191 patents
Utility
Multiple Objectives Metrology System, Lithographic Apparatus, and Methods Thereof
11 Jan 24
A metrology or inspection system, a lithographic apparatus, and a method are provided.
Douglas C. CAPPELLI
Filed: 16 Nov 21
Utility
Radiation Source Arrangement and Metrology Device
4 Jan 24
A radiation source arrangement including: a radiation source operable to generate source radiation including source energy pulses; and at least one non-linear energy-filter operable to filter the source radiation to obtain filtered radiation including filtered energy pulses.
Ali ALSAQQA, Aabid PATEL, Patrick Sebastian UEBEL, Amir ABDOLVAND, Paulus Antonius Andreas TEUNISSEN, Wisham F. KADHIM
Filed: 3 Aug 21
Utility
Polarization Selection Metrology System, Lithographic Apparatus, and Methods Thereof
14 Dec 23
An inspection system, a lithographic apparatus, and a method are provided.
Douglas C. CAPPELLI
Filed: 14 Oct 21
Utility
Alignment sensor based on wavelength-scanning
12 Dec 23
An alignment method includes directing an illumination beam with a varying wavelength or frequency towards an alignment target, collecting diffraction beams from the alignment target and directing towards an interferometer.
Muhsin Eralp
Filed: 22 Jul 20
Utility
Apparatus for and method of sensing alignment marks
12 Dec 23
An apparatus for and method of sensing multiple alignment marks in which the optical axis of a detector is divided into multiple axes each of which can essentially simultaneously detect a separate alignment mark to generate a signal which can then be multiplexed and presented to a single detector or multiple detectors thus permitting more rapid detection of multiple marks.
Krishanu Shome, Justin Lloyd Kreuzer
Filed: 21 Jan 21
Utility
Broad spectrum radiation by supercontinuum generation using a tapered optical fiber
5 Dec 23
A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.
King Pui Leung, Tao Chen, Ronan James Havelin, Igor Matheus Petronella AARTS, Adel Joobeur, Joseph Carbone
Filed: 9 Oct 20
Utility
Vacuum Sheet Bond Fixturing and Flexible Burl Applications for Substrate Tables
30 Nov 23
Systems, apparatuses, and methods are provided for manufacturing a substrate table.
Abdullah ALIKHAN, Tammo UITTERDIJK, Johannes Bernardus Charles ENGELEN, Daniel KAMIENIECKI, Bastiaan Lambertus Wilhelmus Marinus VAN DE VEN, Thomas POIESZ, Leon Martin LEVASIER, Jim Vincent OVERKAMP, Johannes Adrianus Cornelis Maria PIJNENBURG, Koos VAN BERKEL, Gregory James DIGUIDO, Anthony C. SOCCI, JR., Iliya SIGAL, Bram Antonius Gerardus LOMANS, Michel Ben Isel HABETS
Filed: 2 Dec 21
Utility
Metrology Tool with Position Control of Projection System
9 Nov 23
A metrology tool that includes a substrate table to hold a substrate; a projection system configured to project a beam on a target portion of the substrate; an actuator configured to adjust a position of the projection system relative to the substrate on the substrate table; a sensor configured to determine a position of the substrate table; and a one or more processors configured to: determine, based on the position of the substrate table, a position error of the substrate table with respect to a reference; and control, via the actuator, a position of the projection system to compensate for the position error of the substrate table so that the beam projects on the target portion of the substrate.
Hans BUTLER, Arie Jeffrey DEN BOEF, Mark Constant Johannes BAGGEN, Jeroen Arnoldus Leonardus Johannes RAAYMAKERS, Richard Carl ZIMMERMAN
Filed: 24 Aug 21
Utility
Systems and Methods for Forming Structures on a Surface
9 Nov 23
Systems and methods for forming structures (e.g., a plurality of support peaks) on a surface are described.
Sotrios LYRINTZIS, Keane Michael LEVY
Filed: 16 Mar 21
Utility
Double-scanning Opto-mechanical Configurations to Improve Throughput of Particle Inspection Systems
2 Nov 23
Systems, apparatuses, and methods are provided for increasing the throughput of a particle inspection system.
