37 filings
4
ASYS
Amtech Systems, Inc.
13 Mar 24
AMTECH SYSTEMS / MICHAEL M LUDWIG ownership change
4:31pm
4
ASYS
Amtech Systems, Inc.
8 Mar 24
AMTECH SYSTEMS / MICHAEL M LUDWIG ownership change
4:08pm
4
Michael M Ludwig
4 Mar 24
AMTECH SYSTEMS / MICHAEL M LUDWIG ownership change
5:17pm
4
Michael M Ludwig
3 Mar 23
AMTECH SYSTEMS / MICHAEL M LUDWIG ownership change
4:04pm
4
ASYS
Amtech Systems, Inc.
18 Jan 23
AMTECH SYSTEMS / MICHAEL M LUDWIG ownership change
4:15pm
3
b7kiqca9
18 Jan 23
AMTECH SYSTEMS / MICHAEL M LUDWIG ownership change
4:14pm
4
dyhuog9 ar
17 Feb 21
ROGERS / MICHAEL M LUDWIG ownership change
8:03am
4
oli v6ayupusmut3hp
9 Feb 21
ROGERS / MICHAEL M LUDWIG ownership change
5:30pm
4
nfqctt6b1f w1t3
18 Sep 20
ROGERS / MICHAEL M LUDWIG ownership change
3:53pm
4
72qdim86b4sq9z ts9
14 Feb 20
ROGERS / MICHAEL M LUDWIG ownership change
4:55pm
4
hn50xc v8m
11 Feb 20
ROGERS / MICHAEL M LUDWIG ownership change
4:42pm
4
64hjsyzu
19 Sep 19
ROGERS / MICHAEL M LUDWIG ownership change
3:27pm
4/A
oc7b4fw f6
3 Apr 19
ROGERS / MICHAEL M LUDWIG ownership change
11:33am
4
bu9yetw xmy
11 Feb 19
ROGERS / MICHAEL M LUDWIG ownership change
7:36pm
3/A
d7nns7g1
15 Oct 18
ROGERS / MICHAEL M LUDWIG ownership change
4:09pm
4
zgc5sm
19 Sep 18
ROGERS / MICHAEL M LUDWIG ownership change
2:43pm
3
o2vkzx63v 09
19 Sep 18
ROGERS / MICHAEL M LUDWIG ownership change
2:40pm
4
tv8 q2fwmrppq6m
22 Feb 18
FORMFACTOR / MICHAEL M LUDWIG ownership change
12:00am
4
1nigrmke6kcjmhq7
16 Feb 18
FORMFACTOR / MICHAEL M LUDWIG ownership change
12:00am
4/A
ijmx5x8bfe8n5rwm8i
12 Feb 18
FORMFACTOR / MICHAEL M LUDWIG ownership change
12:00am