Michael P Plisinski

Date	Company	Security	Transaction	Code	Indirect	10b5-1	$Price	#Shares	$Value	#Remaining
10 Feb 25	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	183.28	9,210	1.69 mm	157,471
10 Feb 25	ONTO Onto Innovation	Common Stock	Option exercise	Acquire M	No	No	0	19,048	0.00	166,681
10 Feb 25	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	183.28	2,859	524.00 k	147,633
10 Feb 25	ONTO Onto Innovation	Performance Stock Unit Common Stock	Option exercise	Dispose M	No	No	0	9,524	0.00	0
21 Jan 25	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	219.19	35,000	7.67 mm	150,492
16 Jan 25	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	212.11	100	21.21 k	185,492
16 Jan 25	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	211.24	29,900	6.32 mm	185,592
14 Jan 25	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	201.26	1,732	348.58 k	215,492
14 Jan 25	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	200.09	18,268	3.66 mm	217,224
20 Mar 24	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	178.16	2,914	519.16 k	235,492

Data from 3, 4 and 5 filings. Values as filed, not updated for current price.