Michal Emanuel PAWLOWSKI
Filed: 20 Jul 21
Utility
Contaminant detection metrology system, lithographic apparatus, and methods thereof
31 Oct 23
A system (400) includes an illumination system (402), a detector (404), and a comparator (406).
Michal Emanuel Pawlowski, Aage Bendiksen, Ryan Alan Munden, Han-Kwang Nienhuys
Filed: 8 Dec 20
Utility
Phase modulators in alignment to decrease mark size
31 Oct 23
An alignment apparatus includes an illumination system configured to direct one or more illumination beams towards an alignment target and receive the diffracted beams from the alignment target.
Franciscus Godefridus Casper Bijnen, Muhsin Eralp, Simon Reinald Huisman, Arie Jeffrey Den Boef
Filed: 5 Aug 20
Utility
Lithographic Apparatus, Metrology Systems, and Methods Thereof
26 Oct 23
A system includes an illumination system, an optical element, a switching element and a detector.
Simon Reinald HUISMAN, Sergey MALYK, Yuxiang LIN, Daan Maurits SLOTBOOM
Filed: 7 Jun 21
Utility
Lithographic apparatus, metrology system, and illumination systems with structured illumination
17 Oct 23
A system (500) includes an illumination system (502), a lens element (506), and a detector (504).
Yuxiang Lin, Joshua Adams, Tamer Mohamed Tawfik Ahmed Mohamed Elazhary, Krishanu Shome
Filed: 14 Sep 20
Utility
Lithographic Apparatus, Metrology System, and Intensity Imbalance Measurement for Error Correction
12 Oct 23
A metrology system includes a beam splitter and first and second sensors.
Earl William EBERT, Roxana REZVANI NARAGHI
Filed: 24 Jul 21
Utility
Pod Handling Systems and Methods for a Lithographic Device
5 Oct 23
Systems, apparatuses, and methods are provided for transporting a reticle chamber (pod) for processing.
Boris KOGAN, Robert Jeffrey WADE, George Hilary HARROLD, Matthew BOUDREAU
Filed: 19 Aug 21
Utility
Sub Micron Particle Detection on Burl Tops by Applying a Variable Voltage to an Oxidized Wafer
5 Oct 23
Systems, apparatuses, methods, and computer program products are provided for determining a free form flatness of a substrate table.
Tammo UITTERDIJK
Filed: 4 Jun 21
Utility
Lithographic Apparatus and Methods for Multi-exposure of a Substrate
21 Sep 23
A lithographic system and a method for exposing a substrate are provided.
Timothy Allan BRUNNER, Marcus Adrianus VAN DE KERKHOF
Filed: 19 Jul 21
Utility
Lithographic patterning device multichannel position and level gauge
12 Sep 23
A patterning device alignment system including a multipath sensory array including a first collimating light path and one or more other light paths, a first detector positioned at a first end of the first collimating light path, and a second detector positioned at a first end of the one or more other light paths, the first detector configured to receive a reflected illumination beam from an illuminated patterning device and calculate a tilt parameter of the patterning device, and the second detector configured to receive a second reflected illumination beam from a beam splitter and calculate an X-Y planar location position and a rotation position of the patterning device.
Yuli Vladimirsky, Lev Ryzhikov
Filed: 26 May 20
Utility
Mode Control of Photonic Crystal Fiber Based Broadband Radiation Sources
7 Sep 23
A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF).
Sebastian Thomas BAUERSCHMIDT, Peter Maximilian GÖTZ, Patrick Sebastian UEBEL, Ronald Franciscus Herman HUGERS, Jan Adrianus BOER, Edwin Johannes Cornelis BOS, Andreas Johannes Antonius BROUNS, Vitaliy PROSYENTSOV, Paul William SCHOLTES - VAN EIJK, Paulus Antonius Andreas TEUNISSEN, Mahesh Upendra AJGAONKAR
Filed: 11 May 23