UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                              WASHINGTON, DC 20549


                                    Form 8-K

                                 CURRENT REPORT

     Pursuant to Section 13 or 15(d) of The Securities Exchange Act of 1934

Date of Report (Date of earliest event reported):  October 2, 2006
                                                   ---------------


                           Ibis Technology Corporation
                           ---------------------------
             (Exact name of registrant as specified in its charter)


        Massachusetts                  0-23150                   04-2987600
        -------------                  -------                   ----------
(State or other jurisdiction         (Commission               (IRS Employer
      of incorporation)              File Number)            Identification No.)


32 Cherry Hill Drive, Danvers, Massachusetts  01923
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(Address of principal executive offices)  (Zip Code)


Registrant's telephone number, including area code: (978) 777-4247
                                                    --------------


Check the appropriate box below if the Form 8-K filing is intended to
simultaneously satisfy the filing obligation of the registrant under any of the
following provisions (see General Instruction A.2. below):

[ ] Written communications pursuant Rule 425 under the Securities Act (17 CFR
    230.425)

[ ] Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR
    240.14a-12)

[ ] Pre-commencement communications pursuant to Rule 14d-2(b) under the
    Exchange Act (17 CFR 240.14d-2(b))

[ ] Pre-commencement communications pursuant to Rule 13e-4(c) under the
    Exchange Act (17 CFR 240.13e-4(c))




ITEM 8.01. OTHER EVENTS

On October 2, 2006, Ibis Technology Corporation announced that it has reached an
agreement  in  principle  to settle the  consolidated  securities  class  action
litigation pending in the United States District Court of Massachusetts  against
the  Company  and its  President  and CEO. A copy of the press  release is being
furnished as Exhibit 99.1 to this Current  Report on Form 8-K. This  information
shall not be  deemed  "filed"  for  purposes  of  Section  18 of the  Securities
Exchange Act of 1934,  as amended  (the  "Exchange  Act"),  or  incorporated  by
reference in any filing under the  Securities  Act of 1933,  as amended,  or the
Exchange Act,  except as shall be expressly  set forth by specific  reference in
such a filing.

ITEM 9.01. FINANCIAL STATEMENTS AND EXHIBITS.

(a)  Not applicable.

(b)  Not applicable.

(c)  Exhibits

          Exhibit 99.1.  Press Release issued by Ibis Technology  Corporation on
                         October 2, 2006.




                                   SIGNATURES


     Pursuant to the requirements of the Securities Exchange Act of 1934, the
registrant has duly caused this report to be signed on its behalf by the
undersigned hereunto duly authorized.


                                                     IBIS TECHNOLOGY CORPORATION
                                                     ---------------------------

Date: October 2, 2006                                /s/ William J. Schmidt
                                                     ---------------------------
                                                     William J. Schmidt
                                                     Chief Financial Officer




                                  EXHIBIT INDEX
                                  -------------

Exhibit
Number   Description
- ------   -----------

99.1     Press Release issued by Ibis Technology Corporation on October 2, 2006.