POWER OF ATTORNEY

The undersigned, as a Section 16 reporting person of
Onto Innovation Inc. (the "Company"),
hereby constitutes and appoints Yoon Ah Oh,
Eric French, Steven Roth, Erich Lehmann
and Debora Tomlinson, and each of them, the
undersigned's true and lawful attorney-in-fact,
with full power of substitution and resubstitution,
to, for and on behalf of the undersigned:
a. prepare, execute in the undersigned's name,
and submit to the U.S. Securities and Exchange
Commission (the "SEC") a Form ID, including amendments
thereto, and any other documents necessary or appropriate
to obtain codes, passwords and passphrases enabling the
undersigned to make electronic filings of reports with the SEC;
b. complete and execute Forms 3, 4 and 5 and other reports and
forms and all amendments thereto as such attorney-in-fact shall
determine to be required or advisable pursuant to Section 16 of
the Securities Exchange Act of 1934, as amended
(the "Exchange Act") and the rules and regulations
promulgated thereunder, or any successor laws and regulations,
with respect to the undersigned's ownership, acquisition or
disposition of securities of the Company;
c. do all acts which may in the determination of the
attorney-in-fact be necessary or advisable to complete,
execute and file such reports and forms, and amendments
thereto, with the SEC, the Company, any securities exchange
or similar authority, and such other person or agency as the
attorney-in-fact shall deem appropriate, including obtaining
information regarding transactions in Company securities from
any third party, including the Company and any brokers, dealers,
employee benefit plan administrators and trustees, and the
undersigned hereby authorizes any such third party to release
any such information to such attorney-in-fact; and
d. take any other action of any type whatsoever in connection
with the foregoing which, in the opinion of such attorney-in-fact,
may be of benefit to, in the best interest of, or legally required of, the
undersigned, as fully as the undersigned might or could do in person.

This Power of Attorney shall remain in full force and effect until
the earliest to occur of (a) such time as the undersigned is
no longer required to file Forms 4 and 5 with respect to the
undersigned's holdings of and transactions in securities issued
by the Company, (b) revocation by the undersigned in a signed
writing delivered to the foregoing attorneys-in-fact, and (c) as
to any attorney-in-fact individually, until such attorney-in-fact is
no longer employed by the Company or its subsidiaries. This Power
of Attorney revokes all previous powers of attorney with respect to
the subject matter of this Power of Attorney.
The undersigned hereby ratifies and confirms all that said
attorneys-in-fact and agents shall do or cause to be done by
virtue hereof.  The undersigned also ratifies hereby any action
previously taken by the attorney-in-fact that would have been
authorized by this Power of Attorney if it has been in effect at
the time such action was taken.
The undersigned acknowledges that:

1. This Power of Attorney authorizes, but does not require,
the attorney-in-fact to act in the attorney-in-fact's discretion
on information provided to such attorney-in-fact without independent
verification of such information;

2. The documents executed by the attorney-in-fact on behalf
of the undersigned pursuant to this Power of Attorney shall be
in such form and shall contain such terms and conditions as such
attorney-in-fact may approve in the attorney-in-fact's discretion;

3. The foregoing attorneys-in-fact, in serving in such capacity
at the request of the undersigned, are not assuming, nor is the
Company assuming, (i) any of the undersigned's responsibilities to
comply with Section 16 of the Exchange Act, (ii) any liability of the
undersigned for any failure to comply with such requirements, or (iii)
any liability of the undersigned for disgorgement of profits under
Section 16(b) of the Exchange Act; and

4. This Power of Attorney does not relieve the undersigned
from responsibility for compliance with the undersigned's obligations
under Section 16 of the Exchange Act, including, without limitation,
the reporting requirements under Section 16 of the Exchange Act.


IN WITNESS WHEREOF, the undersigned has caused
this Power of Attorney to be executed as of March 16, 2022.

Signature: /s/ May Su


Print Name:  May Su