Russell Low

Date	Company	Security	Transaction	Code	Indirect	10b5-1	$Price	#Shares	$Value	#Remaining
5 Jun 24	ACLS Axcelis	Common Stock	Payment of exercise	Dispose F	No	No	111.29	387	43.07 k	81,566
17 May 24	ACLS Axcelis	Common Stock	Payment of exercise	Dispose F	No	No	113.23	905	102.47 k	81,953
16 May 24	ACLS Axcelis	Common Stock	Payment of exercise	Dispose F	No	No	113.57	652	74.05 k	82,858
15 May 24	ACLS Axcelis	Common Stock	Payment of exercise	Dispose F	No	No	112.94	1,333	150.55 k	83,510
15 May 24	ACLS Axcelis	Common Stock	Payment of exercise	Dispose F	No	No	112.94	1,399	158.00 k	84,843
15 May 24	ACLS Axcelis	Common Stock	Grant	Acquire A	No	No	0	14,244	0.00	86,242
15 May 24	ACLS Axcelis	Common Stock	Grant	Acquire A	No	No	0	14,244	0.00	71,998
11 Mar 24	ACLS Axcelis	Common Stock	Buy	Acquire P	No	No	112.39	440	49.45 k	57,754
28 Feb 24	ACLS Axcelis	Common Stock	Payment of exercise	Dispose F	No	No	0	2,919	0.00	57,314
28 Feb 24	ACLS Axcelis	Common Stock	Payment of exercise	Dispose F	No	No	0	1,761	0.00	60,233

Data from 3, 4 and 5 filings. Values as filed, not updated for current price.