UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                              WASHINGTON, DC 20549


                                    Form 8-K

                                 CURRENT REPORT

     Pursuant to Section 13 or 15(d) of The Securities Exchange Act of 1934

      Date of Report (Date of earliest event reported): November 20, 2006
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                           Ibis Technology Corporation
                           ---------------------------
             (Exact name of registrant as specified in its charter)



Massachusetts                        0-23150                 04-2987600
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(State or other jurisdiction         (Commission             (IRS Employer
of incorporation)                    File Number)            Identification No.)


32 Cherry Hill Drive, Danvers, Massachusetts  01923
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(Address of principal executive offices) (Zip Code)


Registrant's telephone number, including area code: (978) 777-4247
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Check the appropriate box below if the Form 8-K filing is intended to
simultaneously satisfy the filing obligation of the registrant under any of the
following provisions (see General Instruction A.2. below):

     [ ] Written communications pursuant Rule 425 under the Securities Act (17
CFR 230.425)

     [ ] Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17
CFR 240.14a-12)

     [ ] Pre-commencement communications pursuant to Rule 14d-2(b) under the
Exchange Act (17 CFR 240.14d-2(b))

     [ ] Pre-commencement communications pursuant to Rule 13e-4(c) under the
Exchange Act (17 CFR 240.13e-4(c))



ITEM 5.02. DEPARTURE OF DIRECTORS OR PRINCIPAL OFFICERS; ELECTION OF DIRECTORS;
APPOINTMENT OF PRINCIPAL OFFICERS

On November 20, 2006, Ibis Technology Corporation announced that Dr. Charles M.
McKenna, who had been serving as the Company's Executive Vice President and
Chief Operating Officer, has assumed the role of Chief Executive Officer,
effective immediately. Martin Reid, the Company's President and CEO, will assume
the role of Executive Chairman and continue with his day to day duties at the
Company in the areas of market development and business strategy and as a
Director.

A copy of the press release is being furnished as Exhibit 99.1 to this Current
Report on Form 8-K. This information shall not be deemed "filed" for purposes of
Section 18 of the Securities Exchange Act of 1934, as amended (the "Exchange
Act"), or incorporated by reference in any filing under the Securities Act of
1933, as amended, or the Exchange Act, except as shall be expressly set forth by
specific reference in such a filing.


ITEM 9.01. FINANCIAL STATEMENTS AND EXHIBITS.

(a)  Not applicable.

(b)  Not applicable.

(c)  Exhibits

        Exhibit 99.1.   Press Release issued by Ibis Technology Corporation on
                        November 20, 2006.






                                   SIGNATURES


     Pursuant to the requirements of the Securities Exchange Act of 1934, the
registrant has duly caused this report to be signed on its behalf by the
undersigned hereunto duly authorized.


                                                IBIS TECHNOLOGY CORPORATION
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Date: November 20, 2006                         /s/ William J. Schmidt
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                                      William J. Schmidt Chief Financial Officer









                                  EXHIBIT INDEX
                                  -------------

Exhibit
Number                  Description
- -------                 -----------

99.1                    Press Release issued by Ibis Technology Corporation on
                        November 20, 2006.