Exhibit 99.1

    Ibis Technology Announces Resignation of Gerald Cameron as COO

    DANVERS, Mass.--(BUSINESS WIRE)--April 13, 2005--Ibis Technology
Corporation (Nasdaq NM: IBIS), a leading provider of SIMOX-SOI
implantation equipment to the worldwide semiconductor industry, today
announced that Gerald Cameron, its chief operating officer, will be
leaving the company to pursue other opportunities. Cameron is expected
to stay with the company until the earlier of June 30, 2005 or a
replacement is found, assisting with an orderly transition.
    "We will be sorry to see Gerry leave," said Martin J. Reid,
president and chief executive officer of Ibis Technology Corporation.
"He helped us achieve the progress we have made during the last three
years, especially as we exited the wafer manufacturing business and
increased our focus on the business of providing SIMOX-SOI
implantation equipment to the world's silicon wafer manufacturers. We
appreciate his efforts and contributions, and wish him every success
in his future endeavors." Reid added, "We have already begun a search
for an executive to join our senior management team."
    Cameron said, "This was a difficult decision. I enjoyed my time at
Ibis, and I believe that, as the demand for SOI wafers increases, the
SIMOX cost advantage will play an increasingly important role in Ibis'
success. I wish the best for the whole Ibis team."
    Cameron joined Ibis as COO in March of 2002.

    About Ibis Technology

    Ibis Technology Corporation is a leading provider of oxygen
implanters for the production of SIMOX-SOI
(Separation-by-Implantation-of-Oxygen Silicon-On-Insulator) wafers for
the worldwide semiconductor industry. Headquartered in Danvers,
Massachusetts, the Company maintains an additional office in Aptos,
California. Ibis Technology is traded on the Nasdaq National Market
under the symbol IBIS. Information about Ibis Technology Corporation
and SIMOX-SOI is available on Ibis' web site at www.ibis.com.

    "Safe Harbor" Statement under the Private Securities Litigation
Reform Act of 1995

    This release contains express or implied forward-looking
statements regarding, among other things, the cost advantage of SIMOX
technology and customer interest in, demand for, and market acceptance
of the Company's SIMOX-SOI technology. Such statements are neither
promises nor guarantees but rather are subject to risks and
uncertainties, which could cause actual results to differ materially
from those described in the forward-looking statements. Such risks and
uncertainties include, but are not limited to, the company's ability
to attract and retain talented executives, future continued migration
to SOI technology and market acceptance of SIMOX, the level of demand
for the company's products, the company's ability to pursue and
maintain further strategic relationships, partnerships and alliances
with third parties, the company's ability to protect its proprietary
technology, the potential trends in the semiconductor industry
generally, the ease with which the i2000 can be installed and
qualified in fabrication facilities, the likelihood that implanters,
if ordered, will be qualified and accepted by customers without
substantial delay, modification or cancellation, in whole or in part,
the likelihood and timing of revenue recognition on such transactions,
the impact of competitive products, technologies and pricing, the
impact of rapidly changing technology, the possibility of further
asset impairment and resulting charges, equipment capacity and supply
constraints or difficulties, the company's limited history in selling
implanters, general economic conditions, and other risks and
uncertainties described in the company's Securities and Exchange
Commission filings from time to time, including but not limited to,
the company's Annual Report on Form 10-K for the year ended December
31, 2004. All information set forth in this press release is as of
April 13, 2005, and Ibis undertakes no duty to update this information
unless required by law.

    CONTACT: Ibis Technology Corporation
             William J. Schmidt, 978-777-4247
             CFO & Treasurer
             or
             Bill Monigle Associates
             Bill Monigle, 603-424-1184
             President