Douglas A. Lawson

Date	Company	Security	Transaction	Code	Indirect	10b5-1	$Price	#Shares	$Value	#Remaining
20 Jun 24	ACLS Axcelis	Common Stock	Payment of exercise	Dispose F	No	No	136.02	1,396	189.88 k	15,808
17 May 24	ACLS Axcelis	Common Stock	Payment of exercise	Dispose F	No	No	113.23	743	84.13 k	17,202
16 May 24	ACLS Axcelis	Common Stock	Payment of exercise	Dispose F	No	No	113.57	536	60.87 k	17,945
15 May 24	ACLS Axcelis	Common Stock	Payment of exercise	Dispose F	No	No	112.94	256	28.91 k	18,481
15 May 24	ACLS Axcelis	Common Stock	Payment of exercise	Dispose F	No	No	112.94	861	97.24 k	18,737
15 May 24	ACLS Axcelis	Common Stock	Grant	Acquire A	No	No	0	1,365	0.00	19,598
28 Feb 24	ACLS Axcelis	Common Stock	Payment of exercise	Dispose F	No	No	0	457	0.00	18,233
28 Feb 24	ACLS Axcelis	Common Stock	Payment of exercise	Dispose F	No	No	0	958	0.00	18,690
23 Feb 24	ACLS Axcelis	Common Stock	Buy	Acquire P	No	No	111.04	500	55.52 k	19,648

Data from 3, 4 and 5 filings. Values as filed, not updated for current price.