EXHIBIT 32

                    CERTIFICATION OF CHIEF EXECUTIVE OFFICER

      Pursuant to 18 U.S.C. ss. 1350, as created by Section 906 of the
Sarbanes-Oxley Act of 2002, the undersigned officer of Tegal Corporation (the
"Company") hereby certifies, to such officer's knowledge, that:

      (i)   the accompanying Quarterly Report on Form 10-Q of the Company for
            the quarterly period ended June 30, 2004 (the "Report") fully
            complies with the requirements of Section 13(a) or Section 15(d), as
            applicable, of the Securities Exchange Act of 1934, as amended; and

      (ii)  the information contained in the Report fairly presents, in all
            material respects, the financial condition and results of operations
            of the Company.


Date: August 16, 2004                              /s/    MICHAEL L. PARODI
                                               ---------------------------------
                                                          Michael L. Parodi
                                                      Chief Executive  Officer


                    CERTIFICATION OF CHIEF FINANCIAL OFFICER

      Pursuant to 18 U.S.C. ss. 1350, as created by Section 906 of the
Sarbanes-Oxley Act of 2002, the undersigned officer of Tegal Corporation (the
"Company") hereby certifies, to such officer's knowledge, that:

      (i)   the accompanying Quarterly Report on Form 10-Q of the Company for
            the quarterly period ended June 30, 2004 (the "Report") fully
            complies with the requirements of Section 13(a) or Section 15(d), as
            applicable, of the Securities Exchange Act of 1934, as amended; and

      (ii)  the information contained in the Report fairly presents, in all
            material respects, the financial condition and results of operations
            of the Company.

Dated: August 16, 2004                               /s/    THOMAS R. MIKA
                                               ---------------------------------
                                                            Thomas R. Mika
                                                        Chief Financial Officer