Michael P Plisinski

Date	Company	Security	Transaction	Code	Indirect	10b5-1	$Price	#Shares	$Value	#Remaining
3 Mar 25	ONTO Onto Innovation	Common Stock	Grant	Acquire A	No	No	0	23,212	0.00	187,161
3 Mar 25	ONTO Onto Innovation	Performance Stock Unit Common Stock	Grant	Acquire A	No	No	0	11,606	0.00	11,606
3 Mar 25	ONTO Onto Innovation	Performance Stock Unit Common Stock	Grant	Acquire A	No	No	0	11,606	0.00	11,606
1 Mar 25	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	145.66	1,925	280.40 k	163,949
14 Feb 25	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	176.55	3,812	673.01 k	165,874
14 Feb 25	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	176.55	11,435	2.02 mm	169,686
14 Feb 25	ONTO Onto Innovation	Common Stock	Option exercise	Acquire M	No	No	0	23,650	0.00	181,121
14 Feb 25	ONTO Onto Innovation	Performance Stock Unit Common Stock	Option exercise	Dispose M	No	No	0	11,825	0.00	0
10 Feb 25	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	183.28	9,210	1.69 mm	157,471
10 Feb 25	ONTO Onto Innovation	Common Stock	Option exercise	Acquire M	No	No	0	19,048	0.00	166,681

Data from 3, 4 and 5 filings. Values as filed, not updated for current price.