Exhibit 99.1

Ibis Technology Ships i2000 Oxygen Implanter to Leading Silicon Wafer
Manufacturer

    DANVERS, Mass.--(BUSINESS WIRE)--May 25, 2004--Ibis Technology
Corporation (Nasdaq NM: IBIS), a leading provider of SIMOX-SOI
implantation equipment and SIMOX-SOI wafers to the worldwide
semiconductor industry, today announced the shipment of an Ibis i2000
oxygen implanter to a major silicon wafer manufacturer. Ibis announced
the receipt of the order from this customer for this implanter on
February 5, 2004. This implanter, which recently completed the factory
acceptance process at Ibis, now is scheduled to be installed in the
customer's facility and undergo final on-site acceptance testing.
    Martin J. Reid, president and chief executive officer of Ibis
Technology Corporation, said, "It is especially noteworthy that this
system is being sold and shipped to a wafer supplier. Earlier sales of
our implanters have been made primarily to semiconductor manufacturers
who have used the systems mainly for research, process development and
small scale wafer production. We have long believed that when SOI
technology matured to the point where large scale production
quantities of SOI wafers would be needed, it would be the world's
wafer suppliers who would become the predominant manufacturers of
SIMOX-SOI wafers. That's why we view the sale and shipment of an i2000
implanter to this leading wafer supplier as being so significant."
    The i2000 system is designed to be a high-throughput, high-volume
production tool for manufacturing 200- and 300-millimeter SIMOX-SOI
wafers, including the company's Advantox(R) MLD and Advantox MLD-UT
wafers.
    Revenue recognition will be based on final customer acceptance at
their facility, the timing of which may vary depending on a number of
factors, which include the customer's site being properly facilitized
(power, water, air) and performance of the tool. As a result, Ibis
cannot provide any guarantees with respect to when or whether it will
recognize revenue on this transaction.

    About Ibis Technology

    Ibis Technology Corporation is a leading provider of oxygen
implanters for the production of SIMOX-SOI
(Separation-by-Implantation-of-Oxygen Silicon-On-Insulator) wafers for
the worldwide semiconductor industry. The company is also a leading
producer of SIMOX-SOI wafers. Headquartered in Danvers, Massachusetts,
the company maintains an additional office in Aptos, California. Ibis
Technology is traded on the Nasdaq National Market under the symbol
IBIS. Information about Ibis Technology Corporation and SIMOX-SOI is
available on Ibis' web site at www.ibis.com.

    "Safe Harbor" Statement under the Private Securities Litigation
Reform Act of 1995

    This release contains express or implied forward-looking
statements regarding, among other things, (i) customer interest in and
demand for, and market acceptance of, the Company's SIMOX-SOI
technology, (ii) the company's belief that wafer manufacturers will
become the primary suppliers of SIMOX-SOI wafers to the chipmaking
industry, (iii) the throughput and production capacity of the i2000
implanter for manufacturing 200- and 300-mm SIMOX-SOI wafers (iv) the
expected on-site acceptance of the i2000 implanter (v) the timing and
likelihood of revenue recognition on orders for the company's
implanters, (vi) the company's plan to focus on supplying implanters
to wafer manufacturers, (vii) the company's expectations regarding
future orders for i2000 implanters, and (viii) and the adoption rate
of SOI technology. Such statements are neither promises nor guarantees
but rather are subject to risks and uncertainties, which could cause
actual results to differ materially from those described in the
forward-looking statements. Such risks and uncertainties include, but
are not limited to, future continued migration to SOI technology and
market acceptance of SIMOX, the level of demand for the company's
products, the company's ability to pursue and maintain further
strategic relationships, partnerships and alliances with third
parties, the company's ability to protect its proprietary technology,
the potential trends in the semiconductor industry generally, the ease
with which the i2000 can be installed and qualified in fabrication
facilities, the likelihood that implanters, if ordered, will be
qualified and accepted by customers, the likelihood and timing of
revenue recognition on such transactions, the impact of competitive
products, technologies and pricing, the impact of rapidly changing
technology, the possibility of further asset impairment and resulting
charges, equipment capacity and supply constraints or difficulties,
the company's limited history in selling implanters, general economic
conditions, and other risks and uncertainties described in the
company's Securities and Exchange Commission filings from time to
time, including but not limited to, the company's Annual Report on
Form 10-K for the year ended December 31, 2003. All information set
forth in this press release is as of May 24, 2004, and Ibis undertakes
no duty to update this information unless required by law.

    CONTACT: Ibis Technology Corporation
             Martin J. Reid, 978-777-4247
             or
             IR Agency Contact:
             Bill Monigle Associates
             Bill Monigle, 603-424-1184