POWER OF ATTORNEY
Know all by these presents that the undersigned hereby constitutes and
appoints Joseph Colella the undersigned's true and lawful
attorney-in-fact to:
 (1)    prepare, execute in the undersigned's name and on the
undersigned's behalf, and submit to the U.S. Securities and
Exchange Commission (the SEC) a Form ID, including amendments
thereto, and any other documents necessary or appropriate to obtain codes
and passwords enabling the undersigned to make electronic filings with
the SEC of reports required by Section 16(a) of the Securities Exchange
Act of 1934 or any rule or regulationof the SEC;
 (2)    execute for and on behalf of the undersigned, in the undersigned's
capacity as an Officer of ENTEGRIS, INC. (the Company), Forms 3, 4, and 5
in accordance with Section 16(a) of the Securities Exchange Act of 1934 and
the rules thereunder, and any other forms or reports the undersigned may be
required to file in connection with the undersigned's ownership, acquisition,
or disposition of securities of the Company;
 (3)    do and perform any and all acts for and on behalf of the undersigned
which may be necessary or desirable to complete and execute any such Forms
3, 4, or 5, or other form or report, and timely file such form or report with
the United States Securities and Exchange Commission and any stock exchange
or similar authority; and
 (4)    take any other action of any type whatsoever in connection with the
foregoing which, in the opinion of such attorney-in-fact, may be of benefit
to,in the best interest of, or legally required by, the undersigned, it being
understood that the documents executed by such attorney-in-fact on behalf of
the undersigned pursuant to this Power of Attorney shall be in such form and
shall contain such terms and conditions as such attorney-in-fact may approve
in such attorney-in-fact's discretion.
      The undersigned hereby grants to such attorney-in-fact full power and
authority to do and perform any and every act and thing whatsoever requisite,
necessary, or proper to be done in the exercise of any of the rights and
powers herein granted, as fully to all intents and purposes as the undersigned
might or could do if personally present, with full power of substitution or
revocation, hereby ratifying and confirming all that such attorney-in-fact,
or such attorney-in-fact's substitute or substitutes, shall lawfully do or
cause to be done by virtue of this power of attorney and the rights and
powers herein granted.
The undersigned acknowledges that the foregoing attorney-in-fact, is serving
in such capacity at the request of the undersigned, and is not assuming, nor
is the Company assuming, any of the undersigned's responsibilities to comply
with Section 16 of the Securities Exchange Act of 1934.
      This Power of Attorney shall remain in full force and effect until the
undersigned is no longer required to file Forms 3, 4, and 5 with respect to
the undersigned's holdings of and transactions in securities issued by the
Company, unless earlier revoked by the undersigned in a signed writing
delivered to the foregoing attorney-in-fact.
      IN WITNESS WHEREOF, the undersigned has caused this Power of Attorney
to be executed as of this 3rd day of June 2022.

                  /s/ Neil Richards
                  Neil Richards