EXHIBIT 24.5


                                POWER OF ATTORNEY


         The undersigned constitutes and appoints BARRY L. HARMON and J. MICHAEL
DODSON and each of them, as the undersigned's true and lawful attorneys and
agents, with full power of substitution and resubstitution for the undersigned
and in the undersigned's name, place and stead, in any and all capacities, to
sign the Electro Scientific Industries, Inc. Annual Report on Form 10-K/A for
the year ended June 1, 2002 and any and all amendments thereto, and to file the
same, with all exhibits thereto, and other documents in connection therewith,
with the Securities and Exchange Commission, granting unto said attorneys and
agents, and each of them, full power and authority to do any and all acts and
things necessary or advisable to be done, as fully and to all intents and
purposes as the undersigned might or could do in person, hereby ratifying and
confirming all that said attorneys and agents or either of them, or their or his
substitute or substitutes, may lawfully do or cause to be done by virtue hereof.


DATED:  July 17, 2003



                                                     /s/ W. Arthur Porter
                                                     ---------------------------
                                                     W. Arthur Porter