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Exhibit 21.1
VEECO INSTRUMENTS INC.
Annual Report on Form 10-K for the Year Ended December 31, 2001
Exhibit 21.1—Subsidiaries of the Registrant
Subsidiary | Jurisdiction of Organization | ||
---|---|---|---|
U.S. Subsidiaries | |||
Applied Epi, Inc. | MN | ||
CVC, Inc. | DE | ||
CVC Products, Inc. | DE | ||
Commonwealth Scientific Corporation | VA | ||
Ion Tech, Inc. | CO | ||
Monarch Labs, Inc. | CO | ||
NeXray, LLC (formerly Veeco Industrial Measurement, LLC) | DE | ||
Optimag, Inc. | CA | ||
TM Microscopes Corp. (formerly ThermoMicroscopes Corp.) | CA | ||
Tulakes Real Estate Investments, Inc. | CO | ||
Veeco Metrology AFM Inc. | DE | ||
Veeco Metrology, LLC | DE | ||
Robin Hill Properties, Inc. | CA | ||
Veeco Minneapolis Technology Center Inc. | DE | ||
Wyko Corporation (also does business as Veeco Metrology Group) | AZ | ||
Foreign Subsidiaries | |||
Nihon Veeco K.K. | Japan | ||
Veeco Asia Pte. Ltd. | Singapore | ||
Veeco (Barbados) Ltd. | Barbados | ||
Veeco Instruments GmbH | Germany | ||
Veeco Instruments Limited | England | ||
Veeco Instruments S.A.S. (formerly Veeco Instruments S.N.C.) | France | ||
Veeco Korea Inc. | Korea | ||
Veeco Taiwan Inc. | Taiwan |
VEECO INSTRUMENTS INC. Annual Report on Form 10-K for the Year Ended December 31, 2001
Exhibit 21.1—Subsidiaries of the Registrant