UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                              Washington, DC 20549





                                    Form 8-K

                                 CURRENT REPORT

                     Pursuant to Section 13 or 15(d) of the
                         Securities Exchange Act of 1934

Date of Report (Date of earliest event reported):  October 22, 2003
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                           Ibis Technology Corporation
                           ---------------------------
             (Exact name of registrant as specified in its charter)






Massachusetts                       0-23150              04-2987600
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(State or other jurisdiction       (Commission           (IRS Employer
of incorporation)                   File Number)         Identification No.)



32 Cherry Hill Drive, Danvers, Massachusetts  01923
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(Address of principal executive offices)    (Zip Code)



Registrant's telephone number, including area code:  (978) 777-4247
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Item 7.  Financial Statements, Pro Forma Financial Information and Exhibits

(c) Exhibits.

Exhibit 99.1:  Press Release dated October 22, 2003

Item 9.  Regulation FD Disclosure

Ibis Technology Corporation has reported its third quarter ended September 30,
2003 financial results. The Company's press release dated October 22, 2003
announcing the results is attached hereto as Exhibit 99.1. All the statements
and information in this Form 8-K are hereby furnished under Item 12 (Results of
Operations and Financial Condition).

Ibis' website (www.ibis.com) contains a significant amount of information about
Ibis, including financial and other information for investors. Ibis encourages
investors to visit its web site from time to time, as information is updated and
new information is posted.

Item 12.  Results of Operations and Financial Condition

Ibis Technology Corporation has reported its third quarter ended September 30,
2003 financial results. The Company's press release dated October 22, 2003
announcing the results is furnished hereto as Exhibit 99.1.













                                   SIGNATURES


Pursuant to the requirements of the Securities Exchange Act of 1934, the
Registrant has duly caused this report to be signed on its behalf by the
undersigned hereunto duly authorized.


                                IBIS TECHNOLOGY CORPORATION
                                ---------------------------

Date:  October 22, 2003                     /s/Debra L. Nelson
                                ------------------------------------------------
                                     Debra L. Nelson, Chief Financial Officer











                                  EXHIBIT INDEX

Exhibit
Number                     Description
- ------                     -----------

99.1                       Ibis Technology Announces Third Quarter 2003 Results