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Exhibit 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We hereby consent to the incorporation by reference in the Registration Statements on Form S-8 (Nos. 333-212647, 333-205368, 333-197700, 333-190250, 333-181929, 333-175979, 333-168505, 333-160596, 333-152773, 333-143418, 333-134422, 333-125523, 333-109260, 333-106960, 333-50166 and 333-65421) of Intevac, Inc. of our reports dated February 15, 2017 relating to the consolidated financial statements and internal control over financial reporting which appear in this Annual Report on Form 10-K.
/s/ BPM LLP
San Jose, California
February 15, 2017