Susan G. Rice

Date	Company	Security	Transaction	Code	Indirect	10b5-1	$Price	#Shares	$Value	#Remaining
1 Apr 24	ENTG Entegris	Common Stock	Grant	Acquire A	No	No	0	5,244	0.00	49,426.004
1 Apr 24	ENTG Entegris	Employee Stock Option Common Stock	Grant	Acquire A	No	No	140.62	9,048	1.27 mm	9,048
20 Feb 24	ENTG Entegris	Common Stock	Payment of exercise	Dispose F	No	No	136.81	997	136.40 k	44,182.004
20 Feb 24	ENTG Entegris	Common Stock	Grant	Acquire A	No	No	0	2,248	0.00	45,179.004
16 Feb 24	ENTG Entegris	Common Stock	Sell	Dispose S	No	No	135.81	8,858	1.20 mm	42,931.004
16 Feb 24	ENTG Entegris	Common Stock	Option exercise	Acquire M	No	No	33.33	8,858	295.24 k	51,789.004
16 Feb 24	ENTG Entegris	Common Stock	Sell	Dispose S	No	No	135.92	8,660	1.18 mm	42,931.004
16 Feb 24	ENTG Entegris	Common Stock	Option exercise	Acquire M	No	No	31.1	8,660	269.33 k	51,591.004
16 Feb 24	ENTG Entegris	Common Stock	Payment of exercise	Dispose F	No	No	136.81	1,419	194.13 k	42,931.004
16 Feb 24	ENTG Entegris	Employee Stock Option Common Stock	Option exercise	Dispose M	No	No	33.33	8,858	295.24 k	8,858

Data from 3, 4 and 5 filings. Values as filed, not updated for current price.