Srinivas Vedula

Date	Company	Security	Transaction	Code	Indirect	10b5-1	$Price	#Shares	$Value	#Remaining
3 Mar 25	ONTO Onto Innovation	Common Stock	Grant	Acquire A	No	No	0	2,574	0.00	18,730
3 Mar 25	ONTO Onto Innovation	Performance Stock Unit Common Stock	Grant	Acquire A	No	No	0	1,286	0.00	1,286
3 Mar 25	ONTO Onto Innovation	Performance Stock Unit Common Stock	Grant	Acquire A	No	No	0	1,287	0.00	1,287
1 Mar 25	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	145.66	199	28.99 k	16,156
14 Feb 25	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	176.55	464	81.92 k	16,355
14 Feb 25	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	176.55	1,391	245.58 k	16,819
14 Feb 25	ONTO Onto Innovation	Common Stock	Option exercise	Acquire M	No	No	0	2,738	0.00	18,210
14 Feb 25	ONTO Onto Innovation	Performance Stock Unit Common Stock	Option exercise	Dispose M	No	No	0	1,369	0.00	0
13 Feb 25	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	169.58	238	40.36 k	15,472
10 Feb 25	ONTO Onto Innovation	Common Stock	Option exercise	Acquire M	No	No	0	1,632	0.00	15,710

Data from 3, 4 and 5 filings. Values as filed, not updated for current price.