Exhibit 99.1

             Ibis Technology Names Charles M. McKenna, Ph. D as CEO

    Current President and CEO Martin Reid to Continue as Executive Chairman

     DANVERS, Mass.--(BUSINESS WIRE)--Nov. 20, 2006--Ibis Technology Corporation
(Nasdaq NM: IBIS), a leading provider of SIMOX-SOI implantation equipment to the
worldwide semiconductor industry, today announced that Dr. Charles M. McKenna,
who had been serving as the Company's Executive Vice President and Chief
Operating Officer, has assumed the role of President and Chief Executive
Officer, effective immediately. Martin Reid, the Company's President and CEO,
will assume the role of Executive Chairman and continue with his day to day
duties at the Company in the areas of market development and business strategy
and as a Director.

     Commenting on the transition, Martin J. Reid said "We have benefited
greatly from Chuck's technology leadership since he joined us last year. I am
delighted about this development and I look forward to supporting his efforts
and advancing SIMOX technology with our customers."

     McKenna joined the Company in July 2005 as Executive Vice President and
Chief Operating Officer. Prior to joining Ibis, Dr. McKenna served as Executive
Vice President, Automation Systems, and Chief Technology Officer at Brooks
Automation and between July, 2000 and July 2003, and as Chief Operating Officer
and Chief Technology Officer at Varian Semiconductor Equipment Associates (VSEA)
from April, 1999 to January, 2000. Leading up to the spin-out of VSEA, he was
General Manager of Varian's ion implant business for ten years. Earlier, he held
various management and engineering positions at Varian, IBM and Hughes Research
Lab. Dr. McKenna holds a Bachelor's degree in Physics from St. Joseph's
University (PA) and a Ph.D. in nuclear physics from Florida State.

     About Ibis Technology

     Ibis Technology Corporation is a leading provider of oxygen implanters for
the production of SIMOX-SOI (Separation-by-Implantation-of-Oxygen
Silicon-On-Insulator) wafers for the worldwide semiconductor industry.
Headquartered in Danvers, Massachusetts, the Company maintains an additional
office in Aptos, California. Ibis Technology is traded on the Nasdaq National
Market under the symbol IBIS. Information about Ibis Technology Corporation and
SIMOX-SOI is available on Ibis' web site at www.ibis.com.

     "Safe Harbor" Statement under the Private Securities Litigation Reform Act
of 1995

     This release contains express or implied forward-looking statements
regarding, among other things, (i) the Company's ability to conduct its
operations in a manner consistent with its current plan and existing capital
resources or otherwise to obtain additional implanter orders or to secure
financing to continue as a going concern, (ii) the timing of SUMCO's ramping to
production quantities on their i2000 implanters (iii) customer interest in and
demand for, and market acceptance of, the Company's SIMOX-SOI technology, (iv)
attaining implanter improvements to the degree and in the timeframe necessary to
meet customer expectations, (v) the Company's plan to focus on supplying
implanters to wafer manufacturers, (vi) the Company's expectations regarding
future orders for i2000 implanters, (vii) the adequacy of the Company's cash
resources for continuing and future operations, and (viii) the adoption rate of
SOI technology. Such statements are neither promises nor guarantees, but rather
are subject to risks and uncertainties which could cause actual results to
differ materially from those described in the forward-looking statements. Such
risks and uncertainties include, but are not limited to, cessation as a going
concern due to the depletion of the Company's cash reserves at an unanticipated
rate combined with an inability to obtain customer orders or to secure
financing, future continued migration to SOI technology and market acceptance of
SIMOX, the level of demand for the Company's products, the Company's ability to
pursue and maintain further strategic relationships, partnerships and alliances
with third parties, the Company's ability to protect its proprietary technology,
the potential trends in the semiconductor industry generally, the ease with
which an i2000 can be installed and qualified in fabrication facilities, the
likelihood that implanters, if ordered, will be qualified and accepted by
customers without substantial delay, modification, or cancellation, in whole or
in part, the likelihood and timing of revenue recognition on such transactions,
the impact of competitive products, technologies and pricing, the impact of
rapidly changing technology, the possibility of further asset impairment and
resulting charges, equipment capacity and supply constraints or difficulties,
the Company's limited history in selling implanters, general economic
conditions, and other risks and uncertainties described in the Company's
Securities and Exchange Commission filings from time to time, including but not
limited to, the Company's Annual Report on Form 10-K for the year ended December
31, 2005. All information set forth in this press release is as of November 20,
2006, and Ibis undertakes no duty to update this information unless required by
law.


     CONTACT: Company Contact:
              William J. Schmidt
              Chief Financial Officer
              Ibis Technology Corporation
              Phone: (978) 777-4247
              or
              IR Agency Contact:
              Bill Monigle
              President
              Bill Monigle Associates
              Phone: (941) 497-1622