Mark Slicer

Date	Company	Security	Transaction	Code	Indirect	10b5-1	$Price	#Shares	$Value	#Remaining
15 Sep 23	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	127.03	169	21.47 k	13,111
15 Sep 23	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	125.98	1,507	189.85 k	13,280
15 Sep 23	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	124.31	601	74.71 k	14,787
15 Sep 23	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	123.64	728	90.01 k	15,388
17 May 23	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	97.95	1,269	124.30 k	16,116
14 Feb 23	ONTO Onto Innovation	Common Stock	Grant	Acquire A	No	No	0	4,564	0.00	17,385
14 Feb 23	ONTO Onto Innovation	Performance Stock Unit Common Stock	Grant	Acquire A	No	No	0	2,281	0.00	2,281
14 Feb 23	ONTO Onto Innovation	Performance Stock Unit Common Stock	Grant	Acquire A	No	No	0	2,282	0.00	2,282

Data from 3, 4 and 5 filings. Values as filed, not updated for current price.