Mark Slicer

Date	Company	Security	Transaction	Code	Indirect	10b5-1	$Price	#Shares	$Value	#Remaining
3 Mar 25	ONTO Onto Innovation	Common Stock	Grant	Acquire A	No	No	0	2,941	0.00	15,706
3 Mar 25	ONTO Onto Innovation	Performance Stock Unit Common Stock	Grant	Acquire A	No	No	0	1,470	0.00	1,470
3 Mar 25	ONTO Onto Innovation	Performance Stock Unit Common Stock	Grant	Acquire A	No	No	0	1,471	0.00	1,471
1 Mar 25	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	145.66	336	48.94 k	12,765
14 Feb 25	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	176.55	620	109.46 k	13,101
14 Feb 25	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	176.55	1,776	313.55 k	13,721
14 Feb 25	ONTO Onto Innovation	Common Stock	Option exercise	Acquire M	No	No	0	4,564	0.00	15,497
14 Feb 25	ONTO Onto Innovation	Performance Stock Unit Common Stock	Option exercise	Dispose M	No	No	0	2,282	0.00	0
15 Nov 24	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	160.41	1,100	176.45 k	10,933
7 Jun 24	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	217.17	519	112.71 k	12,033

Data from 3, 4 and 5 filings. Values as filed, not updated for current price.