Christopher Tatnall

Date	Company	Security	Transaction	Code	Indirect	10b5-1	$Price	#Shares	$Value	#Remaining
16 Sep 24	ACLS Axcelis	Common Stock	Payment of exercise	Dispose F	No	No	98.86	83	8.21 k	13,288
15 May 24	ACLS Axcelis	Common Stock	Payment of exercise	Dispose F	No	No	112.94	103	11.63 k	13,371
15 May 24	ACLS Axcelis	Common Stock	Grant	Acquire A	No	No	0	2,849	0.00	13,474
15 May 24	ACLS Axcelis	Common Stock	Grant	Acquire A	No	No	0	2,849	0.00	10,625
18 Apr 24	ACLS Axcelis	Common Stock	Payment of exercise	Dispose F	No	No	0	551	0.00	7,776
15 Sep 23	ACLS Axcelis	Common Stock	Grant	Acquire A	No	No	0	1,125	0.00	8,327

Data from 3, 4 and 5 filings. Values as filed, not updated for current price.