5 patents
Utility
Three-dimensional Sensor with Counterposed Channels
25 Mar 21
A method of determining dimensional information of a target surface includes generating a first point cloud corresponding to a first plurality of reconstructed surface points of the target surface generated by a first imaging system-illumination source pair of a phase profilometry system; generating a second point cloud corresponding to a second plurality of reconstructed surface points of the target surface generated by a second imaging system-illumination source pair of the phase profilometry system; generating an initial estimate of the target surface based on the first and second point clouds; and refining the initial surface estimate using positions of the first and second point clouds and geometry of the first and second imaging system-illumination source pairs to generate a final point cloud.
Paul R. Haugen, Evan J. Ribnick, Carl E. Haugan, Eric P. Rudd
Filed: 7 Dec 20
Utility
Wafer-like Sensor
13 May 20
A wafer-like semiconductor sensor includes a wafer-like base formed of a plurality of layers of chemically-hardened glass and an electronics module mounted to a recessed pocket in the base and containing a sensor.
Felix J. Schuda, Mark C. Leclair
Filed: 7 Nov 19
Utility
Three-dimensional Sensor with Counterposed Channels
22 Apr 20
A method of determining dimensional information of a target surface includes generating a first point cloud corresponding to a first plurality of reconstructed surface points of the target surface generated by a first imaging system-illumination source pair of a phase profilometry system; generating a second point cloud corresponding to a second plurality of reconstructed surface points of the target surface generated by a second imaging system-illumination source pair of the phase profilometry system; generating an initial estimate of the target surface based on the first and second point clouds; and refining the initial surface estimate using positions of the first and second point clouds and geometry of the first and second imaging system-illumination source pairs to generate a final point cloud.
Paul R. Haugen, Evan J. Ribnick, Carl E. Haugan, Eric P. Rudd
Filed: 16 Oct 19
Utility
Wireless Substrate-like Teaching Sensor for Semiconductor Processing
23 Oct 19
A wireless substrate-like sensor for teaching transfer coordinates to a robotic substrate handling system is provided.
Ferris J. Chen, David W. Duquette, Robert M. Mark
Filed: 18 Apr 19
Utility
Inline Particle Sensor
16 Oct 19
An inline particle sensor includes a sensor head configured to mount within a fitting, the sensor head including a laser source sealed and isolated from a sensing volume and configured to emit a laser beam through the sensing volume and a detector arranged to detect particles in the sensing volume that pass through the laser beam.
Felix J. Schuda, Ferris J. Chen
Filed: 9 Apr 19
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