James Anthony O'Neill

Date	Company	Security	Transaction	Code	Indirect	10b5-1	$Price	#Shares	$Value	#Remaining
31 May 24	ENTG Entegris	Common Stock	Gift	Dispose G	No	No	0	1,277	0.00	11,758.218
31 May 24	ENTG Entegris	Common Stock	Gift	Dispose G	No	No	0	617	0.00	13,035.218
23 May 24	ENTG Entegris	Common Stock	Sell	Dispose S	No	No	133.5	1,772	236.56 k	13,652.218
23 May 24	ENTG Entegris	Common Stock	Option exercise	Acquire M	No	No	80.71	1,772	143.02 k	15,424.218
23 May 24	ENTG Entegris	Common Stock	Sell	Dispose S	No	No	133.5	1,847	246.57 k	13,652.218
23 May 24	ENTG Entegris	Common Stock	Option exercise	Acquire M	No	No	55.72	1,847	102.91 k	15,499.218
23 May 24	ENTG Entegris	Common Stock	Sell	Dispose S	No	No	133.5	3,142	419.46 k	13,652.218
23 May 24	ENTG Entegris	Employee Stock Option Common Stock	Option exercise	Dispose M	No	No	80.71	1,772	143.02 k	5,316
23 May 24	ENTG Entegris	Employee Stock Option Common Stock	Option exercise	Dispose M	No	No	55.72	1,847	102.91 k	0
1 Apr 24	ENTG Entegris	Common Stock	Grant	Acquire A	No	No	0	2,784	0.00	16,794.218

Data from 3, 4 and 5 filings. Values as filed, not updated for current price.