financial  statements  for  the  three  and
nine-month periods ended December 31, 2003, included here in.

     The letter  acknowledges  the accounting for  convertible  debentures  with
warrants and related  measurement and  recognition of beneficial  conversion and
warrant  discounts and issuance costs requires a deep  understanding  of complex
evolving areas of generally accepted  accounting  principles that are subject to
interpretations and where applications of such principles requires judgment.

     The reportable  condition letter  recommends the Company expand and enhance
its  accounting  function to include  sufficient  knowledge  of  accounting  for
complex financing  transactions  including the convertible  debenture  financing
referred above.

     Based upon that evaluation, our Chief Executive Officer and Chief Financial
Officer conclude that our controls and procedures over financial reporting as of
the end of the period covered by this report were effective, except with respect
to the reportable condition, refer to above.


                                       19



                                   SIGNATURES

    Pursuant to the  requirements  of the  Securities  Exchange Act of 1934, the
registrant  has duly  caused  this  report  to be  signed  on its  behalf by the
undersigned thereunto duly authorized.

                                                        TEGAL CORPORATION
                                                        (Registrant)

                                                        /s/ THOMAS R. MIKA
                                                        ------------------------
                                                        Thomas R. Mika
                                                        Chief Financial Officer

Dated: June 25, 2004



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