Exhibit 24.6


                                POWER OF ATTORNEY

         KNOW ALL MEN BY THESE PRESENTS, that the undersigned officer and/or
director of Electro Scientific Industries, Inc. (the "Company") hereby
constitutes and appoints Barry L. Harmon and J. Michael Dodson, or either of
them, his true and lawful attorneys-in-fact and agents, each with full power of
substitution and resubstitution, for him and in his name, place and stead, in
any and all capacities, to sign any amendments (whether pre-effective or
post-effective) to the Registration Statement on Form S-3 (File No. 333-84552)
and any registration statement for the same offering that is to be effective
upon filing pursuant to Rule 462(b) under the Securities Act of 1933, and to
file the same with all exhibits thereto and other documents in connection
therewith with the Securities and Exchange Commission, granting unto each of
said attorneys-in-fact and agents full power and authority to do and perform
each and every act and thing requisite and necessary to be done in and about the
premises, as fully to all intents and purposes as he might or could do in
person, hereby ratifying and confirming all that each of said attorneys-in-fact
and agents, or their substitute or substitutes, may do or cause to be done by
virtue hereof.



Dated:  August 28, 2003



                                    /s/ Keith L. Thomson
                                    --------------------------
                                    Keith L. Thomson, Director