Mark Slicer

Date	Company	Security	Transaction	Code	Indirect	10b5-1	$Price	#Shares	$Value	#Remaining
15 Nov 24	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	160.41	1,100	176.45 k	10,933
7 Jun 24	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	217.17	519	112.71 k	12,033
6 Jun 24	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	221.21	519	114.81 k	12,552
17 May 24	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	223.5	1,633	364.98 k	13,071
1 Mar 24	ONTO Onto Innovation	Common Stock	Grant	Acquire A	No	No	0	2,077	0.00	14,704
1 Mar 24	ONTO Onto Innovation	Performance Stock Unit Common Stock	Grant	Acquire A	No	No	0	1,038	0.00	1,038
1 Mar 24	ONTO Onto Innovation	Performance Stock Unit Common Stock	Grant	Acquire A	No	No	0	1,039	0.00	1,039
14 Feb 24	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	173.08	484	83.77 k	12,627

Data from 3, 4 and 5 filings. Values as filed, not updated for current price.