UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                              Washington, DC 20549





                                    Form 8-K

                                 CURRENT REPORT

                     Pursuant to Section 13 or 15(d) of the
                         Securities Exchange Act of 1934

Date of Report (Date of earliest event reported):  May 25, 2004
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                           Ibis Technology Corporation
                           ---------------------------
             (Exact name of registrant as specified in its charter)






Massachusetts                       0-23150            04-2987600
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(State or other jurisdiction        (Commission        (IRS Employer
of incorporation)                   File Number)       Identification No.)



32 Cherry Hill Drive, Danvers, Massachusetts  01923
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(Address of principal executive offices)   (Zip Code)



Registrant's telephone number, including area code:  (978) 777-4247
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Item 5.  Other Events

Ibis Technology Corporation today announced that it has shipped an i2000
implanter to a leading silicon wafer manufacturer. The Company's press release
dated May 25, 2004 announcing the shipment is being furnished as Exhibit 99.1
attached hereto. This information shall not be deemed "filed" for purposes of
Section 18 of the Securities Exchange Act of 1934, as amended (the "Exchange
Act"), or incorporated by reference in any filing under the Securities Act of
1933, as amended, or the Exchange Act, except as shall be expressly set forth by
specific reference in such a filing. A copy of the press release is attached as
Exhibit 99.1.
















                                   SIGNATURES


Pursuant to the requirements of the Securities Exchange Act of 1934, the
Registrant has duly caused this report to be signed on its behalf by the
undersigned hereunto duly authorized.


                                                IBIS TECHNOLOGY CORPORATION
                                                ---------------------------

Date:  May 25, 2004                                  /s/William J. Schmidt
                                            ------------------------------------
                                            William J. Schmidt, Chief Financial
                                            Officer and Treasurer











                                  EXHIBIT INDEX
                                  -------------
Exhibit
Number                     Description
- ------                     -----------

99.1                       Ibis Technology Ships i2000 Oxygen Implanter to
                           Leading Silicon Wafer Manufacturer.